JP2002043493A - Lead frame - Google Patents

Lead frame

Info

Publication number
JP2002043493A
JP2002043493A JP2000228236A JP2000228236A JP2002043493A JP 2002043493 A JP2002043493 A JP 2002043493A JP 2000228236 A JP2000228236 A JP 2000228236A JP 2000228236 A JP2000228236 A JP 2000228236A JP 2002043493 A JP2002043493 A JP 2002043493A
Authority
JP
Japan
Prior art keywords
resin
lead frame
frame
width direction
notch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000228236A
Other languages
Japanese (ja)
Inventor
Yoshiharu Kaneda
芳晴 金田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Original Assignee
Renesas Semiconductor Manufacturing Co Ltd
Kansai Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renesas Semiconductor Manufacturing Co Ltd, Kansai Nippon Electric Co Ltd filed Critical Renesas Semiconductor Manufacturing Co Ltd
Priority to JP2000228236A priority Critical patent/JP2002043493A/en
Publication of JP2002043493A publication Critical patent/JP2002043493A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/93Batch processes
    • H01L24/95Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
    • H01L24/97Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491Disposition
    • H01L2224/4912Layout
    • H01L2224/49171Fan-out arrangements

Abstract

PROBLEM TO BE SOLVED: To solve the problem that it is difficult to discriminate the filling state of a resin when the thickness of a resin coating predetermined part is thin. SOLUTION: A number of lead frames 10 are continuously connected in the thickness direction, and a rectangular notch 12 in a planar shape is formed on a frame 7 surrounding the resin coating predetermined part 11d of the terminal of the resin flow passage A of the lead frame with which the resin coating predetermined part 11 communicates in the thickness direction.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は半導体装置の製造に
用いられるリードフレームに関する。
The present invention relates to a lead frame used for manufacturing a semiconductor device.

【0002】[0002]

【従来の技術】ビデオカメラやノート型パーソナルコン
ピュータのように可搬型の電子回路装置は小型、軽量で
あることが要求され、これらに用いられる電子部品は、
小電力用のものだけでなくモータなど比較的大電流を制
御する電子部品でも小型、軽量化が要求されている。
2. Description of the Related Art Portable electronic circuit devices, such as video cameras and notebook personal computers, are required to be small and lightweight.
In addition to those for low power, electronic components such as motors that control relatively large currents are also required to be small and light.

【0003】このような電子部品のうちリードフレーム
を用いて製造される樹脂モールド型半導体装置の一例を
図3及び図4から説明する。
An example of a resin-molded semiconductor device manufactured using a lead frame among such electronic components will be described with reference to FIGS. 3 and 4. FIG.

【0004】図において、1は電子部品本体である半導
体ペレット2をマウントするアイランド、3は一端がア
イランド1の近傍に配置されたリード、4は半導体ペレ
ット2上の電極(図示せず)とリード3とを電気的に接
続するワイヤ、5は半導体ペレット2を含む主要部分を
被覆した樹脂を示す。リード3は樹脂5の側壁から導出
され、クランク状に折り曲げ成形されている。
In FIG. 1, reference numeral 1 denotes an island for mounting a semiconductor pellet 2 as an electronic component body, 3 denotes a lead having one end disposed near the island 1, 4 denotes an electrode (not shown) on the semiconductor pellet 2 and a lead. Reference numeral 5 denotes a resin that electrically covers the main part including the semiconductor pellet 2. The lead 3 is led out from the side wall of the resin 5 and is bent and formed into a crank shape.

【0005】この半導体装置の製造には図5に示すリー
ドフレーム6が用いられる。図において7は矩形状のフ
レーム、8はフレーム7の中央部に配置されたアイラン
ド1をフレーム7に連結する吊りピン、9はフレーム7
の内周からアイランド1に向かって延びる複数本のリー
ド3の中間部を連結して一体化したタイバを示す。リー
ドフレーム6はこのフレーム7を基本単位として、多数
個長手方向に連接したものである。
A lead frame 6 shown in FIG. 5 is used for manufacturing the semiconductor device. In the figure, reference numeral 7 denotes a rectangular frame, 8 denotes a suspension pin for connecting the island 1 arranged at the center of the frame 7 to the frame 7, and 9 denotes a frame.
2 shows a tie bar in which intermediate portions of a plurality of leads 3 extending toward the island 1 from the inner periphery are connected and integrated. A plurality of lead frames 6 are connected in the longitudinal direction with the frame 7 as a basic unit.

【0006】このリードフレーム6は半導体ペレット2
をアイランド1に半田や導電ペーストなどの接着剤(図
示省略)を介してマウントするマウント工程、半導体ペ
レット2上の電極とリード3とをワイヤ4で電気的に接
続するワイヤボンディング工程、半導体ペレット2を含
むタイバ9で囲まれた領域を樹脂にて外装する樹脂モー
ルド工程、要部が樹脂被覆されたリードフレーム6の樹
脂から露呈した扶養部分、即ちフレーム7、吊りピン
8、タイバ9を切断除去し、各リードを独立させ、個々
の半導体装置に分離する切断工程、電気的特性や外観を
検査し選別する検査工程、検査結果に基づいて樹脂5の
表面に捺印する捺印工程を順次経て、図3に示す半導体
装置が製造される。
The lead frame 6 is made of a semiconductor pellet 2
Mounting the semiconductor chip on the island 1 via an adhesive (not shown) such as solder or conductive paste, a wire bonding step of electrically connecting the electrode 3 on the semiconductor pellet 2 and the lead 3 with the wire 4, A resin molding step of covering the area surrounded by the tie bar 9 with the resin, and cutting and removing the dependent parts, that is, the frame 7, the suspension pins 8, and the tie bar 9 exposed from the resin of the lead frame 6 whose main part is coated with the resin Then, each lead is made independent, a cutting step of separating the individual semiconductor devices, an inspection step of inspecting and selecting electrical characteristics and appearance, and a stamping step of stamping the surface of the resin 5 based on the inspection result are sequentially performed. 3 is manufactured.

【0007】この種半導体装置は、小型化、軽量化とと
もに低価格化の要求もあるため、図5に示すフレーム7
を多数列、互いに連接し、一枚のリードフレーム当りの
半導体装置の数を増大させることによりコストダウンを
図っている。
[0007] This type of semiconductor device is required to be smaller and lighter as well as lower in price.
Are connected to each other in a large number of rows to increase the number of semiconductor devices per lead frame, thereby reducing costs.

【0008】このようなリードフレーム6は各フレーム
7にそれぞれ樹脂5を供給することが困難であるため、
巾方向に隣接配置されたフレーム7の樹脂被覆予定部を
連通して、リードフレーム6の一側方から供給された樹
脂5を連接された樹脂被覆予定部に順次移動させて他の
側方に送り、樹脂成形している。
In such a lead frame 6, it is difficult to supply the resin 5 to each frame 7.
The resin coating portions of the frames 7 arranged adjacent to each other in the width direction are communicated with each other, and the resin 5 supplied from one side of the lead frame 6 is sequentially moved to the connected resin coating portions to the other side. Feeding and resin molding.

【0009】またこの種半導体装置は、薄型化も要求さ
れており、数Aの電流を開閉制御する半導体装置でも樹
脂厚さが1.0mm以下のものが製造されている。
Further, this type of semiconductor device is also required to be thinner, and a semiconductor device having a resin thickness of 1.0 mm or less is also manufactured as a semiconductor device which controls opening and closing of a current of several A.

【0010】このように樹脂厚みが1.0mm以下とな
ると、アイランド1の厚みを0.15mm、半導体ペレ
ット2の厚みを0.25mmとすると、半導体ペレット
2をマウントしたアイランド1部分の樹脂5の実質的な
厚みは0.6mm以下となり、上下片側の樹脂厚みは
0.3mm以下となる。
When the thickness of the resin is 1.0 mm or less, the thickness of the island 1 is 0.15 mm and the thickness of the semiconductor pellet 2 is 0.25 mm. The substantial thickness is 0.6 mm or less, and the thickness of the resin on one of the upper and lower sides is 0.3 mm or less.

【0011】一方、リード3部分やアイランド1とリー
ド3の間の樹脂の厚みは0.85mm以上で、アイラン
ド1部分とアイランド1から外れた部分の樹脂5の厚み
の差が大きくなり、樹脂被覆予定部内の樹脂の流動性が
大幅に異なる。
On the other hand, the thickness of the resin between the leads 3 and between the island 1 and the leads 3 is 0.85 mm or more. The fluidity of the resin in the scheduled area is significantly different.

【0012】このように樹脂被覆予定部内での樹脂の流
動性が大幅に異なると、巾方向に多数の樹脂被覆予定部
を連接したものではそれぞれの樹脂被覆予定部の樹脂5
の充填性が大きくばらつき、未充填などの問題を生じる
ことがあった。
As described above, when the fluidity of the resin in the portion to be coated with resin is significantly different, if a plurality of portions to be coated with resin are connected in the width direction, the resin
Have a large variation in the filling properties, and problems such as unfilling may occur.

【0013】そのため外観検査を実施し未充填のものを
検出して、成形不良として除去する必要があるが、樹脂
の厚みが薄いものでは、樹脂被覆予定部の外周を樹脂が
被覆することにより外観は正常でも、内部に空洞が形成
され未充填不良は検出できず、このような不良が後続の
リード成形工程に供給されると、リードが成形パンチに
よって引き抜かれ、パンチとダイの間に詰まって装置の
動作を続行させることができなくなるなどの問題があっ
た。
Therefore, it is necessary to perform an appearance inspection to detect unfilled ones and remove them as molding defects. However, in the case of a resin having a small thickness, the outer periphery of a portion to be covered with the resin is covered with the resin to obtain an appearance. Is normal, voids are formed inside and unfilled defects cannot be detected, and when such defects are supplied to the subsequent lead forming process, the leads are pulled out by the forming punch and clogged between the punch and the die. There has been a problem that the operation of the apparatus cannot be continued.

【0014】また、未充填の半導体装置は耐湿性が劣
り、信頼性が保証できないという問題もあった。
An unfilled semiconductor device also has a problem that its moisture resistance is poor and its reliability cannot be guaranteed.

【0015】そのため、樹脂被覆予定部とタイバ9の間
に形成される樹脂ぱりの状態を検知して未充填を検出す
ることが知られている。例えば特開昭59−22872
7号公報(先行技術1)
For this reason, it is known to detect the state of resin filler formed between the portion to be coated with resin and the tie bar 9 to detect non-filling. For example, JP-A-59-22872
No. 7 (Prior Art 1)

【0016】また樹脂被覆予定部と隣接するフレームの
一部に検知孔を穿設して、この検知孔への樹脂の充填状
態を検知して未充填を検出することも知られている。例
えば特開平1−204438号公報(先行技術2)
It is also known that a detection hole is formed in a part of a frame adjacent to a portion to be coated with a resin, and a state of filling of the detection hole with the resin is detected to detect an unfilled state. For example, JP-A-1-204438 (Prior Art 2)

【0017】[0017]

【発明が解決しようとする課題】上記先行技術1、2に
よって樹脂の未充填を検出することは知られているが、
樹脂被覆予定部を多数連接しさらに樹脂厚みが1.0m
m以下の薄いものに、先行技術1に開示された技術を適
用すると、樹脂被覆予定部とタイバの間に充填される樹
脂ばりがわずかで、樹脂ばりがないか欠けているもので
未充填と判定されるものでも、実際には完全に充填され
ているものがあり、樹脂ばりだけで未充填を検出するこ
とができなかった。
It is known that the prior arts 1 and 2 detect unfilled resin.
A number of resin coating sections are connected to each other, and the resin thickness is 1.0 m
When the technology disclosed in Prior Art 1 is applied to a thin material having a thickness of not more than m, the resin burrs to be filled between the resin coating scheduled portion and the tie bar are small, and the resin burrs are missing or lacking and are not filled. Some of them were actually completely filled, and it was not possible to detect non-filling only with resin burrs.

【0018】また先行技術2に開示されたようにフレー
ムの一部に検知孔を形成するものでも、樹脂被覆予定部
が多数連接したものでは樹脂の流動経路が長くなり、し
かも樹脂被覆予定部が薄いと樹脂は金型からの熱を受け
やすく、樹脂の移動中に粘度が上昇して流動性が低下
し、末端の樹脂被覆予定部では樹脂の流動圧力が小さく
なり、樹脂被覆予定部に完全に樹脂が充填されていても
検知孔には充填されないことがあり、正確に樹脂の充填
状態を検出することができなかった。
[0018] Further, even if the detection hole is formed in a part of the frame as disclosed in the prior art 2, the flow path of the resin becomes long when a large number of resin coating portions are connected, and the resin coating portion becomes large. If the resin is thin, the resin will be more susceptible to heat from the mold, the viscosity will increase during the movement of the resin, and the fluidity will decrease. In some cases, even if the resin was filled, the detection hole was not filled, and the state of filling of the resin could not be accurately detected.

【0019】[0019]

【課題を解決するための手段】本発明は上記課題の解決
を目的として提案されたもので、巾方向及び長手方向に
複数のフレームを連接し、各フレーム内にアイランドを
配置し、フレームからアイランドに向かって複数本のリ
ードを延在させ、アイランドにマウントされリードと電
気的に接続された半導体ペレットを含むフレーム内の要
部が樹脂にて被覆されるリードフレームにおいて、上記
巾方向に連接された複数のフレームの一端側から他端側
に向かって樹脂が順次移動する樹脂供給経路の末端で樹
脂被覆予定部と隣接する部分に、平面形状が略矩形状の
切欠きを形成したことを特徴とするリードフレームを提
供する。
SUMMARY OF THE INVENTION The present invention has been proposed to solve the above-mentioned problems. A plurality of frames are connected in a width direction and a longitudinal direction, and islands are arranged in each frame. A plurality of leads are extended toward the main frame, and the main part in the frame including the semiconductor pellet mounted on the island and electrically connected to the leads is covered with resin. A notch having a substantially rectangular planar shape is formed at a portion adjacent to a portion to be coated with resin at an end of a resin supply path in which resin sequentially moves from one end side to the other end side of the plurality of frames. Is provided.

【0020】[0020]

【発明の実施の形態】本発明によるリードフレームは、
巾方向及び長手方向に多数のフレームを配列したもの
で、巾方向の樹脂被覆予定部を連通して、一端側から他
端側へ樹脂を供給するようにしたリードフレームで、樹
脂流動経路の末端に平面形状が略矩形状の切欠きを形成
したことを特徴とするが、上記樹脂被覆予定部は矩形状
でその対角位置に樹脂供給経路の樹脂注入部と樹脂排出
部が形成され、樹脂供給経路末端の樹脂排出部に切欠き
を形成することができる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A lead frame according to the present invention
A lead frame in which a large number of frames are arranged in the width direction and the longitudinal direction, and the resin coating portion in the width direction is communicated to supply the resin from one end to the other end. A cutout having a substantially rectangular shape in a plan view, the resin coating scheduled portion is rectangular, and a resin injection portion and a resin discharge portion of a resin supply path are formed at diagonal positions thereof. A notch can be formed in the resin discharge portion at the end of the supply path.

【0021】また巾方向に連接した複数のフレームを2
組、長手方向に連接し、巾方向中間に位置する各組の樹
脂供給経路末端のフレームに切欠きを形成することがで
きる。
A plurality of frames connected in the width direction are
The notch can be formed in the frame at the end of the resin supply path of each set that is connected in the set and the longitudinal direction and located in the middle in the width direction.

【0022】さらには本発明によるリードフレームは樹
脂被覆予定部の厚みが1.0mm以下のものに顕著な効
果を奏することかできる。
Further, the lead frame according to the present invention has a remarkable effect when the thickness of the portion to be coated with the resin is 1.0 mm or less.

【0023】[0023]

【実施例】以下に本発明の実施例を図1から説明する。
図において、図3〜図5にてにて説明した同一部分には
同一符号を付して重複する説明を省略する。本発明によ
るリードフレーム10は、図示一点鎖線で示すフレーム
7を巾方向及び長手方向に多数連接し、巾方向に連接し
たフレーム7a、7b、7cの図示点線で囲まれる樹脂
被覆予定部11a、11b、11cを連通して各樹脂被
覆予定部11a、11b、11cに順次流動化した樹脂
を供給しすることにより樹脂被覆するものである。
FIG. 1 shows an embodiment of the present invention.
In the figure, the same parts as those described in FIGS. 3 to 5 are denoted by the same reference numerals, and redundant description will be omitted. The lead frame 10 according to the present invention is formed by connecting a large number of frames 7 indicated by alternate long and short dash lines in the width direction and the longitudinal direction, and the resin coating portions 11a and 11b surrounded by the dotted lines in the frames 7a, 7b and 7c connected in the width direction. , 11c are communicated with each other, and the fluidized resin is sequentially supplied to the respective resin coating portions 11a, 11b, 11c to perform resin coating.

【0024】このリードフレーム10は樹脂被覆予定部
11a、11b、11cの平面形状が矩形状で、樹脂流
動経路Aを対角方向に設定する。そのため流動化した樹
脂はリードフレーム10上を蛇行する。そしてこの樹脂
の流動経路Aの末端の樹脂排出部に平面形状が略矩形状
の切欠き12を形成している。
In the lead frame 10, the resin coating portions 11a, 11b, and 11c are rectangular in plan view, and the resin flow path A is set diagonally. Therefore, the fluidized resin meanders on the lead frame 10. A cutout 12 having a substantially rectangular planar shape is formed at the resin discharge portion at the end of the resin flow path A.

【0025】この切欠き12は樹脂被覆予定部11cと
連通しているが、厚みはフレーム7の厚みで決定され、
樹脂被覆予定部11の厚みが1.0mm以下であるのに
対し、切欠き12の厚みは0.15mm程度、その開口
径は1.0mm程度に設定する。
The notch 12 communicates with the portion 11c to be coated with resin, but the thickness is determined by the thickness of the frame 7.
The thickness of the notch 12 is set to about 0.15 mm, and the opening diameter thereof is set to about 1.0 mm, while the thickness of the resin coating portion 11 is 1.0 mm or less.

【0026】本発明の前提となるリードフレームは多数
の樹脂被覆予定部11a、11b、11cを連通し順次
流動化した樹脂を供給するため、樹脂が樹脂被覆予定部
11a、11b、11c内を進行するにつれて硬化が進
行し粘度が上昇し、流動性が低下する。そのため、末端
の樹脂被覆予定部11c内の樹脂の流動性は極端に低下
し、樹脂が充填された状態でも、フレーム7の厚みで限
定された切欠き12への樹脂の流入は困難である。
The lead frame, which is the premise of the present invention, communicates with a large number of resin coating portions 11a, 11b, and 11c to supply the resin which has been fluidized sequentially, so that the resin travels in the resin coating portions 11a, 11b, and 11c. As the curing proceeds, the viscosity increases and the fluidity decreases. Therefore, the fluidity of the resin in the terminal resin coating portion 11c is extremely reduced, and it is difficult for the resin to flow into the notch 12 limited by the thickness of the frame 7 even when the resin is filled.

【0027】しかしながらこの切欠きは厚みに比して開
口径を十分大きく設定しているため、流動性が低下した
樹脂でも収容することができ、切欠き12に入った樹脂
は、フレーム7から直接熱を受けて速やかに硬化し、流
動性を喪失する。そのため切欠き12に注入された樹脂
の進行深さを検出することにより、樹脂被覆予定部11
内の樹脂の充填状態を確実に検出することができる。
However, since the notch has a sufficiently large opening diameter as compared with the thickness, it is possible to accommodate even a resin having a reduced fluidity. It hardens quickly due to heat and loses fluidity. Therefore, by detecting the depth of progress of the resin injected into the notch 12, the resin coating scheduled portion 11 is detected.
The state of filling of the resin in the inside can be reliably detected.

【0028】図2(a)に示すようにこの切欠き12に
完全に樹脂5が充填された状態では末端の樹脂被覆予定
部11cにも十分圧力がかかった状態で樹脂が充填され
いる。また図2(b)に示すように、樹脂5が切欠き1
2の中間位置まで充填されている状態でも充填状態は良
好である。しかしながら、図2(c)に示すように樹脂
被覆予定部11cは樹脂5で充填されているようにみえ
ても、切欠き12に樹脂5が入っていない状態では、内
部に空洞があり、充填不良と判定される。
As shown in FIG. 2A, when the notch 12 is completely filled with the resin 5, the terminal resin coating portion 11c at the end is also filled with the resin under sufficient pressure. Further, as shown in FIG.
The filling state is good even in the state where the filling is performed up to the intermediate position of No. 2. However, as shown in FIG. 2 (c), the resin coating portion 11c appears to be filled with the resin 5, but when the notch 12 does not contain the resin 5, there is a cavity inside, and It is determined to be defective.

【0029】この切欠き12の樹脂の充填状態は、光セ
ンサで容易に検出することができ、テレビカメラを用い
た画像認識装置によってさらに詳細な判別ができる。
The filling state of the notch 12 with the resin can be easily detected by an optical sensor, and more detailed judgment can be made by an image recognition device using a television camera.

【0030】また、この判別結果により、リードフレー
ム上の樹脂の充填状態を詳細に分析することができ、こ
の文節結果により、樹脂成形の最適条件を設定すること
もできる。
Further, the state of filling of the resin on the lead frame can be analyzed in detail based on the result of this determination, and the optimum conditions for resin molding can be set based on the result of the clause.

【0031】本発明によるリードフレームは巾方向の両
側から複数のフレームを連接し、巾方向両側から連接し
た樹脂被覆予定部に樹脂を供給し、巾方向中間部に末端
の樹脂被覆予定部を配置したリードフレームにも適用で
き、この場合には、巾方向中間部の樹脂被覆予定部に切
欠きを形成すればよい。
In the lead frame according to the present invention, a plurality of frames are connected from both sides in the width direction, the resin is supplied to the resin coating portions connected from both sides in the width direction, and the terminal resin coating portions are arranged at the middle portion in the width direction. In this case, a notch may be formed in the portion to be covered with the resin in the middle portion in the width direction.

【0032】尚、本発明は上記実施例にのみ限定される
ものではなく、例えば、樹脂被覆予定部11の厚みは、
1.0mmを超えるものにも適用できる。
The present invention is not limited only to the above embodiment. For example, the thickness of the resin coating portion 11 is
It can also be applied to those exceeding 1.0 mm.

【0033】また樹脂の供給は単一のポットから流動化
する樹脂を供給するだけでなく、リードフレームの一側
方あるいは両側に多数のポットを配置し、各ポットから
最短の樹脂被覆予定部に樹脂を供給してもよい。
In addition to supplying resin to be fluidized from a single pot, a large number of pots are arranged on one side or both sides of the lead frame, and the resin is supplied from each pot to the shortest resin coating portion. A resin may be supplied.

【0034】[0034]

【発明の効果】以上のように本発明によれば、多数の樹
脂被覆予定部を巾方向に連通したリードフレームの各樹
脂被覆予定部への樹脂の充填状態を正確に検出すること
ができるリードフレームを提供することができる。
As described above, according to the present invention, it is possible to accurately detect the filling state of the resin in each of the resin coating portions of the lead frame in which a large number of the resin coating portions communicate in the width direction. Frames can be provided.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明によるリードフレームの要部平面図FIG. 1 is a plan view of a main part of a lead frame according to the present invention.

【図2】 本発明によるリードフレーム上への樹脂の充
填状態を示す要部平面図
FIG. 2 is a plan view of a main part showing a state of filling a resin on a lead frame according to the present invention.

【図3】 樹脂モールド型電子部品の一例を示す一部断
面平面図
FIG. 3 is a partial cross-sectional plan view illustrating an example of a resin-molded electronic component.

【図4】 図3電子部品の正断面図4 is a front sectional view of the electronic component in FIG. 3;

【図5】 図3電子部品の製造に用いられるリードフレ
ームの要部平面図
FIG. 5 is a plan view of a main part of a lead frame used for manufacturing an electronic component.

【符号の説明】[Explanation of symbols]

1 アイランド 2 半導体ペレット 3 リード 4 ワイヤ 5 樹脂 6 リードフレーム 7 フレーム 7a、7b、7c フレーム 8 ピン 9 タイバ 10 リードフレーム 11 樹脂被覆予定部 11a、11b、11c 樹脂被覆予定部 12 切欠き A 樹脂流動経路 REFERENCE SIGNS LIST 1 island 2 semiconductor pellet 3 lead 4 wire 5 resin 6 lead frame 7 frame 7 a, 7 b, 7 c frame 8 pin 9 tie bar 10 lead frame 11 scheduled resin coating portion 11 a, 11 b, 11 c scheduled resin coating portion 12 notch A resin flow path

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】巾方向及び長手方向に複数のフレームを連
接し、各フレーム内にアイランドを配置し、フレームか
らアイランドに向かって複数本のリードを延在させ、ア
イランドにマウントされリードと電気的に接続された半
導体ペレットを含むフレーム内の要部が樹脂にて被覆さ
れるリードフレームにおいて、 上記巾方向に連接された複数のフレームの一端側から他
端側に向かって樹脂が順次移動する樹脂供給経路の末端
で樹脂被覆予定部と隣接する部分に、平面形状が略矩形
状の切欠きを形成したことを特徴とするリードフレー
ム。
A plurality of frames are connected in a width direction and a longitudinal direction, an island is arranged in each frame, a plurality of leads extend from the frame toward the island, and the leads are electrically connected to the leads. In a lead frame in which a main part in a frame including a semiconductor pellet connected to a resin is covered with a resin, the resin in which the resin sequentially moves from one end to the other end of the plurality of frames connected in the width direction is used. A lead frame, wherein a notch having a substantially rectangular planar shape is formed in a portion adjacent to a resin coating portion at an end of a supply path.
【請求項2】矩形状の樹脂被覆予定部の対角位置に樹脂
供給経路の樹脂注入部と樹脂排出部が形成され、樹脂供
給経路末端の樹脂排出部に切欠きを形成したことを特徴
とする請求項1に記載のリードフレーム。
2. A resin injection section and a resin discharge section of a resin supply path are formed at diagonal positions of a rectangular resin coating section, and a notch is formed at a resin discharge section at an end of the resin supply path. The lead frame according to claim 1.
【請求項3】巾方向に連接した複数のフレームを2組、
長手方向に連接し、巾方向中間に位置する各組の樹脂供
給経路末端のフレームに切欠きを形成したことを特徴と
する請求項1に記載のリードフレーム。
3. Two sets of a plurality of frames connected in the width direction,
2. The lead frame according to claim 1, wherein a notch is formed in a frame at the end of each pair of resin supply paths which is connected in the longitudinal direction and located at the middle in the width direction.
【請求項4】樹脂被覆予定部の厚みが1.0mm以下で
あることを特徴とする請求項1に記載のリードフレー
ム。
4. The lead frame according to claim 1, wherein the thickness of the portion to be covered with the resin is 1.0 mm or less.
JP2000228236A 2000-07-28 2000-07-28 Lead frame Pending JP2002043493A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000228236A JP2002043493A (en) 2000-07-28 2000-07-28 Lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000228236A JP2002043493A (en) 2000-07-28 2000-07-28 Lead frame

Publications (1)

Publication Number Publication Date
JP2002043493A true JP2002043493A (en) 2002-02-08

Family

ID=18721566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000228236A Pending JP2002043493A (en) 2000-07-28 2000-07-28 Lead frame

Country Status (1)

Country Link
JP (1) JP2002043493A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI510179B (en) * 2012-02-22 2015-12-01

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI510179B (en) * 2012-02-22 2015-12-01

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