JP2002042945A - Electric connection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a test device for electric inspection for a semiconductor device provided with a compact contact probe pin without using a coillike spring. SOLUTION: An electric connection device is provided with a plunger 5 arranged in an end part having an opening 2 of a hollow and cylindrical electricity conducting member 3, slidable for an inner wall face of the cylindrical member and having electric conductivity, a contact part 4 protruding outward from a first face on an opening side of the plunger and having electric conductivity, a first magnetic substance whose magnetic pole on one side is fixed on a face on the opposite side to the first face of the plunger 5, and a second magnetic body 10 arranged in an end part on the other side of the hollow and cylindrical electricity conducting member 3. The contact part 4 can conduct electricity to a power supply through the plunger 5 and the hollow and cylindrical electricity conducting member 3, and the first magnetic body 7 and the second magnetic body 10 are arranged by making the same magnetic pole faces face each other in the cylindrical electricity conducting member 3.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor device, an electronic component and other semiconductor devices at room temperature or at room temperature.
The present invention relates to a connection device for testing electrical characteristics at a high temperature of 0 to 150 ° C., and particularly to a test device at a normal temperature or a high temperature of 50 to 150 ° C. for a semiconductor device or the like, for example, an IC package, an IC circuit or a printed wiring and other electronic components. Related to a dynamic connection device. The present invention also relates to an electrical connection device for an inspection device for a semiconductor device and other electronic components and other semiconductor devices, and more particularly to an IC package having many contacts, and an electronic device mounted on a printed wiring board. The present invention relates to an electrical connection device for testing various electronic components having circuits, such as passive components, functional components, conversion components, and display elements.

[0002]

2. Description of the Related Art Inspection apparatuses having contact probe pins have been used to perform various electrical inspections of semiconductor devices and electronic components. For example, a continuity test of a semiconductor device or an electronic component is performed by bringing a contact probe pin that is connected to a power supply into contact with a connection terminal. In this inspection device, a contact probe pin has, for example, a contact portion that contacts various connection ends of a semiconductor device or an electronic component in a metal tube that is a main body called a barrel, and has an electrical characteristic inspection at the other end. A coil spring having a power connection to the power supply of the device is provided. The coil-shaped spring contacts the contact portion with a connection end of a semiconductor device, an electronic component, or the like, and reduces the contact resistance when inspecting electrical characteristics of the semiconductor device or the electronic component. The contact probe pins are positively pressed against the connection terminals of the components to make contact therewith. Coiled springs used in conventional contact probe pins are:
The room temperature specification uses a piano wire (SWP), and in the high temperature specification for burn-in and other environmental resistance tests,
At a high temperature of 120 to 130 ° C., stainless steel for spring (SUS302, SUS304) is used to prevent deterioration, and at a temperature of 130 ° C. or more, a cobalt-nickel-chrome wire is used. On the other hand, for example, in the case of IC packages, chip components such as IC chips will be further miniaturized and densified in the future, and their share will increase.
The pitch interval tends to be further narrowed, and the distance between the connection terminals of the semiconductor device and the electronic component is 0.5 mm to 0.5 mm.
It tends to change to 3 mm.

[0003]

However, in an electrical inspection apparatus for a semiconductor device and an electronic component, the contact probe pin is required to have a distance of 0.5 mm between the connection terminals of the semiconductor device and the electronic component. In order to reduce the size in accordance with the transition to 0.3 mm, it is necessary to reduce the size of the coil spring used as a conductive member and an elastic member while maintaining the elasticity such as the spring pressure. I have. This problem is also a problem in reducing the size of the contact probe pins when performing inspection of a semiconductor device and an electronic component in a high frequency range. Further, in the conventional contact probe pins, the coiled spring causes sagging when used at high temperatures in burn-in and environmental resistance tests, etc., and the spring pressure is reduced. It is not suitable for use at high temperatures, and is regarded as a problem. In the case of miniaturization, in the case of a coil spring, the manufacturing cost of the spring increases due to the shortening of the pin, the durability of the spring is limited to 1,000,000 times, and the guaranteed value of the spring is also limited to 200,000 times. So,
Has been a problem. SUMMARY OF THE INVENTION It is an object of the present invention to solve a problem associated with downsizing a contact probe pin of an electrical inspection device for semiconductor devices and electronic components.

[0004]

Means for Solving the Problems The present inventors have found that the repulsive force generated between the same poles of two magnetic materials can be used for the pressing force of a contact probe pin, and reached the present invention. SUMMARY OF THE INVENTION It is an object of the present invention to solve the problem of downsizing a contact probe pin of an electrical inspection device for semiconductor devices and electronic components without using a coil spring.

That is, the present invention provides a hollow cylindrical conductive member having an opening at at least one end, and a hollow cylindrical conductive member which is disposed inside the opening having an opening. A conductive plunger slidably disposed on a wall surface, a conductive contact portion protruding outside from the first surface on the opening side of the plunger through the opening, A first magnetic body in which one magnetic pole is fixed with respect to a surface opposite to the first surface, and a second magnetic material disposed in the other end of the hollow cylindrical conductive member. The contact portion is electrically conductive to a power source via the plunger and the hollow cylindrical conductive member, and the first magnetic body and the second magnetic body The same pole faces face each other within the conductive member An electrical connection device characterized by being disposed, and the present invention provides a hollow cylindrical conductive member having an opening at one end and a closed end at the other end; A conductive plunger disposed in the end of the cylindrical conductive member having an opening, and slidably disposed on the inner wall surface of the cylindrical member; and a first plunger on the opening side of the plunger. A contact portion having conductivity protruding from the surface of the plunger to the outside through the opening, a first magnetic body having one magnetic pole fixed with respect to a surface opposite to the first surface of the plunger, An electrically connectable connection terminal provided outside the other closed end of the hollow cylindrical conductive member; and a second terminal disposed in the closed other cylindrical conductive member. And a second magnetic body, wherein the contact portion includes a plunger. And via the hollow cylindrical conductive member, the first magnetic body and the second magnetic body are the same as each other in the cylindrical conductive member. An electrical connection device characterized by being arranged with magnetic pole faces facing each other.

Further, the present invention provides a hollow cylindrical conductive member having openings at both ends, and a hollow cylindrical conductive member disposed at a first end of the hollow cylindrical conductive member. A first plunger having conductivity that is slidably disposed with respect to the first plunger, and from the first surface of the first plunger on the first end opening side to the outside through the first end opening. A protruding conductive contact portion, a first magnetic body having one magnetic pole fixed with respect to a surface opposite to the first surface of the first plunger, and the hollow cylindrical conductive member. A conductive second plunger disposed within the second end of the member and slidably disposed on the inner wall surface of the tubular member; and the second plunger of the second plunger. Protrudes outward from the first surface on the side of the end opening through the second end opening. An electrical connection terminal, comprising a second magnetic body having one magnetic pole fixed to a surface opposite to the first surface of the second plunger, the contact portion, The first plunger, the hollow cylindrical conductive member, via the second plunger, can be electrically conductive to the connection terminal, the first magnetic body and the second magnetic body, An electric connection device characterized in that the same magnetic pole faces are arranged facing each other within a cylindrical conductive member, and the present invention further provides a hollow cylindrical conductive member having openings at both ends. A member, a first plunger having conductivity disposed in a first end of the hollow tubular conductive member and slidably disposed on an inner wall surface of the tubular member; The first end of the first plunger from the first surface on the first end opening side; A first contact portion having conductivity protruding to the outside through the mouth, an electrically insulating first covering member covering a surface opposite to the first surface of the first plunger; An electrically insulating first plate member disposed in contact with the first covering member, a first magnetic body having one magnetic pole fixed to the first plate member, and the hollow cylindrical member; A second plunger having conductivity that is disposed within the second end of the conductive member and is slidably disposed on the inner wall surface of the tubular member; and the second plunger of the second plunger. A second conductive contact protruding from the first surface on the second end opening side to the outside through the second end opening, and opposed to the first surface of the second plunger; An electrically insulating second covering member for covering the side surface, and an electric insulator arranged in contact with the second covering member. An edge second plate member, and a second magnetic body having one magnetic pole fixed to the second plate member, wherein the contact portion includes a first plunger and the hollow cylinder. Shaped conductive member,
Via the second plunger, it can be electrically conducted to the connection terminal, and the first magnetic body and the second magnetic body face the same magnetic pole surface within the cylindrical conductive member. An electrical connection device characterized by being arranged together.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present invention, an electrical connection device is used for an electrical inspection device for semiconductor devices and electronic components, and is provided inside a cylindrical conductive member and one end of the cylindrical conductive member. A plunger having conductivity, a contact portion having conductivity provided in the plunger, a first magnetic body fixed to the plunger, and a second provided in the other end of the cylindrical conductive member. Is formed. In the present invention, the contact portion having conductivity can be formed on the plunger, but may be formed separately from the plunger and fixed to the plunger. The tubular conductive member guides the measurement current, and is, for example, brass (B
sT), beryllium copper (BeCu) or phosphor bronze (PB)
It is formed of a material having good electric conductivity such as. The plunger and the contact part are beryllium copper (BeCu), carbon tool steel (S
A material having good conductivity such as K) and relatively hard to be worn is selected. As the first and second magnetic materials, a rare earth magnetic material, an alnico magnet, or an iron-chromium-cobalt magnet can be used. As the rare earth magnetic material, for example, a rare earth element represented by neodymium, a magnet mainly composed of iron and boron or a rare earth element represented by neodymium, a bonded magnet using a magnet powder mainly composed of iron and boron, and the like However, a magnet mainly containing a rare earth element represented by neodymium, iron, and boron is preferable for the small magnetic body of the present invention. Alnico magnets include magnets containing copper, nickel, cobalt and aluminum as main components. In the present invention, it is arranged in a structure that does not come into contact with the cylindrical conductive member, but it is preferable to coat with an insulating material such as a plastic material in order to impart insulation and corrosion resistance.

In the present invention, a disk made of POM (Duracon (acetal resin)) or a fluororesin is disposed between the plunger and the magnetic body, so that the plunger can avoid an electrical influence on the magnetic body. . Further, at least one of the contact surfaces between the plunger and the magnetic body can be covered with a resin film. As the resin film to be coated, there is a fluorine resin film or a mixed film of an epoxy resin and a fluorine resin. In the present invention, when the influence of the magnetic flux from the plunger on the magnetic body is further cut off, besides a disk made of POM (Duracon) or a fluororesin, a magnetic shielding material such as a material having a high magnetic permeability is further used. Can be placed.

According to the present invention, there is provided a hollow cylindrical conductive member having an opening at at least one end, and the hollow cylindrical conductive member is disposed in an end having an opening of the hollow cylindrical conductive member. A conductive plunger slidably disposed with respect to the conductive member; a conductive contact portion protruding from the first surface on the opening side of the plunger to the outside through the opening; A first magnetic body having one magnetic pole fixed to a surface opposite to the surface of the first magnetic body, and a second magnetic body disposed in the other end of the hollow cylindrical conductive member. The contact portion is electrically conductive to a power supply via the plunger and the hollow cylindrical conductive member, and the first magnetic body and the second magnetic body are connected to the cylindrical conductive body. The same magnetic poles face each other in the member. Since the contact to the connection terminal of a semiconductor device of the contact portion of the contact probe pin, it will be performed by the repulsive force of the magnetic body and does not require a coiled spring. Further, the magnetic material used can be covered with a heat-resistant and corrosion-resistant coating, and a contact probe pin excellent in corrosion resistance can be provided. In the present invention, in the case of a connection device in which a plurality of contact probe pins are held, even if the contact portion is held so that the tip thereof has some irregularity, the contact portion is repelled by the magnet. Can be brought into close contact with the connection end of the semiconductor device and the electronic component. Therefore, it can be used to raise the temperature in a pan-in or other environmental test.

In the present invention, the first magnetic body and the second magnetic body are arranged in the tubular conductive member with the same magnetic pole faces facing each other. The miniaturization of the device is due to the ease of forming the magnetic material, and the length of the contact probe can be shortened. In addition, the magnetic material used in the present invention can be a magnetic material having a relatively high melting point and excellent corrosion resistance, which enables semipermanent use. In the present invention, the measurement current flows from the contact portion of the contact probe pin to the test device through the cylindrical conductive member. Therefore, by shortening the length, the influence of high frequency can be reduced, and the electric current in the low frequency region to the high frequency region can be reduced. Characteristics can be measured, and measurement time can be shortened.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. However, the present invention is not limited to the following embodiment and description. FIG. 1 is a schematic sectional view showing an outline of a contact probe pin according to one embodiment of the present invention. FIG. 2 is a schematic sectional view schematically showing a contact probe pin according to an embodiment of the present invention, which is different from the embodiment shown in FIG. FIG. 3 is a schematic cross-sectional view schematically showing a contact probe pin according to an embodiment of the present invention, which is different from the embodiments shown in FIGS. 1 to 3, the corresponding portions are denoted by the same reference numerals.

In the embodiment shown in FIG. 1, a contact probe pin 1 is formed in a barrel-shaped tubular conductive member 3 having an opening 2 formed on one side and having a sharp end face from the inside of the opening 2 to the outside. Projecting the contact portion 4 of the plunger 5
Is arranged. In this example, the plunger 5 includes
First magnet 7 whose contact surface is covered with fluororesin film 6
Are provided with the N pole facing inward and the S pole facing outward. In this example, the barrel-shaped tubular conductive member 3 is formed in a single end, and the end 8 on the other side is sealed. In this example, a second magnet 10 fixed via a fluororesin film 9 is disposed inside the sealed end portion 8 with the N pole inward and the S pole outward. Outside the end 8, a connection terminal 11 for connecting to a test device (not shown) for semiconductor device inspection is provided.

Since this embodiment is formed as described above,
The contact probe pin 1 is moved in the direction of the arrow 12 so that the contact portion 4 of the plunger 5 contacts the connection end 14 of the semiconductor device 13, and the contact probe pin 1 is connected to the semiconductor device 13. When the contact portion 4 of the plunger 5 contacts the connection end 14 of the semiconductor device 13, the first magnet 7 in the barrel-shaped tubular conductive member 5 is pushed toward the second magnet 10, Magnet 7 and second magnet 10
Since the same poles face each other, a repulsive force acts between the two magnets, and the contact portion 4 causes the semiconductor device 1 to move due to the repulsive force.
3 is further pressed against the connection end 14 to make a sufficient connection. When, for example, the continuity test of the semiconductor device is completed, the contact probe pin 1 is moved in a direction opposite to the arrow 12 and separated from the semiconductor device 13, but the first magnet 7 is moved to the second magnet. It is returned to its original position by the repulsive force.

In the embodiment shown in FIG. 2, the barrel-shaped tubular conductive member 3 is formed to have a double end,
Openings are formed at both ends. At both ends, the plunger is provided with an end face protruding a jagged contact portion outwardly from each opening, and in this example, the plunger is provided with a contact portion / connection terminal. This embodiment differs from the embodiment shown in FIG.

In the embodiment shown in FIG. 2, the contact probe pin 1 has a plunger 5 disposed so as to protrude outward from the inside of the opening 2 on one side of the barrel-shaped tubular conductive member 3 to the outside thereof. The plunger 17 is disposed so as to protrude the contact portion 16 from the inside of the opening 15 on the other side to the outside. In this example, the plunger 5 is provided with a first magnet 7 whose contact surface is covered with a fluororesin film 6 with the N pole facing inside and the S pole facing outward. The plunger 17 is provided with a second magnet 10 whose contact surface is covered with the fluororesin film 9 with the N pole facing inside and the S pole facing outside. In the present example, the contact part / connection terminal 4 and 16 provided on the plungers 5 and 17 are both formed so as to be able to serve both as the contact part and the connection terminal. The contact portion / connection terminal 16 of the plunger 17 can be connected to the connection end 14 of the semiconductor device 13 as a contact portion, and can be connected to the inspection device as a connection terminal. In this example, for convenience of description, the contact part / connection terminal 4 of the plunger 5 is connected to the connection end 14 of the semiconductor device 13 as a contact part, and the contact part / connection terminal 16 of the plunger 17 is connected to the semiconductor device inspection test apparatus ( (Not shown)
Connected to

Since this embodiment is formed as described above,
The contact probe pin 1 is moved in the direction of arrow 12 to bring the contact portion 4 of the plunger 4 into contact with the connection end 14 of the semiconductor device 13 to connect the contact probe pin 1 to the semiconductor device. When the contact portion 4 of the plunger 5 contacts the connection end 14 of the semiconductor device 13, the first magnet 7 in the barrel-shaped tubular conductive member 5 is pushed toward the second magnet 10, Since the same north pole faces the magnet 7 and the second magnet 10, a repulsive force acts between the two magnets, and the contact portion 4 is further pressed against the connection end 14 of the semiconductor device 13 by the repulsive force. To be enough. When, for example, the continuity test of the semiconductor device is completed, the contact probe pin 1 is moved in the direction opposite to the arrow 12 to be separated from the semiconductor device 13, but the first magnet 7
Is returned to the original position by the repulsive force against the second magnet.

In the embodiment shown in FIG. 3, the barrel-shaped tubular conductive member 3 is formed at the double end similarly to the embodiment shown in FIG. 2, so that openings are formed at both ends. At both ends, plungers are provided outside the respective openings by protruding a contact portion having a flat end face, and in this embodiment, electrical insulation between the plunger and the magnet is achieved. 1 and 2 in that a disc made of a plastic material is provided for this purpose. In the embodiment shown in FIG. 1, the plunger is further provided with a contact portion / connection terminal. Is also different.

In the embodiment shown in FIG. 3, the contact probe pin 1 has a plunger 5 disposed so as to protrude outward from the inside of the opening 2 on one side of the barrel-shaped tubular conductive member 3 to the outside. The plunger 17 is disposed so as to protrude the contact portion 16 from the inside of the opening 15 on the other side to the outside. In this example, in order to ensure electrical insulation, a plastic disk 18 is provided inside the plunger 5, and a surface in contact with the plastic disk 18 is provided inside the plastic disk 18. The first magnet 7 covered with the fluorine resin film 6 has the N pole
The poles are provided facing outward. The plunger 17 is provided with a plastic disk 19 on the inner side, and the surface of the plastic disk 19 that is in contact with the plastic disk 19 is covered with the fluororesin film 6. A second magnet 10 is provided with the north pole inside and the south pole outside. In this example, the contact part / connection terminals 4 and 16 provided on the plungers 5 and 17 are formed so as to be able to be used both as the contact part and the connection terminal, as in the embodiment shown in FIG. Each of the contact part / connection terminal 4 of the plunger 5 and the contact part / connection terminal 16 of the plunger 17 can be connected to the connection end 14 of the semiconductor device 13 as a contact part. Test equipment (not shown)
Can be connected to In this example, for convenience of description, the contact part / connection terminal 4 of the plunger 5 is connected to the connection end 14 of the semiconductor device 13 as a contact part, and the contact part / connection terminal 16 of the plunger 17 is connected to the semiconductor device inspection test apparatus ( (Not shown).

Since this embodiment is formed as described above,
The contact probe pin 1 is moved in the direction of arrow 12 to bring the contact portion 4 of the plunger 4 into contact with the connection end 14 of the semiconductor device 13 to connect the contact probe pin 1 to the semiconductor device. When the contact portion 4 of the plunger 5 contacts the connection end 14 of the semiconductor device 13, the first magnet 7 in the barrel-shaped tubular conductive member 5 is pushed toward the second magnet 10, Since the same north pole faces the magnet 7 and the second magnet 10, a repulsive force acts between the two magnets, and the contact portion 4 is further pressed against the connection end 14 of the semiconductor device 13 by the repulsive force. To be enough. When, for example, the continuity test of the semiconductor device is completed, the contact probe pin 1 is moved in the direction opposite to the arrow 12 to be separated from the semiconductor device 13, but the first magnet 7
Is returned to the original position by the repulsive force against the second magnet.

In the above embodiment, the first magnet and the second magnet are arranged with their N poles facing each other.
The S poles can be arranged facing each other. Further, in the above embodiments, the contact portion of one plunger and the connection terminal of the other plunger are formed in the same shape, but may be different shapes. For example, the end face of the contact portion can be formed in a pointed shape as shown in FIG. 1, and the connection terminal can be formed in a flat or jagged shape as shown in FIG. The end surfaces of the contact portion and the connection terminal are not limited to a pointed shape, a jagged shape, and a flat shape, but may be formed in a shape having a round shape such as a hemisphere. In the above embodiment, the contact portion or the connection terminal (or the contact portion / connection terminal) is made of the same material as the plunger and is formed integrally with the plunger, but the contact portion or the connection terminal (or the contact portion / connection terminal). ) Can be formed separately from the plunger, or can be formed by changing the material. In the above embodiment, the magnetic shield is not provided between the plunger and the magnetic body. However, when the influence of the magnetic flux from the plunger on the magnetic body is cut off, POM [Duracon (acetal resin)] or fluorine resin is used. In addition to the disc made of, for example, a magnetic shield made of a high magnetic permeability material such as pure iron, soft iron, carbon steel, steel, electric iron plate (magnetic steel strip, silicon steel strip) or iron nickel alloy (for example, permalloy). A disk of material can be placed.

[0021]

According to the present invention, there is provided a hollow cylindrical conductive member having an opening at at least one end, and the hollow cylindrical conductive member is disposed in the end having an opening of the hollow cylindrical conductive member. A conductive plunger slidably disposed on a wall surface, a conductive contact protruding from the first surface on the opening side of the plunger to the outside through the opening, A first magnetic body having one magnetic pole fixed to a surface opposite to the first surface, and a second magnetic body disposed in the other end of the hollow cylindrical conductive member. The contact is electrically conductive to a power supply via a plunger and the hollow cylindrical conductive member, and the first magnetic body and the second magnetic body The same magnetic poles are arranged facing each other in the conductive member Therefore, compared to conventional test equipment for semiconductor devices, it has excellent heat resistance and corrosion resistance, can reduce the length of contact probe pins, can be manufactured at low cost, and can be used semipermanently. It is possible to measure the electric characteristics from the low frequency region to the high frequency region, and it is possible to perform a stable measurement in a short time.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view schematically showing a contact probe pin according to an embodiment of the present invention.

FIG. 2 is a schematic sectional view schematically showing a contact probe pin according to an embodiment of the present invention, which is different from the embodiment shown in FIG. 1;

FIG. 3 is a schematic sectional view schematically showing a contact probe pin according to an embodiment of the present invention, which is different from the embodiment shown in FIGS. 1 and 2;

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Contact probe pin 2 Opening of one side 3 Cylindrical conductive member 4, 16 Contact part or contact part / connection terminal 5, 17 Plunger 6, 9 Fluororesin film 7 First magnet 8 The other of cylindrical conductive member 3 Sealed end 10 Second magnet 11 Connection terminal 12 Arrow 13 Semiconductor device 14 Connection end of semiconductor device 13 15 Opening on the other side 18, 19 Plastic disk

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Naohito Ebihara 1-9-115, Minato-ku, Tokyo Nissho Iwai Plastic Co., Ltd. F-term (reference) 2G011 AA04 AA09 AA10 AB00 AC21 AE11 AF01 2G032 AA00 AB02 AB13 AF02 AJ04

Claims (5)

[Claims] 1. A hollow cylindrical conductive member having an opening at at least one end, and disposed in an end of the hollow cylindrical conductive member having an opening. A conductive plunger slidably disposed, and a conductive contact part protruding outside through the opening from the first surface of the plunger on the opening side;
A first magnetic body having one magnetic pole fixed with respect to a surface opposite to the first surface of the plunger; and a second magnetic material disposed inside the other end of the hollow cylindrical conductive member. Body, the contact portion can be electrically conductive to a power supply via the plunger and the hollow cylindrical conductive member, and the first magnetic body and the second magnetic body ,
An electrical connection device, wherein the same magnetic pole faces are arranged to face each other within the cylindrical conductive member. 2. A hollow tubular conductive member having an opening at one end and a closed end at the other end, and is disposed in the open end of the hollow tubular conductive member. A conductive plunger slidably disposed on the inner wall surface of the cylindrical member, and a conductive contact protruding to the outside from the first surface of the plunger on the opening side through the opening. Part, a first magnetic body having one magnetic pole fixed with respect to a surface opposite to the first surface of the plunger, and the other closed end of the hollow cylindrical conductive member. An electrically connectable connection terminal provided on the other side, and a second magnetic body disposed in the other closed cylindrical conductive member, wherein the contact portion includes a plunger. And via the hollow cylindrical conductive member,
It is electrically conductive to the connection terminal, the first magnetic body and the second magnetic body, within the cylindrical conductive member,
An electrical connection device, wherein the same magnetic pole faces face each other. 3. A hollow cylindrical conductive member having openings at both ends, and is disposed within a first end of the hollow cylindrical conductive member, and slides on an inner wall surface of the cylindrical member. A first conductively disposed plunger having conductivity and a conductive protruding from the first face of the first plunger on the side of the first end opening through the first end opening to the outside. A first magnetic body having one magnetic pole fixed with respect to a surface opposite to the first surface of the first plunger; and a second magnetic member of the hollow cylindrical conductive member. A second plunger having conductivity, which is disposed in the end of the cylindrical member and is slidably disposed on the inner wall surface of the tubular member,
A conductive connection terminal projecting outside from the first surface of the second plunger on the second end opening side through the second end opening; and a first connection terminal of the second plunger. And a second magnetic body having one magnetic pole fixed to a surface on the opposite side to the surface, wherein the contact portion includes a first plunger, the hollow cylindrical conductive member, and a second magnetic member. Through a plunger, can be electrically conducted to the connection terminal;
The electrical connection device, wherein the first magnetic body and the second magnetic body are arranged in the tubular conductive member so that the same magnetic pole faces face each other. 4. The apparatus according to claim 1, wherein the first and second plungers are connected to the first and second magnetic bodies via an insulating member, respectively. Electrical connection device. 5. A hollow cylindrical conductive member having openings at both ends, and is disposed within a first end of the hollow cylindrical conductive member, and slides on an inner wall surface of the cylindrical member. A first conductively disposed plunger having conductivity and a conductive protruding from the first face of the first plunger on the side of the first end opening through the first end opening to the outside. A first contact portion having a property, an electrically insulating first covering member covering a surface opposite to the first surface of the first plunger, and a first covering member in contact with the first covering member. An electrically insulating first plate member, a first magnetic body having one magnetic pole fixed to the first plate member, and a second end portion of the hollow tubular conductive member. A second plunger having conductivity, which is disposed in a slidable manner with respect to the inner wall surface of the tubular member, A second contact portion having conductivity that protrudes outside from the first surface of the second plunger through the second end opening through the second end opening; and the second plunger. An electrically insulating second covering member that covers the surface opposite to the first surface, and an electrically insulating second plate member that is arranged in contact with the second covering member. A second magnetic body having one magnetic pole fixed to the second plate member, wherein the contact portion includes a first plunger, the hollow cylindrical conductive member, and a second plunger. The first magnetic body and the second magnetic body are arranged so that the same magnetic pole faces face each other within the tubular conductive member. An electrical connection device comprising: