JP2001219326A - Vacuum-corresponding sliding device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nonmagnetic, low vibration, low heating, and low dusting vacuum-corresponding sliding device capable of increasing the speed, acceleration, and service life of a table mechanism disposed in a vacuum chamber, realizing a very high positioning accuracy. SOLUTION: A table 2 is installed on a first guide shaft 3 inserted into a long through-hole 12 formed in a wall opposed to the vacuum chamber 11. A first bearing part 4 is loosely fitted to the first guide shaft 3 projected to the outside of the vacuum chamber 11 to form a hydrostatic fluid bearing and a second guide shaft 6 is loosely fitted to a second bearing part 5 orthogonally connected to the first guide shaft 3 to form a hydrostatic fluid bearing. A third bearing part 8 formed so as to surround the through-hole 12 and having annular suction grooves 24 and 25 in an inner peripheral part of the bearing surface is provided on the outer wall surface of the vacuum chamber 11, and forms the hydrostatic fluid bearing together with a pressure receiving part 9 provided at the end part opposed to the third bearing part 8 of the first bearing part 4 to compose the vacuum-corresponding sliding device.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum-compatible slide device capable of moving a table installed in a vacuum chamber in X and Y directions, for example, an exposure apparatus for semiconductor lithography and an electron beam. It is suitable for a scanning type drawing apparatus, an EUV exposure apparatus, a scanning electron microscope or the like using the same.

[0002]

2. Description of the Related Art Conventionally, electron beam lithography systems for directly writing an electron beam on a semiconductor wafer have been developed in response to the increase in the density of semiconductor devices (for example, an "electron beam lithography system", SEAJ Journal, 24-). 32, December 1995).

FIG. 7 is a longitudinal sectional view showing an example of a conventional vacuum-compatible slide device. A Y-table 51 and an X-table 52 constituting a table mechanism installed in a vacuum chamber 61 include rolling bearings and sliding bearings. Guide member 5
The guides 3 and 54 guide in the X and Y directions, respectively. A ball screw 56 is attached to the X table 52 and is connected to a motor 58 installed outside the vacuum chamber 61 so that a magnetic field does not adversely affect the path of an electron beam (not shown). The X table 52 is moved in the X direction by the drive of the motor 58, and the Y table 51 is provided with a ball screw 55 arranged perpendicular to the ball screw 56, and is installed outside the vacuum chamber 61 like the X table 52. The Y table 51 is moved in the Y direction by driving the motor (not shown), and a sample such as a semiconductor wafer placed on the Y table 51 is moved to the X direction. -It was possible to move in the -Y direction.

The ball screw 56 is connected to the vacuum chamber 6.
In order to maintain the degree of vacuum in the vacuum chamber 61, a rotating magnetic seal 60 using a magnetic fluid is used in a portion penetrating through the vacuum chamber 61. A seal was used.

FIG. 8 is a longitudinal sectional view showing another example of a conventional vacuum-compatible slide device, and has the same structure as that of FIG. 5 except that a drive mechanism for driving a table mechanism in a vacuum chamber 61 is different. A linear rod 63 is attached to the X table 52, and is connected to a slide means 71 installed outside the vacuum chamber 61. The slide means 71 is slid by a motor 65 so that the X table 52 is moved. In the X direction and Y
A linear motion rod 62 arranged perpendicular to the linear motion rod 63 is attached to the table 51, and a vacuum chamber 61
The slide means (not shown) installed outside is connected to a motor 65, and the slide means is slid by the motor to move the Y table 51 in the Y direction. In order to maintain the degree of vacuum in the vacuum chamber 61, a surrounding partition 70 is used in a portion where the linear motion rod 63 penetrates the vacuum chamber 61, and the linear motion rod 62 penetrates the vacuum chamber 61. Surrounding partitions were also used for the portions to be formed.

[0006]

However, in the conventional vacuum-compatible slide device shown in FIGS. 7 and 8, guide members 53 and 5 for guiding the X table 51 and the Y table 52 are provided.
4 uses a rolling bearing or a slide bearing, so that the sliding resistance is large and it is difficult to achieve high precision. In addition, vibration and dust generated by the movement of each of the tables 51 and 52 cause There is a problem that the processing accuracy of the sample mounted on the sample 51 is adversely affected.

In addition, the table mechanism has a remarkable short life due to an increase in the amount of wear due to the increase in speed and acceleration, and the rolling bearing and the sliding bearing require lubrication, thereby contaminating the environment in the vacuum chamber 61. I was afraid.

In the vacuum-compatible slide device shown in FIG. 7, it is necessary to pay attention to the generation of a magnetic field in the rotary magnetic seal 60. In the vacuum-compatible slide device shown in FIG. The movement accuracy of each of the tables 51 and 52 deteriorates due to the contraction resistance caused by the
The contracted partition 70 interferes with the linear motion rod 63 to generate abrasion powder, and the partition 70 is pulled during vacuum evacuation in the vacuum chamber 61, so that it is difficult to adjust the installation of the tables 51 and 52.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems, and has as its object to increase the speed of a table mechanism.
High acceleration and long life are possible, high precision can be maintained for a long time, clean environment can be maintained by maintaining the vacuum environment in the vacuum chamber, and non-magnetic, low vibration, An object of the present invention is to provide a vacuum-compatible slide device that satisfies important requirements for drawing accuracy and exposure accuracy such as low heat generation and low dust generation.

[0010]

That is, the present invention provides a vacuum chamber having through holes in opposing walls, a first guide shaft inserted into each of the through holes of the vacuum chamber, and: A first bearing part which is loosely fitted to both ends of the table provided on the first guide shaft and both ends of the first guide shaft protruding out of the vacuum chamber and forms a hydrostatic fluid layer to constitute a hydrostatic fluid bearing. A second bearing portion joined to the first bearing portion such that an axis is orthogonal to the axis line of the first bearing portion; and a second bearing portion is loosely fitted to the second bearing portion to form a hydrostatic fluid layer to form a hydrostatic fluid. A second guide shaft constituting a fluid bearing, a third bearing portion formed on an outer wall surface of the vacuum chamber so as to surround the through hole, and having an annular suction groove in an inner peripheral portion of the bearing surface;
A pressure-receiving part which is attached to a bearing part and forms a hydrostatic fluid layer in a gap with the third bearing part to constitute a hydrostatic fluid bearing, constitutes a vacuum-compatible slide device, and is installed in the vacuum chamber. The table can be moved in the X-Y directions.

In this vacuum compatible slide device, the gap between the third bearing portion and the pressure receiving portion is preferably 1 to 7 μm, and the surface roughness of the bearing surface in the third bearing and the pressure receiving portion is arithmetically averaged. The value (Ra) is preferably 0.2 μm or less.

Further, from the viewpoints of increasing the bearing rigidity of the hydrostatic bearing, increasing the positioning accuracy of the table, and reducing the weight of the slide device, the first bearing portion, the first guide shaft, and the It is preferable that the second bearing portion and the second guide shaft, and the third bearing portion and the pressure receiving portion are formed of ceramics having high rigidity and a smooth surface easily obtained.

[0013]

Embodiments of the present invention will be described below.

FIG. 1 is a partially cutaway perspective view showing an example of a vacuum-compatible slide device of the present invention, and FIG.
3 is an enlarged perspective view of a main part of FIG. 1.

This vacuum-compatible slide device has elongated holes 12 of the same shape on opposite walls of a vacuum chamber 11 air-tightly bonded to a base board 10. The first guide shaft 3 is inserted across the first guide shaft 3 so that the table 2 is mounted on the first guide shaft 3 in the vacuum chamber 11. Both ends of the first guide shaft 3 are loosely fitted to the first bearing portions 4 and 4 disposed outside the vacuum chamber 11, and are formed by a hydrostatic fluid layer formed in a gap between the first bearing portion 4 and the first guide shaft 3. The table 2 can be smoothly moved in the X direction in the vacuum chamber 11 by moving the first guide shaft 3 by driving means (not shown).

In addition, a second portion is provided below each of the first bearing portions 4 and 4 so that the axis is orthogonal to the axis of the first bearing portion 4.
The bearings 5 and 5 are respectively joined, and the second guide shafts 6 and 6 are loosely fitted to the second bearings 5 and 5, respectively.
Hydrostatically supported by a hydrostatic fluid layer formed in a gap between the bearings 5 and 5 and the second guide shafts 6 and 6, the second bearing 5 and
The table 2 can be moved smoothly in the Y direction in the vacuum chamber 11 by moving the table 5 along the second guide shafts 6, 6 by the air cylinders 7, 7 as actuators. .
The second guide shafts 6, 6 are fixed on the base board 10.

Further, the through hole 12 of the vacuum chamber 11
As shown in FIG. 3, a third bearing portion 8 is provided on the outer wall surface having the through hole 12 so as to surround the through hole 12. In the center of the bearing surface of the third bearing portion 8, 8, the through hole 12 is provided. In addition to having an opening 26 having almost the same dimensions as
The air pads 21 in the shape of a “ta” having compressed fluid injection holes are arranged in a line, and a double annular suction groove 24, 2 surrounding the opening 26 is provided in the inner peripheral portion of the bearing surface.
The first suction groove 24 near the air pad 21 has a groove width larger than that of the second suction groove 25 in order to efficiently collect the compressed fluid ejected from the injection hole. Further, flat pressure receiving portions 9, 9 having a width equal to or longer than the outer wall surface 11a of the vacuum chamber 11 are integrally formed on the end faces of the first bearing portions 4, 4 facing the third bearing portions 8, 8. Compressed fluid is ejected from the injection holes of the third bearing portions 8, 8 toward the pressure receiving portions 9, 9, and the bearing surface 8 a of the third bearing portions 8, 8 and the bearing of the pressure receiving portion 9 are provided. A hydrostatic fluid layer is formed in a gap (not shown) with the surface 9a to form a hydrostatic bearing, and the compressed fluid ejected from the injection hole is discharged to the third
Double suction groove 2 formed in the inner peripheral portion of the bearing surface of bearing portions 8
By forcibly collecting from the vacuum chambers 4 and 25, the degree of vacuum in the vacuum chamber 11 is not impaired. In addition,
Reference numeral 27 denotes a hose for discharging the compressed fluid collected in the first suction groove 24, and reference numeral 28 denotes a hose for discharging the compressed fluid collected in the second suction groove 25.

Next, the driving principle of the vacuum-compatible slide device will be described.

First, the piston rods 7a, 7a of the air cylinders 7, 7 are extended,
When the second bearings 5, 5 connected to the ends of the first and second a, 7a are moved in the Y direction along the second guide shafts 6, 6, the first guide shaft 3 is moved along the through hole 12 of the vacuum chamber 11. Since the table 2 can be moved, the table 2 provided on the first guide shaft 3 can be moved in the Y direction in the vacuum chamber 11. At this time, the second bearing portions 5, 5 are supported by the second guide shafts 6, 6 under static pressure, and the third bearing portions 8, 8 are provided.
And the pressure receiving portions 9 and 9 constitute a hydrostatic bearing,
When the first guide shaft 3 moves in the Y direction, there is no sliding resistance, no vibration or dust is generated, and the table 2 can be moved smoothly in the Y direction. In addition, by increasing the expansion and contraction speed of the piston rods 7a, 7a in the air cylinders 7, 7, it is possible to realize a higher speed and a higher acceleration of the table 2.

Further, the compressed fluid ejected from the injection holes of the third bearing portions 8, 8 is forcibly recovered from the double suction grooves 24, 25 provided on the inner peripheral portion of the bearing surface. Therefore, the compressed fluid in the gap between the third bearing portions 8 and the pressure receiving portions 9 and 9 does not leak into the vacuum chamber 11 and does not impair the degree of vacuum.

If the first guide shaft 3 is moved in the X direction by driving means (not shown), the table 2 can be moved in the X direction, and the first guide shaft 3 is also moved in the first bearing portion 4. , 4, the first pressure
When the guide shaft 3 is moved, there is no sliding resistance, there is no vibration or dust generation, the table 2 can be moved smoothly in the X direction, and a driving means for moving the first guide shaft 3 in the X direction. If, for example, an air cylinder is used, it is possible to realize a higher speed and a higher acceleration of the table 2.

If the second bearings 5, 5 and the first guide shaft 3 are simultaneously moved, the table 2 can be simultaneously moved in the X and Y directions, and the time required for positioning can be reduced. it can.

Further, according to this vacuum-compatible slide device, only one table 2 is required, and the height of the vacuum chamber 11 can be suppressed. 4 and 2nd bearing part 5,5
Is outside the vacuum chamber 11, and therefore does not require a compressed fluid recovery mechanism, and can be easily manufactured using a conventionally known hydrostatic bearing.

Incidentally, the third bearing portions 8 and 8 and the pressure receiving portions 9 and
Compressed fluid supplied to the gap with the vacuum chamber 11
In order to prevent the air from leaking into the inside, exhaust grooves 22 and 23 are provided between the air pads 21 and between the air pads 21 and the first suction grooves 24, respectively, and are formed on the bearing surface 8a of the third bearing portion 8. Of the double suction grooves 24 and 25, the groove width L of the first suction groove 24 close to the air pad 21 is set to the second width.
The width of the suction groove 25 is set to be at least twice the width M, and the distance N between the first suction groove 24 and the second suction groove 25 is set to the first suction groove 2.
It is preferable that the groove width is equal to or longer than the groove width L of No. 4.

That is, the exhaust grooves 22 and 23 formed between the air pad 21 and between the air pad 21 and the first suction groove 24 respectively discharge the compressed fluid supplied from the injection hole to the outside and reach the atmospheric pressure. Since the pressure can be reduced, the recovery efficiency in the subsequent suction grooves 24 and 25 can be improved, the ultimate vacuum time can be shortened, and the amount of fluid recovered from the suction grooves 24 and 25 can be reduced.
A small pump can be used as the compressed fluid recovery pump.

If the groove width L of the first suction groove 24 is less than twice the groove width M of the second suction groove 25, the first suction groove 24
The amount of fluid that can be collected by the first suction groove 24 is small.
If the distance N between the first and second suction grooves 25 is smaller than the groove width M of the second suction groove 25, the distance between them is too short.
This is because the amount of fluid passing through the suction groove 24 is large, the amount of flow flowing into the second suction groove 25 increases, and the efficiency of collecting the compressed fluid by the double suction grooves 24, 25 decreases.

However, it is necessary that the groove width L of the first suction groove 24 does not affect the groove processing and does not adversely affect the finishing accuracy of the bearing surface 8a. 2mm to 40mm, preferably 4mm to 25m
m is good, and the groove depth is 0.5mm-40m
m, preferably in the range of 4 mm to 25 mm.

The maximum gap between the bearing surface 8a of the third bearing portion 8 and the bearing surface 9a of the pressure receiving portion 9 is preferably provided in the range of 1 to 7 μm. This is because during assembly, it is difficult to make the parallelism between the bearing surface 8a of the third bearing portion 8 and the bearing surface 9a of the pressure receiving portion 9 less than 1 μm, and the maximum gap is 1 μm.
If it is less than m, the third bearing portion 8 and the pressure receiving portion 9 may come into contact with each other. Conversely, if the maximum gap exceeds 7 μm, the pressure is supplied to the gap between the third bearing portion 8 and the pressure receiving portion 9. Since the amount of compressed fluid is too large, the recovery efficiency is reduced in the double suction grooves 24 and 25, and it becomes difficult to maintain the degree of vacuum in the vacuum chamber 11 at a high degree of vacuum of 10 ^-6 torr or more. is there.

If the surface roughness of the bearing surface 8a of the third bearing portion 8 and the bearing surface 9a of the pressure receiving portion 9 are too poor, gas molecules tend to adhere to the bearing surfaces 8a, 9a, and the suction grooves 24, 2 are formed.
5, the recovery efficiency of the compressed fluid is deteriorated.
In order to maintain a high degree of vacuum of 0 ^-7 torr or more, the surface roughness of each bearing surface 8a, 9a may be set to 0.2 μm or less in arithmetic average roughness (Ra).

Further, when the degree of vacuum in the vacuum chamber 11 becomes a high vacuum state, the outer wall surface 11
Since a is deformed in a concave shape, in such a case, the bearing surface 8a of the third bearing portion 8 may be formed in a middle-high shape in advance, or the bearing surface 9a of the opposing pressure receiving portion 9 may be formed in a middle-high shape in advance.

As shown in FIG. 4, at least the inner wall surface of the first suction groove 24 near the air pad 21 may be inclined with respect to the bearing surface 8a so as to spread from the opening to the inner periphery. By inclining the inner wall surface of the first suction groove 24 in this way, the compressed fluid ejected from the ejection hole of the third bearing portion 8 can be more efficiently collected.

However, the inclination angle α is preferably in the range of 40 to 65 degrees with respect to the bearing surface 8a. This is because if the angle α with respect to the bearing surface 8a exceeds 65 degrees, the efficiency of collecting the compressed fluid is not different from that when the inner wall surface is not inclined, and conversely, the inclination angle α with respect to the bearing surface 8a is less than 40 degrees In this case, even if the inclination is further increased, the recovery efficiency of the compressed fluid cannot be increased, and the bearing surface 8a must be increased. It is preferable that the desired inclination angle α be 40 degrees to 45 degrees with respect to the bearing surface 8a.

As described above, in this embodiment, the example in which the air pad 21 is arranged only on the outer side of the bearing surface of the third bearing portion 8 has been described, but the air pad 21 is formed on the entire outer peripheral portion of the bearing surface, and the annular suction groove 24 is formed. , 25 can further increase the bearing rigidity. In addition, the shape of the air pad 21 is not limited to the one having a “ta” shape, but may be a “T” shape or a shape in which a porous body is inserted. Further, the number of suction grooves for recovering the compressed fluid supplied from the air pad 21 may be determined in consideration of the dimensions of the third bearing portion 8 and the amount of fluid to be recovered.
Heavy or quadruple suction grooves may be formed.

Incidentally, the first bearing part and the first guide shaft, the second bearing part and the second guide shaft,
It is preferable that each of the bearing portion and the pressure receiving portion is formed of ceramics.
Since the bearing surface constituting each hydrostatic bearing can be flattened and smoothed, the gap can be kept almost constant, the bearing rigidity can be increased, and the positioning accuracy of the table 2 can be improved. , Can reduce the weight of the slide device, especially alumina, zirconia, silicon nitride,
Ceramics mainly composed of silicon carbide and sialon can be suitably used.

Here, an experiment for examining the effect when the gap P between the third bearing portion 8 and the pressure receiving portion 9 which are the main parts in the vacuum-compatible slide device of the present invention shown in FIGS. 1 to 3 is made different. went.

The third bearing portion 8 and the flat plate 9 are both formed of alumina ceramics having an alumina purity of 99.5%, and the bearing surfaces 8a and 9a of the third bearing portion 8 and the flat plate 9 are obtained by arithmetically averaging the surface roughness. The roughness (Ra) was 0.2 μm. The first suction groove 24 formed in the third bearing portion 8 has a groove width L of 8 mm, a groove depth of 8 mm, and a groove width M of the second suction groove 25.
Was 4 mm and the groove depth was 4 mm. Then, a compressed fluid of 0.3 MPa is ejected from the injection hole into the gap P between the third bearing portion 8 and the pressure receiving portion 9, and the first suction groove 24 and the second suction groove 25 are discharged.
The degree of vacuum in the vacuum chamber 11 at the time of collection is measured by a hot cathode digital vacuum gauge (measuring pressure: 3 × 10 ⁻⁸ to 4).
× 10 ^-1 Pa).

As a result, as shown in FIG. 5, by setting the maximum gap P between the third bearing portion 8 and the pressure receiving portion 9 in the range of 1 to 7 μm, the degree of vacuum in the vacuum chamber 11 is reduced to 10 ⁻⁷ t.
It can be seen that the pressure can be increased to orr and a higher degree of vacuum can be achieved.

Next, when the gap between the third bearing portion 8 and the pressure receiving portion 9 is set to 2 to 3 μm and the surface roughness of each of the bearing surfaces 8a and 9a of the third bearing portion 8 and the pressure receiving portion 9 is changed. The effect was tested under similar conditions.

As a result, as shown in FIG. 6, the degree of vacuum in the vacuum chamber 11 can be increased by reducing the surface roughness of each of the bearing surfaces 8a, 9a of the third bearing portion 8 and the pressure receiving portion 9. I understand. By setting the arithmetic average roughness (Ra) to 0.2 μm or less, the degree of vacuum in the vacuum chamber 11 could be increased to 10 ⁻⁷ torr, which was particularly excellent.

As a result, in order to set the degree of vacuum in the vacuum chamber 11 to 10 ^-7 torr or more, the maximum distance between the third bearing portion 8 and the flat plate 9 is set to 1 to ⁷ μm, and the third
It is understood that the surface roughness of each of the bearing surfaces 8a and 9a of the bearing portion 8 and the flat plate 9 should be 0.2 μm in terms of arithmetic average roughness (Ra).

[0041]

As described above, according to the first aspect of the present invention, there is provided a vacuum chamber having through holes in opposing walls,
A first guide shaft inserted into each through hole of the vacuum chamber, a table installed on the first guide shaft inside the vacuum chamber, and a first guide shaft protruding out of the vacuum chamber at both ends. A first bearing portion which is loosely fitted to form a hydrostatic fluid layer to form a hydrostatic bearing, and a second bearing joined to the first bearing portion such that an axis is orthogonal to the axis of the first bearing portion; A second guide shaft, which is loosely fitted to the second bearing portion and forms a hydrostatic fluid layer to form a hydrostatic fluid bearing, and is formed on an outer wall surface of the vacuum chamber so as to surround the through hole; A third bearing portion provided with an annular suction groove in an inner peripheral portion of the bearing surface; and a hydrostatic fluid bearing formed in a gap between the third bearing portion and the first bearing portion. A vacuum-compatible slide device is configured from the pressure receiving portion that constitutes the device, and is installed in the vacuum chamber. Since the table can be moved in the X-Y directions, there is no sliding resistance in the drive unit of the table. During positioning, extremely high position accuracy can be realized,
Furthermore, since there is no wear on the driving unit, the life is long.

Further, since no lubricating oil or the like is required, the vacuum environment in the vacuum chamber can be maintained and a clean environment can be maintained. Exposure apparatus, a scanning type drawing apparatus using an electron beam, an EUV exposure apparatus, a scanning electron microscope, or the like.

According to the second and third aspects of the present invention,
By setting the gap between the third bearing portion and the pressure receiving portion to 1 to 7 μm and the surface roughness of each other to 0.2 μm or less in arithmetic average roughness (Ra), the degree of vacuum in the vacuum chamber is 1 × 10
It can correspond to a high vacuum of ^-5 Pa or more.

Further, according to the fourth aspect of the present invention, the first bearing portion, the first guide shaft, and the second
Since the bearing portion and the second guide shaft, and the third bearing portion and the pressure receiving portion are formed of ceramics, respectively, the bearing rigidity of the hydrostatic bearing can be increased, and the positioning accuracy of the table can be increased. The weight can be reduced.

[Brief description of the drawings]

FIG. 1 is a partially broken perspective view showing an example of a vacuum-compatible slide device of the present invention.

FIG. 2 is a sectional view taken along line AA of FIG.

FIG. 3 is an enlarged perspective view of a main part of FIG. 1;

FIG. 4 is a cross-sectional view showing another example of the main part of the vacuum-compatible slide device of the present invention.

FIG. 5 is a graph showing a relationship between a gap between a third bearing portion and a pressure receiving portion and a degree of vacuum in a vacuum chamber.

FIG. 6 is a graph showing the degree of vacuum in a vacuum chamber when the surface roughness of the bearing surface of the third bearing portion and the pressure receiving portion is varied.

FIG. 7 is a partially cutaway sectional view showing an example of a conventional vacuum-compatible slide device.

FIG. 8 is a partially cutaway sectional view showing another example of a conventional vacuum-compatible slide device.

[Explanation of symbols]

1: Vacuum compatible slide device 2: Table 3: First
Guide shaft 4: First bearing part 5: Second bearing part 6: Second guide shaft
7: Air cylinder 8: Third bearing part 9: Pressure receiving part 10: Base plate 11:
Vacuum chamber 12: Through hole 20: Injection hole 21: Air pad 2
2, 23: Exhaust groove 24: First suction groove 25: Second suction groove 26: Opening 51: Y table 52: X table 53, 54: Guide member 55, 56: Ball screw 58: Motor 60: Rotary magnetic seal 61 : Vacuum chamber 62, 63: Linear rod 6
5: Motor 70: Partition wall 71: Sliding means

Claims (4)

[Claims] 1. A vacuum chamber having through holes in opposing walls, a first guide shaft inserted through each of the through holes of the vacuum chamber, and a table installed on the first guide shaft in the vacuum chamber. A first bearing portion which is loosely fitted to both ends of a first guide shaft projecting out of the vacuum chamber and forms a hydrostatic fluid layer to form a hydrostatic fluid bearing; and an axis line of the first bearing portion. A second bearing portion joined to the first bearing portion so as to be orthogonal to the axis, and a second guide shaft loosely fitted to the second bearing portion and forming a hydrostatic fluid layer to constitute a hydrostatic fluid bearing. A third suction groove formed on an outer wall surface of the vacuum chamber so as to surround the through hole, and having an annular suction groove on an inner peripheral portion of the bearing surface.
A bearing portion, and a pressure receiving portion attached to the first bearing portion and forming a hydrostatic fluid layer in a gap between the third bearing portion and forming a hydrostatic fluid bearing, and installed in the vacuum chamber. A vacuum-compatible slide device, wherein the table is configured to be movable in XY directions. 2. A gap between the third bearing portion and the pressure receiving portion is set to one.
2. The vacuum-compatible slide device according to claim 1, wherein the thickness is set to 7 μm. 3. The vacuum-compatible slide device according to claim 2, wherein the surface roughness of the bearing surface in the third bearing and the pressure receiving portion is set to an arithmetic average roughness value (Ra) of 0.2 μm or less. . 4. The device according to claim 1, wherein the first bearing, the first guide shaft, the second bearing, the second guide shaft, the third bearing, and the pressure receiving portion are each formed of ceramics. Vacuum compatible slide device.