JP2002031768A - Optical adm device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical ADM device which is capable of suppressing that the device becomes large. SOLUTION: In the optical ADM device, a first channel waveguide section 10, a first slab waveguide section 20, an array waveguide section 30, a second slab waveguide section 40 and a second channel waveguide section 50 for wavelength separation and synthesis are formed on a substrate 2. And also, a switch section 60 is disposed on a substrate 2. The switch section 60 has movable mirrors 61. The movable mirrors 61 are freely movable in an advance direction and retreat direction with respect to the optical paths in the second channel waveguides 511 to 51N for wavelength separation and second channel waveguides 521 to 52N for wavelength synthesis. The movable mirrors 61 is disposed on the substrate 2 in such a manner that the movable mirrors 61 are made freely movable in the advance direction and retreat direction with respect to groove parts 3 of the positions corresponding to respective intersection parts.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to an optical ADM (Add Dr.
op Multiplexer) device.

[0002]

2. Description of the Related Art As this type of optical ADM device, for example, an optical ADM device as disclosed in Japanese Patent Application Laid-Open No. 11-271559 is known. This Japanese Patent Application Laid-Open No. 11-2715
The optical ADM apparatus disclosed in Japanese Patent Application Publication No. 59-59139 has an input port waveguide, an optical demultiplexer connected to the input port waveguide, and an input port connected to the output port of the optical demultiplexer by the waveguide. And an output port waveguide connected to the optical multiplexer. The waveguide connecting the output port of the optical demultiplexer and the input port of the optical multiplexer includes an add of signal light to the optical transmission path. ) Or drop (dro
p) or an optical multi-port optical switch to do both.

A thermo-optical switch in the form of a Mach-Zehnder (MZ) interferometer is used for this optical switch. The thermo-optical switch has a heating element, which controls the optical path length (phase shift) of the optical waveguide.
For example, in an optical ADM device disclosed in Japanese Patent Application Laid-Open No. H11-271559, a thermo-optic switch drops a signal light from an optical demultiplexer and applies a different signal light by applying a voltage to a heating element. And outputs it to the optical multiplexer. On the other hand, by canceling the application of the voltage to the heating element, the thermo-optical switch outputs the signal light from the optical demultiplexer to the optical multiplexer.

[0004]

However, an optical ADM apparatus using a thermo-optical switch in the form of an MZ interferometer as an optical switch, such as an optical ADM apparatus described in Japanese Patent Application Laid-Open No. 11-271559, is difficult to solve. In order to form the mechanism, it has been found that an appropriate optical path length is required, the area occupied by the optical switch is increased, the area of the substrate is increased, and the entire optical ADM apparatus has a problem. .

Also, an optical ADM device using a thermo-optical switch utilizes the modulation of the refractive index due to a change in temperature (heating by a heating element), so that the operation speed of the optical switch is reduced (10 ms or more). It also turned out to have problems.

Further, in an optical ADM device using a thermo-optical switch, since a subtle change in the refractive index is controlled by the magnitude of the voltage applied to the heating element, the switching characteristics of each optical switch are made uniform. It is also found that there is a problem that the adjustment of the temperature is required and the productivity is deteriorated.

[0007] The present invention has been made in view of the above points, and an object of the present invention is to provide an optical ADM apparatus capable of suppressing an increase in the size of the apparatus.

[0008]

An optical ADM apparatus according to the present invention is an optical ADM apparatus having a wavelength separation / combination unit and a switch unit on a substrate, wherein the wavelength separation / combination unit includes at least one array waveguide. The switch unit includes a wave path type diffraction grating, and the switch unit has a movable mirror that is movable in an advancing direction and an egressing direction with respect to an optical path on the wavelength separation side of the wavelength separation and synthesis unit.

In the optical ADM apparatus according to the present invention, when the movable mirror has advanced to the optical path on the wavelength separation side of the wavelength separation / combination section, the switch reflects the signal light passing through the optical path on the wavelength separation side and is movable. When the mirror is out of the optical path on the wavelength separation side, the signal light passing through the optical path on the wavelength separation side is passed. As a result, the switch section has a mechanical configuration, and the area of the substrate is smaller than that of a conventional optical ADM device using a thermo-optical switch. As a result, an increase in the size of the device can be suppressed.

Preferably, the switch section has a plurality of movable mirrors, and the plurality of movable mirrors are arranged in a straight line along a groove crossing the optical path on the wavelength separation side of the wavelength separation / combination section. . With this configuration, it is possible to realize a configuration in which the switch unit can be simply and inexpensively arranged. In addition, the required accuracy of the arrangement position of the movable mirror is relaxed, the assembling of the switch unit to the substrate is facilitated, and the productivity can be improved.

The wavelength separation / combination unit includes an arrayed waveguide type diffraction grating for wavelength separation and an arrayed waveguide type diffraction grating for wavelength synthesis. A channel waveguide, a first wavelength separation slab waveguide, a wavelength separation array waveguide, a second wavelength separation slab waveguide, and a plurality of second wavelength separation channel waveguides; The combining arrayed waveguide type diffraction grating includes a first wavelength combining channel waveguide, a first wavelength combining slab waveguide, a wavelength combining array waveguide, a second wavelength combining slab waveguide, and a plurality of wavelength combining slab waveguides. And the second wavelength separating channel waveguide and the second wavelength combining channel waveguide through which the signal light of the same wavelength passes are equal to one another. Cross on two straight lines, the groove is Is formed along a straight line, the switch unit preferably has as many movable mirror points of intersection. In the case of such a configuration, an arrayed-waveguide grating for wavelength separation (Arrayed-Waveguide Gratin) is used.
g: hereinafter abbreviated as AWG) and an AADM for wavelength combining, which can realize a configuration in which the switch unit can be simply and inexpensively arranged.
In addition, the required accuracy of the arrangement position of the movable mirror is relaxed, the assembling of the switch unit to the substrate is facilitated, and the productivity can be improved.

The wavelength separation / combination unit includes a wavelength separation / combination array waveguide type diffraction grating, and the wavelength separation / combination array waveguide type diffraction grating includes a first wavelength separation / combination channel waveguide and a first wavelength separation / combination channel waveguide. A slab waveguide for wavelength separation / synthesis, an array waveguide for wavelength separation / synthesis, a second slab waveguide for wavelength separation / synthesis, and a plurality of second channel waveguides for wavelength separation / synthesis; The second wavelength separation / synthesis channel waveguide is formed between the second wavelength separation / synthesis slab waveguide and the second wavelength separation / synthesis channel waveguide. It is preferable to have the same number of movable mirrors as the two wavelength separation / combination channel waveguides. In the case of such a configuration, the wavelength separation AW
G and AWG for wavelength synthesis have common optical AD
In the M device, it is possible to realize a configuration in which the switch unit can be simply and inexpensively arranged. In addition, the required accuracy of the arrangement position of the movable mirror is relaxed, the assembling of the switch unit to the substrate is facilitated, and the productivity can be improved. Further, an optical ADM having substantially flat characteristics
The transmission band of the device can be realized.

The wavelength separation / combination unit includes an arrayed waveguide type diffraction grating for wavelength separation and an arrayed waveguide type diffraction grating for wavelength synthesis. A channel waveguide, a first wavelength separation slab waveguide, a wavelength separation array waveguide, a second wavelength separation slab waveguide, and a plurality of second wavelength separation / synthesis channel waveguides; The wavelength-combining array waveguide type diffraction grating is continuous with a first wavelength-combining channel waveguide, a first wavelength-combining slab waveguide, a wavelength-combining array waveguide, and a second wavelength-separating slab waveguide. A second wavelength combining slab waveguide sharing a part, and a plurality of second wavelength separating / combining channel waveguides are provided.
The second wavelength separation / synthesis channel waveguides are arranged in parallel between the second wavelength separation / slab waveguide and the second wavelength synthesis / slab waveguide and the second wavelength separation / synthesis channel waveguide. Preferably, the switch unit has the same number of movable mirrors as the second wavelength separation / combination channel waveguide. In this case, the second wavelength separation slab waveguide and the second wavelength synthesis slab waveguide share a part of the wavelength separation AWG and the wavelength synthesis AWG. In the optical ADM device, a configuration in which the switch unit can be simply and inexpensively arranged can be realized. In addition, the required accuracy of the arrangement position of the movable mirror is relaxed, the assembling of the switch unit to the substrate is facilitated, and the productivity can be improved. Further, a transmission band of the optical ADM device having substantially flat characteristics can be realized. Furthermore, the number of optical circulators can be reduced as compared with an optical ADM device having a configuration in which an AWG for wavelength separation and an AWG for wavelength synthesis are shared.

[0014] The switch section has an insulating layer provided with a movable mirror on one surface side, a first electrode layer formed on the other surface side of the insulating layer, and a position facing the insulating layer of the substrate. And a second electrode layer formed, wherein the insulating layer is bent by an electrostatic attraction generated by applying a predetermined voltage between the first electrode layer and the second electrode layer, It is preferable to move the movable mirror in the forward or backward direction with respect to the optical path on the wavelength separation side. With this configuration, the operating speed of the switch unit can be increased as compared with a conventional optical ADM device using a thermo-optical switch.

[0015] The insulating layer may be in a state where the movable mirror retreats from the optical path on the wavelength separation side when a predetermined voltage is not applied between the first electrode layer and the second electrode layer. It is preferable to be formed in advance so as to be bent. In such a configuration, a predetermined voltage is not applied between the first electrode layer and the second electrode layer, and the movable mirror moves out of the optical path on the wavelength separation side of the wavelength separation / combination unit. The set state can be set as an initial state, and power consumption for operating the switch unit can be reduced.

The switch section has a first electrode layer provided with a movable mirror on one surface side and a first electrode layer sandwiching an insulating layer.
A second electrode layer formed at a position facing the electrode layer of
The first electrode layer is bent by an electrostatic attraction generated by applying a predetermined voltage between the first electrode layer and the second electrode layer, and causes the movable mirror to move the movable mirror on the wavelength separation side. It is preferable to move in the advance direction or the exit direction with respect to the optical path. With this configuration, the operating speed of the switch unit can be increased as compared with a conventional optical ADM device using a thermo-optical switch. In addition, since the movable mirror is provided on the first electrode layer as compared with the configuration in which the first electrode layer is formed on one surface side of the insulating layer on which the movable mirror is provided, the manufacturing cost of the switch unit is increased. Can be simplified and the cost can be reduced.

Further, when the predetermined voltage is not applied between the first electrode layer and the second electrode layer, the first electrode layer allows the movable mirror to move out of the optical path on the wavelength separation side. It is preferable to be formed so as to be bent in advance so as to be in a bent state. In such a configuration, a predetermined voltage is not applied between the first electrode layer and the second electrode layer, and the movable mirror moves out of the optical path on the wavelength separation side of the wavelength separation / combination unit. The set state can be set as an initial state, and power consumption for operating the switch unit can be reduced.

Preferably, the first electrode layer is formed of the same material as the movable mirror. With this configuration, the first electrode layer and the movable mirror can be formed very easily in the switch section.

Preferably, the movable mirror and the first electrode layer are formed of nickel. In the case of such a configuration, the movable mirror and the first electrode layer can be formed by using a metal plating technique whose process is simple and the device is inexpensive.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the optical ADM apparatus according to the present invention will be described below in detail with reference to the drawings. In each of the drawings, the same elements will be denoted by the same reference symbols, without redundant description.

(First Embodiment) First, based on FIG.
An optical ADM device according to a first embodiment of the present invention will be described.
FIG. 1 is a configuration diagram illustrating the optical ADM apparatus according to the first embodiment.

The optical ADM apparatus 1 according to the first embodiment includes a wavelength separating waveguide type diffraction grating (AWG) and a wavelength combining AW.
G, and each AWG is formed on a substrate 2 made of Si or SiO ₂ . A switch unit 60 is provided on the substrate 2.

The first channel waveguide section 10 includes one first wavelength separating channel waveguide 11 and one first wavelength combining channel waveguide 12. The first slab waveguide section 20 includes a first wavelength separation slab waveguide 21 connected to the first wavelength separation channel waveguide 11 and a first wavelength separation slab waveguide 21.
And a first wavelength-synthesizing slab waveguide 22 connected to the wavelength-synthesizing channel waveguide 12.

The array waveguide section 30 is composed of M (M ≧ 2) channel waveguides 31 _{1 to} 31 _M connected to the first wavelength separation slab waveguide 21 and having different optical path lengths. Wavelength array composed of M (M ≧ 2) channel waveguides 32 _{1 to} 32 _M connected to the array waveguide section 31 for wavelength and the first slab waveguide for wavelength synthesis 22 and having different optical path lengths from each other. And a waveguide section 32. The second slab waveguide section 40 includes a second wavelength separation slab waveguide 41 connected to the wavelength separation array waveguide section 31 and a second wavelength connected to the wavelength synthesis array waveguide section 32. And a slab waveguide 42 for synthesis. The second wavelength separation / synthesis channel waveguide unit 50 includes the second wavelength separation / slab waveguide 4.
N (N ≧ 2) second wavelength separation channel waveguides 51 _{1 to} 51 _N connected to the first and N (N ≧ 2) second wavelength synthesis slab waveguides 42 Of the second wavelength synthesizing channel waveguides 52 _{1 to} 52 _N.

In the optical ADM apparatus 1, the wavelength separation AW
G denotes a first wavelength separation channel waveguide 11, a first wavelength separation slab waveguide 21, a wavelength separation array waveguide unit 31, a second wavelength separation slab waveguide 41, and a second
Of the wavelength separating channel waveguides 51 _{1 to} 51 _N. On the other hand, in the optical ADM apparatus 1, the wavelength combining A
The WG includes a first wavelength combining channel waveguide 12, a first wavelength combining slab waveguide 22, a wavelength combining array waveguide section 32, a second wavelength combining slab waveguide 42, and a second It will have the wavelength combining channel waveguides 52 _{1 to} 52 _N.

The first wavelength separating channel waveguide 11 is
An input end 11a is provided on the end face of the substrate 2 and the input end 11a
Has an output end 11b for outputting the signal light input to the slab waveguide 21 for the first wavelength separation. The first wavelength synthesizing channel waveguide 12 is connected to the input end 12a by the first
The output end 12 for outputting the signal light input to the input end 12a at the junction position with the wavelength combining slab waveguide 22.
b on the end surface of the substrate 2.

The first wavelength separation slab waveguide 21 receives the signal light input from the output end 11b of the first wavelength separation channel waveguide 11 to the first wavelength separation slab waveguide 21, Is input to the input end 31a of the array waveguide unit 31 for wavelength separation joined to the slab waveguide 21 for wavelength separation. The first wavelength-synthesizing slab waveguide 22 is connected to an output end 32b of the wavelength-synthesizing array waveguide unit 32 joined to the first wavelength-synthesizing slab waveguide 22 from the first end.
The signal light input to the slab waveguide 22 for wavelength synthesis is input to the input end 12a of the first channel waveguide 12 for wavelength synthesis.

The wavelength separation array waveguide section 31 has an input end 31a for inputting signal light from the first wavelength separation slab waveguide 21 and outputs the signal light to the second wavelength separation slab waveguide 41. Output end 31b. Each of the _M channel waveguides 31 _{1 to} 31 _M has a different optical path length by a predetermined length ΔL, and gives a phase difference to the signal light guided therethrough.

The wavelength combining array waveguide section 32 has an input end 32a for inputting signal light from the second wavelength combining slab waveguide 42 and outputs the signal light to the first wavelength combining slab waveguide 22. Output end 32b. Each of the _M channel waveguides 32 _{1 to} 32 _M has a different optical path length by a predetermined length ΔL, and gives a phase difference to the signal light guided through each.

The second wavelength separation slab waveguide 41 converts the signal light input from the output end 31b of the wavelength separation array waveguide section 31 to the second wavelength separation slab waveguide 41 into the second wavelength separation slab waveguide 41. Input ends 5 of the second wavelength separation channel waveguides 51 _{1 to} 51 _N joined to the separation slab waveguide 41.
1a. Second wavelength combining slab waveguide 42
Are input to the second wavelength synthesizing slab waveguide 42 from the output ends 52b of the second wavelength synthesizing channel waveguides 52 _{1 to} 52 _N joined to the second wavelength synthesizing slab waveguide 42. The signal light is input to the input end 32a of the wavelength combining array waveguide 32.

The second wavelength separating channel waveguides 51 ₁ to 51 _1-
51 _N are the second wavelength separation slab waveguides 41
From the input terminal 51a is output (dropped) to an output terminal 52b provided on the end face of the substrate 2. Second
Each of the wavelength synthesis channel waveguides 52 _{1 to} 52 _N of
The signal light input (added) from the input end 52a provided on the end face of the substrate 2 is output from the output end 52b to the second slab waveguide 42 for wavelength synthesis. The second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesizing channel waveguides 52 _{1 to} 52 _N intersect with each other at the portion of the groove 3 described below (for example, , Orthogonal).

The substrate 2 extends in the direction in which the second wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel waveguides 52 _{1 to} 52 _N are arranged side by side, and A groove 3 for cutting each intersection of the wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel waveguides 52 _{1 to} 52 _N is formed. The groove 3 is formed by using a dicing technique or the like.

The switch section 60 has a movable mirror 61, an insulating layer 62, a first electrode layer 63, and a second electrode layer 64, as shown in FIGS. The same number of movable mirrors 61 as the number of intersections (second wavelength separating channel waveguides 51 _{1 to} 51 _N or second wavelength combining channel waveguides 52 _{1 to} 52 _N ) are arranged in the switch section 60 in an array. The movable mirrors 61 are arranged in a straight line along the groove 3. The movable mirror 61 is movable in the forward and backward directions with respect to the optical paths in the second wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel waveguides 52 _{1 to} 52 _N. The switch unit 60 is disposed on the substrate 2 such that each movable mirror 61 is movable in the forward and backward directions with respect to the groove 3 at a position corresponding to each intersection. Movable mirror 61
Has a flat plate shape having a size of about 200 μm × 100 μm in the present embodiment.

The insulating layer 62 is made of, for example, polysilicon, and the movable mirror 61 is provided on one surface side. The first electrode layer 63 is formed on the other surface side of the insulating layer 62. The second electrode layer 64 is formed on the insulating layer 6 of the substrate 2.
2 is formed at a position facing one surface. The insulating layer 62 is deflected by an electrostatic attraction generated by applying a predetermined voltage between the first electrode layer 63 and the second electrode layer 64, and as shown in FIGS. 61 is moved in the forward or backward direction with respect to the optical path at the intersection of the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguides 52 _{1 to} 52 _N. The insulating layer 62 has a width of 200 in this embodiment.
The length is about 1.5 mm, and the thickness is about 1.5 μm. Also, the first electrode layer 63
And the thickness of the second electrode layer 64 is about 50 nm.

Further, when a predetermined voltage is not applied between the first electrode layer 63 and the second electrode layer 64, the movable mirror 61 serves as a second wavelength separation / combination channel. each waveguide 51 of the waveguide section _{50 1 ~51 N, 52 1 ~52} N
Is bent in advance so as to be retracted with respect to the optical path at. Thereby, the first electrode layer 63
A predetermined voltage is not applied between the movable mirror 61 and the second electrode layer 64, and the movable mirror 61 has the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguide 52 _1.
The state in which the exit with respect to the optical path at the intersection of the to 52 _N can be set as the initial state, it is possible to reduce the power consumption for operating the switch section 60 (the movable mirror 61). In the present embodiment, the first electrode layer 6
By forming the first electrode layer 63 so that a compressive stress is generated in 3, the insulating layer 62 is in a state of being bent in advance.

Next, a manufacturing process of the switch section 60 will be described with reference to FIG. The switch unit 60 is manufactured by using a thin film technology such as a photolithography technology and an etching technology. FIG. 6 shows an example in which one movable mirror 61 and one first electrode layer 63 are formed for one insulating layer 62.
1 can be manufactured in a similar manner.

First, as shown in FIG.
The first is formed on the substrate 71 by using a photolithography technique or the like.
A metal pattern 72 corresponding to the electrode layer 63 is formed.
At this time, the metal pattern 72 (the first electrode layer 63) is formed while controlling the stress so that a compressive stress is generated in the metal pattern 72 (the first electrode layer 63). When the metal pattern 72 is formed, as shown in FIG.
The polysilicon film 73 is formed by using VD or a sputtering technique. Further, a resist film 74 is applied on the polysilicon film 73.

After the application of the resist film 74, FIG.
As shown in (1), a mold 75 corresponding to the movable mirror 61 is formed in the resist film 74 by using a lithography technique or the like. Thereafter, as shown in FIG. 6D, the mold 75 formed on the resist film 74 by a metal plating technique.
A metal (for example, copper or nickel) 76 to be the movable mirror 61 is grown therein. Finally, as shown in FIG. 6E, the Si substrate 71,
The resist film 74 is removed. As described above, by using the thin film technology such as the photolithography technology and the etching technology, the switch unit 60 can be easily manufactured at low cost.

A predetermined voltage (about 20 V in the present embodiment) is applied between the first electrode layer 63 and the second electrode layer 64.
Is applied, as shown in FIG. 4, the insulating layer is bent by the electrostatic attraction generated between the first electrode layer 63 and the second electrode layer 64, and the movable mirror 61
Are the second wavelength separation channel waveguides 51 _{1 to} 51 _N and the second
Is advanced to the optical path at the intersection with the wavelength synthesizing channel waveguides 52 _{1 to} 52 _N. Movable mirror 6
1 is a movable mirror 61 is a second wavelength separation channel waveguide 51 _{1 to} 51 _N and a second wavelength synthesis channel waveguide 52 _1.
To 52 in the state that advances with respect to the optical path at the intersection of the _N, the movable mirror 61, a second output from the wavelength separating slab waveguide 41 and the second wavelength separation channel waveguide 51 ₁ to 51 _N The reflected signal light is reflected and input to the corresponding second wavelength combining channel waveguides 52 _{1 to} 52 _N.

When a predetermined voltage is not applied between the first electrode layer 63 and the second electrode layer 64, as shown in FIG. 5, the movable mirror 61 is connected to the second wavelength separation channel conductor. Waveguides 51 _{1 to} 51 _N and second wavelength combining channel waveguide 5
In a state of being exited from the optical path at the intersection of the 2 ₁ to 52 _N. In the state where the movable mirror 61 is protruded from the optical path at the intersection between the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguides 52 _{1 to} 52 _N , the second Output from the wavelength separation slab waveguide 41, and are output from the second wavelength separation channel waveguides 51 _{1 to} 51 5.
The signal light passing through 1 _N passes through the space in the groove 3 and
The output reaches the output end 51b of the second wavelength separation channel waveguides 51 _{1 to} 51 _N and is dropped. Also, the second
Input ends 52 of the wavelength synthesizing channel waveguides 52 _{1 to} 52 _N
If the ad signal light is inputted from a, signal light ad passes through the space in the groove 3, to the output end 52b of the second wavelength-multiplexing channel waveguide 52 ₁ to 52 _N .
By setting the width of the groove 3 to about 20 μm, the loss of signal light in the groove 3 can be suppressed to about 3 dB. Further, if the groove portion 3 is operated by filling it with an electrically insulating matching oil, the loss can be reduced to 1 dB or less, and the movable mirror 61 is formed as a concave surface and the reflected light and the second wavelength separating channel waveguides 51 ₁ to 51 ₁ to By improving the coupling with 51 _N , the loss can be reduced to 0.3 dB.

Therefore, in the optical ADM apparatus 1,
By selectively operating the predetermined movable mirror 61 in the switch unit 60 having the above-described configuration, the signal light of a certain wavelength input to the first channel waveguide unit 10 is dropped, and the other wavelengths that are not dropped are dropped. The signal light of a certain wavelength is added together with the signal light of
0 can be output.

As described above, the light AD according to the first embodiment is
In the M device 1, the switch unit 60 moves in the direction in which the light enters the optical path at the intersection of the second wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel waveguides 52 _{1 to} 52 _N. In addition, since the movable mirror 61 has a mechanical configuration in which the movable mirror 61 is movable in the retreating direction, the area of the substrate 2 is smaller than that of a conventional optical ADM device using a thermo-optical switch. As a result, an increase in the size of the optical ADM apparatus 1 can be suppressed.

AWG for wavelength separation and AW for wavelength synthesis
In the optical ADM apparatus 1 having the configuration G, it is possible to realize a configuration in which the switch unit 60 can be arranged simply and at low cost.

Since the movable mirror 61 has a flat plate shape, even if the arrangement position of the movable mirror 61 (switch section 60) is slightly shifted in a direction parallel to the mirror surface (reflection surface) of the movable mirror 61, The movable mirror 61 can reliably reflect the signal light from the second wavelength separating channel waveguides 51 _{1 to} 51 _N to the second wavelength combining channel waveguides 52 _{1 to} 52 _N. Further, since the signal light has a predetermined light flux width, even if the arrangement position of the movable mirror 61 (the switch unit 60) is slightly shifted in the direction perpendicular to the mirror surface (reflection surface) of the movable mirror 61, there is still a certain amount. The second wavelength separation channel waveguides 51 _{1 to} 51 _N are obtained in a state where the reflection intensity of
From the second wavelength combining channel waveguide 52 ₁
~ 52 _N reflection is possible. From these facts, the required accuracy for the arrangement position of the movable mirror 61 is relaxed, the assembling of the switch unit 60 to the substrate 2 is facilitated, and the productivity can be improved.

The switch unit 60 is provided with a movable mirror 61.
, An insulating layer 62, a first electrode layer 63, and a second electrode layer 64, wherein the insulating layer has a predetermined voltage between the first electrode layer 63 and the second electrode layer 64. , The movable mirror 61 intersects the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguides 52 _{1 to} 52 _N. By moving the switch section 60 in the forward or backward direction with respect to the optical path, the operation speed of the switch section 60 becomes 1 ms or less, and the operation speed of the switch section 60 is reduced as compared with a conventional optical ADM apparatus using a thermo-optical switch. Can be faster.

(Second Embodiment) Next, based on FIG.
An optical ADM device according to a second embodiment of the present invention will be described.
FIG. 7 is a configuration diagram illustrating an optical ADM apparatus according to the second embodiment.

Optical ADM apparatus 101 according to the second embodiment
Has a configuration in which an AWG for wavelength separation and an AWG for wavelength synthesis are shared, and an AWG for wavelength separation and synthesis in which the AWG for wavelength separation and the AWG for wavelength synthesis are shared.
G is the substrate 2 as in the optical ADM apparatus 1 of the first embodiment.
Is formed on. The switch unit 6 is provided on the substrate 2.
0 is provided.

The first channel waveguide section 110 includes one first wavelength separation / combination channel waveguide 111. The first wavelength separation / synthesis slab waveguide section 120 includes a first wavelength separation / synthesis slab waveguide 121 connected to the first wavelength separation / synthesis channel waveguide 111. The array waveguide unit 130 for wavelength separation / synthesis includes a plurality of channel waveguides 131 _{1 to} 131 _M connected to the first slab waveguide 121 for wavelength separation / synthesis. The second wavelength separation / synthesis slab waveguide section 140 includes a second wavelength separation / synthesis slab waveguide 141 connected to the channel waveguides 131 _{1 to} 131 _M. Second Wavelength Separating / Combining Channel Waveguide 150
Are a plurality of second wavelength separation / synthesis channel waveguides 15 connected to the second wavelength separation / synthesis slab waveguide 141.
Including a ₁ 1 ~151 _N.

In the optical ADM apparatus 101, the wavelength separation / combination AWG is the first wavelength separation / combination channel waveguide 1.
11, a first wavelength separation / synthesis slab waveguide 121, a wavelength separation / synthesis array waveguide section 130, a second wavelength separation / synthesis slab waveguide 141, and a second wavelength separation / synthesis channel waveguide 151 ₁ It will have a ~151 _N.

Hereinafter, the optical ADM according to the second embodiment will be described.
Description will be made on the assumption that the device 101 functions as an optical demultiplexing circuit. That is, the signal light input to the first wavelength separation / combination channel waveguide 111 is demultiplexed, and the demultiplexed signal light of each wavelength is transmitted to N second wavelength separation / combination channel waveguides 151 _1. The description will be made on the assumption that the output is performed to any one of _N to 151 _N.

First Wavelength Separating / Combining Channel Waveguide 11
Reference numeral 1 denotes an output terminal 111b having an input terminal 111a on an end face of the substrate 2 and outputting a signal light input to the input terminal 111a.
At the joint position with the first wavelength separation / synthesis slab waveguide 121.

First slab waveguide 121 for wavelength separation / combination
Are connected from the output end 111b of the first wavelength separation / synthesis channel waveguide 111 to the first wavelength separation / synthesis slab waveguide 12
The signal light input to 1 is input to the input terminal of the wavelength separation / synthesis array waveguide unit 130 joined to the first wavelength separation / synthesis slab waveguide 121.

The wavelength separating / synthesizing array waveguide section 130 includes:
An input end 131a for inputting signal light from the first wavelength separation / synthesis slab waveguide 121, and an output end 131b for outputting the signal light to the second wavelength separation / synthesis slab waveguide 141.
And M channel waveguides 131 _{1 to} 13
1 _M is such that each optical path length is different by a predetermined length ΔL,
A phase difference is given to the signal light guided through each.

Second slab waveguide for wavelength separation / combination 141
Is the output end 13 of the wavelength separation / synthesis array waveguide section 130.
The signal light input from the first wavelength separation / synthesis slab waveguide 141 to the second wavelength separation / synthesis slab waveguide 141 is coupled to the second wavelength separation / synthesis channel waveguide 151 _1- 151 _N is input to the input terminal 151a of the.

Second Wavelength Separating / Combining Channel Waveguide 15
11 _{1 to} 151 _N respectively convert the signal light input from the second wavelength separation / synthesis slab waveguide 141 to the input end 151a,
The signal is output to an output terminal 151b provided on the end surface of the substrate 2.

The optical ADM apparatus 101 includes a first optical circulator 181 connected to the first wavelength separation / combination channel waveguide 111 and each of the second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N. And a second optical circulator 182 connected to the output end 151b.
The first optical circulator 181 has a first terminal 181a.
And a second terminal 181b connected to the first wavelength separation / combination channel waveguide 111 and a third terminal 181c. The first optical circulator 181 converts the optical signal input to the first terminal 181a into the second terminal 181a.
1b, the signal light input from the first wavelength separation / combination channel waveguide 111 to the second terminal 181b is output from the third terminal 181c. The second optical circulator 182 has a first terminal 182a, a second terminal 182b connected to the corresponding second wavelength separation synthesis channel waveguide 151 ₁ ~151 _N, and a third terminal 182c Have. The second optical circulator 182 outputs the signal light input (added) to the first terminal 182a to the output end (input end) 151b of the second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N , the second signal light inputted from the output terminal 151b to the second terminal 182b of channel wavelength separating and synthesizing waveguide 151 ₁ ~151 _N third terminal 182c
Output (drop) from

On the substrate 2, between the second wavelength separation / synthesis slab waveguide 141 and the second wavelength separation / synthesis channel waveguide section 150, each of the second wavelength separation / synthesis channel waveguides 151 ₁ to 151 ₁ . Grooves 3 extending in the direction in which 151 _N are juxtaposed are formed. In the switch section 60, the same number of movable mirrors 61 as the second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N are arranged in an array. Each movable mirror 61 is configured to be movable in the forward and backward directions with respect to the groove 3 at a position corresponding to the optical path in the corresponding second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N.

When a predetermined voltage is applied between the first electrode layer (not shown) and the second electrode layer (not shown),
The movable mirror 61 has a groove 3 at a position corresponding to the optical path in the second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N.
Is advanced. In a state where the movable mirror 61 has advanced to the groove 3 at a position corresponding to the optical path in the second wavelength separation / synthesis channel waveguides 151 _{1 to} 151 _N , the movable mirror 61 holds the second wavelength separation / synthesis slab. The signal light output from the waveguide 141 is reflected, and the signal light is reflected by the second wavelength separation / combination channel waveguide 151 _1.
~ 151 _N is never entered.

When a predetermined voltage is not applied between the first electrode layer and the second electrode layer, the movable mirror 61 moves to the optical path in the second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N. It is in a state of being retracted with respect to the groove 3 at the corresponding position. When the movable mirror 61 is retracted from the groove 3 at a position corresponding to the optical path in the second wavelength separation / synthesis channel waveguides 151 _{1 to} 151 _N , the output from the second wavelength separation / synthesis slab waveguide 141 is obtained. The signal light is
Through the space groove 3, is input to the second wavelength separation synthesis channel waveguide 151 ₁ ~151 _N, the output end of the second wavelength separation synthesis channel waveguide 151 ₁ ~151 _N 151
b, and is input to the second optical circulator 182. In addition, the output end (input end) 15 of the second channel waveguides 151 _{1 to} 151 _N from the second optical circulator 182.
The signal light output (added) to 1b passes through the space in the groove 3 and is input to the second slab waveguide 141 for wavelength separation / combination.

As described above, the light AD according to the second embodiment is
In the M device 101, similarly to the optical ADM device 1 of the first embodiment, the area of the substrate 2 is smaller than that of a conventional optical ADM device using a thermo-optical switch. As a result, an increase in the size of the optical ADM device 101 can be suppressed.

AWG for wavelength separation and AW for wavelength synthesis
In the optical ADM apparatus 101 having a configuration in which G is shared, it is possible to realize a configuration in which the switch unit 60 can be arranged easily and at low cost. In addition, the required accuracy of the arrangement position of the movable mirror 61 is relaxed, the assembling of the switch unit 60 to the substrate 2 is facilitated, and the productivity can be improved.

Further, the switch section 60 has a movable mirror 61 for reflecting the signal light, and the reflectance for the signal light of each of the divided wavelengths is substantially constant. As a result, the optical ADM
As shown in FIG. 8, the transmission band of the device 101 has substantially flat characteristics, and it is possible to suppress a change in the reflection intensity with respect to the fluctuation of the wavelength of the signal light.

(Third Embodiment) Next, based on FIG.
An optical ADM device according to a third embodiment of the present invention will be described.
FIG. 9 is a configuration diagram illustrating an optical ADM apparatus according to the third embodiment.

Optical ADM apparatus 201 according to the third embodiment
In the AWG for wavelength separation and the AWG for wavelength synthesis, the second wavelength separation slab waveguide and the second wavelength synthesis slab waveguide share a part thereof. The AWG is the light A of the first and second embodiments.
Like the DM devices 1 and 101, they are formed on the substrate 2. A switch unit 60 is provided on the substrate 2.

Second slab waveguide section 24 for wavelength separation / combination
0 is the second wavelength connected to the wavelength separation array waveguide section 31.
A second wavelength separation / synthesis slab waveguide having a configuration in which the wavelength separation slab waveguide and a second wavelength synthesis slab waveguide connected to the wavelength synthesis array waveguide portion 32 share a part thereof. 241 is included.

In the optical ADM apparatus 201, the AWG for wavelength separation includes the first channel waveguide 11 for wavelength separation,
Slab waveguide 21 for wavelength separation, array waveguide section 31 for wavelength separation, second slab waveguide 241 for wavelength separation / synthesis,
And the second wavelength separation / synthesis channel waveguides 151 ₁ to 151 _1-
151 _N. On the other hand, the optical ADM device 20
1, the wavelength-synthesizing AWG includes a first wavelength-synthesizing channel waveguide 12 and a first wavelength-synthesizing slab waveguide 2.
2. It has the array waveguide section 32 for wavelength synthesis, the second slab waveguide 241 for wavelength separation / synthesis, and the second channel waveguides 151 _{1 to} 151 _N for wavelength separation / synthesis.

Second slab waveguide 241 for wavelength separation / combination
From the output end 31b of the wavelength separating array waveguide section 31
The signal input to the second wavelength separation / synthesis slab waveguide 241
The signal light is supplied to the second wavelength separation / synthesis slab waveguide 241.
Wavelength separation / synthesis channel waveguide joined to the second substrate
151₁~ 151_NTo the input terminal 151a. Ma
The second wavelength separation / synthesis slab waveguide 241 is
Joined to the second wavelength separation / synthesis slab waveguide 241
Second wavelength channel 151 for wavelength separation / combination ₁~ 1
51_NWavelength separation from the input end (output end) 151a of the
The signal light input to the slab waveguide 241 for synthesis is
The input is made to the input end 32a of the forming array waveguide section 32.

As in the case of the second embodiment, the second
A groove extending in the direction in which the second wavelength separation / synthesis channel waveguides 151 _{1 to} 151 _N are arranged between the wavelength separation / synthesis slab waveguide 241 and the second wavelength separation / synthesis channel waveguide 151. 3 are formed. The switch section 60 includes a second channel waveguide 151 for wavelength separation / synthesis.
_The same number of movable mirrors 61 as _{1 to} 151 _N are arranged in an array. Each movable mirror 61 is configured to be movable in the forward and backward directions with respect to the groove portion at the position corresponding to the optical path in the corresponding second wavelength separation / combination channel waveguides 151 _{1 to} 151 _N.

As described above, the light AD according to the third embodiment is
In the M device 201, as in the optical ADM devices 1 and 101 of the first and second embodiments, the substrate area is smaller than that of a conventional optical ADM device using a thermo-optical switch. As a result, an increase in the size of the optical ADM device 201 can be suppressed.

Further, in the wavelength-separating AWG and the wavelength-synthesizing AWG, an optical ADM in which the second wavelength-separating slab waveguide and the second wavelength-synthesizing slab waveguide share a part thereof. In the device 201, a configuration in which the switch unit 60 can be simply and inexpensively arranged can be realized. In addition, the required accuracy for the arrangement position of the movable mirror 61 is relaxed, the assembling of the switch unit 60 to the substrate is facilitated, and the productivity can be improved. Further, similarly to the second embodiment, an optical ADM having substantially flat characteristics
The transmission band of the device 201 can be realized, and the change in the reflection intensity with respect to the fluctuation of the wavelength of the signal light can be suppressed.

Further, AWG for wavelength separation and AW for wavelength synthesis
Compared with the optical ADM apparatus 101 of the second embodiment in which G is shared, the first circulator 181 becomes unnecessary, the number of optical circulators can be reduced, and the cost of the optical ADM apparatus 201 can be reduced. Becomes possible.

(Fourth Embodiment) Next, FIGS. 10 and 11
Based on the above, a switch unit included in the optical ADM apparatus according to the fourth embodiment of the present invention will be described. FIG. 10 is a plan view showing the switch unit, and FIG. 11 is a side view showing the switch unit. The optical ADM apparatus according to the fourth embodiment is different from the optical ADM apparatus according to the first embodiment in the configuration of the switch unit.
The configuration is different from that of the DM device 1 and the configuration except for the switch unit is the same as that of the optical ADM device 1 according to the first embodiment, and the detailed description is omitted.

As shown in FIGS. 12 and 13, the switch section 160 includes the movable mirror 61 and the first electrode layer 1.
63, a second electrode layer 164, and an insulating layer 165. The switch unit 160 includes the same number of movable mirrors 61 as the number of intersections (the second wavelength separating channel waveguides 51 _{1 to} 51 _N or the second wavelength combining channel waveguides 52 _{1 to} 52 _N ).
Are arranged in an array inside the frame portion 166, and the respective movable mirrors 61 are arranged in a straight line along the groove portion 3. The movable mirror 61 is movable in the forward and backward directions with respect to the optical paths in the second wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel waveguides 52 _{1 to} 52 _N. Switch section 160
Are disposed on the substrate 2 such that each movable mirror 61 is movable in the forward and backward directions with respect to the groove 3 at a position corresponding to each intersection. Frame portion 166 is made of, for example, polysilicon.

The first electrode layer 163 is made of, for example, nickel, and has a movable mirror 61 at one end on one surface side. The first electrode layer 163 includes the movable mirror 61
At the end opposite to the end on which the
The frame 166 is formed so as to be supported by the frame 66. The second electrode layer 164 is formed at a position facing one surface of the first electrode layer 163 of the substrate 2 with the insulating layer 165 interposed therebetween. The first electrode layer 163 bends by an electrostatic attraction generated by applying a predetermined voltage between the first electrode layer 163 and the second electrode layer 164, and
As shown in FIG. 13, the movable mirror 61 is moved with respect to the optical path at the intersection of the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguides 52 _{1 to} 52 _N. Move in the advance direction or the exit direction. In the present embodiment, the first electrode layer 163 has a width of 200 μm.
m, the length is about 1.5 mm, and the thickness is about 2.0 μm. Further, the second electrode layer 16
4 has a thickness of about 50 nm.

When the first electrode layer 163 does not apply a predetermined voltage between the first electrode layer 163 and the second electrode layer 164, the movable mirror 61 performs the second wavelength separation. Each of the waveguides 51 _{1 to} 51 _{N of} the synthesis channel waveguide unit 50,
As a state of exit with respect to the optical path of 52 ₁ to 52 _N, it is previously bent in form. Thereby, the first
A predetermined voltage is not applied between the second electrode layer 163 and the second electrode layer 164, and the movable mirror 61 is connected to the second wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel. A state in which the light exits from the optical path at the intersection with the waveguides 52 _{1 to} 52 _N can be set as an initial state, and power consumption for operating the switch unit 160 (movable mirror 61) can be reduced. Note that, in the present embodiment, the first electrode layer 163 is formed so as to be bent in advance by forming the first electrode layer 163 so as to generate a compressive stress.

Next, based on FIG.
The manufacturing process No. 0 will be described. The switch unit 160 is manufactured by using a thin film technology such as a photolithography technology and an etching technology. In FIG. 14, 1
One movable mirror 61 for one first electrode layer 163
Although an example in which is formed is shown, a case where a plurality of movable mirrors 61 are arranged in an array can be manufactured in the same manner.

First, as shown in FIG.
A metal pattern 172 corresponding to the first electrode layer 163 is formed on the i-substrate 71 with nickel. At this time, the metal pattern 172 is formed while controlling the stress such that a compressive stress is generated in the metal pattern 172 (the first electrode layer 163). After the formation of the metal pattern 172, a resist film 74 is applied on the metal pattern 172.

When the resist film 74 is applied, FIG.
As shown in (b), a mold 75 corresponding to the movable mirror 61 is formed on the resist film 74 by using a lithography technique or the like. Thereafter, as shown in FIG. 14C, nickel 76 is grown as a metal to be the movable mirror 61 in a mold 75 formed on the resist film 74 by a metal plating technique. Finally, as shown in FIG. 14D, the Si substrate 71 and the resist film 74 are removed by using an etching technique. As described above, by using the thin film technology such as the photolithography technology and the etching technology, the switch unit 160 can be easily manufactured at low cost.

First electrode layer 163 and second electrode layer 164
When a predetermined voltage (about 20 V in this embodiment) is applied between the first electrode layer 163 and the second electrode layer 164, as shown in FIG. The insulating layer is deflected by the generated electrostatic attraction, and the movable mirror 61 has the second wavelength separation channel waveguides 51 ₁ to 51 ₁ .
51 _N and a second wavelength-multiplexing channel waveguide 52 ₁ to 52 _N
At the intersection with the optical path.
In a state where the movable mirror 61 has advanced to the optical path at the intersection of the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguides 52 _{1 to} 52 _N. The movable mirror 61 reflects the signal light output from the second wavelength separation slab waveguide 41 and passing through the second wavelength separation channel waveguides 51 _{1 to} 51 _N , and the corresponding second wavelength. Synthesis channel waveguides 52 _1-
52 _N.

First electrode layer 163 and second electrode layer 164
When a predetermined voltage is not applied between the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesizing channel waveguide, as shown in FIG. It is in a state of retreating to the optical path at the intersection with 52 _{1 to} 52 _N. In the state where the movable mirror 61 is protruded from the optical path at the intersection between the second wavelength separating channel waveguides 51 _{1 to} 51 _N and the second wavelength combining channel waveguides 52 _{1 to} 52 _N , the second Output from the wavelength separation slab waveguide 41 and the second wavelength separation channel waveguide 51
_The signal light that has passed through _{1 to} 51 _N passes through the space in the groove 3, reaches the output ends 51 b of the second wavelength separation channel waveguides 51 _{1 to} 51 _N , and is dropped. Also,
When the added signal light is input from the input ends 52a of the second wavelength synthesizing channel waveguides 52 _{1 to} 52 _N , the added signal light passes through the space in the groove portion 3 and passes through the second space. It reaches the output end 52b of the wavelength combining channel waveguides 52 _{1 to} 52 _N.

As described above, the ADM according to the fourth embodiment is
In the device, the switch unit 160 includes: a movable mirror 61; a first electrode layer 163 provided with the movable mirror 61;
A second electrode layer 164, and the first electrode layer 163
The movable mirror 61 is bent by electrostatic attraction generated by applying a predetermined voltage between the first electrode layer 163 and the second electrode layer 164, and the movable mirror 61 is moved to the second wavelength separation channel waveguides 51 _{1 to} 51 _{1. N} and second wavelength combining channel waveguide 52 ₁
By moving to the advanced direction or exit direction with respect to the optical path at the intersection of the to 52 _N, as compared with the conventional optical ADM device using a thermo-optic switch, the switch section 16
0 can be increased in operating speed. Further, the first electrode layer 63 is formed on the other surface side of the insulating layer 62 on which the movable mirror 61 is provided (the configuration of the switch section 60 in the first embodiment). Layer 163
The movable mirror 61 is provided on the
Can be simplified and the cost can be reduced.

Further, since the first electrode layer 163 is formed of the same material as the movable mirror 61, the first electrode layer 163 and the movable mirror 61 can be formed on the switch unit 160 very easily. it can. In the fourth embodiment, the first electrode layer 163 and the movable mirror 61 are made of nickel. Nickel first
By using the material for the electrode layer 163 and the movable mirror 61, the first electrode layer and the movable mirror can be formed by using a metal plating technique that has a simple process and is inexpensive as a processing means. In addition, from the viewpoint that the metal plating technique can be used, the material is not limited to the above-described nickel, and any material having flexibility and conductivity, such as copper, gold, silver, or the like, may be used. May be used. Of course, the first electrode layer 163 and the movable mirror 61 may be made of different materials.

The present invention is not limited to the above-described embodiment, but includes first channel waveguide sections 10, 110,
The number of channel waveguides in the array waveguide sections 30 and 130 or the second wavelength separation / combination channel waveguide sections 50 and 150 are not limited to those described above.

In the first to third embodiments, the optical ADM devices 1, 101, and 201 are configured so that the groove 3 is formed in the substrate 2. However, the present invention is not limited to this. At each intersection between the wavelength separation channel waveguides 51 _{1 to} 51 _N and the second wavelength synthesis channel waveguides 52 _{1 to} 52 _N , or each of the second wavelength separation / combination channel waveguides 151 ₁ to 151 _N. A hole may be formed independently for every 151 _N.

[0085]

As described above in detail, according to the present invention, an optical ADM capable of suppressing an increase in the size of an apparatus.
An apparatus can be provided.

[Brief description of the drawings]

FIG. 1 is a configuration diagram illustrating an optical ADM apparatus according to a first embodiment of the present invention.

FIG. 2 is a plan view showing a switch unit included in the optical ADM apparatus according to the first embodiment of the present invention.

FIG. 3 is a side view showing a switch unit included in the optical ADM apparatus according to the first embodiment of the present invention.

FIG. 4 is a diagram illustrating an operation of a switch unit included in the optical ADM apparatus according to the first embodiment of the present invention.

FIG. 5 is a diagram illustrating an operation of a switch unit included in the optical ADM apparatus according to the first embodiment of the present invention.

FIG. 6 is a diagram illustrating a manufacturing process of the switch unit included in the optical ADM device according to the first embodiment of the present invention.

FIG. 7 is a configuration diagram illustrating an optical ADM apparatus according to a second embodiment of the present invention.

FIG. 8 is a diagram showing a relationship between the optical ADM apparatus according to the second embodiment of the present invention and a wavelength indicating a characteristic of a transmission band.

FIG. 9 is a configuration diagram illustrating an optical ADM apparatus according to a third embodiment of the present invention.

FIG. 10 is a plan view illustrating a switch unit included in an optical ADM apparatus according to a fourth embodiment of the present invention.

FIG. 11 is a side view showing a switch unit included in an optical ADM apparatus according to a fourth embodiment of the present invention.

FIG. 12 is a diagram illustrating an operation of a switch unit included in an optical ADM device according to a fourth embodiment of the present invention.

FIG. 13 is a diagram illustrating an operation of a switch unit included in an optical ADM apparatus according to a fourth embodiment of the present invention.

FIG. 14 is a diagram illustrating a manufacturing process of a switch unit included in the optical ADM device according to the fourth embodiment of the present invention.

[Explanation of symbols]

1, 101, 201 optical ADM device, 2 substrate, 3 groove portion, 10 first channel waveguide portion, 11 first channel waveguide for wavelength separation, 12 channel guide for first wavelength combining Waveguide, 20: first slab waveguide portion, 21: first slab waveguide for wavelength separation, 22: first slab waveguide for wavelength synthesis, 30: array waveguide portion, 31: array waveguide for wavelength separation Waveguide part, 32... Array waveguide part for wavelength synthesis, 40
... Second slab waveguide section, 41... Second wavelength separating slab waveguide, 42.
... Second wavelength separation / combination channel waveguides, 51 _{1 to} 5
1 _N ... Second wavelength separating channel waveguide, 52 _{1 to} 52 _N
... Second wavelength synthesizing channel waveguides, 60, 160. Switch section, 61. Movable mirror, 62.
63: first electrode layer, 64, 164: second electrode layer, 1
10: first channel waveguide section; 111: first wavelength separation / combination channel waveguide; 120: first wavelength separation / combination slab waveguide; 121: first wavelength separation / combination slab waveguide; 130: Array waveguide section for wavelength separation / synthesis, 1
40 ... second slab waveguide section for wavelength separation / combination, 141 ...
A second wavelength separation / synthesis slab waveguide, 150... A second wavelength separation / synthesis channel waveguide, 151 _{1 to} 151 _N ... A second wavelength separation / synthesis channel waveguide, 181 a first optical circulator; 182 ... second optical circulator, 2
40... Second slab waveguide section for wavelength separation / synthesis, 241.
A second wavelength separation / synthesis slab waveguide.

Continued on the front page (72) Inventor Tomohiko Kanie 1 Yokohama, Yokohama, Kanagawa Prefecture 1 Sumitomo Electric Industries Co., Ltd. (72) Inventor Masayuki Nishimura 1 Tayacho, Sakae-ku, Yokohama, Kanagawa Prefecture 2H041 AA04 AB13 AC06 AZ01 AZ05 2H047 KA11 KA12 KA15 LA09 LA18 NA10 RA00 RA08 TA01 5K002 BA05 BA06 DA02 FA01

Claims (11)

[Claims] 1. An optical ADM device comprising a substrate and a wavelength separation / combination unit and a switch unit, wherein the wavelength separation / combination unit includes at least one arrayed waveguide type diffraction grating; An optical ADM apparatus comprising a movable mirror movable in an advancing direction and an egressing direction with respect to an optical path on a wavelength separation side of the wavelength separation / combination unit. 2. The switch section has a plurality of movable mirrors, and the plurality of movable mirrors are arranged in a straight line along a groove crossing an optical path on the wavelength separation side of the wavelength separation / combination section. The optical ADM apparatus according to claim 1, wherein: 3. The wavelength separation / combination unit includes a wavelength separation array waveguide type diffraction grating and a wavelength synthesis array waveguide type diffraction grating, wherein the wavelength separation array waveguide type diffraction grating has a first wavelength. It has a separation channel waveguide, a first wavelength separation slab waveguide, a wavelength separation array waveguide, a second wavelength separation slab waveguide, and a plurality of second wavelength separation channel waveguides. The array waveguide type diffraction grating for wavelength synthesis includes a first channel waveguide for wavelength synthesis, a first slab waveguide for wavelength synthesis, an array waveguide for wavelength synthesis, a second slab waveguide for wavelength synthesis, And a plurality of second wavelength-synthesizing channel waveguides, and a waveguide through which signal light of the same wavelength passes through the second wavelength-separating channel waveguide and the second wavelength-synthesizing channel waveguide. Wave paths are on one straight line The optical ADM device according to claim 2, wherein the groove portion is formed along the straight line, and the switch portion has the same number of the movable mirrors as the number of the intersecting points. 4. The wavelength separation / combination unit includes a wavelength separation / combination array waveguide type diffraction grating, wherein the wavelength separation / combination array waveguide type diffraction grating includes a first wavelength separation / combination channel waveguide, A first slab waveguide for wavelength separation / synthesis, an array waveguide for wavelength separation / synthesis, a second slab waveguide for wavelength separation / synthesis, and a plurality of second channel waveguides for wavelength separation / synthesis; Are formed in a direction in which the respective second wavelength separation / combination channel waveguides are juxtaposed between the second wavelength separation / combination slab waveguide and the second wavelength separation / combination channel waveguide. 3. The optical ADM apparatus according to claim 2, wherein the switch section has the same number of movable mirrors as the number of the second wavelength separation / combination channel waveguides. 5. The wavelength separation / combination unit includes a wavelength separation array waveguide type diffraction grating and a wavelength synthesis array waveguide type diffraction grating, wherein the wavelength separation array waveguide type diffraction grating has a first wavelength. A separation channel waveguide, a first wavelength separation slab waveguide, a wavelength separation array waveguide, a second wavelength separation slab waveguide, and a plurality of second wavelength separation / synthesis channel waveguides. The wavelength-combining arrayed waveguide type diffraction grating includes a first wavelength-combining channel waveguide, a first wavelength-combining slab waveguide, a wavelength-combining arrayed waveguide, and the second wavelength separating slab waveguide. A second wavelength synthesizing slab waveguide that is continuous with and shares a part with a wave path, and the plurality of second wavelength separation / synthesis channel waveguides, wherein the groove portion includes the second wavelength; A separating slab waveguide and the second The second wavelength separation / synthesis channel waveguides are formed in a direction in which the second wavelength separation / synthesis channel waveguides are juxtaposed between the wavelength synthesis slab waveguide and the second wavelength separation / synthesis channel waveguides. The optical ADM apparatus according to claim 2, further comprising the same number of movable mirrors as the number of the second wavelength separation / combination channel waveguides. 6. The switch section, wherein: an insulating layer provided with the movable mirror on one surface side; a first electrode layer formed on the other surface side of the insulating layer; and the insulating layer of the substrate The second formed at the position facing the
The insulating layer is bent by electrostatic attraction generated by applying a predetermined voltage between the first electrode layer and the second electrode layer, and the movable layer is movable. The optical ADM apparatus according to any one of claims 1 to 5, wherein a mirror is moved in a forward or backward direction with respect to the optical path on the wavelength separation side. 7. When the predetermined voltage is not applied between the first electrode layer and the second electrode layer, the movable mirror moves the movable mirror to an optical path on the wavelength separation side. 7. The optical ADM apparatus according to claim 6, wherein the optical ADM apparatus is formed by bending in advance so as to be in a state of being retracted. 8. The switch unit, comprising: a first electrode layer provided with the movable mirror on one surface side; and a second electrode formed at a position facing the first electrode layer with an insulating layer interposed therebetween. An electrode layer, wherein the first electrode layer is bent by electrostatic attraction generated by applying a predetermined voltage between the first electrode layer and the second electrode layer, The optical ADM apparatus according to claim 1, wherein the movable mirror is moved in an advancing direction or an egressing direction with respect to the optical path on the wavelength separation side. 9. The movable electrode according to claim 1, wherein the movable mirror is configured to move the wavelength separating side when the predetermined voltage is not applied between the first electrode layer and the second electrode layer. The optical ADM apparatus according to claim 8, wherein the optical ADM apparatus is formed to be bent in advance so as to be retracted with respect to the optical path. 10. The optical ADM apparatus according to claim 8, wherein said first electrode layer is formed of the same material as said movable mirror. 11. The optical ADM apparatus according to claim 10, wherein said movable mirror and said first electrode layer are formed of nickel.