JP2002050606A5 - - Google Patents

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Publication number
JP2002050606A5
JP2002050606A5 JP2000233252A JP2000233252A JP2002050606A5 JP 2002050606 A5 JP2002050606 A5 JP 2002050606A5 JP 2000233252 A JP2000233252 A JP 2000233252A JP 2000233252 A JP2000233252 A JP 2000233252A JP 2002050606 A5 JP2002050606 A5 JP 2002050606A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000233252A
Other languages
Japanese (ja)
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JP2002050606A (ja
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Publication date
Application filed filed Critical
Priority to JP2000233252A priority Critical patent/JP2002050606A/ja
Priority claimed from JP2000233252A external-priority patent/JP2002050606A/ja
Publication of JP2002050606A publication Critical patent/JP2002050606A/ja
Publication of JP2002050606A5 publication Critical patent/JP2002050606A5/ja
Pending legal-status Critical Current

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JP2000233252A 2000-08-01 2000-08-01 基板用リンス液及び基板処理方法 Pending JP2002050606A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000233252A JP2002050606A (ja) 2000-08-01 2000-08-01 基板用リンス液及び基板処理方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000233252A JP2002050606A (ja) 2000-08-01 2000-08-01 基板用リンス液及び基板処理方法

Publications (2)

Publication Number Publication Date
JP2002050606A JP2002050606A (ja) 2002-02-15
JP2002050606A5 true JP2002050606A5 (enrdf_load_stackoverflow) 2005-08-11

Family

ID=18725797

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000233252A Pending JP2002050606A (ja) 2000-08-01 2000-08-01 基板用リンス液及び基板処理方法

Country Status (1)

Country Link
JP (1) JP2002050606A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005051101A (ja) * 2003-07-30 2005-02-24 Ses Co Ltd 基板の洗浄方法
JP4898999B2 (ja) 2005-03-30 2012-03-21 独立行政法人 国立印刷局 印刷物、該印刷物の検知方法及び検知装置、並びに認証方法及び認証装置
JP2012109290A (ja) 2010-11-15 2012-06-07 Kurita Water Ind Ltd シリコンウェハ清浄化方法及びシリコンウェハ清浄化装置
US8859428B2 (en) * 2012-10-19 2014-10-14 Air Products And Chemicals, Inc. Chemical mechanical polishing (CMP) composition for shallow trench isolation (STI) applications and methods of making thereof

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