JP2002040223A5 - - Google Patents
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- Publication number
- JP2002040223A5 JP2002040223A5 JP2000221892A JP2000221892A JP2002040223A5 JP 2002040223 A5 JP2002040223 A5 JP 2002040223A5 JP 2000221892 A JP2000221892 A JP 2000221892A JP 2000221892 A JP2000221892 A JP 2000221892A JP 2002040223 A5 JP2002040223 A5 JP 2002040223A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000221892A JP2002040223A (ja) | 2000-07-24 | 2000-07-24 | 被加熱体保持部材およびそれを用いた加熱炉 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000221892A JP2002040223A (ja) | 2000-07-24 | 2000-07-24 | 被加熱体保持部材およびそれを用いた加熱炉 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002040223A JP2002040223A (ja) | 2002-02-06 |
| JP2002040223A5 true JP2002040223A5 (enExample) | 2007-09-06 |
Family
ID=18716215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000221892A Pending JP2002040223A (ja) | 2000-07-24 | 2000-07-24 | 被加熱体保持部材およびそれを用いた加熱炉 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002040223A (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100943375B1 (ko) | 2002-05-29 | 2010-02-18 | 도레이 카부시키가이샤 | 감광성 수지 조성물 및 내열성 수지막의 제조 방법 |
| JP2007226128A (ja) * | 2006-02-27 | 2007-09-06 | Toppan Printing Co Ltd | カラーフィルタ製造用ホットプレート及びカラーフィルタ製造方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3014770B2 (ja) * | 1990-12-20 | 2000-02-28 | 富士通株式会社 | 半導体製造装置 |
| JPH08279548A (ja) * | 1993-12-28 | 1996-10-22 | Sharp Corp | ホットプレート型のプロキシミティベーク炉に使用するピン及びそれを使用した炉 |
| JPH11337266A (ja) * | 1998-05-28 | 1999-12-10 | Toray Ind Inc | カラーフィルタ製造用オーブンおよびこれを用いたカラーフィルタの製造方法 |
| JP2000119737A (ja) * | 1998-10-16 | 2000-04-25 | Nsk Warner Kk | ワークの炉内配置方法 |
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2000
- 2000-07-24 JP JP2000221892A patent/JP2002040223A/ja active Pending