JP2002035670A - Spinning device and spinning method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a spinning device capable of preventing a substrate from being soiled by the treating liquid stuck or remaining in a nozzle head at the time of drying. SOLUTION: The spinning device for rotating and treating the substrate is provided with a cup body 1, a rotary table 9 disposed in the cup body 1 and rotary-driven while holding the substrate, a 1st drive motor 8 for rotary- driving the rotary table, a nozzle head 41 having nozzle bodies 42 and 43 arranged to face the back surface center part of the substrate held by the rotary table and for jetting a treating liquid on the back surface, an axial member 31 having one end connected to the back surface of the nozzle head and another end led out from the bottom of the cup body to the outside and a 2nd drive motor 36 for rotary-driving the nozzle head with the axial member to remove the treating liquid stuck to the upper surface of the nozzle head.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a spin processing apparatus and a spin processing method for processing a substrate while rotating the substrate by a rotary table.

[0002]

2. Description of the Related Art For example, in a manufacturing process of a semiconductor device or a liquid crystal display device, there are a film forming process and a photo process for forming a circuit pattern on a semiconductor wafer or a glass substrate as a substrate. In these processes, a film forming process and a cleaning process are repeatedly performed on the substrate.

[0003] A spin processing apparatus is used to perform the above-described substrate cleaning processing and drying processing after cleaning. The spin processing device has a cup body, and a rotating body that is driven to rotate is provided in the cup body. The rotating body is provided with a holding mechanism, and the holding mechanism detachably holds the substrate.

The processing liquid is sprayed from the upper processing liquid nozzle toward the upper surface on which the circuit pattern is formed on the substrate held by the holding mechanism. In addition, the substrate may require not only the upper surface but also the lower surface to be clean. In such a case, a lower processing liquid nozzle body that sprays the processing liquid toward the lower surface of the substrate is disposed.

When the lower processing liquid nozzle is disposed on the lower surface side of the substrate, a nozzle head is provided at a portion facing the lower surface of the substrate held by the rotating body in the cup body, and the lower processing liquid is provided on the nozzle head. And a lower gas nozzle for injecting a gas for drying after treating the lower surface of the substrate or the lower surface of the substrate.

[0006]

According to such a structure, a part of the processing liquid jetted from the lower processing liquid nozzle for processing the lower surface of the substrate is reflected on the back surface of the substrate and is reflected by the nozzle head. Drop on top of The processing liquid dropped on the upper surface of the nozzle head is mist-like and scattered by turbulence generated on the lower surface side of the substrate due to the rotation of the substrate when the substrate is rotated at a high speed to perform the drying process. For this reason, the processing liquid scattered in the form of a mistake sometimes adheres to the back surface of the dried substrate and causes contamination.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a spin processing apparatus and a spin processing method in which a processing liquid adhering to a nozzle head is not scattered at the time of drying processing of a substrate to contaminate the substrate.

[0008]

According to a first aspect of the present invention, there is provided a spin processing apparatus for processing a substrate by rotating the substrate, a cup body, and a rotary member provided in the cup body and driven to rotate while holding the substrate. A table, first driving means for rotating and driving the rotary table, and a nozzle body provided opposite to a central portion of a lower surface of the substrate held by the rotary table and jetting a processing liquid to a lower surface of the substrate. A nozzle head, a shaft member having one end connected to the lower surface of the nozzle head and the other end led out of the bottom of the cup body to the outside, and the nozzle head is rotationally driven together with the shaft member to rotate the nozzle head. A second drive unit for removing the processing liquid attached to the upper surface.

According to a second aspect of the present invention, the shaft member is hollow, and a tube having one end connected to the nozzle body is inserted therein, and the other end of the tube is connected to the other end of the shaft member. Connected to the first coupler provided, and
A second coupler is detachably connected to said coupler, and a supply tube for supplying a processing liquid to said nozzle body via said tube is connected to said second coupler. 1 is a spin processing apparatus.

According to a third aspect of the present invention, the substrate is rotationally driven, and the processing liquid is jetted from the upper nozzle body to the upper surface of the substrate, and the processing liquid is jetted from the lower nozzle body provided in the nozzle head to the lower surface. In the spin processing method for processing the upper surface and the lower surface of the substrate, the processing liquid is ejected from the upper nozzle body to the upper surface of the substrate by rotating the substrate, and the processing liquid is provided on the lower surface of the nozzle head. A step of processing the substrate by injecting a processing liquid from the lower nozzle body,
After the processing of the substrate with the processing liquid is completed, a step of rotating the nozzle head to remove the processing liquid attached to the nozzle head, and a step of rotating the substrate treated with the processing liquid to thereby remove the processing liquid attached to the substrate. And a drying step for drying the substrate.

The invention according to claim 4 is the spin processing method according to claim 3, wherein the step of rotating the nozzle head is performed before the step of drying the substrate.

According to a fifth aspect of the present invention, there is provided the spin processing method according to the third aspect, wherein the step of rotating the nozzle head is performed simultaneously with the step of drying the substrate.

According to the present invention, the nozzle head having the nozzle body for injecting the processing liquid onto the lower surface of the substrate can be rotated. Therefore, by rotating the nozzle head, the processing liquid adhered to the surface can be removed. Can be removed,
It is possible to prevent the substrate from being scattered during the drying process and contaminating the substrate.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings.

In FIG. 1, reference numeral 1 denotes a cup body. This cup body 1 is provided on a base plate 2. That is, the cup body 1 has a bottom plate 3 that is inclined high toward the center, and a peripheral wall 4 is provided around the bottom plate 3.
As shown in FIG. 2, the peripheral wall 4 is provided at regular intervals in the circumferential direction.
One inlet 5 is formed with an opening.

A through hole 6 is formed at the center of the bottom plate 2, and a hollow drive shaft 7 is inserted through the through hole 6.

At the center of the lower surface of the base plate 2, a first
The first drive motor 8 constituting the drive means is mounted. As shown in FIG. 3, the first drive motor 8 includes a hollow stator 8a and a rotatable cylindrical rotor 8b provided rotatably. The drive shaft 7 is provided at the upper end of the rotor 8b. Are connected and fixed. Rotor 8b
Is rotatably held by a ring-shaped holding member 8c provided on the lower end surface of the stator 8a so as not to fall from the inside of the rotor 8b.

The upper end of the drive shaft 7 protruding into the cup body 1 is mounted on a rotary table 9 having a substantially cross-shaped planar shape. As shown in FIG. 2, the turntable 9 includes a base 11 connected and fixed to the upper end of the drive shaft 7 and four arms 12 having one ends connected to the base 11 at predetermined intervals in a circumferential direction. Each of the arms 12 has a pair of engaging pins 13 erected at the distal end thereof.
Further, the distal end of each arm 12 and the base 11
Each support pin 14 is provided upright.

The rotary table 9 has a rectangular substrate 1 made of glass used for a liquid crystal display device, for example.
5 engages the corners with a pair of engagement pins 13 provided at the distal end of each arm, and the lower surface of the corner and the lower surface of the central portion are supported by the support pins 14 and detachably held. Is done.

Therefore, when the first drive motor 8 operates, the rotary table 9 is driven to rotate counterclockwise as shown by an arrow A in FIG.

As shown in FIG. 1, a ring-shaped anti-reflection member 16 is provided at the upper end of the peripheral wall 4 of the cup body 1. The anti-reflection member 16 includes an inclined portion 16a that is inclined so that an outer peripheral end connected to the peripheral wall 4 is lower than an inner peripheral end, and a vertical portion that is vertically provided at an inner peripheral end of the inclined portion 16a. 16b.

Outside the peripheral wall of the cup body 1, a cover body 22 is provided at a portion corresponding to each inlet port 5. Each cover body 22 has an introduction path 23 in which the distance from the outer peripheral surface of the cup body 1 gradually increases from one end located on the introduction port 5 side to the other end along the rotation direction of the rotary table 9, It is formed along the circumferential direction of the cup body 1. That is, the introduction path 23 is formed such that the cross-sectional area gradually increases from one end to the other end.

The end of the introduction path 23 is closed,
A discharge port 24 as a discharge portion is formed at the closed end. As shown in FIG. 1, one end of a discharge pipe 25 also serving as a discharge section is connected to the discharge port 24, and the other end of the discharge pipe 25 is connected to an exhaust pump 27 through a gas-liquid separator 26.
Is connected. The suction force of the exhaust pump 27 acts on the inlet 5 through the outlet 24 and the inlet 23.

When the rotary table 9 provided in the cup body 1 is driven to rotate, an air flow is generated by the rotation. This air flow is in the direction of rotation of the turntable 9, ie, in FIG.
Occurs counterclockwise as indicated by arrow B and tangentially to the outer circumference of the rotation of the turntable 9.

The airflow B generated by the rotation of the rotary table 9 is formed on the peripheral wall of the cup body 1 by the centrifugal force generated by the rotation of the rotary table 9 and the suction force of the exhaust pump 27 acting on the inlet 5. It flows into the introduction path 23 formed by the cover body 22 from the part 5.

The gas flow B flowing into the introduction passage 23 flows from one end of the introduction passage 23 to the other end, and is sucked into the discharge pipe 25 through the discharge port 24 formed at the other end, and the gas-liquid separator 26 Is separated into liquid and gas.

A tubular shaft member 31 is inserted into the rotor 8b of the drive motor 8. The lower end of the shaft-like member is provided with a holding member 8 provided at the lower end of the first drive motor 8.
c, and protrudes downward, and this protruding portion is rotatably supported by a bearing 33 built in a bearing body 32 attached to the holding member 8c.

The lower end of the shaft-like member 31 protrudes from the lower end surface of the bearing body 32.
4 is fitted. Further, a first coupler 35 is attached to a lower end surface of the shaft-shaped member 31.

In the vicinity of the lower end of the shaft member 31, a second drive motor 36 constituting a second drive means is disposed. A drive pulley 38 is fitted on the rotation shaft 37 of the second drive motor 36.

A belt 39 is stretched between the driving pulley 38 and the driven pulley 34. Therefore, when the second drive motor 36 operates to rotate the rotation shaft 37, the rotation is transmitted to the shaft member 31 via the belt 39. That is, the shaft member 31 is driven to rotate by the second drive motor 36.

The upper end of the shaft-like member 31 is opposed to a through hole 11 a formed in the base 11 of the turntable 9. A nozzle head 41 is attached to the upper end of the shaft-shaped member 31 so as to cover the through-hole 11a of the base 11 and not to contact the base 11. That is,
The nozzle head 41 is mounted on the substrate 1 held on the turntable 9.
5 is provided so as to face the center of the lower surface.

As shown in FIGS. 2 and 3, the nozzle head 41 has a pair of first processing liquid nozzles 42 and a pair of second processing liquid nozzles 43 and 1 as lower nozzles.
And two gas nozzle bodies 44. The lower end of each of the nozzle bodies 42 to 44 protrudes from the lower surface of the nozzle head 41 into the upper end of the shaft-shaped member 31, and one end of a tube 45 is connected to each of the protruding ends.

The other ends of the tubes 42 to 44 are connected to the first coupler 35. A second coupler 46 is detachably connected to the first coupler 35. Second
An outer tube 47 is connected to the coupler 46 of the first embodiment. In the outer tube 47, five supply tubes communicating with the tubes 45 by connecting the second coupler 46 to the first coupler 35 are provided. 48 are provided.

Each supply tube 48 supplies a chemical solution to the first processing liquid nozzle body 42, and supplies the chemical liquid to the second processing liquid nozzle body 4.
A rinsing liquid such as pure water is supplied to 3, and a gas such as clean air or an inert gas is supplied to the gas nozzle 44.

Further, above the turntable 9, FIG.
As shown in the figure, an upper nozzle body 51 for spraying the processing liquid on the upper surface of the substrate 15 is provided. From the upper nozzle body 51, a chemical solution and a rinsing liquid can be selectively jetted onto the upper surface of the substrate 15.

As shown in FIG. 3, the drive shaft 7 is rotatably supported by a bearing 50 provided on a support member 49. This restricts lateral vibration of the drive shaft 7 when it is driven to rotate.

Next, a case where the substrate 15 is processed by the spin processing apparatus having the above configuration will be described. Substrate 15
Is treated with a predetermined chemical solution, rinsed with a rinse solution, and then dried.

When performing treatment with a chemical solution, first,
When the rotary table 9 is rotated at a predetermined speed by operating the first drive motor 8, the upper nozzle body 51 and the first processing liquid nozzle body 42 provided on the nozzle head 41 are provided.
Then, a chemical such as ozone water is sprayed onto the upper and lower surfaces of the substrate 15. Thereby, the upper surface and the lower surface of the substrate 15 are processed by the chemical.

When the processing with the chemical liquid is completed, the rinsing liquid is sprayed from the upper nozzle body 51 and the second processing liquid nozzle body 43 provided on the nozzle head 41 toward the upper surface and the lower surface of the substrate 15. . Thereby, the upper and lower surfaces of the substrate 15 treated with the chemical solution are rinsed.

When the rinsing process is completed, the shaft member 3
The second coupler 46 is removed from the first coupler 35 at the lower end of the first coupler. In this state, the second drive motor 36 is operated to rotate the shaft member 31. When the shaft member 31 is rotated, the nozzle head 41 rotates together with the shaft member 31.

Thus, the surface of the nozzle head 41,
In particular, the rinsing liquid adhering to the rinsing liquid during the rinsing process can be removed from the upper surface.

When the shaft member 31 is rotated, the outer tube 47 connected to the second coupler 46 is detached from the first coupler 35 in order to disconnect the second coupler 46 from the first coupler 35.
It is not twisted by the rotation of. That is, even if the fluid is supplied to the nozzle bodies 42 to 44 provided in the nozzle head 41 through the tubes 45 and 48,
The shaft member 31 can be rotated.

After the nozzle head 41 has been rotated for a predetermined time, the rotation speed of the first drive motor 8 is increased to
5 rotates at a higher speed than in the case of treating with a chemical solution or a rinsing solution. As a result, the rinse liquid adhering and remaining on the upper surface and the lower surface of the substrate 15 is scattered, so that the substrate 15 is dried.

At the time of drying the substrate 15, the nozzle head 4
If the rinsing liquid remains on the surface of the substrate 1, the rinsing liquid flies in the form of a mist due to the air flow generated on the lower surface side of the substrate 15 by the rotation of the turntable 9,
It adheres to the lower and upper surfaces of the substrate 15 and causes contamination of the substrate 15.

However, as described above, the substrate 15
Before the drying process, the nozzle head 41 is rotated to remove the rinsing liquid adhering to the surface thereof, so that the substrate 15 is prevented from being contaminated by the rinsing liquid adhering to the nozzle head 41 during the drying process. be able to.

The timing of rotating the nozzle head 41 may be performed not only before the substrate is dried but also simultaneously with the start of the drying. In that case, the substrate 15
At the same time as removing the rinsing liquid attached to the nozzle head 41,
The rinsing liquid attached to the surface is removed.

Therefore, also in this case, the rinsing liquid can be prevented from being scattered from the nozzle head 41 and adhered to the dried substrate 15. Moreover, since the rinsing liquid attached to the nozzle head 41 can be removed and the substrate 15 can be dried at the same time, the entire processing time does not need to be increased.

The nozzle head 41 may be rotated until the drying process of the substrate 15 is completed, but may be stopped before the drying process is completed.

On the other hand, the rotary table 9 holding the substrate 15
Is rotated at high speed, an airflow B is generated by the rotation. The airflow B is generated in the rotation direction of the rotating substrate 15, that is, in the tangential direction of the rotation.

Airflow B generated in the direction of rotation of the rotary table 9
Flows into the introduction path 23 from the introduction port 5 formed in the peripheral wall 4 of the cup body 1, and is sucked and discharged to the discharge pipe 25 from the discharge port 24 formed at the end of the introduction path 23.

Since the air flow B generated by the rotation of the rotary table 9 contains the cleaning liquid scattered from the substrate 15,
In the gas-liquid separator 26, gas and liquid are separated, and each is separately discharged.

The air flow B generated by the rotation of the rotary table 9 flows into the introduction passage 23 from a plurality of introduction ports 5 formed at predetermined intervals along the circumferential direction on the peripheral wall 4 of the cup body 1.
Since the gas is discharged to the gas-liquid separator 26, the flow along the inner peripheral surface of the cup body 1 can be reduced and can flow into the inlet 5.

For this reason, most of the airflow B generated by the rotation of the rotary table 9 flows into the respective inlets 5 before the airflow B is disturbed in the cup body 1 and becomes a vortex or ascending airflow. In addition, it is possible to prevent the mist contained in the airflow B from floating in the cup body 1 and re-adhering to the substrate 15. Therefore, this also makes it difficult for the substrate 15 to be contaminated.

[0054]

According to the present invention, it is possible to rotate a nozzle head provided with a nozzle body for jetting a processing liquid onto the lower surface of a substrate.

Therefore, by rotating the nozzle head, the processing liquid adhering to the surface can be removed, so that the processing liquid adhering to the nozzle head during the drying process of the substrate is scattered by an air current generated by the rotation of the substrate, and is applied to the substrate. It is possible to prevent adhesion and cause of contamination.

[Brief description of the drawings]

FIG. 1 is a longitudinal sectional view of a schematic configuration of a spin processing apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view taken along line XX of FIG.

FIG. 3 is a sectional view showing a structure for rotating and driving a shaft-shaped member having a nozzle head attached to an upper end.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Cup body 8 ... 1st drive motor (1st drive means) 9 ... Rotary table 15 ... Board | substrate 31 ... On-axis member 35 ... 1st coupler 36 ... 2nd drive motor (2nd drive means) 41 ... Nozzle head 45 ... Tube 46 ... Second coupler

Continued on the front page (51) Int.Cl. ⁷ Identification code FI Theme coat II (Reference) H01L 21/306 JF term (Reference) 4D075 AC64 AC84 BB65Z CA48 DA08 DB14 DC22 EA45 4F042 AA07 CC07 CC08 EB17 EB23 5F043 AA40 BB27 EE07 EE08 5F046 JA02 JA03 JA15 LA02 LA03 LA04

Claims (5)

[Claims] 1. A spin processing apparatus for processing a substrate by rotating the substrate, comprising: a cup body; a rotary table provided in the cup body and driven to rotate while holding the substrate; A driving unit, a nozzle head provided opposite to a central portion of the lower surface of the substrate held by the rotary table, the nozzle head having a nozzle body for injecting a processing liquid onto the lower surface of the substrate, one end of the lower surface of the nozzle head A shaft member whose other end is led out from the bottom of the cup body to the outside, and a second member for rotating and driving the nozzle head together with the shaft member to remove a processing liquid attached to an upper surface of the nozzle head.
A spin processing device comprising: 2. The shaft-shaped member is hollow, and a tube having one end connected to the nozzle body is inserted therein, and the other end of the tube is provided at a first end provided at the other end of the shaft-shaped member. And a second coupler is detachably connected to the first coupler, and a supply tube for supplying a processing liquid to the nozzle body via the tube is connected to the second coupler. 2. The spin processing device according to claim 1, wherein the spin processing device is connected. 3. A substrate is rotated by injecting a processing liquid from an upper nozzle body on an upper surface of the substrate and a processing liquid from a lower nozzle body provided in a nozzle head on the lower surface. A spin processing method for processing the upper surface and the lower surface of the substrate, wherein the substrate is rotated to eject the processing liquid from the upper nozzle body to the upper surface of the substrate, and the lower nozzle body provided to the nozzle head on the lower surface. A step of spraying the processing liquid to process the substrate; a step of rotating the nozzle head after the processing of the substrate with the processing liquid to remove the processing liquid attached to the nozzle head; Drying the substrate by rotating the substrate to remove the processing liquid attached to the substrate and drying the substrate. 4. The spin processing method according to claim 3, wherein the step of rotating the nozzle head is performed before the step of drying the substrate. 5. The spin processing method according to claim 3, wherein the step of rotating the nozzle head is performed simultaneously with the step of drying the substrate.