JP2002050558A5 - - Google Patents

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Publication number
JP2002050558A5
JP2002050558A5 JP2000231126A JP2000231126A JP2002050558A5 JP 2002050558 A5 JP2002050558 A5 JP 2002050558A5 JP 2000231126 A JP2000231126 A JP 2000231126A JP 2000231126 A JP2000231126 A JP 2000231126A JP 2002050558 A5 JP2002050558 A5 JP 2002050558A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000231126A
Other languages
Japanese (ja)
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JP4738573B2 (ja
JP2002050558A (ja
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Publication date
Application filed filed Critical
Priority to JP2000231126A priority Critical patent/JP4738573B2/ja
Priority claimed from JP2000231126A external-priority patent/JP4738573B2/ja
Publication of JP2002050558A publication Critical patent/JP2002050558A/ja
Publication of JP2002050558A5 publication Critical patent/JP2002050558A5/ja
Application granted granted Critical
Publication of JP4738573B2 publication Critical patent/JP4738573B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000231126A 2000-07-31 2000-07-31 投影露光装置及びデバイス製造方法 Expired - Fee Related JP4738573B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000231126A JP4738573B2 (ja) 2000-07-31 2000-07-31 投影露光装置及びデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000231126A JP4738573B2 (ja) 2000-07-31 2000-07-31 投影露光装置及びデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2002050558A JP2002050558A (ja) 2002-02-15
JP2002050558A5 true JP2002050558A5 (zh) 2007-09-06
JP4738573B2 JP4738573B2 (ja) 2011-08-03

Family

ID=18723997

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000231126A Expired - Fee Related JP4738573B2 (ja) 2000-07-31 2000-07-31 投影露光装置及びデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4738573B2 (zh)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SG102718A1 (en) * 2002-07-29 2004-03-26 Asml Holding Nv Lithography tool having a vacuum reticle library coupled to a vacuum chamber
JP2005191278A (ja) * 2003-12-25 2005-07-14 Semiconductor Leading Edge Technologies Inc 投影露光装置及び投影露光方法
JP2011003723A (ja) * 2009-06-18 2011-01-06 Nikon Corp マスク搬送装置、露光装置、マスク搬送方法、及びデバイスの製造方法
KR20240014514A (ko) * 2021-07-05 2024-02-01 가부시키가이샤 니콘 노광 장치 및 디바이스 제조 방법

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60107834A (ja) * 1983-11-16 1985-06-13 Hitachi Ltd 露光装置
JP3064367B2 (ja) * 1990-09-21 2000-07-12 株式会社ニコン 投影光学装置、露光方法、および回路製造方法
JP3391409B2 (ja) * 1993-07-14 2003-03-31 株式会社ニコン 投影露光方法及び装置、並びに素子製造方法
JP3414476B2 (ja) * 1994-03-02 2003-06-09 株式会社ニコン 投影露光装置
JP3303758B2 (ja) * 1996-12-28 2002-07-22 キヤノン株式会社 投影露光装置及びデバイスの製造方法
JPH10289871A (ja) * 1997-04-14 1998-10-27 Nikon Corp 投影露光装置
WO1999049366A1 (fr) * 1998-03-20 1999-09-30 Nikon Corporation Photomasque et systeme d'exposition par projection

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