JP2002048909A - Method for manufacturing color filter and device for manufacture - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and a device for manufacturing a color filter in which defects in the color filter part can be significantly decreased in the process of manufacturing the color filter to be used for a liquid crystal device by a laminate method and which is suitable to improve the yield. SOLUTION: The method for manufacturing a color filter has a process of laminating a strip supporting body 12 with a photosensitive layer fed from a roll 10 of the strip supporting body with the photosensitive layer on a substrate 20 by laminate rolls 16A, 16B. The method includes a first process of memorizing the coordinates of defective points on the supporting body 12 in the period from the position where the supporting body 12 is fed from the roll 10 to the point when the supporting body 12 passes through the laminate rolls 16A, 16B, and a second process of temporarily stopping the carrying of the substrate 20 to the laminate rolls 16A, 16B in the period when the defective point of the supporting body 12 reaches the position where the supporting body 12 is to be laminated with the substrate 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for manufacturing a color filter, and more particularly to a method for manufacturing a color filter applied to a liquid crystal element by laminating a color filter, which is capable of greatly reducing defects in the color filter. The present invention relates to a method and an apparatus for producing a color filter suitable for improving the color filter.

[0002]

2. Description of the Related Art As a method of manufacturing a color liquid crystal display element, there is a spin coating method as a method of forming a color filter on a substrate. However, in this method, since a large amount of the expensive high-dispersion pigment liquid is blown off, the use rate of the expensive high-dispersion pigment liquid is low, and the production cost of the color liquid crystal display element tends to be high.

On the other hand, there is a lamination method as a method for manufacturing a color liquid crystal display element. Since this method is a method of laminating a band-shaped support with a photosensitive layer for each pixel on a substrate or a pixel to form a pixel, the utilization rate of the band-shaped support with a photosensitive layer is higher than the spin coating method. Has the advantage that the manufacturing cost of the color liquid crystal display element can be reduced.

[0004] However, if there is a defect during the production of the strip-shaped support with a photosensitive layer for lamination, the yield of the strip-shaped support roll with a laminated photosensitive layer (for example, a length of 100 m) is reduced, thereby reducing the production cost. Had limitations.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to produce a color filter by a laminating method.
It is an object of the present invention to provide a method and an apparatus for manufacturing a color filter capable of improving the yield of a strip-shaped support roll with a photosensitive layer by significantly reducing defects in the color filter caused by defects in the strip-shaped support with a photosensitive layer. is there.

[0006]

The inventor of the present invention has focused on the fact that the number of defective portions generated in the process of manufacturing a belt-shaped support with a photosensitive layer is approximately 0.5 / m ² or less in terms of density. When laminating on a substrate by skipping (skipping) the defective portion of the layered support with a layer, it has been found that a roll wound with a defective layered support with a photosensitive layer can also be used,
The present invention has been achieved.

That is, the method of manufacturing a color filter according to the present invention comprises: <1> manufacturing a color filter including a step of laminating a belt-like support with a photosensitive layer sent from a roll of a belt-like support with a photosensitive layer to a substrate by a laminating roller. In the method, a defect of the photosensitive layer-attached support may be performed from a portion where the photosensitive layer-attached support is fed from the photosensitive layer-attached roll to a point at which the photosensitive layer-attached support passes through the laminating roller. Temporarily stopping the transport of the substrate to the laminating roller until the first step of storing the coordinates of the points and until the defect point of the strip-shaped support with the photosensitive layer corresponds to the position to be laminated on the substrate. And a second step of producing a color filter. Particularly preferably, the first step is such that the belt-like support with a photosensitive layer passes through the laminating roller from a portion where the cover film is peeled off from the belt-like support with a photosensitive layer sent from the roll with the photosensitive layer. And storing the coordinates of the defect point of the band-shaped support with a photosensitive layer.

Further, the present invention provides a color filter manufacturing apparatus for laminating a belt-like support with a photosensitive layer sent from a roll of a belt-like support with a photosensitive layer on a substrate by a laminating roller. It is provided from the site to which the photosensitive layer-attached band-shaped support is sent out from the photosensitive layer-attached band-shaped support roll until the photosensitive layer-attached band-shaped support passes through the laminating roller,
A defect detection device that stores coordinates of a defect point of the photosensitive layer-attached support; and a defect point of the photosensitive layer-attached support that is laminated on the substrate based on a defect coordinate signal from the defect detection device. A substrate transport control device for temporarily stopping the transport of the substrate to the laminating roller until the substrate corresponds to the position.

According to the present invention, the defect detecting device detects a defect point of the band-shaped support having the photosensitive layer, and the defect point corresponds to a position where the portion of the band-shaped support having the photosensitive layer having the defect point is laminated to the substrate. During this time, the transfer of the substrate is temporarily stopped. Therefore, the belt-like support with the photosensitive layer having the defect point is intermittently transported without being laminated on the substrate. For this reason, even when the belt-shaped support roll with a photosensitive layer has a defect,
It becomes possible to use this belt-like support roll with a photosensitive layer, and the yield of the belt-like support roll with a photosensitive layer is improved.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is an explanatory view showing a preferred embodiment of the method for producing a color filter of the present invention. In FIG. 1, on a belt-shaped support with a photosensitive layer,
A belt-like support 12 having a photosensitive layer for lamination, having a photosensitive layer of each hue (R, G, B) on a film of polyethylene terephthalate or the like and having a cover film on the surface of each photosensitive layer, was wound. A belt-like support roll 10 with a photosensitive layer is disposed, and the belt-like support 1 with a photosensitive layer is provided.
After the cover film 14 is peeled off from 2, the cover film 14 is wound into a roll.

Thereafter, although not particularly shown, the strip-shaped support 12 with the photosensitive layer is cut off and peeled off from the support at a portion that does not need to be laminated with the substrate 20. The photosensitive layer cut and peeling section fixes and holds the photosensitive layer-attached belt-shaped support 12 and can move the photosensitive layer-attached belt-shaped support with the photosensitive layer and can move in the conveying direction. It consists of a cutter blade and an adhesive tape that move in a direction perpendicular to the direction of transport of the belt-shaped support with the photosensitive layer on the table, that is, in the photosensitive layer cut and peel direction.

Before the belt-like support with a photosensitive layer (for example, having a photosensitive layer for R pixels) 14 reaches a pair of laminating rollers (thermocompression rollers) 16A and 16B, the defect points of the belt-like support 12 with a photosensitive layer are determined. A defect detecting device 18 to be detected is arranged. The defect detecting device 18 stores the coordinates of a defect point A present on the strip-shaped support 12 with a photosensitive layer, and stores the coordinates of the defect point A on the substrate 20. If it is present in the corresponding area, the transport of the substrate 20 is temporarily stopped based on the defect point coordinate signal from the defect detection device 18, and the photosensitive layer-attached band-like support portion having the defect point A is
The substrate 20 is conveyed without being laminated on the substrate 20, and when the defect point A is not detected on the band-shaped support 12 with a photosensitive layer, the conveyance of the substrate 20 is started, and the band-shaped support with a photosensitive layer is laminated on the substrate 20.

Thus, the belt-like support 12 with the photosensitive layer is provided.
In the case where the defect point A is present, the lamination of the substrate 20 with the photosensitive layer-attached belt-shaped support 12 having the defect point A is avoided. The belt-shaped support with a photosensitive layer having a photosensitive layer for an R pixel is then subjected to a pattern exposure step, a development step, and the like to form an R pixel.

Next, in the belt-like support having a photosensitive layer having a G pixel photosensitive layer, a defect point is detected by the defect detector 18 in the same manner as described above, and the defect point A is detected. In this case, the transport of the substrate having the R pixel previously manufactured is temporarily stopped. If no defect is detected on the belt-like support having a photosensitive layer for a G image, the belt-like support having a photosensitive layer having a photosensitive layer for a G pixel and the substrate having an R pixel are laminated. Thereafter, a substrate having R pixels and G pixels is manufactured through a pattern exposure step, a development step, and the like. Hereinafter, when a defect point is not detected while a defect point is detected in the same manner, a band-shaped support having a photosensitive layer having a photosensitive layer for B pixels and a substrate having R pixels and G pixels are laminated. Thereafter, through a pattern exposure step, a development step, etc., the R pixel, G pixel
A substrate having pixels and B pixels is manufactured. In this way, a color filter having no defect in all of the R, G, and B pixels can be manufactured.

FIG. 2 shows an overall configuration of a color filter manufacturing apparatus according to the present invention.
A substrate turning unit 200, a substrate heating unit 300, a substrate transport mechanism unit 400, a laminating unit 500, a strip-shaped support cutting unit 600 with a photosensitive layer, a substrate turning unit 700,
Mainly consisting of

The defect detecting section 100 has a defect detecting device 18. The defect detecting device 18 1) irradiates light to the back surface (the surface having no photosensitive layer) of the belt-like support with a photosensitive layer, and detects a defect point by detecting the transmitted light from the belt-like support with a photosensitive layer. 2) irradiating the surface of the belt-shaped support with a photosensitive layer (the surface having the photosensitive layer) with light and detecting reflected light to detect a defect point; And a defect detection device having the functions of the above 2). Further, the photosensitive layer formed on the belt-shaped support with a photosensitive layer is usually subjected to pattern formation by a subtractive method using a UV exposure development type. And a yellow light which does not emit UV light.

FIGS. 3 to 5 show an example of a defect detecting apparatus for detecting a defect point by irradiating light to the surface (photosensitive layer side) of the belt-like support with a photosensitive layer in the above 2) and detecting reflected light. Is shown. The defect detection device 18 includes a light projecting unit 117 that irradiates the belt-shaped support with a photosensitive layer with inspection light, an image capturing unit 118 including a photoelectric element, and a light projecting unit 117 and an image capturing unit 11.
And a scanning drive unit 119 for moving the scanning unit 8 in a direction perpendicular to the conveying direction of the belt-shaped support with a photosensitive layer. As shown in FIG. 4, the imaging unit 118 includes an imaging lens 122 that forms an image on a line CCD 121 having optical resolution, which is a photoelectric element.
And a box 123 in which these are assembled.
The line CCD 121 is arranged so that its longitudinal direction is along the transport direction of the belt-shaped support with a photosensitive layer.

The light projecting section 117 has a cylindrical case 125.
And a plurality of ring-shaped lamps 126 housed in this case
a, 126b, 126c, 126d and each of the ring-shaped lamps 126a to 126d.
A plurality of reflectors 127 for irradiating light emitted from 26a to 126d toward the surface of the belt-shaped support 12 with a photosensitive layer.
a, 127b and 127c. As the ring-shaped lamps 126a to 126d, for example, a ring-shaped yellow lamp or an EL light emitting element is used.

The light projecting section 117 is disposed below the image pickup section 118 at the position where the image pickup section 118 picks up the image of the band-shaped support 12 with a photosensitive layer so as to surround the periphery. This allows the inspection light to enter the imaging position of the imaging unit at various angles from the outer periphery, and allows the inspection light to be irregularly reflected by scratches, dust, dust, etc. having various reflectances and directivities. The inspection accuracy of the inspection device can be improved. In addition,
The black support 129 is provided on the opposite side (the side having no photosensitive layer) of the belt-shaped support 12 with a photosensitive layer to increase the detection efficiency.
Can be arranged.

The light projecting section 117 and the imaging section 118 are held by a substantially T-shaped support stay 131. The support stay 131 is incorporated in a scanning drive unit 119 arranged along the width direction of the photosensitive layer-attached band-shaped support 12, and the scanning drive unit 119 operates in the width direction of the photosensitive layer-attached band-shaped support 12. It is reciprocated. The light projecting unit 117 illuminates the surface of the photosensitive layer-attached band-shaped support 12 while moving in the width direction of the photosensitive layer-attached band-shaped support 12, and the imaging unit 118 projects while moving in synchronization with the light-projecting unit 117. The surface of the belt-shaped support 12 with a photosensitive layer illuminated by the light unit 117 is imaged.

There are various types of defects in the belt-like support 12 with the photosensitive layer, and the ring-like lamps 126a to 126a are used.
126d has the widest application range. However, as shown in FIG. 6, an imaging unit is used as a device for irradiating light to the back surface (the surface having no photosensitive layer) of the belt-shaped support with a photosensitive layer and detecting light transmitted from the belt-shaped support with a photosensitive layer. Defects can be detected even with inspection light from a backlight 150 arranged so as to sandwich the belt-like support with a photosensitive layer facing the surface 118, and opaque foreign matter and strong scratches can be effectively detected.

The scanning drive unit includes an imaging unit 118 and a light emitting unit 1
A scanning mechanism for moving the camera 17 is provided. As this scanning mechanism, although not shown in detail, a pulley arranged along the width direction of the belt-like support 12 with a photosensitive layer, and a support stay 131 are moved by movement of a belt when the pulley is rotated by a motor. It has become. The scanning mechanism is not limited to the pulley and the belt, but may be a sprocket and a chain, a solenoid and a spring, a cam mechanism, an air cylinder, a hydraulic cylinder, a ball screw and a ball nut, or the like.

The surface detecting device is controlled by a computer 133. The computer 133 has a control program for controlling the surface detecting device, a coordinate recording program for recording the coordinates of the detected defect point, and a detected defect point in the belt-shaped support with the photosensitive layer based on the coordinate recording program. When the belt-like support 12 with the photosensitive layer corresponds to the position where the substrate 20 is to be laminated, a program for temporarily suspending the substrate 20 is stored, and the computer 133 controls the substrate transport from the computer 133 according to these programs. The substrate transport control signal is output to the control unit 400.

The coordinates of the defect point and the defect coordinate data are input to the computer 133 as necessary, and are stored in a storage device such as a memory. The stored data is observed by a monitor 135 connected to the computer 133. It can be printed out by a printer 136 connected to the computer 133 and used for various studies.

The defect detecting section 100 is provided with a marking device 138 for performing a marking at the position of the defect point detected by the defect detecting device 8, and can be operated as required. Although not shown in detail, the marking device 138 includes a printer head that performs marking on the belt-like support 12 with a photosensitive layer, and a moving mechanism that moves the printer head in the width direction of the belt-like support 12 with a photosensitive layer. The moving mechanism moves the printer head based on the defect coordinates stored in the computer 138, and marks the belt-like support 12 with the photosensitive layer at a predetermined position. As the mark to be marked by the marking device 138, it is desirable to change the mark shape according to the size of the defect point.

Next, the method for manufacturing a color filter of the present invention will be described with reference to the flowchart shown in FIG. In the substrate reversing unit 200, the sheet-like substrate 20 sent by the transport roller 203 is supported from below by a reversing arm 205, lifted, the arm is rotated, and the substrate 20 is placed on the transport roller 203. The thermocompression surface faces down. There are vacuum suction, mechanical hand, etc. for holding the inverted arm substrate, but it is necessary to hold the back side or the end surface of the substrate and make the surface non-contact. The transport rollers 203 include roller transport, belt transport, carrier transport, and robot transport. The reverse contact conveyance may be performed until the substrate is turned over, but after turning over, the edge contact conveyance of the substrate is performed so that the conveyance roller 203 does not contact the lower surface.

In the substrate heating section 300, the substrate 20 is heated at a temperature of about 50 to 110 ° C. by the heater 304. The heater 304 includes a far infrared heater, a nichrome wire heater, a hot air heater, and the like. The heater 304 is the substrate 2
It may be provided above or below 0 or both. Examples of the substrate 20 include a copper bonded glass epoxy resin substrate and a glass substrate for a printed circuit board.

In the laminating section (thermocompression roller section) 500, a pair of thermocompression rollers 16A and 16B are respectively provided above the substrate 20 with the upper thermocompression roller 16A and below the thermocompression roller 16A below the thermocompression roller 16B. Are provided at positions facing each other, and pressure is applied downward to both ends of the upper thermocompression roller 16A by a cylinder or the like. The upper and lower thermocompression rollers 16A and 16B cooperate to thermocompress the substrate 20 together with the band-shaped support 12 with the photosensitive layer.
It serves to support and transport 0s. When the upper and lower thermocompression rollers 16A and 16B do not sandwich the substrate 20, they are in a non-contact state with a gap smaller than the substrate thickness. The thermocompression rollers 16A and 16B are stainless steel rollers whose roller surfaces are covered with an elastic material such as silicone rubber.
It is heated to about 150 ° C.

The belt-like support 12 with a photosensitive layer is wound around a lower thermocompression roller 16B, and its end is held by a belt with suction 515 at the exit side of the thermocompression roller. The belt 515 with suction moves at the same transport speed as the belt-like support 12 with a photosensitive layer, and vacuum-holds the end of the belt-like support 12 with a photosensitive layer by suction from below the transport belt with holes. When the substrate 20 is not continuous, the thermocompression rollers 16A and 16B and the belt with suction 515 rotate in synchronization with the transport speed of the belt-like support 12 with a photosensitive layer while holding the belt-like support 12 with a photosensitive layer. are doing.

When the substrate 20 which has been preheated and turned upside down comes from the left side in the drawing, it temporarily stops at the substrate pushing mechanism 400 and waits. The edge of the photosensitive layer-attached support 12 is sensed by a sensor based on a change in reflectance or transmittance by a sensor, and the photosensitive layer-attached support 12 is synchronized with a predetermined position of the substrate 20 at a predetermined position. , 16B. When the substrate 20 enters the gap and is wound, the upper thermo-compression roller 16
A, pressure is applied from above to the belt-like support 12 with the photosensitive layer.
And the substrate 20 are thermocompression bonded. When the belt-like support 12 with a photosensitive layer is thermocompression-bonded to the rear end position of the substrate 20, the pressure of the upper thermocompression roller 16A is released, and the non-contact state is maintained at a gap smaller than the thickness of the substrate.

In the meantime, the next substrate 20 is preheated and turned upside down, and is waiting at the substrate push-out mechanism 400 to detect the edge of the next belt-like support 12 with a photosensitive layer and to determine the predetermined position of the substrate 20. The substrate 20 with a photosensitive layer is synchronized with the substrate 20 and the substrate 20 is pushed out at a good timing.
To extrude the gap between the thermocompression rollers 16A and 16B. Thus, the belt-shaped support 12 with the photosensitive layer is continuously transported,
The band-shaped support 12 with a photosensitive layer and the substrate 20 are thermocompression-bonded.

At this time, the belt with suction 5
The holding of the end of the photosensitive layer-attached band-shaped support 12 by 15 is temporary holding when the substrate 20 is not continuously loaded on the thermocompression rollers 16A and 16B, and the substrate 20 is loaded and laminated. At this time, the suctioned belt 515 is in a state where the suction is cut off, and the belt-like support 12 with the photosensitive layer is conveyed together with the substrate while being adhered to the substrate 20.

Next, in the strip support 600 with the photosensitive layer, the fixed blade 61 is moved below the transport level of the substrate 20 on which the strip support 12 with the photosensitive layer having the photosensitive layer is laminated.
8. When the rotary blade 617 is installed on the upper side and the belt-like support with a photosensitive layer without the photosensitive layer is transported to the position between the substrate 20 and the substrate 20 on which the belt-like support with the photosensitive layer is laminated, The substrate 20 is separated by cutting the portion where the photosensitive layer not laminated on the substrate 20 has been peeled off.

In the band-shaped support cutting section 600 with the photosensitive layer,
Even when the substrate 20 is not continuously transported, the thermocompression bonding rollers 16A and 16B and the belt 515 with suction hold the belt-like support with a photosensitive layer with a photosensitive layer while the transport speed of the belt-like support with a photosensitive layer with a photosensitive layer. , The filter with the photosensitive layer is always transported,
The end of the belt-shaped support with a photosensitive layer is cut off by a rotary blade 617, and is dropped and collected in a lower collection box.

The separated substrate 20 having been subjected to the thermocompression bonding of the belt-like support with a photosensitive layer is transported to the substrate turning unit 700 with the belt-like support with a photosensitive layer protruding from the edge.
The back surface of the substrate 20 is held by the substrate reversing arm 719 from above, and the substrate 20 is lifted.
With the thermocompression bonding surface facing upward, and collect it in the next process or a substrate cassette.

As shown in FIG. 7, the above-mentioned operation is performed when the defect detection device 18 inspects the belt-shaped support 12 with a photosensitive layer, and as a result, there is no defect in the belt-shaped support 12 with a photosensitive layer. If the length of the belt-like support with the photosensitive layer in the area having no dots is longer than the length of the substrate by a predetermined amount, the substrate 2
Zero is transported through the substrate transport mechanism 400, the above-described laminating operation is performed, and the length of the belt-shaped support with a photosensitive layer in the transport direction is counted.

Next, as a result of the inspection of the belt-like support 12 with the photosensitive layer by the defect detecting device 18, the belt-like support 12 with the photosensitive layer
If there is a defect, inspection scanning and marking are performed as necessary, and inspection scanning is continued while the length of the coordinate of the defect point in the transport direction of the belt-shaped support with the photosensitive layer is counted. 4 is stopped and enters a standby state. When the length of the photosensitive layer-attached band-shaped support in the area having no defect point in the transport direction is larger than the length of the substrate by a predetermined amount, the substrate 20 is transported through the substrate transport mechanism unit 400, and the above-described laminating operation is performed. The length of the belt-like support with the photosensitive layer in the transport direction is counted.

By the above operation, a defect point exists in the belt-shaped support with the photosensitive layer, and while the defect point corresponds to a position where the substrate is laminated on the substrate, the transport of the substrate is stopped, so that the defect point exists. Since the belt-like support with the photosensitive layer in the region is not laminated on the substrate, a color filter having a defect caused by a defect point of the belt-like support with the photosensitive layer is not manufactured.

In the illustrated embodiment,
(1) From the belt-like support 12 with the photosensitive layer to the cover film 1
Laminating rollers 16A and 16B
Although the example in which the defect point of the belt-like support 12 with a photosensitive layer is detected before passing through the substrate is described, the present invention relates to (2) the belt-like support 12 with a photosensitive layer from the belt-like support 12 with a photosensitive layer.
Roller 12A from the part where the paper is sent out.
A method of detecting a defect point of the belt-shaped support 12 with a photosensitive layer before passing through the sheet B may be used. However, in the case of the method (2), when a defect point is detected in a state where the cover film is provided on the surface of the belt-shaped support 12 with the photosensitive layer, when the photosensitive layer has no defect point and only the cover film has the defect point Since the coordinates of the defect point are also recorded and the conveyance of the substrate is stopped, the number of band-shaped supports 12 with a photosensitive layer that are not laminated on the substrate increases. Therefore, in the present invention, the method (1) is more preferable.

[0040]

(Embodiment) (Embodiment) Using the above-described defect detection apparatus,
The width L of the belt-shaped support 12 with a photosensitive layer shown in FIG.
mm, the operation width L1 of the line CCD 121 is 50 mm,
The resolution of the line CCD 121 is 10 μm and the minimum is 2
The imaging unit 118 at a speed capable of detecting a defect having a size of 0 μm.
And the light projecting unit 117 were moved, and the band-shaped support 12 with a photosensitive layer was laminated on the substrate 20 in the operation sequence shown in FIG. (Comparative Example) Without using the defect detection device of the embodiment,
A belt-shaped support 12 with a photosensitive layer was laminated on a substrate 20 by a conventional method.

-Results- As a result of examining the number of color filters having defects in the color filters obtained by the method of (Comparative Example), the yield of the color filters was 76%, while the yield of the color filters was 76%. As a result of examining the number of color filters having defects in the color filters obtained by the method, the yield of the color filters was 98%. Therefore, it was found that the method of the present invention significantly improved the yield of the color filters.

[0042]

As described above, according to the present invention, a belt-shaped support with a photosensitive layer having a defect is provided, and the yield of a color filter is improved. In addition, the yield of the liquid crystal element manufactured from this color filter can be improved, and as a result, the manufacturing cost of the liquid crystal element can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing a method for manufacturing a color filter of the present invention.

FIG. 2 is a schematic configuration diagram illustrating an overall configuration of a color filter manufacturing apparatus of the present invention.

FIG. 3 is a schematic configuration diagram showing a defect detection unit in the color filter manufacturing apparatus of the present invention.

FIG. 4 is a cross-sectional view of a main part of an imaging unit and a light projecting unit in the defect detection device of the present invention.

FIG. 5 is a perspective view of a main part of an imaging unit and a light projecting unit in the defect detection device of the present invention.

FIG. 6 is a cross-sectional view of a principal part showing another embodiment of the defect detection device of the present invention.

FIG. 7 is a process chart showing an operation order of the defect detection device of the present invention.

[Explanation of symbols]

 Reference Signs List 10 strip-shaped support roll with photosensitive layer 12 strip-shaped support with photosensitive layer 14 cover film 18 defect detection device 16A, 16B laminating roller (thermocompression roller) 20 substrate 100 defect detection unit 117 light emitting unit 118 imaging unit 119 operation driving unit 121 Line CCD 122 Imaging lens 123 Case 125 Cases 126a to 126d Ring lamps 127a to 127c Reflector 129 Support (black) 131 Support stay 133 Computer 135 Monitor 136 Printer 138 Marking device 150 Backlight 200 Substrate inside-out section 203 Transport roller 205 Inverted arm 300 Substrate heating section 304 Heater 400 Substrate transport mechanism section 406 Cylinder 500 Laminating section 515 Suction belt 600 Slit strip with photosensitive layer 600 17 Rotary blade 618 Fixed blade 700 substrate turned over portion 719 substrate upside down arms

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H025 AA00 AB11 AB13 EA08 2H048 BA11 BA43 BA45 BA66 BB15 BB42 2H088 FA16 FA17 FA18 FA30 HA01 HA12 MA20 2H091 FA02X FA02Y FA02Z FB02 FB07 FC01 GA01 LA12

Claims (3)

[Claims] 1. A method for producing a color filter, comprising a step of laminating a belt-like support with a photosensitive layer delivered from a roll of a belt-like support with a photosensitive layer onto a substrate with a laminating roller, comprising the steps of: A first step of storing coordinates of defect points of the photosensitive layer-attached belt-shaped support from a site where the layer-attached belt-shaped support is sent out to a point at which the photosensitive layer-attached belt-shaped support passes through the laminating roller; A second step of temporarily stopping transport of the substrate to a laminating roller until a defect point of the photosensitive layer-attached band-shaped support corresponds to a position where the substrate is laminated to the substrate;
A method for producing a color filter, comprising: 2. In the first step, the belt-like support with a photosensitive layer passes through the laminating roller from a portion where the cover film is peeled off from the belt-like support with a photosensitive layer sent out from the belt-like support with a photosensitive layer. 2. The method according to claim 1, further comprising the step of storing coordinates of a defect point of the band-shaped support with a photosensitive layer. 3. A color filter manufacturing apparatus for laminating a belt-like support with a photosensitive layer delivered from a belt-like support roll with a photosensitive layer on a substrate with a laminating roller, comprising: A defect detection device that is provided between a portion where the support is sent out and the band-shaped support with a photosensitive layer passes through the laminating roller and stores coordinates of a defect point of the band-shaped support with a photosensitive layer; and the defect detection. A substrate for temporarily stopping conveyance of the substrate to a laminating roller until a defect point of the photosensitive layer-attached band-shaped support corresponds to a position where the substrate is laminated on the substrate, based on a defect coordinate signal from the apparatus. An apparatus for manufacturing a color filter, comprising: a transport control device;