JP2018129356A - Xy stage movement mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an XY stage movement mechanism which can be manufactured relatively compactly and inexpensively, and can be installed in the vacuum chamber of an exposure apparatus using an electron beam.SOLUTION: An XY stage movement mechanism 10 includes an X movement mechanism 12 including three slide members 17a, 17b, 17c provided slidably on three parallel guide shafts extending in the X-axis direction on a horizontal plane, and an X-axis coupling member for coupling respective slide members, and a Y movement mechanism 14 including three slide members 21a, 21b, 21c provided slidably on three parallel guide shafts in the Y-axis direction orthogonal to the X-axis direction on a horizontal plane, and a Y-axis coupling member for coupling respective guide members. An XY stage is installed on the slide members 21a, 21c. Each guide shaft, each slide member, and each coupling member are formed of a nonmagnetic metal material of titanium or a titanium alloy.SELECTED DRAWING: Figure 1

Description

  The present invention relates to an XY stage moving mechanism, and more particularly, to an XY stage moving mechanism installed in a vacuum chamber of an exposure apparatus.

  Conventionally, Patent Document 1 discloses a stage mechanism installed in a vacuum chamber of a scanning exposure apparatus using an electron beam. This stage mechanism includes a slide shaft that penetrates the vacuum chamber, an X stage substrate coupled to the slide shaft, an air slide bearing that serves as a guide for the slide shaft outside the vacuum chamber, and an actuator outside the vacuum chamber. . The air slide bearing has an air pad for levitating the slide shaft and an exhaust groove for exhausting the gas, and supports the slide shaft so as to be slidable in a floating state. The actuator is disposed outside the vacuum chamber and is connected to the X stage substrate via a drive rod that penetrates the side wall of the vacuum chamber. In the stage mechanism configured in this manner, the slide shaft is supported by the air slide bearing in a floating state (that is, in a non-contact state), and the actuator is driven to move the X stage substrate in the X axis direction in the vacuum chamber. To move to.

JP 2001-44107 A

  In the stage moving mechanism described in Patent Document 1, since the actuator is disposed outside the vacuum chamber, there is a problem that the exposure apparatus including the stage mechanism is enlarged and the occupation area is increased. Moreover, although it describes that the air slide bearing in patent document 1 is formed in square cylinder shape using ceramics, the process of ceramics is not easy and connects four side walls made from ceramics. The constructed air slide bearing was large and very expensive.

  An object of the present invention is to provide an XY stage moving mechanism that can be manufactured in a relatively small and inexpensive manner and can be installed in a vacuum chamber of an exposure apparatus using an electron beam.

  The XY stage moving mechanism according to the present invention is arranged in parallel to each other along a first direction on a horizontal plane, two first driven guide shafts each having both ends fixed to a fixing member, and at least one end to the fixing member. Three first slide members respectively provided so as to be slidable by static pressure gas bearings on the outer peripheral surfaces of one fixed first drive guide shaft, the first driven guide shaft, and the first drive guide shaft. And a first connecting member that connects the first slide members, and the first slide member provided on the first drive guide shaft among the three first slide members is supplied to the inside. A first direction moving mechanism, which is a first direction actuator driven by gas so as to be position-controllable in the first direction, and a second direction perpendicular to the first direction on a horizontal plane. Two second driven guide shafts that are arranged in parallel with each other, and whose both ends are connected to the first slide member located on both sides in the second direction among the three first slide members, and at least one end is the It is slidable by a hydrostatic gas bearing on the outer peripheral surfaces of one second drive guide shaft, the second driven guide shaft, and the second drive guide shaft connected to the first slide member located on both sides. Each of the two second slide members provided on the second drive guide shaft of the three second slide members includes three second slide members provided to each other and a second connecting member for connecting the second slide members. The slide member includes a second-direction moving mechanism that is a second-direction actuator that is driven by a compressed gas supplied therein so as to be capable of position control in the second direction. And an XY stage is installed on the second slide member located on both sides of the first direction, wherein one of the second directions is the X-axis direction and the other is the Y-axis direction, and the first-direction moving mechanism and the The guide shaft, the slide member, and the connecting member that respectively constitute the second direction moving mechanism are formed of titanium or a titanium alloy that is a nonmagnetic metal material.

  According to this configuration, since the guide shaft, the slide member, and the connecting member that respectively constitute the first direction moving mechanism and the second direction moving mechanism are formed of titanium or a titanium alloy that is a nonmagnetic metal material, Even if it is installed in a vacuum chamber of an exposure apparatus for drawing on a wafer using a beam, high-precision drawing can be performed without affecting the magnetic field used for the operation of the electron beam. In addition, since titanium or titanium alloy has better workability than ceramics as described above, the first and second moving mechanisms can be manufactured in a small size and at low cost. Therefore, the exposure apparatus including such an XY stage moving mechanism can contribute to downsizing and cost reduction. Further, when the first and second slide members and the static pressure gas bearings provided on the first and second slide members are formed of ceramics, the pressure of the working gas supplied is limited due to strength restrictions, and the movement of the slide member is increased. Although it is a limitation, the first and second direction moving mechanisms composed of members made of titanium or titanium alloy can make the working gas relatively high in pressure, and as a result, it is possible to realize high speed movement of the slide member. The number of wafers to be drawn (throughput) increases. Furthermore, since the weight of the XY stage is supported by the two first guide shafts connected to the fixing member via the two second guide shafts on both sides, the XY stage is stably supported. Can be moved.

  In the XY stage moving mechanism according to the present invention, the compressed gas for the static pressure gas bearing and the drive of the first and second slide members is passed through the guide shafts and the passages formed in the fixed member. It is preferable that air is supplied from the outside of the vacuum chamber and exhausted to the outside. According to this configuration, leakage of the compressed gas into the vacuum chamber is suppressed, and a reduction in the degree of vacuum in the vacuum chamber can be prevented.

  In the XY stage moving mechanism according to the present invention, the first drive slide member is disposed at a position lower than the first slide member on both sides thereof, and the second direction drive mechanism is on the first slide on both sides. You may arrange | position in the same height position as a member. If comprised in this way, a 2nd moving mechanism can be arrange | positioned in the space between the 1st slide members of both sides above a 1st drive slide member, and an XY stage moving mechanism can be comprised more compactly. .

  Further, in the XY stage moving mechanism according to the present invention, the first and second slide members are respectively gas seal portions for suppressing leakage of compressed gas into the vacuum chamber on the axially outer side of the static pressure gas bearing. May further be included. With this configuration, it is possible to further suppress a decrease in the degree of vacuum in the vacuum chamber.

  Furthermore, each of the first and second connecting members may be composed of a flat plate made of titanium or a titanium alloy. If comprised in this way, the manufacturing cost and weight of a 1st and 2nd direction moving mechanism can be reduced.

  In this case, the first connecting member is formed of a plate material made of titanium or a titanium alloy, and is formed by bending a base portion attached to the upper surface of the first drive slide member and a substantially L shape at both ends of the base portion. You may have an attaching part each attached to the upper surface of the 1st slide member in the both sides of the 1st direction. If the first connecting member is configured in this manner, the moment force acting when the propulsive force is transmitted from the first driving slide member to the first slide members on both sides via the first connecting member is suppressed, and the first connecting member is suppressed. The movement of the XY stage by the direction moving mechanism can be made smoother.

  The XY stage moving mechanism according to the present invention can be manufactured relatively inexpensively and inexpensively, and can be installed in a vacuum chamber of an exposure apparatus using an electron beam.

It is a top view which shows the XY stage moving mechanism which is one Embodiment of this invention. It is the side view which looked at the XY stage moving mechanism shown in FIG. 1 from the Y direction. It is a figure which shows the AA line cross section in FIG. 1, (a) shows the case where the both ends include the 1st connection member bent in the L shape, (b) shows the flat 1st connection member. Indicates the case of inclusion. It is the BB sectional view taken on the line in FIG. 1 which shows the attachment state of an XY stage. It is sectional drawing of an X-axis guide shaft and an X-axis actuator, and an enlarged view of a static pressure air bearing and a gas seal part. It is a top view which shows the XY stage moving mechanism which is another embodiment of this invention. It is an axial sectional view of the actuator shown in FIG. It is a figure which shows the edge part fixing structure of a guide shaft.

  Embodiments according to the present invention will be described below in detail with reference to the accompanying drawings. In this description, specific shapes, materials, numerical values, directions, and the like are examples for facilitating the understanding of the present invention, and can be appropriately changed according to the application, purpose, specification, and the like. In addition, when a plurality of embodiments and modified examples are included below, it is assumed from the beginning that these configurations are used in appropriate combinations.

  FIG. 1 is a plan view showing an XY stage moving mechanism 10 according to an embodiment of the present invention. FIG. 2 is a side view of the XY stage moving mechanism 10 shown in FIG. 1 viewed from the Y direction. In FIG. 1 and FIG. 2, the X-axis direction (first direction) and the Y-axis direction (second direction) orthogonal to each other on the horizontal plane are indicated by arrows. Further, the Z direction perpendicular to the X-axis direction and the Y-axis direction is shown as the height direction. In addition, in FIG. 1, illustration of a connection member is abbreviate | omitted.

  The XY stage moving mechanism 10 includes an X-axis direction moving mechanism (first direction moving mechanism) 12 and a Y-axis direction moving mechanism (second direction moving mechanism) 14. Hereinafter, these will be appropriately referred to as an X moving mechanism 12 and a Y moving mechanism 14.

  The X moving mechanism 12 is provided on each of the three guide shafts 16a, 16b, and 16c arranged in parallel to each other along the X-axis direction on the horizontal plane, and on the outer peripheral surface of each guide shaft 16a, 16b, and 16c. Slide members (first slide members) 17a, 17b, and 17c. The two guide shafts 16a and 16c located on both sides in the Y-axis direction correspond to the first driven guide shaft in the present invention, and the guide shaft 16b located in the center corresponds to the first drive guide shaft in the present invention.

  Each guide shaft 16a, 16b, 16c is arranged at equal intervals or equal pitches. Both ends of each of the guide shafts 16a, 16b, and 16c are fixed to a pair of fixing members 18a and 18b arranged to face each other at a predetermined interval. In the present embodiment, the pair of fixing members 18 a and 18 b are installed on the horizontal upper surface 3 of the base 2. However, when the XY stage moving mechanism 10 is installed in the vacuum chamber of the exposure apparatus, for example, the pair of fixing members 18a and 18b are configured by both side walls facing in the X-axis direction constituting the vacuum chamber. May be. In this case, the base 2 can be omitted.

  In this embodiment, the guide shaft 16b disposed at the center is formed with a larger diameter than the guide shafts 16a and 16b disposed on both sides thereof. This is because the guide shaft 16b attaches and supports an X-axis actuator (first-direction actuator) driven by compressed gas, as will be described later, and thus has higher rigidity. However, the present invention is not limited to this, and the guide shafts 16a, 16b, and 16c may be formed to have the same diameter.

  The guide shafts 16a, 16b, and 16c of the X moving mechanism 12 are shaft members that are made of titanium or a titanium alloy that is a nonmagnetic material and have a circular cross section, for example. The guide shafts 16a, 16b, and 16c may be solid members or hollow tube members. Further, the guide shafts 16a, 16b, and 16c may be formed with a rectangular cross section.

  The X slide members 17a, 17b, and 17c provided on the outer peripheral surfaces of the guide shafts 16a, 16b, and 16c are formed of titanium or a titanium alloy that is a nonmagnetic material. In this embodiment, each X slide member 17a, 17b, 17c is comprised by the cylindrical member which makes a rectangular parallelepiped external shape, and it is provided so that a slide movement is possible with respect to each guide shaft 16a, 16b, 16c. Each X slide member 17a, 17b, 17c has a static pressure gas bearing at both ends, respectively, and can move in a state of floating from the guide shafts 16a, 16b, 16c. Details of the static pressure gas bearing Will be described later.

  The slide member 17b located at the center of the three slide members 17a, 17b, and 17c arranged in the Y-axis direction is driven so that the position in the X-axis direction can be controlled by compressed air as compressed gas, for example. Actuator. Hereinafter, when the slide member 17b is distinguished from the other slide members 17a and 17c, it is referred to as an X-axis actuator 17b. The configuration of the X-axis actuator 17b will be described later together with the configuration of the static pressure gas bearing.

  As shown in FIG. 2, in the X moving mechanism 12, the two guide shafts 16a and 16c and the slide members 17a and 17c are arranged at the same height position, whereas the guide shaft 16c and the X-axis actuator 17b The slide shafts 16a and 16c located on both sides and the slide members 17a and 17c are disposed at lower positions. Thereby, as shown in FIG. 1, the space which arrange | positions the Y movement mechanism 14 above the X-axis actuator 17b is securable. Therefore, the XY stage moving mechanism 10 including the X moving mechanism 12 and the Y moving mechanism 14 can be configured more compactly.

  3A and 3B are cross-sectional views taken along line AA in FIG. 1. FIG. 3A shows a case where the first connecting member is bent at both ends in an L shape, and FIG. The case where 1 connection member is included is shown. As shown in FIG. 3A, the X moving mechanism 12 further includes an X-axis connecting member (first connecting member) 24 formed of a plate material made of titanium or a titanium alloy, which is a nonmagnetic material. The X-axis connecting member 24 connects the slide members 17a, 17b, and 17c to transmit the propulsive force of the X-axis actuator 17b to the slide members 17a and 17c on both sides.

  The X-axis connecting member 24 includes a flat plate-like substrate portion 25 that is attached to the upper surface of the X-axis actuator 17b with, for example, bolts, and is bent into a substantially L shape at both ends in the Y direction of the substrate portion 25, and slide members 17a, An attachment portion 26 attached to the upper surface of 17c with, for example, a bolt or the like is included. If the X-axis connecting member 24 is configured in this way, the moment force acting when the propulsive force is transmitted from the X-axis actuator 17b to the slide members 17a and 17c on both sides via the X-axis connecting member 24 is suppressed. In addition, there is an advantage that the movement of the XY stage by the X moving mechanism 12 can be made smoother. However, the present invention is not limited to this, and as shown in FIG. 3B, the X-axis connecting member 24a is connected to the upper surface of the X-axis actuator 17b and the lower surfaces of the slide members 17a and 17c with bolts or the like. You may comprise by the flat plate which consists of titanium or titanium alloy to be attached. Thus, if it is set as the X-axis connection member 24a which does not have a bending part in both ends, there exists an advantage which manufacture is easy and can hold down cost.

  Referring again to FIG. 1, the Y moving mechanism 14 of the XY stage moving mechanism 10 includes three guide shafts 20a, 20b, 20c arranged in parallel to each other along the Y axis direction, and each guide shaft 20a, 20b, Y slide members (second slide members) 21a, 21b, 21c provided on the outer peripheral surface of 20c. The two guide shafts 20a and 20c located on both sides in the X-axis direction correspond to the second driven guide shaft in the present invention, and the guide shaft 20b located in the center corresponds to the second drive guide shaft in the present invention.

  Both ends of each of the guide shafts 20a, 20b, 20c are fixed to opposing side surfaces of the slide members 17a, 17c located on both sides of the X moving mechanism 12, respectively. Each of the guide shafts 20a, 20b, and 20c is a shaft member that is formed of titanium or a titanium alloy that is a nonmagnetic material and has a circular cross section, for example. The guide shafts 20a, 20b, 20c may be solid members or hollow tube members. Further, the guide shafts 20a, 20b, and 20c may have a rectangular cross section.

  The Y slide members 21a, 21b, and 21c provided on the outer peripheral surfaces of the guide shafts 20a, 20b, and 20c are formed of titanium or a titanium alloy that is a nonmagnetic material. In this embodiment, each Y slide member 21a, 21b, 21c is comprised by the cylindrical member which makes a rectangular parallelepiped external shape, and it is provided so that a slide movement is possible with respect to each guide shaft 20a, 20b, 20c. Each Y slide member 21a, 21b, 21c has a static pressure gas bearing at both ends, respectively, and can move while floating from the guide shafts 20a, 20b, 20c. The X slide members 17a, 17b, and 17c can be configured similarly.

  The slide member 21b located in the center among the three slide members 21a, 21b, and 21c arranged in the X-axis direction is driven in such a manner that the position in the X-axis direction can be controlled by compressed air as compressed gas, for example. Actuator (second direction actuator). Hereinafter, when the slide member 21b is distinguished from the other slide members 21a and 21c, it is referred to as a Y-axis actuator 21b. The configuration of the Y-axis actuator 21b can be configured similarly to the X-axis actuator 17b.

  FIG. 4 is a cross-sectional view taken along the line BB in FIG. In FIG. 4, the X-axis actuator 17b and the guide shaft 16b are not shown.

  As shown in FIG. 4, the Y moving mechanism 14 further includes a flat plate-like Y-axis connecting member (second connecting member) 28 made of titanium or a titanium alloy that is a nonmagnetic material. The central portion of the Y-axis connecting member 28 is fixed to the upper surface of the Y-axis actuator 21b with a bolt or the like (not shown). Further, both end portions of the Y-axis connecting member 28 in the X-axis direction are sandwiched between the lower surface of the XY stage S and the upper surfaces of the slide members 21a and 21c, and are slid by the fixing bolts 30 of the XY stage S. It is fixed to the members 21a and 21c. As described above, the Y-axis actuator 21b and the slide members 21a and 21c are connected by the Y-axis connecting member 28, whereby the propulsive force by the Y-axis actuator 21b is transmitted to the slide members 21a and 21b. As a result, the XY stage S is driven so that the position can be controlled in the Y-axis direction.

  Further, as described above, the guide shafts 20 a, 20 b, and 20 c of the Y moving mechanism 14 are fixed to the slide members 17 a and 17 c constituting the X moving mechanism 12. Therefore, by driving the X axis actuator 17b of the X moving mechanism 12, the XY stage S can be moved in the X axis direction via the slide members 17a and 17c so that the position of the XY stage S can be controlled. Therefore, according to the XY stage moving mechanism 10 of this embodiment, the X moving mechanism 12 and the Y moving mechanism 14 can move the XY stage S on the horizontal plane so that the position can be controlled in the X axis direction and the Y axis direction. . Thereby, a semiconductor wafer, a mask forming member, and the like installed on the XY stage S can be moved in the XY plane, and can be drawn with high accuracy by an electron beam or the like irradiated from above.

  In the above description, the example in which the Y-axis connecting member 28 of the Y moving mechanism 14 is formed of a flat plate has been described. However, the present invention is not limited to this, and the X-axis connecting member shown in FIG. Similarly to the member 24, it is possible to form a mounting portion bent in a substantially L shape at both ends, and to attach a flat plate-like substrate portion positioned between the mounting portions to the lower surface of the drive slide member 21b. As a result, the moment force acting when the propulsive force is transmitted from the Y-axis actuator 21b to the slide members 21a and 21c on both sides via the Y-axis connecting member 28 is suppressed, and the movement of the XY stage by the Y moving mechanism 14 is suppressed. There is an advantage that can be made smoother.

  Next, the configuration of the drive slide member and the static pressure gas bearings and gas seal portions provided at both ends of the slide member will be described with reference to FIG. FIG. 5 is a cross-sectional view of the guide shaft 16b and the X-axis actuator 17b of the X moving mechanism 12, and an enlarged view of the static pressure air bearing 43 and the gas seal portion 52.

  Hereinafter, the guide shaft 16b and the X-axis actuator 17b of the X moving mechanism 12 will be described as an example, but the guide shaft 20b and the Y-axis actuator 21b of the Y moving mechanism 14 can be similarly configured. Hereinafter, the case where the compressed gas supplied to the X-axis actuator 17b is air will be described. However, the present invention is not limited to this, and other gases such as nitrogen may be used.

  As shown in FIG. 5, the guide shaft 16b of the X moving mechanism 12 has a flat cylindrical piston portion 32 in the central region in the axial direction. The piston portion 32 is accommodated in a cylindrical slide body 36 that constitutes the X-axis actuator 17b. The cylindrical slide body 36 has, for example, a square outer shape, and a columnar space is formed therein. The outer shape of the piston part 32 is formed to be slightly smaller in diameter than the internal space of the slide body 36. A plurality of grooves 34 are formed in an annular shape along the circumferential direction on the outer peripheral surface of the piston portion 32.

  Bearing members 42 are attached to both axial ends of the slide body 36 of the X-axis actuator 17b. Each bearing member 42 has a guide shaft 16b extending therethrough. The bearing member 42 is a member constituting a static pressure gas bearing and a gas seal portion as will be described later.

  The piston portion 32 divides the internal space of the slide body 36 into two pressure chambers 38a and 38b. The pressure chambers 38 a and 38 b are isolated from each other in an airtight state by a seal member provided in the piston portion 32. Thereby, the piston part 32 functions as a piston when the X-axis actuator 17b is driven by the compressed air supplied to the inside.

  A first air passage 40a extending in the axial direction from one end and a second air passage 40b extending in the axial direction from the other end are formed in the guide shaft 16b. The first air passage 40a extends radially in the radial direction at a position adjacent to one end of the piston portion 32 and communicates with the pressure chamber 38a through a plurality of ports 40c. In contrast, the second air passage 40b extends radially in the radial direction at a position adjacent to the other end of the piston portion 32 and communicates with the pressure chamber 38b through a plurality of ports 40d. The first and second air passages 40a and 40b are each connected to a compressed air source via a servo valve (not shown). For each servo valve, for example, a 3-position 3-port direct acting servo valve is preferably used. Each servo valve is electrically connected to a servo amplifier (not shown), and the spool position is controlled via the servo amplifier by a controller (not shown). As a result, the pressures P1 and P2 of the compressed air supplied to the two pressure chambers 38a and 38b of the X-axis actuator 17b (that is, the pressures of the pressure chambers 38a and 38b) can be appropriately adjusted.

  Here, when the pressure P1 of the pressure chamber 38a is adjusted to be higher than the pressure P2 of the pressure chamber 38b (P1> P2), the X-axis actuator 17b is moved to the pressure chamber 38a side (left side in FIG. 5) by the pressure difference, that is, The axial length of the pressure chamber 38a extends and the axial length of the pressure chamber 38b decreases. On the contrary, when the pressure P2 in the pressure chamber 38b is adjusted to be higher than the pressure P1 in the pressure chamber 38a (P1 <P2), the X-axis actuator 17b is moved to the pressure chamber 38b side (right side in FIG. 5) by the pressure difference. That is, the axial length of the pressure chamber 38b extends and the axial length of the pressure chamber 38a decreases.

  The respective positions in the X-axis direction and the Y-axis direction of the XY stage S installed on the Y moving mechanism 14 are the X-axis laser interferometer and Y-axis laser installed outside the vacuum chamber in which the XY stage S is provided. Measured by an interferometer. Based on the measurement result of the X-axis laser interferometer, the controller drives the X-axis servo valve via the servo amplifier to control the position of the X-axis actuator 17b. Similarly, the controller controls the position of the Y-axis actuator 21b by driving the Y-axis servo valve via the servo amplifier based on the measurement result by the Y-axis laser interferometer. As a result, the XY stage S can be positioned with high accuracy (for example, several nm).

  As described above, the bearing members 42 are provided at both ends of the X-axis actuator 17b. The bearing member 42 is formed in a substantially cylindrical shape, and is fitted so as to be slidable with a slight gap between the inner peripheral surface and the outer peripheral surface of the guide shaft 16b.

  An air supply groove 44 and an exhaust groove 46 are formed adjacent to each other in the axial direction on the outer peripheral surface of the guide shaft 16b. The air supply groove 44 and the exhaust groove 46 are each formed in an annular shape. Further, the air supply groove 44 is formed to have a wider width in the axial direction than the exhaust groove 46. Thereby, when compressed air is supplied to the air supply groove 44, sufficient floating force can be obtained with respect to the outer peripheral surface of the guide shaft 16b.

  An air supply passage 45 formed in the guide shaft 16 b communicates with the air supply groove 44. Compressed air is supplied to the air supply groove 44 through the air supply passage 45. An exhaust passage 47 formed in the guide shaft 16b is connected to the exhaust groove 46. The exhaust passage 47 is connected to a suction pump (not shown) or open to atmospheric pressure outside the vacuum chamber. Although the air supply passage 45 and the exhaust passage 47 are shown on the same plane in FIG. 5, it is actually preferable that they are formed at different phase positions in the circumferential direction of the guide shaft 16b. Further, it is preferable that a plurality of air supply passages 45 and exhaust passages 47 are formed at intervals in the circumferential direction in order to make the pressure distribution in the circumferential direction in the air supply groove 44 and the exhaust groove 46 uniform.

  The above-described air supply groove 44, air supply passage 45, exhaust groove 46 and exhaust passage 47 constitute a static pressure gas bearing 43. In the static pressure gas bearing 43, when compressed air is supplied to the air supply groove 44 through the air supply passage 45, a small gap is formed between the outer peripheral surface of the guide shaft 16 b and the inner peripheral surface of the bearing member 42. Compressed air flows. The compressed air is exhausted from the exhaust groove 46 via the exhaust passage 47. As the compressed air flows in this way, the bearing member 42 floats from the guide shaft 16b. As a result, the X-axis actuator 17b is supported in a non-contact state on the outer peripheral surface of the guide shaft 16b. Moreover, the static pressure gas bearing 43 similarly comprised is also provided in the both ends of the other slide members 17a and 17c, respectively. Therefore, the X-axis actuator 17b and the slide members 17a and 17c included in the X movement mechanism 12 can smoothly slide and move in the X-axis direction.

  In the X movement mechanism 12 of the present embodiment, the gas seal portion 52 is provided adjacent to the outside in the axial direction of the static pressure gas bearing 43 (that is, the side opposite to the pressure chamber 38b). The gas seal portion 52 serves to prevent or suppress the compressed air supplied to the static pressure gas bearing 43 from leaking out of the bearing member 42. Thereby, the fall of the vacuum degree in the vacuum chamber in which the XY stage moving mechanism 10 including the X moving mechanism 12 is installed can be suppressed.

  The gas seal portion 52 includes a first suction groove 48 and a second suction groove 50 formed in an annular shape on the outer peripheral surface of the guide shaft 16b. The first and second suction grooves 48 and 50 are respectively connected to suction pumps 58 and 60 outside the vacuum chamber via first and second suction passages 49 and 51 formed in the guide shaft 16b. In addition, it is preferable that a plurality of first and second suction passages 49 and 51 are also formed at different phase positions in order to equalize the circumferential pressure distribution in the suction grooves 48 and 50.

The first suction groove 48 sucks compressed air leaking from the static pressure gas bearing 43 with a suction pump 58 and reduces the pressure to a predetermined pressure (for example, atmospheric pressure). Then, in the second suction groove 50 located axially outward from the first suction groove 48, further suction and evacuated to a vacuum degree of the same level in the vacuum chamber (e.g. 10- ⁴ Torr) by the suction pump 60 . Thereby, it can suppress that the vacuum degree in a vacuum chamber falls.

  In the XY stage moving mechanism 10 of the present embodiment, it is assumed that the gas seal portions 52 are provided at both axial ends of the X-axis actuator 17b and the slide members 17a and 17c and the Y-axis actuator 21b and the slide members 21a and 21c, respectively. However, the present invention is not limited to this. For example, when the XY stage moving mechanism 10 is installed and used in a vacuum chamber having a low degree of vacuum, the gas seal portion may be omitted.

  As described above, according to the XY stage moving mechanism 10 of the present embodiment, the guide shafts 16a, 16b, 16c, 20a, 20b, and 20c, the X-axis actuator 17b, and X constituting the X moving mechanism 12 and the Y moving mechanism 14, respectively. The shaft slide members 17a and 17c, the Y-axis actuator 21b, the Y-axis slide members 21a and 21c, and the X-axis and Y-axis connecting members 24 and 28 are formed of titanium or a titanium alloy that is a nonmagnetic metal material. Therefore, even if it is installed in a vacuum chamber of an exposure apparatus that performs drawing on a wafer using an electron beam, high-precision drawing can be performed without affecting the magnetic field used for the operation of the electron beam.

  In addition, since titanium or titanium alloy has better workability than ceramics, the X moving mechanism 12 and the Y moving mechanism 14 can be manufactured in a small size and at low cost. Therefore, the exposure apparatus including such an XY stage moving mechanism 10 can contribute to downsizing and cost reduction.

  Furthermore, when the X-axis actuator and slide member, the Y-axis actuator and slide member, and the static pressure gas bearing provided thereon are formed of ceramics, the pressure of the compressed air that is the working gas supplied due to strength restrictions However, in the X moving mechanism 12 and the Y moving mechanism 14 formed of members made of titanium or a titanium alloy, compressed air that is a working gas is set to a relatively high pressure. can do. As a result, the movement of the X-axis actuator 17b and the Y-axis actuator 21b can be increased, and the number of processed wafers (throughput) to be drawn increases.

  Furthermore, for each of the X moving mechanism 12 and the Y moving mechanism 14, two sets of guide shafts 16a, 16c, 20a, 20c and slide members 17a, 17c, 21a, 21c provided on both sides of the actuators 17b, 21b, respectively. In this state, the XY stage S can be guided while being supported more stably.

  Next, with reference to FIGS. 6 and 7, an XY moving mechanism 10A which is another embodiment of the present invention will be described. 6 is a plan view showing the XY stage moving mechanism 10A, and FIG. 7 is an axial sectional view of the X-axis actuator 17b shown in FIG. In the present embodiment, the same or similar components as those in the XY stage moving mechanism 10 described above are denoted by the same or similar reference numerals, and redundant description will be omitted.

  As shown in FIG. 6, in the XY stage moving mechanism 10A, only one end of the guide shaft 16b in the X moving mechanism 12A is connected and fixed to the fixing member 18b. Thereby, the X-axis actuator 17b is supported in a cantilever state. Similarly, in the Y moving mechanism 14A, only one end of the guide shaft 20b is connected and fixed to the X-axis slide member 17c. Thereby, the Y-axis actuator 21b is also supported in a cantilever state.

  As shown in FIG. 7, the X-axis actuator 17 b of the present embodiment has a shape that extends from the end portion fixed to the fixing member 18 b and terminates at the piston portion 32. That is, it can be formed to be about half as long as the embodiment described above. The same applies to the guide shaft 20b of the Y moving mechanism 14A.

  Further, the axial end of the slide body 36 of the X-axis actuator 17 b is closed in an airtight manner by the end plate 19. A guide shaft 62 is erected and fixed to the end plate 19. The guide shaft 62 is slidably fitted into a piston portion 32 of the guide shaft 16b and a bottomed hole 64 formed in the center portion of the shaft portion. By providing the guide shaft 62 in this way, the X-axis actuator 17b supported in a cantilever state can be moved more smoothly, and the difference in pressure receiving area between the pressure chambers 38a and 38b can be reduced to reduce the operating pressure difference. Can be suppressed.

The X-axis actuator 17b is supported in a cantilevered manner by a guide shaft 18b whose one end is fixed to the fixed member 18b, and the axial length can be significantly shortened compared to the XY stage moving mechanism 10 of the above-described embodiment. . Further, since one end portion of the X-axis actuator 17b is sealed by the end plate 19, it is not necessary to provide the static pressure gas bearing 43 or the gas seal portion 52. Therefore, the axial length of the X-axis actuator 17b can be further shortened by this. This is the same for the Y-axis actuator 17b supported in a cantilevered manner as in the X-axis actuator 17b.
The configuration other than the above is the same as in the case of the XY stage moving mechanism 10.

  As described above, the XY stage moving mechanism 10A of the present embodiment has the same operational effects as the XY stage moving mechanism 10 described above, and can greatly reduce the dimensions in the X axis direction and the Y axis direction (for example, 300 mm). . Therefore, the XY stage moving mechanism 10A can be made compact, and accordingly, the vacuum chamber and thus the exposure apparatus can be miniaturized.

  Further, in the XY stage moving mechanism 10A of this embodiment, even if the guide shafts 16b and 20b that support the X-axis actuator 17b and the Y-axis actuator 21b in a cantilever state are slightly bent downward, such a bend is not detected. Can be absorbed by the X-axis connecting member 24 and the Y-axis connecting member 28, so that the driving of the XY stage S is not hindered.

  FIG. 6 is a diagram showing an end fixing structure such as the guide shaft 16a. In FIG. 6, the gap formed between the guide shaft 16a and the fixed hole is exaggerated. This end fixing structure is provided on a bracket 70 for attaching both end portions of the guide shafts 16a, 16b, 16c to the fixing members 18a, 18b. In FIG. 6, an end fixing structure provided at one end of the guide shaft 16a is exemplified, but the structure is also applied to the other end of the guide shaft 16a and applied to the other guide shafts 16b, 16c, 20a, 20b, and 20c. Preferably applied.

  One end of the guide shaft 16a is inserted through a through hole formed in the fixing member 18a (see FIG. 1). The bracket 70 is fixed to the side surface of the fixing member 18a by, for example, bolt fastening. The bracket 70 is formed with a fixing hole 71 having substantially the same inner diameter as the through hole formed in the fixing member 18a. The fixing hole 71 of the bracket 70 is provided concentrically with the through hole of the fixing member 18a.

  The bracket 70 is formed with two female screw holes communicating with the fixing hole 71 at positions shifted by 90 degrees. Each female screw hole accommodates an urging member 72 having elasticity. For the urging member 72, for example, a coil spring is preferably used. The urging member 72 is pressed toward the fixing hole 71 by a bolt 74 that is screwed into the female screw hole.

  By providing such an end fixing mechanism, a minimal gap is formed between the inner peripheral surface of the through hole of the fixing member 18a and the outer peripheral surface of the one end portion of the guide shaft 16a due to tolerance, manufacturing error, or the like. Even in such a case, the guide shaft 16 a can be fixed in a state where the guide shaft 16 a is pressed against the inner peripheral surface of the fixing hole 71 at a position where the phase is shifted by 90 degrees by the two urging members 72. Thereby, it is possible to prevent the parallelism of the guide shafts 16a, 16b, and 16c from varying due to the influence of the extremely small gap, and as a result, the slide movement of the slide members 17a, 17b, and 17c becomes smoother and highly accurate. It can contribute to positioning of.

  Note that the present invention is not limited to the above-described embodiment and its modifications, and various changes and improvements can be made within the scope of matters described in the claims of the present application and the equivalent scope thereof.

  For example, in the above description, an example in which the guide shafts 16a, 16b, and 16c of the X moving mechanism 12 are fixed to the fixing members 18a and 18b has been described. However, the present invention is not limited thereto, and the guide shaft 20a of the Y moving mechanism 14 is not limited thereto. 20b, 20c may be fixed to a fixed member, and both ends of the guide shafts 16a, 16b, 16c of the X moving mechanism 12 may be fixed to the slide members 21a, 21c on both sides of the Y moving mechanism 14.

  In the above configuration, the compressed air is supplied to or exhausted from the actuators and slide members through the air supply passages and exhaust passages formed in the guide shafts 16a, 16b, 16c, 20a, 20b, and 20c. However, the present invention is not limited to this. The compressed air may be configured to be supplied and exhausted from the outside of the vacuum chamber to each axis actuator and the slide member via a flexible pipe made of plastic, rubber or the like.

  2 base, 3 upper surface, 10, 10A stage moving mechanism, 12, 12A X moving mechanism, 14, 14A Y moving mechanism, 16a, 16b, 16c, 20a, 20b, 20c guide shaft, 17a, 17c, 21a, 21c slide Member, 17b X-axis actuator, 18a, 18b Fixing member, 19 End plate, 21b Y-axis actuator, 24, 24a X-axis connecting member, 25 Substrate part, 26 Mounting part, 28 Y-axis connecting member, 30 Fixing bolt , 32 Piston part, 34 groove, 36 Slide body, 38a, 38b Pressure chamber, 40a, 40b Air passage, 40c, 40d Port, 42 Bearing member, 43 Static pressure gas bearing, 44 Air supply groove, 45 Air supply passage, 46 Exhaust groove, 47 Exhaust passage, 48 First suction groove, 49 First suction passage, 50 Second suction groove, 51 First suction groove Pull passage, 52 Gas seal part, 58, 60 Suction pump, 62 Guide shaft, 64 Bottomed hole, 70 Bracket, 71 Fixing hole, 72 Energizing member, 74 bolts, P1, P2 pressure, SXY stage.

Claims (6)

Two first driven guide shafts arranged in parallel to each other along a first direction on a horizontal plane, each end of which is fixed to the fixing member, and one first driving guide whose at least one end is fixed to the fixing member A shaft, three first slide members provided on each outer peripheral surface of the first driven guide shaft and the first drive guide shaft by a static pressure gas bearing so as to be slidable, and each of the first slide members. Of the three first slide members, the first slide member provided on the first drive guide shaft can be controlled in position in the first direction by compressed gas supplied to the inside. A first direction moving mechanism which is a first driving slide member driven by
On the horizontal plane, they are arranged in parallel to each other along a second direction orthogonal to the first direction, and both ends are connected to the first slide members located on both sides in the second direction among the three first slide members. The two second driven guide shafts and one second drive guide shaft, at least one end of which is connected to the first slide member located on both sides, the second driven guide shaft, and the second drive guide shaft Three second slide members provided on each outer peripheral surface of the second slide member so as to be slidable by a static pressure gas bearing, and a second connecting member for connecting the second slide members, and the three second slide members Among the members, the second slide member provided on the second drive guide shaft is driven by the compressed gas supplied to the inside so as to be capable of position control in the second direction. There, a second movement mechanism,
With
One of the first direction and the second direction is the X-axis direction and the other is the Y-axis direction, and an XY stage is installed on the second slide member located on both sides of the first direction, and the first direction The guide shaft, the slide member, and the connecting member that respectively constitute the moving mechanism and the second direction moving mechanism are formed of titanium or a titanium alloy that is a nonmagnetic metal material.
XY stage moving mechanism. In the XY stage moving mechanism according to claim 1,
The compressed gas for the static pressure gas bearing and the drive of the first and second slide members is supplied from the outside of the vacuum chamber through the guide shafts and the passages formed in the fixed member, An XY stage moving mechanism that is exhausted to the outside. In the XY stage moving mechanism according to claim 1 or 2,
The first drive slide member is disposed at a position lower than the first slide members on both sides thereof, and the second direction drive mechanism is disposed at the same height position as the first slide members on both sides. XY stage moving mechanism. In the XY stage moving mechanism according to any one of claims 1 to 3,
Each of the first and second slide members is an XY stage moving mechanism further including a gas seal portion that suppresses leakage of compressed gas into the vacuum chamber on the axially outer side of the static pressure gas bearing. In the XY stage moving mechanism according to any one of claims 1 to 4,
The XY stage moving mechanism, wherein the first and second connecting members are each constituted by a flat plate made of titanium or a titanium alloy. In the XY stage moving mechanism according to any one of claims 1 to 4,
The first connecting member is formed of a plate made of titanium or a titanium alloy, and a base portion attached to an upper surface of the first driving slide member, and is bent in a substantially L shape at both ends of the base portion to be in the first direction. An XY stage moving mechanism having attachment portions respectively attached to upper surfaces of the first slide members on both sides of the first slide member.

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