JP2002039180A - Static pressure bearing, method of manufacturing it, and non-contact guide device using it - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a static pressure bearing capable of increasing the rigidity and accuracy of a stage device which moves with high speed and accuracy inside a vacuum chamber. SOLUTION: The static pressure bearing 1 has a bearing surface 1a with a compressed air outlet, and an exhaust groove 2 for collecting compressed air spit out of the outlet is formed around the bearing surface. Further, an evacuation groove 3 is formed around the exhaust groove. In particular, the size of clearance between the bearing surface and a supporting surface 4a is greater than the size of clearance among a first surface 1c between the exhaust groove and the evacuation groove, a second surface 1d located outside of the evacuation groove, and the supporting surface.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrostatic bearing for a stage device, and more particularly, to a precision positioning stage device which is driven in an X-axis direction and a Y-axis direction in a vacuum chamber and enables high-speed, high-precision positioning. The present invention relates to a suitable hydrostatic bearing, a manufacturing method thereof, and a non-contact guide device using the hydrostatic bearing.

[0002]

2. Description of the Related Art High-speed, high-precision
Higher precision is required. In order to satisfy this demand, there has been proposed a stage device that performs non-contact guidance by a static pressure bearing using compressed air and performs non-contact driving by a linear actuator based on the principle of compressed air pressure or a linear motor.

The combination of a non-contact guide mechanism with a static pressure bearing and a compressed air drive mechanism has already been proposed by the present applicant as a fluid pressure actuator (Japanese Patent Application No. 11-225007), an X-ray actuator.
As a Y table (Japanese Patent Application No. 11-224998), there has been proposed a stage device which can be used in a vacuum non-magnetic environment and can perform high-speed, high-precision positioning.

Referring to FIG. 5, Japanese Patent Application No. 11-22499 / 1999
An example of the actuator proposed in No. 8 will be described. This example is used to drive a driven body (movable part) in one axis direction, uses a shaft body having a rectangular cross section as the X guide shaft 11 in the X actuator 10, and inserts the X slider 12 through the X guide shaft 11. It has a cylindrical body with a possible internal space with a rectangular cross section. In particular, the gap between the inner wall of the X slider 12 and the outer peripheral surface of the X guide shaft 11 is small. Here, the X guide shaft 11 is made thinner so that a pressure chamber can be formed in a region near the center of the X guide shaft 11. A partition 13 slidable along the X guide shaft 11 is fixed to the inner wall of the X slider 12 to partition the pressure chamber into two cylinder chambers 16a and 16b.

In the following, the cylinder chamber 1 divided into two sections
The structure on the cylinder chamber 16a side of 6a and 16b will be described. The cylinder chamber 16b side has exactly the same structure.

[0006] In order to allow compressed air to enter and exit the cylinder chamber 16a, an air passage 11-1 is provided at the center of the X guide shaft 11 from the end to the center. The air passage 11-1 is branched into a plurality of portions near the cylinder chamber 16a and communicates with the cylinder chamber 16a so that the pressure distribution in the cylinder chamber 16a is uniform.
An air pipe is connected to the air passage 11-1 at the end of the X guide shaft 11, and a servo valve is further connected. The maximum stroke of the X slider 12 is the cylinder chamber 16a, 1
6b is determined by the axial dimension.

Referring to FIG. 6, a static pressure bearing 14 is also provided around the X guide shaft 11 near the cylinder chamber 16a, and exhaust portions 19-1 and 19-2 are provided on both sides of the static pressure bearing 14.
Is provided. The static pressure bearings 14 are provided on four surfaces of the X guide shaft 11 because the cross-sectional shape of the X guide shaft 11 is square. The exhaust portions 19-1 and 19-2 are for exhausting air leaking from the cylinder chamber 16 a and air from the static pressure bearing 14.
A groove is formed around the periphery, and exhaust gas is collected through this groove. The X guide shaft 11 is further provided with a vacuum exhaust unit 1 at a position outside the hydrostatic bearing 14 in the axial direction.
9-3 are provided. The provision of the evacuation unit 19-3 is in consideration of use in a vacuum chamber.
This vacuum exhaust unit 19-3 also has X
A groove is formed around the guide shaft 11, and evacuation is performed through this groove.

In order to supply compressed air to the static pressure bearing 14, a plurality of air passages 11-2 are provided in the X guide shaft 11 from its end to the static pressure bearing 14. X guide shaft 1
1 also includes exhaust portions 19-1 and 19-2 from the ends thereof.
Are provided with a plurality of exhaust passages 11-3 reaching the grooves. The X guide shaft 11 further has a vacuum exhaust unit 19-
An exhaust passage 11-4 reaching the third groove is provided. The exhaust passage 11-4 is provided with holes in the groove of the vacuum exhaust unit 19-3 for every four surfaces of the X guide shaft 11, and communicates with each of the holes. In FIG. 6, for convenience, a plurality of types of passages provided in the X guide shaft 11 are all shown by solid lines, but these passages are provided at different positions in the X guide shaft 11 in the circumferential direction. Needless to say.

An air pipe is connected to a plurality of air passages 11-2 at the end of the X guide shaft 11, and a compressed air supply source is further connected. Similarly, an air pipe is connected to the plurality of exhaust passages 11-3 at the end of the X guide shaft 11,
Further, an exhaust pump is provided. An air pipe is connected to the exhaust passage 11-4 at the end of the X guide shaft 11,
Further, a pump for evacuation is provided.

[0010] Both ends of the X guide shaft 11 pass through the side wall of the vacuum chamber 100 so as to be supported by the side wall as shown in FIG. Therefore, the connection of the air pipes at both ends of the X guide shaft 11 is performed outside the vacuum chamber 100.

While the X actuator 10 for driving the driven body in the X-axis direction has been described above, the Y actuator for driving the driven body in the Y-axis direction has exactly the same structure.

Next, an example of an XY stage device using the above X actuator 10 and Y actuator will be described with reference to FIG. In this example, the X actuator 10 has two combinations of the X guide shaft 11 and the X slider 12 in such a relationship that they are parallel to each other.
The Y actuator 20 also has two combinations of the Y guide shaft 21 and the Y slider 22 in such a relationship that they are parallel to each other. In particular, both ends of two sets of Y guide shafts 21 are connected to two sets of X sliders 12. As a result, two sets of Y
The guide shaft 21 is movable in the X-axis direction together with the two sets of the X sliders 12. Further, a table 30 is provided between the two sets of Y sliders 22. In this way,
By combining the movement of the X slider 12 in the X-axis direction and the movement of the Y slider 22 in the Y-axis direction,
Can be moved in both the X-axis direction and the Y-axis direction. In the case of such an XY stage device, both ends of the X guide shaft 11 are fixed to the side wall of the vacuum chamber as described with reference to FIG.

[0013]

As apparent from the above configuration, in FIG. 5, the X slider 12 is connected to the X guide shaft 1.
1 and the X guide shaft 11 can be fixed only at its end. For this reason, the X guide shaft 11 bends due to the weight of the slider itself and the weight of a work such as a table and a semiconductor wafer mounted thereon. Since this deflection changes due to the movement of the X slider 12, it causes a position error of the table (semiconductor wafer) and causes a reduction in positioning accuracy.

SUMMARY OF THE INVENTION An object of the present invention is to provide a hydrostatic bearing in which a guide portion and a slider incorporated in a vacuum chamber can be formed into a guide support mechanism without forming the slider into a cylindrical body. It is in.

Another object of the present invention is to provide a hydrostatic bearing which can realize high rigidity and high precision of a stage device which moves at high speed and with high precision in a vacuum chamber.

Still another object of the present invention is to provide a method for manufacturing the above-described hydrostatic bearing.

Another object of the present invention is to provide a non-contact guide device using the above-described hydrostatic bearing and suitable for non-contact guide in a vacuum chamber.

[0018]

According to the present invention, there is provided a stage apparatus configured to support a movable portion driven in at least one axial direction in a vacuum chamber by a static pressure bearing in a non-contact manner. The pressure bearing has a bearing surface region having an outlet for compressed fluid, and a fluid exhaust groove for collecting the compressed fluid discharged from the outlet is formed around the bearing surface region. A vacuum exhaust groove is formed in the periphery, and the fluid exhaust groove and the vacuum exhaust groove are connected to an exhaust pipe through a fluid exhaust passage and a vacuum exhaust passage provided in the hydrostatic bearing, respectively. A gap dimension between the bearing surface and the support surface is between a first surface between the fluid exhaust groove and the vacuum exhaust groove and a second surface outside the vacuum exhaust groove and the support surface. Is larger than the gap size of Hydrostatic bearing characterized the door is provided.

According to the present invention, there is also provided a first member having a bearing surface having an outlet for compressed fluid, a recess for mounting the first member, and the outlet around the recess. A fluid exhaust groove for collecting the compressed fluid discharged from the fluid exhaust groove, and assembling a second member having a vacuum exhaust groove formed around the fluid exhaust groove, the second member comprising: A passage for connecting the fluid exhaust groove and the pipe for fluid exhaust, and a passage for connecting the vacuum exhaust groove and the pipe for vacuum exhaust, wherein the depth of the recess and the first member When the first member is assembled to the concave portion of the second member, a gap between the bearing surface and the support surface has a thickness between the fluid exhaust groove and the vacuum exhaust groove. A first surface and a second surface outside the evacuation groove and the support surface; Method for producing a hydrostatic bearing, characterized in that it is made larger than the gap dimension is provided.

According to the present invention, there is further provided a bearing surface having a compressed fluid outlet, and a fluid exhaust groove for collecting the compressed fluid discharged from the outlet is formed around the bearing surface. A fluid exhaust groove is formed around a member having a vacuum exhaust groove formed around the fluid exhaust groove. The member includes a passage for connecting the fluid exhaust groove and a fluid exhaust pipe, A passage for connecting a pipe, and a coating between a surface between the fluid exhaust groove and the vacuum exhaust groove and a surface outside the vacuum exhaust groove. Is larger than the gap between the first surface between the fluid exhaust groove and the vacuum exhaust groove and the second surface outside the vacuum exhaust groove and the support surface. Provided is a method for manufacturing a hydrostatic bearing characterized in that: It is.

In any of the above-mentioned inventions, when the clearance between the bearing surface and the support surface is h, the clearance between the first surface and the support surface is the same as the second clearance. And the gap between the support surface and the support surface is substantially h
/ 2 or less.

According to the present invention, there is further provided a stage configured to non-contactly support a movable portion driven along at least one guide shaft extending in at least one axial direction in a vacuum chamber by a static pressure bearing. In the apparatus, the guide shaft has three support surfaces that intersect at an angle with adjacent support surfaces, and the movable part has three surfaces facing the three support surfaces, and each of the movable portions has A non-contact guide device using a hydrostatic bearing, characterized in that the hydrostatic bearing is mounted.

In this non-contact guide device, the movable portion has a length in the length direction of the guide shaft, and three surfaces opposed to the three support surfaces respectively at both ends in the length direction. And the hydrostatic bearing can be mounted on each surface.

In this non-contact guide device, the non-contact guide device extends in the uniaxial direction in the vacuum chamber in parallel with each other.
The movable portion has a certain length in the length direction of the guide shaft, has a width capable of being bridged over the two guide shafts, and has four corner portions thereof. Each having three surfaces opposed to the three support surfaces, and the hydrostatic bearing can be mounted on each of the three surfaces.

[0025]

DESCRIPTION OF THE PREFERRED EMBODIMENTS In the present embodiment, the following is done in order to solve the above-mentioned problem. In the vacuum chamber, the flow rate of compressed air leakage from the hydrostatic bearing is reduced and the hydrostatic bearing is downsized so that the hydrostatic bearing can be used as a single flat pad without using a movable part, that is, a slider as a cylindrical body. ing. The flow of air in the gap between the guide shaft and the slider between the exhaust unit (fluid exhaust unit) and the vacuum exhaust unit described in FIG.
If the gap is set to several (μm), the flow becomes an intermediate flow region. However, since the flow is relatively viscous, it is treated as a viscous flow hereinafter.

The flow rate of the viscous flow between with a gap h in mutually parallel relationship two thin plates surfaces as shown in FIG. 8 is represented by ^{_{Q 1 = A (P 0 2}} -P 1 2) . However, in the ^{A = B · h 3 / 24μ} · L 1, μ
The viscosity coefficient, L ₁ is the gap length, B is the channel width.

Further, the air flow in the gap between the guide shaft and the slider between the vacuum exhaust unit and the vacuum chamber, when the pressure of the vacuum exhaust unit is several hundred (Pa) and the gap is several (μm), the molecular flow Become.

In this case, the flow rate of the molecular flow between two thin plate surfaces parallel to each other with a gap h as shown in FIG. 9 is represented by Q ₂ = C (P ₁ −P ₂ ). Here, C is the conductance between two plate surfaces (in the case of molecular flow), and C = 314 K · B · h ² / L ₂ ,
K = (3/8) ln (L 2 / h) (ln is logarithm) (L ₂
Is the gap length).

As described above, when the clearance h is reduced, the flow rate of leakage into the pressure chamber is reduced, and the clearance length L ₂ can be reduced, so that the size can be reduced.

However, the gap (floating amount) of the hydrostatic bearing is set near the maximum value of the rigidity of the hydrostatic bearing. In a structure in which the bearing surface and the other surface of the guide shaft are coplanar, If the gap is reduced to reduce the leakage flow rate, the rigidity of the hydrostatic bearing will decrease.

Therefore, in this embodiment, as shown in FIG.
The static pressure bearing 1 is formed in a quadrangular pad shape, and the exhaust groove 2 is provided along the periphery of the square bearing surface 1 a of the static pressure bearing 1, and the vacuum exhaust groove 3 is provided along the periphery of the exhaust groove 2. I have. The exhaust groove 2 is provided at the outlet 1 provided on the bearing surface 1a.
The vacuum exhaust groove 3 is for collecting the compressed air blown out from b, and the vacuum exhaust groove 3 is for vacuum exhaust.

In particular, in the present embodiment, the first surface 1c between the exhaust groove 2 and the vacuum exhaust groove 3 and the outer surface of the vacuum exhaust groove 3, that is, the vacuum exhaust groove 3 and the outer periphery of the hydrostatic bearing 1 Between the second surface 1d and the bearing surface 1a.
Then, a step of about 0.5 h is provided. In other words, when the clearance dimension between the bearing surface 1a and the support surface 4a at the time of floating is h, the clearance size between the first surface 1c and the support surface 4a, and the second surface 1d and the support surface 4a are set to be substantially h / 2 or less.

The bearing surface 1a is provided with a plurality of compressed air outlets 1b. Although not shown in detail, each outlet 1b is connected to a compressed air supply source through a passage formed in the main body of the hydrostatic bearing 1. Further, the exhaust groove 2 and the vacuum exhaust groove 3 are connected to an exhaust pipe through one or more fluid exhaust passages and one or more vacuum exhaust passages provided in the hydrostatic bearing 1 main body, respectively. Fluid exhaust pump,
Connected to vacuum pump. The number of the fluid exhaust passages and the vacuum exhaust passages is preferably about four in total, one for each side of the square.

By the way, the hydrostatic bearing 1 as shown in FIG. 1 can be manufactured as an integral body by grinding and polishing, but such manufacturing cannot be said to be easy. That is, it is difficult to post-finish the bearing surface 1a so as to have the above-described steps.

Therefore, as shown in FIG. 2, the hydrostatic bearing 1 is composed of a bearing part 1-1 (first member) having a bearing surface 1a and an outer peripheral part 1-2 (second member) for mounting the same. ) Are made as separate parts, and a first method of assembling them later is adopted. Specifically, the hydrostatic bearing 1 includes a bearing portion 1-1 having a bearing surface 1a having a compressed air outlet, and a bearing portion 1-
1 has a concave portion 1-2a, an exhaust groove 2 is formed around the concave portion 1-2a, and an outer peripheral portion 1-2 having a vacuum exhaust groove 3 formed around the exhaust groove 2. . The depth of the recess 1-2a and the thickness of the bearing 1-1 are determined by the distance between the bearing surface 1a and the support surface 4a when the bearing 1-1 is assembled to the recess 1-2a of the outer peripheral portion 1-2. Is larger than the gap between the first surface 1c and the second surface 1d and the support surface 4a. Bearing part 1
-1 is fixed to the outer periphery 1-2 by a plurality of bolts 5. Needless to say, the bearing portion 1-1 is provided with a plurality of compressed air outlets and a passage connected thereto, and the outer peripheral portion 1-2 is also provided with a passage connected to the above-described passage. Outer part 1
Further, -2 is provided with a passage for connecting the exhaust groove 2 and the exhaust pipe, and a passage for connecting the vacuum exhaust groove 3 and the exhaust pipe.

FIG. 3 shows a second embodiment for manufacturing the hydrostatic bearing 1.
The method of is shown. In this second method, the bearing surface 1a and the first
After the surfaces corresponding to the first and second surfaces are finished to the same surface, the bearing surface 1a is masked, and a number (μm) of coating is applied to the regions corresponding to the first and second surfaces. Finish processing is performed so that the first surface 1c and the second surface 1d are formed.

For example, as shown in FIG.
Is a piece of 60 (mm) square, rigidity 100 (N / μm)
, The width of the exhaust groove 2 and the vacuum exhaust groove 3
(Mm), the width of the evacuation groove 2, the width of the evacuation groove 3 is 5 (mm), the width of the first surface 1c is 5 (mm), and the width of the second surface 1d is 10 (m).
m), the overall planar shape of the hydrostatic bearing 1 is a square of 110 (mm). Bearing floating amount is 5 (μ
m), assuming that the step (dent) of the bearing surface 1a is 3 (μm), the gap between the support surface 4a and the first surface 1c and the second surface 1d is 2 (μm). When such a hydrostatic bearing 1 is provided in a vacuum chamber, the exhaust flow rate to the vacuum chamber is 2.1E ^-5 (Pa · m ³ / s).

FIG. 4 shows an example of a non-contact guide device in which the movable portion 6 is driven in one axial direction in the vacuum chamber 7 using the above-described hydrostatic bearing. Two guide shafts 8 extending in a uniaxial direction are provided in the vacuum chamber 7 in parallel with each other. The guide shaft 8 has an inverted L-shaped cross section, and has three support surfaces 8a at which adjacent support surfaces intersect at right angles. The two guide shafts 8 are arranged so that the intermediate support surfaces 8a face each other. The movable portion 6 has a length in the length direction of the guide shaft 8, has a width capable of being bridged over the two guide shafts 8, and has at least 4
Three corners each facing three support surfaces 8a
Having two surfaces, each having a hydrostatic bearing 1 (total of 12
) Are attached. Here, the lower surface of the movable portion 8 main body is used as a mounting surface of the upper hydrostatic bearing 1, and a plate member 8-1 having the same length is fixed to the lower surface of the movable portion 8 main body, and the intermediate hydrostatic bearing 1 is mounted. A plate member 8-2 of the same length is fixed to the lower end of the plate member 8-1 to form a mounting surface for the lower hydrostatic bearing 1.

Of course, flexible piping is used for each of the piping for supplying compressed air to each hydrostatic bearing 1, the piping for exhausting compressed air, and the piping for evacuating, so as to follow the movement of each hydrostatic bearing. It is configured to be able to. The form of the drive source for moving the movable section 6 may be any, but a pneumatic drive mechanism or a linear actuator is preferable.

The guide shaft 8 does not need to have an inverted L-shape, but may have a square cross section. In this case, the surface corresponding to the upper side of the rectangle and the surface adjacent thereto
One side is used as a support surface. In such a case, only one guide shaft 8 may be used. When the movable part 6 is small, it is possible to perform non-contact guidance on the movable part 6 using only three hydrostatic bearings.

The above configuration is uniaxial (hereinafter referred to as X axis).
If the stage device is a non-contact guide only in the direction and is also movable in an axis perpendicular to the X-axis direction (hereinafter, referred to as a Y-axis), the following configuration may be adopted. For example,
A non-contact guide device having the same configuration as that of FIG. 4 may be mounted on the upper surface of the movable portion 6 such that the two guide shafts extend in the Y-axis direction. Alternatively, when the movable portion 6 of FIG. 4 is used as a table for mounting a workpiece, a non-contact guide device having the same configuration as that of FIG. 4 is used so that two guide shafts extend in the Y-axis direction. Further, it may be assembled on the lower side of the non-contact guide device of FIG. That is, the portion shown as the vacuum chamber 7 in FIG. 4 is the movable portion of the lower non-contact guide device.

As described above, one hydrostatic bearing 1 is provided for each shaft.
Assuming a configuration using two and a total of 24 X-axis and Y-axis, a total exhaust flow rate to the vacuum chamber is 5.0E ^-4 (Pa ·
m ³ / s) is evacuated by a turbo molecular pump having an evacuation speed of 1.5 (m ³ / s), the pressure in the vacuum chamber becomes 3.4E ^-4.
(Pa) is possible.

In the above description, the case where compressed air is used for the hydrostatic bearing has been described. However, another fluid such as nitrogen gas may be used.

[0044]

The hydrostatic bearing according to the present invention can reduce the leakage flow rate of the compressed fluid from the gap between the guide shaft and the support surface while maintaining a floating amount that provides optimum performance in a vacuum chamber. The hydrostatic bearing, in which the cylindrical slider is combined with the guide shaft, can be freely arranged and used alone. For this reason, the guide shaft can be fixed in a rail shape over the entire length instead of being supported at both ends, so that the movable portion does not bend due to its own weight and the weight of the load, and a non-contact guide device capable of highly accurate positioning can be realized.

[Brief description of the drawings]

FIG. 1 is a view showing an embodiment of a hydrostatic bearing according to the present invention, wherein FIG. 1 (a) is a longitudinal sectional view and FIG. 1 (b) is a bottom view.

FIG. 2 is a longitudinal sectional view for explaining a first example of a method of manufacturing a hydrostatic bearing according to the present invention.

FIG. 3 is a longitudinal sectional view for explaining a second example of the method for manufacturing a hydrostatic bearing according to the present invention.

FIG. 4 is a view showing an example of a non-contact guide device using a hydrostatic bearing according to the present invention, wherein FIG. 4 (a) is a front view and FIG.
FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 5 shows an actuator proposed by the present applicant.

FIG. 6 is an enlarged view of a part of FIG. 5;

7 is a diagram illustrating an example of a case where an XY stage device is configured in a vacuum chamber using the actuator of FIG.

FIG. 8 is a diagram for explaining the principle of the hydrostatic bearing according to the present invention.

FIG. 9 is a diagram for explaining the principle of the hydrostatic bearing according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Static pressure bearing 1a Blow-out port 1c 1st surface 1d 2nd surface 2 Exhaust groove 3 Vacuum exhaust groove 4a Support surface 5 Bolt 6 Movable part 7 Vacuum chamber 8 Guide shaft 8-1, 8-2 Plate member

Continued on front page F term (reference) 2F078 CA08 CB02 CB16 CC11 3J102 AA02 BA14 CA09 CA11 CA15 CA16 CA36 EA02 EA08 EA13 EA23 FA12 GA19

Claims (8)

[Claims] 1. A stage device configured to support a movable portion driven in at least one axial direction in a vacuum chamber by a static pressure bearing in a non-contact manner, wherein the static pressure bearing has an outlet for compressed fluid. A fluid exhaust groove for collecting the compressed fluid discharged from the outlet is formed around the bearing surface area, and a vacuum exhaust groove is formed around the fluid exhaust groove; The fluid exhaust groove and the vacuum exhaust groove are respectively connected to an exhaust pipe through a fluid exhaust passage and a vacuum exhaust passage provided in the hydrostatic bearing, and a gap between the bearing surface and the support surface is provided. The dimension is set to be larger than the gap between the first surface between the fluid exhaust groove and the evacuation groove and the second surface outside the evacuation groove and the support surface. A hydrostatic bearing. 2. The hydrostatic bearing according to claim 1, wherein a gap dimension between said bearing surface and said support surface is h.
A static pressure, wherein a gap size between the first surface and the support surface and a gap size between the second surface and the support surface are each substantially h / 2 or less. bearing. 3. A first member having a bearing surface having an outlet for compressed fluid, a concave portion for mounting the first member,
A step of assembling a second member having a fluid exhaust groove formed around the recess for collecting the compressed fluid discharged from the outlet, and further having a vacuum exhaust groove formed around the fluid exhaust groove; Wherein the second member has a passage for connecting the fluid exhaust groove and the fluid exhaust pipe, and a passage for connecting the vacuum exhaust groove and the vacuum exhaust pipe, The depth of the first member and the thickness of the first member are such that when the first member is assembled to the concave portion of the second member, the gap between the bearing surface and the support surface is smaller than the fluid exhaust groove. A gap between a first surface between the first and second vacuum pumping grooves and a second surface outside the vacuum pumping groove and the support surface. Manufacturing method of pressure bearing. 4. A bearing surface having an outlet for compressed fluid, and a fluid exhaust groove for collecting the compressed fluid discharged from the outlet is formed around the bearing surface. A member around which a vacuum exhaust groove is formed, the member connects a passage for connecting the fluid exhaust groove and a pipe for fluid exhaust, and a member for connecting the vacuum exhaust groove and a pipe for vacuum exhaust. A gap between the bearing surface and the support surface by applying a coating to a surface between the fluid exhaust groove and the vacuum exhaust groove and a surface outside the vacuum exhaust groove, respectively. The dimension is larger than the gap between the first surface between the fluid exhaust groove and the vacuum exhaust groove and the second surface outside the vacuum exhaust groove and the support surface. A method for producing a hydrostatic bearing. 5. The method for manufacturing a hydrostatic bearing according to claim 3, wherein the gap between the bearing surface and the support surface is h, wherein the gap between the first surface and the support surface is h. A method of manufacturing a hydrostatic bearing, wherein a gap size between the second surface and the support surface is substantially h / 2 or less. 6. A stage device configured to support a movable portion driven along at least one guide shaft extending in at least one axial direction in a vacuum chamber by a static pressure bearing in a non-contact manner. The axes intersect at an angle with adjacent support surfaces 3
The movable part has three surfaces facing the three support surfaces, and the hydrostatic bearing according to claim 1 is mounted on each of the surfaces. Non-contact guide device using pressure bearing. 7. The non-contact guide device according to claim 6, wherein the movable portion has a length in a length direction of the guide shaft, and is provided on each of the three support surfaces at both ends in the length direction. A non-contact guide device using a hydrostatic bearing, wherein the non-contact guide device has three opposing surfaces, and the hydrostatic bearing is mounted on each surface. 8. The non-contact guide device according to claim 7, wherein two guide shafts extending in the uniaxial direction are provided in the vacuum chamber in parallel with each other, and the movable portion is arranged in a longitudinal direction of the guide shafts. And the length is
The guide shaft has a width that can be bridged over the guide shaft, and has four surfaces opposed to the three support surfaces at its four corners, and the hydrostatic bearing is mounted on each surface. A non-contact guide device using a hydrostatic bearing.