JP2006029412A - Static pressure type linear motion guide unit - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a static pressure type linear motion guide unit capable of constituting a slider in compact with high accuracy by floating the slider with respect to a track rail by static pressure and relatively sliding them. <P>SOLUTION: The slider 1 is composed of a casing 3 composed of a number of casing plates 3P and an end plate 4 comprising a supply port 8 communicated with spouts 10. A track surface 6 of the casing 3 has a number of spouts 10 for spouting the fluid to the track surface 5 of the track rail 1. The track surface 5 of the track rail 1 is composed of a pair of inclined faces orthogonal to each other at both side faces 34. <P>COPYRIGHT: (C)2006,JPO&NCIPI

Description

  The present invention relates to a hydrostatic linear motion guide unit comprising a track rail having a track surface and a slider that moves relative to the track rail.

  In recent years, as linear motion guide units, semiconductor devices, various assembly devices, inspection devices, medical equipment, measuring devices, etc., have high precision, ultra miniaturization, and smooth reciprocating motion for parts that reciprocate. What can achieve such performance is required. Recently, as a linear motion guide unit, in addition to improving performance such as high accuracy and high speed, maintenance-free has been emphasized, and in particular, an ultra-miniaturized one has been demanded. The members and parts that make up the motion guide unit have a small structure, and it has become necessary to reduce the number of parts due to assembly errors and assembly man-hours of those parts. The linear motion guide unit constitutes an indispensable important machine element of the machine. Various sizes and types of linear motion guide units are used, but rolling elements such as balls and rollers are used. There is a demand for a slider that can be slidably guided on a track rail without being used.

  Conventionally, as hydrostatic bearing devices, those used for ultra-precision stages and machine tools are known. This static pressure type bearing device supplies air to the bearing surface to generate static pressure and floats the supported body, so that the flow velocity of the base body becomes sonic in the air supply system path to the bearing surface. Is provided with an orifice. The hydrostatic bearing device is composed of a rectangular fixed guide rail supported at both ends and a movable block surrounding the fixed guide rail so that high-pressure air is supplied from the upper, lower, left and right branch passages. It is configured. In the static pressure type bearing device, one orifice is formed between the opposing surfaces of one side of a rectangular shape, and air is supplied from the orifice to the bearing surface. Further, the movable block is constructed by assembling a block plate on one side into a quadrangular cylindrical shape on four sides in order to form a slight gap with the fixed guide rail (see, for example, Patent Document 1).

  In addition, a hydrostatic air bearing type linear guide that improves bearing performance and reduces manufacturing costs is also known. In the static pressure air bearing type linear guide, a slider shaft having a rectangular cross section moves linearly with respect to the bearing block, and the bearing block has four shafts, one on each side in four axial directions. Bearing pads are installed. The bearing pad is a throttle portion and is mounted in one hole portion that communicates with the air communication hole. Moreover, a bearing block fixes a block which has a pair of substantially L-shaped cross sections with an assembly screw (for example, refer patent document 2).

A method for manufacturing a radial orifice used for a hydrostatic bearing is also known. The manufacturing method of the radial orifice is a method in which the orifice is formed in a bearing case that supports the rotating shaft with air pressure, and the hydrostatic bearing is formed by stacking circular grooves formed in a radial groove fixed in the bearing case. The hydrostatic radial bearing has a large number of radial orifices. The hydrostatic bearing is composed of a radial grooved disk having a parallel shaft hole and an exhaust grooved disk having a parallel shaft hole, and a radial grooved circle having a tapered shaft hole. A plurality of plates and an exhaust grooved disk having a tapered shaft hole are overlapped each other (see, for example, Patent Document 3).
JP-A-3-37412 JP 2000-87969 A JP 2002-310155 A

  However, the conventional hydrostatic type linear motion guide unit can be slid freely on the current track rail via multiple rolling elements by taking advantage of the hydrostatic bearings that have reduced the number of parts without using rolling element parts. In order to increase versatility and improve convenience, such as a linear motion guide unit consisting of a simple slider, there are many ways to eject fluid onto the raceway surface and lift the slider in a balanced manner with respect to the raceway rail. There was a problem.

  Further, the above-described hydrostatic bearing device has a long stroke for supporting both ends, so that it becomes a large-scale one and is not suitable for versatility.

  In addition, the hydrostatic air bearing type linear guide described above must be formed with long holes from the compressed air supply port to each air communication hole, so that the length of the bearing block is limited and the shaft slides. Therefore, versatility is limited.

  The above-described radial orifice manufacturing method forms an orifice by laminating a number of disks fixed in a bearing case that supports a rotating shaft.

  The object of the present invention is to solve the above-mentioned problems, and in order to improve convenience, the slider can be made more compact than the slider in the conventional linear motion guide unit, and the number of parts can be reduced. A long stroke for relative sliding is possible, the relative sliding resistance of the slider to the track rail is very small, the relative running accuracy of the slider is high, the heat generation of the sliding part is very small, and the range of use is To provide a static pressure linear motion guide unit applicable to a wide range.

  According to the present invention, an elongated track rail having a first track surface formed along a longitudinal direction and a second track surface that is opposed to the first track surface through a fluid are formed. And a slider that is slidable relative to the track rail, and the second track surface of the slider has a jet outlet for ejecting the fluid to the first track surface of the track rail. The present invention relates to a hydrostatic type linear motion guide unit which is formed in a plurality along the raceway surface and along the sliding direction.

  In this hydrostatic linear motion guide unit, the first track surface of the track rail is formed from a pair of inclined surfaces orthogonal to each other on both side surfaces of the track rail, and the slider is positioned on the upper surface side of the track rail. And a pair of sleeve portions extending from the bridge portion along the both side surfaces of the track rail. The slider has a recess between the sleeve portions straddling the track rail and is relatively slidable. It is.

  The slider includes a casing made of a plurality of casing plates stacked in a sliding direction, and end plates respectively disposed at both ends of the casing for fixing the casing plates to each other.

  The static pressure linear motion guide unit includes a supply hole for the fluid in the casing plate, a communication groove formed at one end surface of the casing plate and communicating with the supply hole, and the second raceway surface communicating with the communication groove. A plurality of throttle grooves that are spaced apart from each other and formed so that one end surface of the casing plate cooperates with a flat other end surface of the adjacent casing plate, and the fluid supply path, the communication path, and the first Two throttle passages are formed along the raceway surface so as to form a large number of the ejection ports, and the end plate is provided with a supply port leading to the supply path of the casing plate.

  The first track surface of the track rail is formed on both side surfaces and an upper surface of the track rail, and the slider has at least one leading to the jet port facing the first track surface of the track rail. A supply port is formed.

  Further, the casing constituting the slider has a plurality of first casing plates having the ejection openings, and a plurality of discharge communication grooves and discharge holes for collecting the fluid blown from the ejection openings. A second casing plate is laminated in the sliding direction.

  In the static pressure linear motion guide unit, the first casing plate is formed in the fluid supply hole communicating with at least one supply port formed in the end plate, on one end surface of the casing plate, and in the supply hole. A plurality of throttle grooves that are spaced apart from and open to the second raceway surface that communicates with the communication groove, and the second casing plate has another supply hole for the fluid that communicates with the supply port; In order to collect the fluid blown out from the jet port, the discharge communication groove formed on one end surface and the discharge hole communicating with the discharge communication groove are formed, and the first casing plates or the first casing plate and The second casing plate cooperates to supply the supply passage by the supply hole, the communication passage by the communication groove, and the throttle groove that is spaced along the second raceway surface to form a plurality of the jet ports. A throttle path is formed, and the first casing plate and the second casing plate or the second casing plate cooperate to form a discharge communication path by the discharge communication groove and a discharge path by the discharge hole, The end plate is formed with a discharge port communicating with the discharge path.

  In this hydrostatic linear motion guide unit, the throttle groove formed in the casing plate is formed into a triangular groove, a square groove or a semicircular groove.

  In the static pressure linear motion guide unit, the fluid is a gas such as air or a liquid such as oil.

  In the static pressure linear motion guide unit, the size of the jet outlet is substantially 0.05 mm to 0.5 mm.

  In this hydrostatic linear motion guide unit, a gap between the first track surface of the track rail and the second track surface of the slider is substantially set to 0.01 mm to 0.05 mm.

  Since this static pressure type linear motion guide unit is configured as described above, the slider can be tracked without a plurality of rolling elements between the track rail and the slider, unlike the conventional linear motion guide unit. The slider can be slid relative to the track rail by floating with air, oil, or other fluid, and the slider can be configured in a compact hydrostatic bearing system by eliminating rolling elements and end caps. The slider can be slid relative to the track rail with a long stroke, the sliding resistance of the slider to the track rail is very small, the relative running accuracy of the slider is high, and the heat generation is very small. The present invention is applied to a bearing having a wide range of use, and can be used for various devices such as semiconductor manufacturing devices, various processing devices, measuring devices, and inspection devices.

  Embodiments of a hydrostatic linear motion guide unit according to the present invention will be described below with reference to the drawings. In this embodiment, the hydrostatic linear motion guide unit is formed such that the track rail 1 has a shape in which wedge-shaped projections 31 projecting on both side surfaces extend in the longitudinal direction. Although applied to the linear motion guide unit formed in the shape of the wedge-shaped concave portion 30 corresponding to the shape, it is not necessarily limited to that type of linear motion guide unit, for example, both side surfaces of the track rail are concave portions. Can be applied to various types such as those having a shape extending in the longitudinal direction and those having a bowl-like shape.

  A first embodiment of a hydrostatic linear motion guide unit according to the present invention will be described with reference to FIGS. As shown in FIG. 1, the hydrostatic linear motion guide unit is opposed to the track rail 1 and the track surface 5 having a long track surface 5 (first track surface) formed along the longitudinal direction. Thus, a raceway surface 6 (second raceway surface) is formed in a non-contact manner through a fluid, and is composed of a slider 2 that floats on the raceway rail 1 with a fluid and is relatively slidable. In the first embodiment, the raceway surface 5 formed on the raceway rail 1 is composed of a raceway surface 16 composed of the lower inclined surface of the convex portion 31 and a raceway surface 17 composed of the upper opposite inclined surface. Yes. The slider 2 is composed of a casing 3 and end plates 4 on both end faces of the casing 3, and the raceway surface 6 formed on the casing 3 is below the inner side surface 35 that forms the recess 30 between the sleeve portions 29. It comprises a raceway surface 18 made of an inclined surface and a raceway surface 19 made of an upper reverse slope surface. The angles of these inclined surfaces may be set so that the slider 2 is stably supported by the fluid pressure with respect to the track rail 1.

  As shown in FIGS. 2 and 3, the slider 2 is formed with a large number of orifices, that is, jet outlets 10, which are fine openings for blowing fluid onto the raceway surface 6. The slider 2 includes a bridge portion 28 located on the upper surface 33 side of the track rail 1 and a pair of sleeve portions 29 extending from the bridge portion 28 along both side surfaces 34 of the track rail 1. The slider 2 is configured such that a straddle recess 32 through which the track rail 1 is inserted between the sleeve portions 29 straddles the track rail 1 and relatively slides. The slider 2 is composed of a casing 3 in which a large number (for example, 14) of casing plates 3P each having a recess 32 through which the track rail 1 is inserted, and end plates 4 arranged on both end faces of the casing 3. The end plate 4 and the laminated casing plate 3P are screwed together with fixing bolts 11 and firmly fixed. In other words, a large number of jets 10 are formed in the casing 3 along the raceway surface 6 in the width direction of the casing plate 3P, and in a multistage (corresponding to 14 sheets) corresponding to the number of casing plates 3P in the sliding direction. 14 steps). In this static pressure type linear motion guide unit, the track surface 5 of the track rail 1 is formed as described above, and the track surface 6 of the slider 2 faces the track surface 5 of the track rail 1. Has a structure that can receive load in all directions. The end plate 4 is formed in a shape corresponding to the casing plate 3P, that is, a shape including a bridge portion 28 and a sleeve portion 29.

  In the first embodiment, the casing plate 3P is formed with a fluid supply hole 20P (first supply hole) communicating with the supply port 8 (first supply port) of the end plate 4 and one end surface 37 of the casing plate 3P. In addition, a communication groove 7P that communicates with the supply hole 20P and a plurality of throttle grooves 9 that are spaced and opened along the raceway surface 6 that communicates with the communication groove 7P are formed. The throttle grooves 9 are formed at right angles to the raceway surface 6 so that the throttle grooves 9 extend in parallel with each other. Furthermore, the other end surface 38 of the casing plate 3P is formed as a flat surface in the first embodiment. The end surface 38 of the casing plate 3P is not necessarily formed as a flat surface, and can be formed, for example, as a shallower groove corresponding to the communication groove 7P and the throttle groove 9 of the facing casing plate 3P. The casing 3 has a structure in which the casing plates 3 </ b> P are arranged in the same direction and overlapped, that is, stacked and firmly fixed by the fixing bolts 11. By stacking casing plates 3P on the casing 3, one end surface 37 of one adjacent casing plate 3P and one end surface 38 of the other casing plate 3P work together to connect the supply holes 20P. The fluid supply path 20 is formed, the communication groove 7P is closed by a flat end surface 37 to form the communication path 7, and a plurality of throttle grooves 9 spaced along the raceway surface 6 are flat end surface 37. A large number of throttle paths 15 are formed by being blocked by the nozzles, and the openings of the throttle paths 15 are formed as the ejection ports 10. Accordingly, since the spout 10 formed in the casing 3 is formed orthogonal to the raceway surface 6, fluid such as air and oil is ejected in a direction perpendicular to the raceway surface 5 of the raceway rail 1. It is configured to be able to. If the fluid is a gas such as clean air, it is preferable to prevent contamination of the track surface 5 of the track rail 1 and the track surface 6 of the slider 2. If the fluid is a liquid such as oil, it is preferable to function as a lubricating oil for the raceway surface 5 of the track rail 1 and the raceway surface 6 of the slider 2. It is necessary to provide a means for recovering without leaking outside.

  In this static pressure type linear motion guide unit, a plurality of jet ports 10 formed in the slider 2 are formed along the raceway surface 6 on one casing plate 3P. Further, since a plurality of casing plates 3P are overlapped, a plurality of casing plates 3P are formed in the longitudinal direction of the slider 2 as well. In other words, the jet ports 10 are formed innumerably over the entire track surface 6 of the slider 2. End plates 4 are respectively disposed on both end faces of the casing 3 in which the casing plates 3P are laminated, and the end plates 4 are provided with supply ports 8 that communicate with the supply path 20 of the casing plates 3P. In the drawing, the supply port 8 is formed in one end plate 4. However, the supply port 8 is formed in both end plates 4, and the supply port 20 is blocked by one end plate 4 with a stopper plug (not shown). Of course, the end plates 4 positioned at both ends of the casing 3 can be shared.

  Further, as shown in FIGS. 4 (a), 4 (b), and 4 (c), the throttle groove 9 constituting the jet port 10 can be formed in the size of a fine opening, and the cross-sectional shape is processed. It can form in arbitrary shapes, such as a shape which is easy to do. The aperture groove 9 is formed, for example, in an aperture groove 9A having a triangular cross section as shown in FIG. 4A, or in an aperture groove 9B having a square cross section as shown in FIG. It is formed in a throttle groove 9C having a semicircular cross section as shown in FIG. 4 (c), or a combination of these throttle groove 9A, throttle groove 9B and throttle groove 9C, or tapered toward the ejection port 10. The shape of the throttle groove 9 is not limited. In this static pressure type linear motion guide unit, when the throttle groove 9 is formed in the throttle path 15 by laminating the casing plates 3P, and the opening at the tip of the throttle path 15 is formed in the jet outlet 10, the supply port 8 The fluid supplied through the supply passage 20 and the communication passage 7 is a strong jet from the jet outlet 10 and the slider 2 is a fluid film with respect to the track rail 1 and both are kept floating in a non-contact state. is there. In addition, the depth h, that is, the size, of the throttle groove 9 that is the ejection port 10 is formed to be 0.05 mm to 0.5 mm. Further, the narrow groove 9 can be formed by press working, electric discharge machining, slicing machining, etching machining, laser machining, or the like. Further, the casing plate 3P constituting the casing 3 can be made of a material such as a stainless steel plate, a ceramic plate, or a cured resin plate, and is processed into a predetermined shape. Further, the communication groove 7P formed in the casing plate 8 can be formed in various shapes. The boundary between the communication groove 7P and the throttle groove 9 may be formed in an R shape so that the fluid can flow smoothly.

  In the first embodiment, as shown in FIG. 2, the track surface 5 formed on the track rail 1 is formed on each side surface 34 of the track rail 1 from a pair of inclined surfaces that are inclined perpendicularly or oppositely to each other. Yes. The slider 2 includes a bridge portion 28 located on the upper surface 33 side of the track rail 1 and a pair of sleeve portions 29 extending from the bridge portion 28 along both side surfaces 34 of the track rail 1. In this static pressure type linear motion guide unit, the recess 32 between the sleeve portions 29 of the slider 2 is slidable relative to the track rail 1, and the end plate 4 constituting the slider 2 has a track rail 1. A supply port 8 communicating with the jet port 10 facing the raceway surface 5 is formed.

  In this static pressure type linear motion guide unit, the track surface 6 of the slider 2 facing the track surface 5 of the track rail 1 has a structure in which a plurality of casing plates 3P are fixed integrally with the casing 3 as shown in FIG. The grindstone 14 can be used for grinding. Further, if the slider 2 itself is small in size, it can be configured compactly including the raceway surface 6. Further, the clearance S between the raceway surface 5 of the raceway rail 1 and the raceway surface 6 of the casing 3 can be set and processed with a minimum accuracy, and the slider 2 can be configured with high rigidity. The clearance S between the track surface 5 of the track rail 1 and the track surface 6 of the slider 2 is configured to be, for example, 0.01 mm to 0.05 mm, and the slider itself can be floated or held by a fluid such as high-pressure air. 1 and the track surface 6 of the slider 2 can be maintained in a non-contact manner with high accuracy.

  In this embodiment, the track rail 1 is formed with mounting holes 13 spaced in the longitudinal direction. The track rail 1 has a lower surface 39 positioned on a base such as a base or a bed. , A bolt (not shown) can be inserted into the mounting hole 13 and screwed into the base for fixing. The track rail 1 is formed in a long shape, and can slide the slider 2 in a long stroke. A mounting screw hole 12 is formed in the end plate 4 constituting the slider 2 so that a movable body such as a workpiece can be attached. As described above, this static pressure linear motion guide unit has versatility in the same manner as a conventional linear motion guide unit consisting of a slider slidable on a track rail via a circulating rolling element. It can be used by incorporating it into the sliding area of a wide variety of devices.

  This static pressure type linear motion guide unit is operated by supplying a fluid having a predetermined pressure from the outside to the supply port 8 of the slider 2, in this embodiment, compressed air (for example, 0.4 to 0.8 MPa). The compressed air passes from the supply port 8 through the supply path 20, from the supply path 20 through the communication path 7 of each casing plate 3 </ b> P, from the communication path 7 through the throttle path 15, which is a fine port, and further through the throttle path. 15, and is ejected at a high pressure from the jet outlet 10, which is the tip of the throttle path 15, so that a high-pressure fluid film is formed between the track surface 5 of the track rail 1 and the track surface 6 of the casing 3. It has become. In this embodiment, since the slider 2 is configured to have a simple shape having no discharge passage, the fluid (compressed air) ejected from the ejection port 10 is disposed on the opening gap S side of the end plate 4 with respect to the track rail 1 and each It is comprised so that it may discharge | emit to the opening clearance gap S side with respect to the track rail 1 of the downward direction of the casing board 3P.

  Next, a second embodiment of the static pressure linear motion guide unit according to the present invention will be described with reference to FIGS. The second embodiment is substantially the same as the first embodiment, but the track rail 1 is not formed with the mounting holes 13 in the upper surface 33 as in the first embodiment. The upper surface 33 of the track rail 1 can be formed on the track surface 24, and the lower surface 36 of the bridge portion 28 of the recess 32 of the slider 2 is formed on the track surface 24 corresponding to the track surface 24 of the track rail 1. 26 can be formed. In the second embodiment, the track surface 24 is formed not only on the track surface 5 of the side surface 34 of the track rail 1 but also on the upper surface 33 of the track rail 1 as shown in FIG. In the second embodiment, the supply port to the raceway surface 26 of the slider 2 (second supply port, see 8A in FIG. 12) is the supply port 8 (first supply port) of the raceway surface 5 on the side surface 34 of the track rail 1. ), And is only required to operate when the load applied from the upper surface 33 of the track rail 1 to the slider 2 is large. Further, as shown in FIG. 12, in the second embodiment, the supply port 8 (first supply port) for the side surface 34 of the track rail 1 including the end plate 4 is provided separately on the left and right. , Both supply ports 8 can be made common to form a single supply port 8. This static pressure type linear motion guide unit is formed with the raceway surfaces 24 and 26, so that the load capacity can be further increased. In addition, providing the track surface 24 on the track rail 1 and correspondingly providing the track surface 26 on the slider 2 can be applied to the hydrostatic linear motion guide unit of the first embodiment. .

  Next, a third embodiment of the static pressure linear motion guide unit according to the present invention will be described with reference to FIGS. The third embodiment is essentially the same as the first embodiment, but is characterized in that the casing plates 3P are alternately laminated in the sliding direction with the casing plates 3A and 3B. It is said. In the third embodiment, as shown in FIGS. 8 to 11, the casing 3 includes a casing plate 3 </ b> A (first casing plate) and a casing plate 3 </ b> B (second casing plate). As shown in FIG. 7, the casing plate 3A is provided with a supply hole 20P, a communication groove 7P, a throttle groove 9, and a discharge hole 23P, and an outlet 10 from which fluid such as supplied air is ejected. Is formed. As shown in FIGS. 10 and 11, the casing plate 3B is formed as a discharge plate that collects and discharges the fluid ejected from the casing plate 3A. As shown in FIG. 10, the fluid is collected and discharged on one end face 22 of the casing plate 3 </ b> B to the peripheral portion of the raceway surface 6 of the casing plate 3 </ b> B of the slider 2 so as to face the raceway surface 5 of the track rail 1. A discharge communication groove 21P is formed, and the other end surface 27 is formed as a flat surface. Further, the casing plate 3B is formed with a discharge hole 23P that communicates with the discharge communication groove 21P and discharges collectively from the discharge communication passage 21.

  In the third embodiment, the casing plate 3A and the casing plate 3B are alternately stacked in the sliding direction in FIGS. 6 and 8, so that the casing plate 3A and the casing plate 3B cooperate or end at the end. In cooperation with the plate 4, one end surface 37 of one casing plate 3 </ b> A and one end surface 22 of the adjacent casing plate 3 </ b> B cooperate to form the fluid supply path 20 by connecting the supply holes 20 </ b> P. The communication groove 7P is closed by the end surface 22 of the casing plate 3B to form the communication path 7, and a plurality of throttle grooves 9 are closed by the end surface 22 of the casing plate 3B so as to be spaced along the raceway surface 6. A large number of throttle paths 15 are formed, and an opening portion, that is, a tip end portion of the throttle path 15 is formed as the ejection port 10. In the figure, the casing plates 3A and the casing plates 3B are alternately stacked. However, the casing plates 3A and / or the casing plates 3B are stacked, and the casings 3C and 3B are appropriately stacked between them. The plates 3A and 3B can be arranged at random so as to incorporate them. As a result, the adjacent casing plate 3A and the casing plate 3B or the casing plates 3B cooperate with each other, and the discharge communication groove 21P is closed by the flat surface 38 of the casing plate 3A to form the discharge communication path 21, and the discharge hole 23P are connected to form a fluid discharge path 23. In the third embodiment, the casing 3 is configured by laminating a casing plate 3A and a casing plate 3B, and the slider 2 is configured by the casing 3 and end plates 4 disposed on both end faces thereof. In the plate 4, supply ports 8 and 8 </ b> A communicating with the supply channel 20 and a discharge port 25 communicating with the discharge channel 23 are formed. The casing plates 3A and 3B are formed with discharge holes 23P corresponding to the discharge ports 25 and supply holes 20A and 20B corresponding to the supply ports 8 and 8A. The casing plate 3A has communication grooves 7P communicating with the supply holes 20A and 20B, respectively. One communication groove 7P communicates with the throttle groove 9 opened in the raceway surfaces 18 and 19 of the casing 3, and the other communication. The groove 7 </ b> P communicates with the throttle groove 9 opening in the raceway surface 26 of the casing 3. Therefore, the fluid supplied from the supply ports 8 and 8A formed in the end plate 4 is connected to the communication passages 7P formed from the supply passages 20 formed by the supply holes 20A and 20B of the casing plates 3A and 3B, respectively. From the throttle path 15 formed by the passage 7 and the throttle groove 9, respectively, the jets are ejected to the raceway surfaces 16, 17, and 24 of the raceway rail 1. The slider 2 is stably supported with respect to the track rail 1 by the fluid pressure from the upper surface side and the both side surfaces as described above, and the balance between supply and discharge of the fluid is improved, and a stable high pressure state can be maintained. , And can slide relative to the track rail 1.

  In the third embodiment, as shown in FIG. 8, the slider 2 is arranged such that the casing plates 3A and the casing plates 3B are alternately arranged so that both ends of the slider plate 3A are located. It has a configuration that is one more than 3B. In the third embodiment, four casing plates 3A and three casing plates 3B are configured. The combination of the casing sheet 3A and the casing plate 3B can be arbitrarily combined depending on the application and use conditions. The casing plate 3A is formed with a discharge hole 23P that communicates with the casing plate 3B, and the casing plate 3B is formed with supply holes 20A and 20B that communicate with the casing plate 3A. When the track surface 24 is formed on the upper surface 33 of the track rail 1, as shown by the broken lines in FIGS. 7, 10, and 12, the mounting screw holes 13A for mounting on the base, base, etc. are provided on the track. It is preferably formed on the lower surface 39 of the rail 1.

  The hydrostatic linear motion guide unit according to the present invention can be formed in various shapes, numbers, positions and arrangements for the supply holes P, the communication grooves 7P and the throttle grooves 9 formed in the casing plate 3P. It can be done. For example, as shown in FIGS. 2 and 7, the communication path 7 formed of the communication groove 7 </ b> P is shown to have a uniform width from the start end side communicating with the supply path 20 to the end side, but the fluid in the communication path 7 The passage cross-sectional areas do not have to be the same. For example, the communication passage 7 has a communication groove 7P that is formed shallower, that is, smaller in a gradient shape as it extends from the start side to the end side, and the passage cross-sectional area is made smaller. 7, a uniform fluid pressure can be applied to the constricted passages 15 formed one after another in the longitudinal direction in the developed view, and the jet flow from the jet outlet 10 can be adjusted to a uniform pressure, and the slider 2 with respect to the track rail 1 can be adjusted. Can be stabilized.

  The hydrostatic linear motion guide unit according to the present invention is a sliding device for a wide variety of devices such as semiconductor manufacturing equipment, various processing equipment, various assembly equipment, precision machinery, measuring equipment, inspection equipment, medical equipment, micromachines, and various robots. In particular, it can be used in high-precision parts with a simplified structure without using rolling elements.

1 is a perspective view showing a first embodiment of a static pressure linear motion guide unit according to the present invention. FIG. It is a cross-sectional view which shows one end surface of the casing board in the cross section of the A plane of FIG. It is a longitudinal cross-sectional view which shows the static pressure type | mold linear motion guide unit in the BB cross section of FIG. FIG. 3 is a cross-sectional view showing a throttle groove formed in the casing plate of FIG. 2, (a) shows a form in which the throttle groove is formed into a triangular cross section, and (b) shows a throttle groove formed into a square cross section. (C) shows a form in which the throttle groove is formed in a semicircular groove in cross section. It is explanatory drawing which shows the formation method of the track surface formed in the slider of FIG. It is a perspective view which shows 2nd Example of the static pressure type | mold linear motion guide unit by this invention. FIG. 7 is a cross-sectional view corresponding to the cross section of the A plane of FIG. 2 and showing one end surface of the casing plate of FIG. 6. It is a longitudinal cross-sectional view which shows CC cross section in FIG. One casing plate of FIG. 8 is shown, and the shape of the communication groove is shown. It is a cross-sectional view showing the end surface of the other casing plate in the DD section of FIG. It is sectional drawing which shows the other casing board in the EE cross section of FIG. 10, and shows the end surface in which the shape of the discharge communicating groove is shown. It is a side view of the static pressure type linear motion guide unit of FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Track rail 2 Slider 3 Casing 3A Casing board (1st casing board)
3B casing plate (second casing plate)
3P casing plate 4 end plate 5, 16, 17, 24 raceway surface (first raceway surface)
6, 18, 19, 26 raceway surface (second raceway surface)
7 communication path 7P communication groove 8 supply port (first supply port)
8A supply port (second supply port)
9 Throttling groove 9A Triangular groove in cross section 9B Quadrilateral groove in cross section 9C Semicircular groove in cross section 10 Jet port 15 Restriction path 20 Supply path 20P Supply hole 20A Supply hole (first supply hole)
20B supply hole (second supply hole)
21 discharge communication path 21P discharge communication groove 22, 27, 37, 38 end face 23 discharge path 23P discharge hole 25 discharge port 28 bridge part 29 sleeve part 32 straddle concave part 33 upper surface 34 side face

Claims (11)

A track rail having a long shape in which a first track surface is formed along the longitudinal direction, and a second track surface that is opposed to the first track surface through a fluid and formed in contact with the first track surface, and the track rail. A slider that is slidable relative to the first track surface, and an outlet for ejecting the fluid with respect to the first track surface of the track rail extends along the second track surface. A hydrostatic type linear motion guide unit which is formed in a number spaced apart along the sliding direction. The first track surface of the track rail is formed by a pair of inclined surfaces orthogonal to each other on both side surfaces of the track rail, and the slider is located on the track rail and on the track portion. 2. The slider according to claim 1, comprising a pair of sleeve portions that respectively extend along the both side surfaces of the rail, and the slider is configured such that a recess between the sleeve portions is slidable relative to the track rail. Static pressure type linear motion guide unit. The slider comprises a casing comprising a plurality of casing plates stacked in a sliding direction, and end plates respectively disposed at both ends of the casing for fixing the casing plates to each other. Item 3. The static pressure linear motion guide unit according to Item 1 or 2. The casing plate is provided with a fluid supply hole, a communication groove formed at one end surface of the casing plate and communicating with the supply hole, and a plurality of apertures that are spaced apart from the second raceway surface that communicates with the communication groove. A groove is formed, and the one end surface of the casing plate is spaced along the fluid supply path, the communication path, and the second raceway surface in cooperation with the other flat end surface of the adjacent casing plate. 4. The hydrostatic linear guide according to claim 3, wherein a plurality of throttle passages are formed to form a plurality of jet nozzles, and a supply port leading to the supply passage of the casing plate is formed in the end plate. unit. The first track surface of the track rail is formed on both side surfaces and an upper surface of the track rail, and the slider has at least one supply port that communicates with the jet port facing the first track surface of the track rail. The hydrostatic linear motion guide unit according to claim 1, wherein the static pressure linear motion guide unit is formed. The casing constituting the slider has a plurality of second casing plates formed with a plurality of first casing plates having the ejection ports, and a discharge communication groove and a discharge hole for collecting the fluid blown from the ejection ports. The static pressure linear motion guide unit according to any one of claims 1 to 5, wherein the casing plate and the casing plate are laminated in a sliding direction. The first casing plate communicates with the fluid supply hole that communicates with at least one supply port formed in the end plate, the communication groove that is formed at one end surface of the casing plate and communicates with the supply hole, and the communication groove. A plurality of throttle grooves that are spaced apart from the second raceway surface are formed, and the second casing plate is configured to supply the fluid blown from the another supply hole of the fluid that communicates with the supply port and the ejection port. The discharge communication groove formed on one end surface for recovery and the discharge hole communicating with the discharge communication groove are formed, and the first casing plates or the first casing plate and the second casing plate cooperate with each other. A supply path by the supply hole, a communication path by the communication groove, and a throttle path by the throttle groove that forms a plurality of the jet ports spaced apart from each other along the second raceway surface are formed. And the second casing plate or the second casing plate cooperate to form a discharge communication path by the discharge communication groove and a discharge path by the discharge hole, and the end plate communicates with the discharge path. The hydrostatic linear motion guide unit according to claim 6, wherein a discharge port is formed. The static pressure linear motion guide unit according to any one of claims 4 to 7, wherein the throttle groove formed in the casing plate is formed into a triangular groove, a square groove, or a semicircular groove in cross section. . The static pressure linear motion guide unit according to claim 1, wherein the fluid is a gas such as air or a liquid such as oil. The static pressure linear motion guide unit according to any one of claims 1 to 9, wherein the size of the jet port is substantially 0.05 mm to 0.5 mm. 11. The gap between the first track surface of the track rail and the second track surface of the slider is substantially set to 0.01 mm to 0.05 mm. The linear motion guide unit described in the section.

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