JP3253007B2 - Waveguide-type optical switch pair and waveguide-type matrix optical switch - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a waveguide type optical switch used in the field of optical communication and the like.
Waveguide type deformation 2 × that can be compactly integrated on a single substrate
Applied to the layout structure of a waveguide type matrix optical switch using 2 optical switch及 Bikore a technique effectively.

[0002]

2. Description of the Related Art In recent years, optical fiber, light-receiving elements, and light-emitting elements have been increasingly used in communication networks due to their higher performance and lower cost. In relay networks, most communication lines have already been replaced by optical fiber communication. I have. Further, the optical communication network is changed from a point-to-point optical communication connecting individual nodes to an optical communication network having a network structure in which a plurality of nodes including an access network are connected as optical signals without being converted into electric signals. It is time to develop. There is an urgent need to develop various optical components such as optical branching couplers, optical multiplexers / demultiplexers, and optical switches required for this. Among them, optical switches (particularly matrix optical switches capable of strictly non-blocking switches) are used as components for switching optical fiber lines freely according to demand or for switching to secure a detour in case of line failure. The need is growing.

[0003] Bulk type, waveguide type and the like have been proposed as a realization mode of the optical switch. The bulk type is assembled using movable prisms and lenses as components, and has the advantage of low wavelength dependence and relatively low loss.However, the assembly adjustment process is complicated and not suitable for mass production. There is a problem that it is expensive, and it has not been widely used. The waveguide type is based on an optical waveguide on a flat substrate manufactured using microfabrication technology using photolithography or various types of etching, and is excellent in terms of mass productivity, miniaturization, and the like. Is expected as an optical switch.

[0004] Conventionally, attempts have been made to fabricate a matrix optical switch using optical waveguides of various materials. Among them, a thermal optical system using a quartz optical waveguide fabricated on a silicon substrate has been proposed. A thermo-optical matrix optical switch utilizing an optical effect is excellent in stability and matching with an optical fiber, and is expected as a promising means for realizing a practical matrix optical switch.

FIG. 9 (a) shows an N × N image of the present invention.
FIG. 2 is a configuration conceptual diagram of a 4 × 4 matrix optical switch as an example of a matrix optical switch. This 4 × 4 matrix optical switch has four input line optical waveguides 1a-1d and 2a-
2d, 3a-3d, 4a-4d and four output line optical waveguides 1
c-1b, 2c-2b, 3c-3b, 4c-4b is 4 × 4 =
It has a configuration that intersects at 16 locations. At this intersection, 2 × 2 optical switch elements S11 to S11 as the minimum unit of the optical switch
S44 is arranged. Each of these optical switch elements is switched from a cross state shown in FIG. 9B to a bar state shown in FIG. 9C by ON / OFF driving. Such a matrix optical switch has a strictly non-blocking configuration, and in order to connect an arbitrary input line optical waveguide and an output line optical waveguide, the input line optical waveguide and the output line optical waveguide intersect. You only need to connect one intersection.

FIG. 10 shows a conventional thermo-optical 4 × 4 waveguide matrix optical switch manufactured using a silica-based single mode waveguide corresponding to the 4 × 4 matrix optical switch of FIG. It is a plane arrangement view. 11 (a) is an enlarged plan view of a 2 × 2 switch elements double gate type 2 × 2 optical switch elements using each intersection difference <br/> point (JP-A-6-51354), FIGS. 11B and 11C show C in FIG. 11A.
It is sectional drawing cut | disconnected along the -C 'line and DD' line.

[0007] These waveguides are fabricated on a silicon substrate by a known combination of a flame hydrolysis reaction deposition method and a reactive ion etching technique.

As shown in FIG. 11 (a), the optical switch element comprises an input line optical waveguide 11a-11b and an output line optical waveguide 1 which cross each other at an angle θ at which crosstalk can be ignored.
3 in which bypass waveguides 13a-13b are added to 2a-12b
It comprises two optical waveguides and has two Mach-Zehnder optical interferometer circuits 18a and 18b.

That is, the input line optical waveguides 11a-11b
And a part of the bypass waveguides 13a to 13b are close to each other at two places to form directional couplers 14a and 15a to form a first Mach-Zehnder optical interferometer circuit. Portions of the linear optical waveguides 12a to 12b are close to each other at two locations to form directional couplers 14b and 15b, and constitute a second Mach-Zehnder optical interferometer circuit.

The optical coupling ratio of these directional couplers is set to be 50% at the wavelength of the signal light. In these Mach-Zehnder optical interferometer circuits, the difference between the optical path lengths of the two waveguides connecting the two directional couplers is set to exactly one half of the signal wavelength in the OFF state. At least one of the two waveguides is loaded with a thin-film heater for changing the optical path length using a so-called thermo-optic effect.

In the OFF state (when the thin-film heater is not energized), the first Mach-Zehnder optical interferometer circuit uses a half of the signal wavelength to the two optical waveguides connecting the two directional couplers. Since the optical path length difference is provided, as long as the coupling rates of the two directional couplers are the same, regardless of the absolute value of the coupling rate, the input line optical waveguide 11a-1 is formed by a known interference principle.
The signal light transmitted to 1b is apparently a bypass waveguide 13a-
100% input line optical waveguide 11a without being transmitted to 13b
Since only −11b is propagated, when viewed as a whole 2 × 2 optical switch element, the signal light passes through the optical switch element with a 100% cross path.

Even if signal light leaks into the bypass waveguides 13a-13b in the first Mach-Zehnder optical interferometer circuit,
The leakage signal light apparently propagates only through the bypass waveguides 13a-13b in the second Mach-Zehnder optical interferometer circuit and on the output line optical waveguides 12a-12b according to the same principle as the first Mach-Zehnder optical interferometer circuit. Does not propagate, and when viewed as a whole 2 × 2 optical switch element, there is little light crosstalk to the bar path.

In these two Mach-Zehnder optical interferometers, a thermo-optic phase shifter provided on a waveguide connecting two directional couplers is operated (electric current is supplied to the thin film heater), and the optical path corresponding to the half is obtained. When the length difference is canceled and the ON state is set, the signal light transmitted to the input line optical waveguide 11a in the first Mach-Zehnder optical interferometer circuit is transmitted to the bypass waveguide 13a-1.
3b, and further guided by the second Mach-Zehnder optical interferometer circuit to the output line optical waveguide 12b, whereby the state of the optical switch element can be switched to the bar path.

As described above, the double gate type 2 × 2 optical switch element is a two-stage Mach-Zehnder optical interferometer circuit 18.
Since light crosstalk is controlled by a double barrier composed of a and 18b, a 2 × 2 optical switch element with a very high extinction ratio can be realized, and this is expected from the viewpoint of expanding the application range of the matrix optical switch to the system. ing.

FIG. 14 is a diagram showing another conventional 2.times.2 waveguide optical switch, which is an example of a waveguide 2.times.2 optical switch using only one Mach-Zehnder optical interferometer circuit. .

[0016] On the other hand, in strictly nonblocking waveguide type optical switch composed N × N by connecting a waveguide type optical switch element in the N ² pieces of 2 × 2, by the connection as shown in FIG. 10 of the aforementioned As a configuration in which the number of switch stages is smaller than that of a normal matrix optical switch, FIG.
The following connection configuration (path-independent configuration) is known (Japanese Patent Publication No. 6-66982). This path-independent configuration basically connects the lower output terminal of the optical switch element at the i-th row and j-th column (where i and j are integers and 1 <i <N, j <N). A matrix optical switch is formed by connecting the upper input terminal of the optical switch element in the (i + 1) row and j + 1 column and connecting the upper output terminal to the lower input terminal of the optical switch element in the (i-1) th row and j + 1 column. .

At first glance, the optical switch having the path-independent configuration has a completely different logical configuration from the optical switch having the ordinary matrix configuration. However, it is difficult to connect any input waveguide to any output waveguide. The logical configuration that can be connected by driving only one 2 × 2 waveguide type optical switch element is the same as that of a normal matrix optical switch.

Hereinafter, it will be described that this logical configuration is the same as the conventional one. FIG. 13A is a diagram showing a so-called conventional connection configuration in a 4 × 4 matrix switch, for example. In this connection configuration, an arbitrary input line optical waveguide and an arbitrary output line optical waveguide always have one intersection (for example, 1a-1d and 1c-1b have S11), so that strict non-blocking operation is possible, and In order to connect an arbitrary input line optical waveguide and an output line optical waveguide, only one intersection where the input line optical waveguide intersects with the output line optical waveguide may be connected. In other words, as long as the principle that an arbitrary input line optical waveguide and an arbitrary output line optical waveguide always have one intersection, the logical configuration does not change even if the arrangement of switch elements is changed from the above configuration.

First, the input line waveguide is divided into two parts (for example, 1a-1d is divided into 1a-1e and 1f-1d) and arranged as shown in FIG. And a new intersection of the output line optical waveguide and S12, S13, S14, S23, S24, S34.
Can be moved to this new intersection. In order to connect the input line waveguides divided into two, a cylinder as shown in FIG. 13C is considered, and a circuit is arranged such that these waveguides are attached to the surface thereof. The input line waveguide can be connected smoothly.

Actually, since a circuit is not formed on a cylinder, as shown in FIG. 13D, a planar circuit is formed by two-dimensionally projecting the arrangement on the cylinder onto a plane. Realize. In this configuration, crossings occur in the waveguides connecting the switch elements, and although the appearance is completely different from that of FIG. 13A, an arbitrary input line optical waveguide and an arbitrary output line optical waveguide always cross each intersection. The principle of having is the same as before.

Here, a specific description has been given of a 4 × 4 matrix switch, but by applying the same idea, this configuration can be applied to an N × N matrix switch.
As with a conventional matrix optical switch, there is only one 2 to connect any input waveguide to any output waveguide.
It can be easily understood that the logical configuration is such that connection can be made by driving the × 2 waveguide type optical switch element.

In an N × N strictly non-blocking waveguide optical switch, the number of switch stages in which 2 × 2 waveguide optical switches are integrated is 2N− in a normal matrix configuration.
Whereas one stage is required, only N stages are required in the path-independent configuration. Therefore, in the path-independent configuration, the number of switch stages can be reduced to about half as compared with a normal matrix configuration, so that a significant reduction in circuit length (optical path length) can be expected. Further, a reduction in loss can be expected by shortening the circuit length (optical path length).

[0023]

SUMMARY OF THE INVENTION The present inventor has found the following problems as a result of studying the above conventional technology.

In the above-described conventional path-independent configuration, in the waveguide connecting each switch element between the number of switch stages , a crossing between the waveguides which is not the matrix configuration newly occurs. Therefore, in order to suppress the loss at the intersection and the crosstalk between the waveguides, it is necessary to intersect the two waveguides at a certain intersection angle. Therefore, the waveguide is mainly composed of a curved waveguide before and after the intersection. Waveguide development part 5
It was necessary to provide 1a, 51b, and 51c.

Therefore, even if the number of switch stages is reduced from a normal matrix type configuration to a path-independent type configuration, a waveguide expansion unit that increases the circuit length (optical path length) is required. There is a problem that the effect of shortening the circuit length (optical path length) by reducing the number of stages cannot be sufficiently obtained.

An object of the present invention is to use an optical switch element having a configuration capable of obtaining the above-described high extinction ratio for each optical switch element, and to reduce the circuit length (optical path length) significantly. It is an object of the present invention to provide a technique capable of providing an optical waveguide layout that suppresses an effect of an increase in a circuit length (optical path length) caused by a waveguide expansion portion of a cross waveguide generated in a path-independent configuration.

The above and other objects and novel features of the present invention will become apparent from the description of the present specification and the accompanying drawings.

[0028]

The following is a brief description of an outline of a typical invention among the inventions disclosed in the present application.

The present invention provides a first bypass optical waveguide,
The first bypass optical waveguide is arranged on the same side.
Such as a first input line optical waveguide and a first output line optical waveguide
It is al structure, the input unit and the first input line optical waveguide,
A first 1 × 2 optical switch to the output unit and the first input line optical waveguide and the first bypass waveguide, an input unit
And the first output line optical waveguide of the first bypass waveguide, first to the output portion and the first output line waveguide
2 × 1 optical switch, and the first input line optical waveguide
Path and the first output line optical waveguide intersect at a first intersection
A first waveguide type optical switch, and a second bypass optical waveguide.
On the same side as the waveguide and the second bypass optical waveguide
A second input line optical waveguide and a second output line light arranged
A waveguide, and the input section is connected to the second input line optical waveguide.
A waveguide, and an output portion is provided between the second input line optical waveguide and the second input line optical waveguide.
Second 1 × 2 optical switch having two bypass optical waveguides
And an input unit connected to the second output line optical waveguide and the second bus.
An output optical waveguide, wherein the output portion is the second output line optical waveguide;
A second 2 × 1 optical switch as a path,
The input line optical waveguide and the second output line optical waveguide are connected to a second
A second waveguide type optical switch that intersects at the intersection
A waveguide-type optical switch pair, wherein the first intersection and the
And the second intersection is the first or second input line
An optical waveguide, or the first or second output line optical waveguide
Arrange so as to face each other with an arbitrary line parallel to the straight section of the road.
And the first input line optical waveguide is the first 1 ×.
After configuring the two-optical switch, the first intersection
Intersects the first output line optical waveguide, and then at a third intersection
Disposed so as to intersect with the second input line optical waveguide,
The second input line optical waveguide is connected to the second 1 × 2 optical switch.
After the switch has been configured, the second exit at the second intersection.
Intersects the field line optical waveguide, and then at said third intersection
The first input line optical waveguide is disposed so as to intersect with the first input line optical waveguide;
A first output line optical waveguide is coupled to the second output line at a fourth intersection.
Intersects the field line optical waveguide and then at said first intersection
After crossing the first input line optical waveguide, the first 2 ×
One optical switch, the second output
The power line optical waveguide is connected to the first output line at the fourth intersection.
Intersects the optical waveguide and then at the second intersection,
After crossing the input line optical waveguide of the second
A first switch and a second switch .
The two bypass optical waveguides are the most
Located in a distant position, the first 1 × 2 optical switch, front
The first 2 × 1 optical switch and the second 1 × 2 optical switch
And the second 2 × 1 optical switch is connected to each of the intersections.
Part, and the first 1 × 2 optical switch
Switch and the second 1 × 2 optical switch, and the first
2 × 1 optical switch and the second 2 × 1 optical switch
Are arranged so as to face each other with the parallel line interposed therebetween.
It is characterized by being performed.

The present invention also provides a waveguide type matrix optical switch including at least 2M (M is a positive integer) input line optical waveguides and 2M output line optical waveguides, each having one input line. 2. A waveguide type 2.times.2 optical switch comprising an optical waveguide and an output line optical waveguide, and the waveguide type according to claim 1.
The waveguide according to claim 1 , further comprising an optical switch pair.
(2k-1) by arranging M optical switch pairs in parallel
Stage (k is an integer 1 or M) constitutes the said waveguide-type 2 × 2 optical switch, (M-1) pieces of the claim 1
A 2k-th stage is formed by arranging the waveguide type optical switch pair and the waveguide type 2 × 2 optical switch in this order in parallel, and the 2M input line optical waveguides and the 2M , And a total of 4M optical waveguides are connected without crossing .

The present invention is also a waveguide type matrix optical switch including at least 2M (M is a positive integer) input line optical waveguides and 2M output line optical waveguides, each having one input line. 2. A waveguide type 2.times.2 optical switch comprising an optical waveguide and an output line optical waveguide, and the waveguide type according to claim 1.
The waveguide according to claim 1 , further comprising an optical switch pair.
The M- type optical switch pairs are arranged in parallel to constitute a second k-th stage (k is an integer of 1 or more and M or less), and the waveguide type 2 × 2 optical switch and (M−1) the above-mentioned optical switch pairs. The waveguide described in
Type optical switch pair and the waveguide type 2 × 2 optical switch are arranged in parallel in this order to form a (2k-1) th stage, and the 2M input line optical waveguides and the 2M A total of 4M optical waveguides of the output line optical waveguides are connected without crossing each other.

The present invention also provides a waveguide type matrix light including at least (2M-1) (M is a positive integer of 2 or more) input line optical waveguides and (2M-1) output line optical waveguides. A waveguide type 2 × 2 optical switch, comprising: one input line optical waveguide and one output line optical waveguide;
2. The optical switch according to claim 1, comprising (2M-1) switch stages each including the waveguide type optical switch pair according to claim 1. The odd-numbered switch stages include the waveguide type 2 × 2 optical switch and (M−2).
1) number of the constructed by arranging a waveguide type optical switch pairs <br/> described in parallel in this order in claim 1, the even-numbered switch stage, (M-1) pieces of the claims 1 Waveguide type described in
An optical switch pair and the waveguide type 2 × 2 optical switch are arranged in parallel in this order, and the (2)
M-1) input line optical waveguides and (2M-1) output line optical waveguides are connected without intersecting a total of 2 (2M-1) optical waveguides .

Further , the present invention provides a waveguide type matrix light including at least (2M-1) (M is a positive integer of 2 or more) input line optical waveguides and (2M-1) output line optical waveguides. A waveguide type 2 × 2 optical switch, comprising: one input line optical waveguide and one output line optical waveguide;
The optical switch according to claim 1, comprising (2M−1) switch stages including the waveguide type optical switch pair according to claim 1, wherein the odd-numbered switch stages are (M−1) switch stages . Guided wave
A path-type optical switch pair and the waveguide type 2 × 2 optical switch are arranged in parallel in this order, and the even-numbered switch stages include the waveguide type 2 × 2 optical switch and (M−1)
2. A plurality of waveguide type optical switch pairs according to claim 1 are arranged in parallel in this order, and the (2M-1) input line optical waveguides and the (2M-1) 2) A total of 2 (2M-1) optical waveguides of the output line optical waveguides are connected without crossing each other.

In a preferred embodiment of the present invention, the
The waveguide type 2 × 2 optical switch has one input line optical waveguide and one input line optical waveguide.
One output line optical waveguide and one bypass optical waveguide.
The input unit is the input line optical waveguide, and the output unit is the input line.
Third 1 × 2 optical waveguide and said bypass optical waveguide
An optical switch, and an input unit connected to the output line optical waveguide and the bus.
An i-pass optical waveguide, and an
3 2 × 1 optical switches, and the third 1 × 2 optical switch
The input between a switch and the third 2 × 1 optical switch
Waveguide where line optical waveguide and output line optical waveguide intersect
It is a type 2 × 2 optical switch.

In a preferred embodiment of the present invention, the first
First to third 1 × 2 optical switches, and said first
The third 2 × 1 optical switch has two optical waveguides at two locations.
To form two directional couplers in close proximity to each other, and
Mach-Zehnder interferometer circuit
It is characterized by the following.

In a preferred embodiment of the present invention, the first
First to third 1 × 2 optical switches, and said first
The third 2 × 1 optical switch has a switch drive terminal.
A Y-branch switch.

In a preferred embodiment of the present invention, the first
First to third 1 × 2 optical switches, and said first
The third 2 × 1 optical switch has two optical waveguides at one location.
Directional coupler with proximity and switch drive terminals
It is characterized by being.

[0038]

Using quartz glass or the like, which is currently widely used,
In glass optical waveguides, thin film heaters are used as phase shifters.
Using the thermo-optic phase shifter used, at the intersection between the waveguides
Preferably, the intersection angle is 20 degrees or more.

That is, according to the present invention, FIG.
1 (d) or 2 × 2 optical switch of FIG. 11 (e)
The intersections are arranged so as to be spatially close to each other.
As a result, for example, the intersection can be changed to the optical switch shown in FIG.
Fig. 11 (f) Compared to the case where two switches are arranged in parallel.
In the w direction can be reduced.

The waveguide type optical matrix according to the present invention is similar to the waveguide type modified 2 × 2 optical switch shown in FIGS.
(D) or FIG. 11 the 2 × 2 optical switch (e) as a basic structure, in which are arranged as said means.

In the path-independent configuration, each optical switch element has an input line optical waveguide and an output line optical waveguide arranged in a positive direction and an inverted optical switch element arranged in an inverted checkered pattern. Is done. Therefore, when a double gate type optical switch element is used as the 2 × 2 optical switch element as in the present invention, the cross waveguide of the input line optical waveguide and the output line optical waveguide in the double gate type optical switch element is: As described above, the optical switch elements are arranged at close positions in the paired optical switch elements.

Therefore, the cross waveguide of the input line optical waveguide generated between the switch stages on the output end side of the switch element and the cross waveguide of the output line optical waveguide generated between the switch stages on the input end side of the switch element are described above. It can be configured by being incorporated in an optical switch element configured as a pair. Furthermore, by arranging the cross waveguides generated between these switch stages near the cross waveguide of the input line optical waveguide and the output line optical waveguide in the optical switch element, these four cross waveguides are collectively arranged. One waveguide development part.

As described above, the waveguide expansion portion of the cross waveguide generated between the switch stages which is generated in a path-independent manner and the waveguide expansion portion of the cross waveguide in the double gate type optical switch element are collectively described. Layout in the same waveguide development section eliminates the need to provide a new waveguide development section for cross waveguides that occur between switch stages, and fully reduces the number of stages by half by adopting a path-independent type. , The circuit length (optical path length) can be greatly reduced, and the insertion loss can be reduced even though a double gate type optical switch element that can obtain a high extinction ratio can be used.

[0045]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The embodiments (examples) of the present invention will be described below in detail with reference to the drawings.

In all the drawings for describing the embodiments, parts having identical functions are given same symbols and their repeated explanation is omitted.

In the following embodiments, a quartz single-mode optical waveguide formed on a silicon substrate is used as an optical waveguide, and a thermo-optic Mach-Zehnder optical interferometer circuit type 2 × 2 optical switch is used as an optical switch element. The waveguide type matrix optical switch described above will be described. This is because this combination can provide a waveguide type matrix optical switch having excellent connectivity with a single mode optical waveguide and having no polarization dependency. However, the present invention is not limited to the above combination.

(Embodiment 1) FIGS. 1 and 4 show 4 × 4 of Embodiment 1 as an embodiment of an N × N matrix optical switch according to the present invention (particularly an example of N = 2M, M: a positive integer). FIG. 3 is a diagram illustrating a schematic configuration of a matrix optical switch.

FIGS. 1 (a), 1 (b) and 1 (c) show a waveguide-type modified 2 × 2 according to the present invention in which two 2 × 2 optical switch elements used in the first embodiment are arranged in pairs. a diagram for Description <br/> bright light switch, FIG. 1 (a) 2 of the present embodiment 1
FIG. 1B is a plan view in which two × 2 matrix optical switch elements are arranged in pairs, and FIG.
FIG. 1C is a sectional view taken along the line A ′, and FIG.
FIG. 3 is a sectional view taken along line BB ′ shown in FIG.

In FIG. 1, 1 is a silicon substrate, 2 is a quartz glass clad layer, 11a-11b, 21a-21b.
Is a silica-based input line waveguide core, 12a-12b, 22a-2
2b is a silica-based output line waveguide core, 13a-13b, 23
a-23b is a silica-based bypass waveguide core, 14a, 14
b, 15a, 15b, 24a, 24b, 25a, 25b
Is a directional coupler.

16a, 16b, 17a, 17b, 26
a, 26b, 27a, and 27b are thin film heaters (phase shifters), 18a and 28a are first Mach-Zehnder interferometer circuits, 18b and 28b are second Mach-Zehnder interferometer circuits, and 19 and 29 are double-gate optical switch elements. cross waveguide input line optical waveguide and the output line optical waveguide of the inner, 31a are cross waveguide input line waveguide that occurs between the switch stage of the output end of the switching element, 3 2 b is the input end side of the switch elements Cross waveguides of output line optical waveguides generated between switch stages ,
Reference numeral 30 denotes a waveguide developing section.

The waveguide type deformation 2 × 2 used in the first embodiment
A pair of 2 × 2 optical switches in the optical switch includes two input line optical waveguides and two bypass optical waveguides,
A first 1 × 2 optical switch having an input section as a first input line optical waveguide, an output section as the first input line optical waveguide and a first bypass optical waveguide, and an input section as a second input line optical waveguide; A second 1 × 2 optical switch having a waveguide as an output section and an output section as the second input line optical waveguide and a second bypass optical waveguide, and an input section as the first output line optical waveguide and the second bypass optical waveguide; A first output line optical waveguide, and a first output line optical waveguide;
And a second 2 × 1 optical switch having an input section as the second output line optical waveguide and the first bypass optical waveguide and an output section as the second output line optical waveguide.

The first input line waveguide is connected to the first input line waveguide.
After configuring the × 2 optical switch, the second output line waveguide and the second input line waveguide intersect in this order, and the second input line waveguide is connected to the second 1 × 2 optical switch. After configuring the optical switch, the first output line waveguide and the first input line waveguide intersect in this order, and the first output line waveguide is connected to the first 2 × 1 optical switch. And the second output line waveguide and the second input line waveguide intersect in this order before the second output line waveguide is connected to the second 2 × 1 optical switch. Prior to configuration, the first output line waveguide and the first input line waveguide intersect in this order, and a total of four intersections form the first 1 × 2 optical switch and the second It is located near the center of the area surrounded by the 1 × 2 optical switch, the first 2 × 1 optical switch, and the second 2 × 1 optical switch.

In the first embodiment, the above-mentioned 1 × 2 optical switch and 2 × 1 optical switch include two waveguides, which are switch elements that have been used in a silica glass waveguide.
A Mach-Zehnder interferometer having two directional couplers arranged close to each other and having a switch driving element is used.

[0055] The waveguide type deformation the 2 × 2 optical switch is 1
The basic configuration includes a × 2 optical switch and a 2 × 1 optical switch, and the 1 × 2 optical switch and the 2 × 1 optical switch include a Mach-Zehnder interferometer type shown in FIG.
It is possible to use a Y-branch optical waveguide type shown in FIG. 3A, a directional coupler type shown in FIG.

[0056] Figure 4 is a region be overall plan layout of the embodiment 1, SLU is the waveguides shape modification 2 × 2 optical switch of FIG. 1 are distribution <br/> location, S23 and S41 is an area that is located in the 2 × 2 optical switch element vertically same directions of a conventional double gate type shown in FIG. 11 (in relative orientation of FIG. 11 (a)), the S32 and S14 11 The conventional double-gate type 2 × 2 optical switch element shown in FIG.
A region arranged with 1 (a) with respect to the direction of). 1a-1d, 2a-2d, 3a-3d, 4a-4d are input line optical waveguides, 1c-1b, 2c-2b, 3c-3b, 4
c-4b is an output line optical waveguide, S11, S12,..., S4
4 2 × 2 optical switch elements, SLU is waveguides shape modification 2 ×
2 optical switch, # 1 to # 4 is an optical switch stage.

In the first embodiment, as shown in FIGS. 1 and 4, a double-gate optical switch element and a path-independent configuration are combined, and the double-gate optical switch element is arranged in the forward direction. and an optical switch element arranged upside down with the optical switch element which is paired waveguides shape modification 2
× constitute a second optical switch. That, 51 a of the waveguide deployment portion generated between the optical switch stage, 51 b, 51 c of the cross waveguide 31a, a 3 2 b, incorporating the conductor wave path shape modification 2 × 2 optical <br/> switch Further, the point that it is collectively constituted by the same waveguide developing unit 30 as the waveguide developing unit 30 for forming the cross waveguide in each switch element is significantly different from the conventional configuration. different.

The path-independent configuration is such that, in each of the optical switch elements, the arrangement of the input line optical waveguides 11a-11b and the output line optical waveguides 12a-12b is a positive optical switch element and a vertically inverted optical switch element. , Arranged in an alternating checkered pattern. Therefore, when a double gate type optical switch element is used as the 2 × 2 optical switch element, the input line optical waveguides 11a-11b and 21 in the double gate type optical switch element are used.
a-21b and output line optical waveguides 12a-12b, 22a-2
2b of the cross waveguides 19 and 29 is disposed at a position Oite close to waveguides shape modification 2 × 2 optical switch configured by a pair as described above. Therefore, the input line optical waveguides 11a-11 generated between the switch stages on the output end side of the switch element.
b, the output line optical waveguide 12 generated between the cross waveguide 31a of 21a-21b and the switch stage on the input end side of the switch element.
The cross waveguide 32b of a-12b and 22a-22b is described above.
Of incorporated into waveguides shape modification 2 × 2 optical switch can be constituted, further, the above-mentioned waveguides shape modification 2 × 2 optical Sui <br/> Tsu input line optical waveguides in Ji 11a- 11b, 21a-21b
And the output line optical waveguides 12a-12b and 22a-22b are arranged in the vicinity of the crossing waveguides 19 and 29, so that these four crossing waveguides 19, 29, 31a and 32b are integrated into one waveguide. The unit 30 can be configured.

As described above, the waveguide unfolding portions 51a, 51b, 51 generated between the switch stages which are generated in a path-independent manner.
c the cross waveguide 31a, 3 2 b of, by configuring incorporated in waveguides shape modification 2 × 2 optical switch configured by a pair waveguide deployment of cross waveguide occurring between the switching stage It is not necessary to newly provide the parts 51a, 51b, and 51c, and the effect of reducing the number of blocks by half by adopting the path-independent type can be sufficiently obtained, and the circuit length can be significantly reduced.

Further, the waveguide development portions of the cross waveguides 31a and 32b generated between the switch stages and the waveguide development portions of the cross waveguides 19 and 29 in the double gate type optical switch element are collectively described. By laying out on the same waveguide development section 30, the circuit size including the size in the horizontal direction perpendicular to the waveguide direction could be reduced.

As shown in FIGS. 1 (b) and 1 (c), the 4 × 4 matrix optical switch according to the first embodiment comprises a quartz waveguide 2 on a silicon substrate 1 having a thickness of 1 mm and a diameter of 6 inches. Was fabricated by a combination of a quartz glass film deposition technique utilizing a hydrolysis reaction of a source gas such as SiCl ₄ and GeCl ₄ and a reactive ion etching technique, and a thin film heater was fabricated by a vacuum deposition method and chemical etching.

The silica-based input line waveguide cores 11a-11b,
21a-21b, silica based output line waveguide core 12a-12
b, 22a-22b , quartz-based bypass waveguide core 13a-
The cross-sectional dimensions of cores such as 13b and 23a-23b are 6 μm square, and the relative refractive index difference between the core and the clad is 0.75%. The size of the thin film heater is 0.1 μm in thickness and 4 in width.
0 μm, length 3 mm.

The 2 × 2 optical switch element used in the first embodiment is basically composed of a straight waveguide and a bent waveguide having a radius of about 5 mm. Cross waveguide 31a, 3 2 b, 19,
The crossing angles θ and θ ′ of 29 were around 30 degrees. Two directional couplers 1 forming a Mach-Zehnder interferometer circuit
4a, 14b, 15a, 15b, 24a, 24b, 25
The effective optical path length difference between the two waveguides connecting a and 25b was accurately set to 0.775 μm, which is half of the signal light wavelength of 1.55 μm. The actual waveguide length difference on the mask pattern was set to 0.775 μm / 1.45 = 0.534 μm in consideration of the fact that the refractive index of quartz glass was 1.45.

[0064] 2 × 2 optical switch element combining two waveguides shape modification 2 × 2 optical switch size Ji at this time,
W0.9 mm × L16.3 mm, and the size per 2 × 2 optical switch element is W0.45 mm × L16.3.
mm. When the crossing waveguide between the switch stages is not formed by the same waveguide developing portion as the waveguide developing portion forming the crossing waveguide in the switch element, 2 × including the waveguide developing portion of the crossing waveguide between the switch stages is included. The size per two-optical switch element was W0.5 mm × L20.1 mm.

Therefore, by adopting the layout structure of the present invention, the circuit length could be shortened by about 20%. The chip size of the 4 × 4 matrix optical switch as a whole, including the heater driving electrodes, is 10 × 90 mm
Met.

The chip on which the 4 × 4 matrix optical switch was fabricated was cut out by dicing, a heat sink was provided below the silicon substrate, a single mode fiber array was connected to the input / output waveguide, and a thin film heater was connected to the thin film heater. Connected the power supply leads to complete the 4 × 4 matrix optical switch module.

The 4 × 4 switch operation was confirmed by appropriately selecting the thin film heater to be supplied with power. The power consumption of each thin film heater required for the switch operation was about 0.45 W. Each optical switch element drives two thin film heaters for operation, and the number of optical switch elements that operate simultaneously in the ON state is up to four, so that the total power consumption is up to 0.45 W.
× 2 × 4 = approximately 3.6W.

The extinction ratio of the entire matrix optical switch is such that the coupling ratio of the directional coupler is 50% ± 1 due to a manufacturing error.
Even with a very large deviation of about 5%, a very excellent value of about 50 dB was obtained. The loss value of the matrix optical switch was 1-2 dB including the connection loss of the optical fiber, and a very low loss value was obtained.

FIG. 5 shows a first embodiment of an N × N matrix optical switch to which the present invention is applied, similar to the 4 × 4 matrix optical switch (particularly, an example of N = 2M, M: a positive integer).
FIG. 13 is a diagram illustrating a schematic configuration of a 6 × 6 matrix optical switch as another embodiment.

The introduction and the manufacturing method of the optical waveguide of this embodiment are basically the same as those of the above-mentioned 4 × 4 matrix optical switch, except that the scale N of the matrix optical switch is different. FIG at 5, SLU is an area where the waveguide type deformation the 2 × 2 optical switch of FIG. 1 is disposed, S
W1 is a region in which conventional double-gate type 2 × 2 optical switch elements are arranged in the same vertical direction, and SW2 is a conventional double-gate type 2 × 2 optical switch element arranged in the vertical direction. Area.

Also in this embodiment, as in the case of the 4 × 4 matrix optical switch, the circuit size including the size in the horizontal direction perpendicular to the waveguide direction can be reduced, and the heater drive electrode and the like are included. The chip size of the entire 4 × 4 matrix optical switch was 12 mm × 120 mm. As for the device characteristics, the total power consumption was about 5.4 W, the extinction ratio was about 50 dB, and the insertion loss value was about 2 dB including the optical fiber connection loss.

(Embodiment 2) FIG. 6 shows a 5 × 5 of Embodiment 2 as another embodiment of the N × N matrix optical switch according to the present invention (particularly, N = 2M−1, M: positive integer). FIG. 3 is a diagram illustrating a schematic configuration of a matrix optical switch.

The optical waveguide introduction and manufacturing method of the second embodiment are basically the same as those of the 4 × 4 matrix optical switch of the first embodiment. In the first embodiment, the scale N of the matrix optical switch is an even number.
Are different in that the scale N of the matrix optical switch is odd.

[0074] In FIG. 6, SLU is an area where the waveguide type deformation the 2 × 2 optical switch of FIG. 1 is disposed, SW
Reference numeral 1 denotes an area in which conventional double-gate type 2 × 2 optical switch elements are arranged in the same vertical direction, and SW2 denotes a conventional double-gate type 2 × 2 optical switch element arranged in the vertical direction. Area.

[0075] Thus, with the embodiment 1, a waveguide-type <br/> modification 2 × 2 optical switch switches stage switch I being injured disposed, the waveguide-type deformation the 2 × 2 optical switches and a conventional 2 The matrix optical switch is composed of two types of switch stages in which two double-gate type 2 × 2 optical switch elements (forward and reverse arrangement) are arranged. in a switch stage waveguide shape modification 2 × 2 2 × 1 or 2 optical switch element of a conventional double gate type optical switch and forward arrangement (forward arrangement) is located, a waveguide-type deformation 2 × 2 2 × 2 optical switch elements one conventional double gate type optical switch and reverse arrangement (reverse arrangement) is configured a matrix optical switch with two stages of switching stages being arranged that there are different from the first embodiment.

Also in the second embodiment, the first embodiment is used.
Similarly to the above, the circuit size including the size in the horizontal direction perpendicular to the waveguide direction can be reduced, and the chip size of the entire 5 × 5 matrix optical switch including the heater driving electrodes and the like is 11 mm × 105 mm. Met. The device characteristics are such that the total power consumption is about 4.5 W, the extinction ratio is about 50 dB, and the insertion loss value is 2 dB including the optical fiber connection loss.
It was about.

(Embodiment 3) FIG. 7A shows the arrangement of the entire configuration of an 8 × 8 matrix optical switch according to Embodiment 3 of the present invention. In FIG. 7A, reference numerals 70a to 70e denote 16 waveguide bundles, and optical switch stages # 1 to # 8 are arranged at eight positions on the way of the waveguide bundles 70a to 70e. The feature of the 8 × 8 matrix optical switch of the third embodiment shown in FIG.
Between the input terminal and the optical switch stage # 1, between the optical switch stages # 2 and # 3, between # 4 and # 5, between # 6 and # 7, and between the optical switch stage # 8 and the output terminal. , 90 degrees to 18 respectively
Waveguide bundles 70b, 70c, 70d having 0 degree bend
It is a point connected by. In other words, the bent waveguide bundles 70b, 70c, and 70d are referred to as (the bent waveguide bundles 7
0b, 70c, in mind also possible to suppress an increase in circuit length due 70d) using appropriate eight optical switching stages # 1 to
# It is a feature that is disposed on the substrate size is limited to 8.

FIGS. 7B and 7C are layout diagrams of 2 × 2 optical switch elements in each of the optical switch stages # 1 to # 8. In FIG. 7 (b), (c) , SLU is a region where waveguides shape modification 2 × 2 optical switch of FIG. 1 is disposed, SW1 is the 2 × 2 optical switch of a conventional double gate type This is the area where the elements are arranged in the same direction up and down.
Reference numeral 2 denotes a region where a conventional double gate type 2 × 2 optical switch element is arranged upside down. In FIG. 7A, optical switch stages # 1, # 3, # 5, and # 7 have
The optical switch stages having the configuration shown in FIG. 7B are arranged, and the optical switch stages having the configuration shown in FIG. 7C are arranged in the optical switch stages # 2, # 4, # 6, and # 8.

In the arrangement in which the input terminal and the output terminal of the waveguide face each other, the layout of the optical switch stages # 1 to # 8 of the third embodiment has the shortest circuit length (29 cm). Incidentally, in the case where a normal matrix optical switch by the connection as shown in FIG. 11 is formed on a 4-inch silicon substrate using a double gate type 2 × 2 optical switch element (the circuit layout is the fourth embodiment). Since the circuit length (optical path length) was about 60 cm, the layout of the third embodiment could reduce the circuit length to half or less.

The 8 × 8 matrix optical switch of the third embodiment was fabricated on a silicon substrate having a thickness of 1 mm and a diameter of 4 inches. The chip size was 68 mm × 68 mm. Other circuit introductions and circuit / module manufacturing methods are the same as those of the first embodiment.

The operation of the 8 × 8 switch was confirmed by appropriately selecting the thin film heater to be supplied with electric power. The power consumption of each thin film heater required for the switch operation was about 0.45 W. Each optical switch element drives two thin-film heaters for operation, and the number of optical switch elements that operate simultaneously in the ON state is up to eight, so that the total power consumption is up to 0.45 W × 2 × 8. = 7.2W.

The extinction ratio of the matrix optical switch as a whole was as excellent as about 50 dB. The loss value of the entire matrix optical switch was 4 to 5 dB including the optical fiber connection loss, and a very low loss value was obtained. Incidentally, in the case of the above-mentioned conventional example, since the loss value was 7 to 8 dB including the optical fiber connection loss,
In the circuit of the third embodiment, the loss value has decreased by 40% or more.

In the third embodiment, in order to make the input terminal and the output terminal face each other, the position between the optical switch stage # 1 and the input terminal is
Although a bent waveguide bundle is used between the optical switch stage # 8 and the output terminal, the optical switch stage
Of course, the input end may be provided on the same chip side using a linear waveguide bundle between the stage # 8 and the output terminal.

(Embodiment 4) FIG. 8 shows the overall arrangement of an 8 × 8 matrix optical switch as Embodiment 4 of the matrix optical switch of the present invention.
Embodiment 4 is basically the same as Embodiment 3 except that the overall arrangement of the optical switch stages is different. The fourth embodiment is characterized in that eight optical switch stages are arranged on a limited substrate size with the priority given to minimizing the chip size by appropriately using a bent waveguide bundle. This is different from the third embodiment.

The 8 × 8 matrix optical switch of the fourth embodiment was manufactured on a silicon substrate having a thickness of 1 mm and a diameter of 4 inches. The chip size was 65 × 55 mm.

The operation of the 8 × 8 switch was confirmed by appropriately selecting the thin film heater to be supplied with electric power. The power consumption of each thin film heater required for the switch operation was about 0.45 W. Each optical switch element drives two thin-film heaters for operation, and the maximum number of optical switch elements that operate simultaneously in the ON state is eight, so that the total power consumption is 0.45 W at maximum.
× 2 × 8 = about 7.2 W.

The extinction ratio of the matrix optical switch as a whole was as excellent as about 50 dB. The loss value of the matrix optical switch was 5 to 6 dB including the connection loss of the optical fiber, and a very low loss value was obtained.

In the first to fourth embodiments of the present invention, the intersection angle in the intersection waveguide is set to 30 degrees. Next, the setting of the intersection angle will be considered.

The crosstalk between the two optical waveguides depends on the straightness of light, although it varies depending on the relative refractive index difference of the optical waveguide used and the core size of the waveguide. Practically negligible. In the case of the crossing angle of 30 degrees adopted in the above embodiment, the crosstalk is -60 dB.
And the loss in the cross waveguide is 0.1.
It is slight, on the order of dB. In general, the crosstalk and the loss of the crossed waveguide are improved as the crossing angle approaches 90 degrees, but if the crossing angle is increased, the area occupied by the waveguide development part before and after the crossed waveguide increases, and the size of the optical switch element increases. Therefore, it is desirable to determine in consideration of the required performance of the matrix optical switch, the allowable bending radius of the optical waveguide, and the like.

In the first to fourth embodiments, the signal light wavelength is 1.55 μm. However, the layout of the present invention can be applied to other wavelengths, for example, 1.3 μm wavelength.

In the first to fourth embodiments, a matrix optical switch based on quartz glass on a silicon substrate has been described. However, other materials that can constitute a Mach-Zehnder optical interferometer circuit type optical switch element, for example, The present invention can be applied to a polymer optical waveguide, an ion diffusion waveguide, and a lithium niobate-based optical waveguide provided with an optical phase shifter using an electro-optic effect.

In particular, since the polymer optical waveguide has a thermo-optic effect that is about 10 times as large as that of a quartz-based waveguide,
It is easy to configure a 1 × 2 optical switch or a 2 × 1 optical switch using a Y-branch waveguide as shown in (b), (c), and (d). In this case, waveguides shape modification 2 × in FIG. 1
2 switch can be constituted by the 1 × 2 optical switches and the 2 × 1 optical switch as shown in FIG. 2 (a).

[0093]FIG.(A) is a waveguide including a Y-branch optical waveguide
Mold deformation 2 × 2 light switchChi'sPlan view,FIG.(B) is Y branch
Enlarged plan view of an optical waveguide,FIG.(C)FIG.Shown in (b)
Sectional view taken along line A-A ',FIG.(D)FIG.
It is sectional drawing cut | disconnected along the B-B 'line shown to (b).
In FIG. 2, 1HaRecon board, 45 is a polymer crack
Layer, 40 is a Y-branch optical waveguide, 41, 42, 43 are high
ChildsystemThe optical waveguide cores, 44a and 44b are thin film heaters, 30
Is a waveguide development part.

Further, since the lithium niobate-based optical waveguide has a large electro-optic effect, the direction shown in FIGS. 3B, 3C and 3D is generally well known. A 1 × 2 optical switch or 2 × 1 optical switch using a sex coupler can be easily configured. In this case, the waveguide shown in FIG.
The road shape modification 2 × 2 switches can be constituted by the 1 × 2 optical switches and the 2 × 1 optical switch as shown in FIG. 3 (a).

[0095] 3 (a) is a plan view of a waveguide-type deformation the 2 × 2 optical switch including a directional coupler, and FIG. 3 (b) is an enlarged plan view of a directional coupler, FIG. 3 (c) A- shown in FIG.
Section taken along A 'line, and FIG. 3 (d) FIG. 3 (b)
FIG. 3 is a sectional view taken along line BB ′ shown in FIG. 3, 60 is a directional coupler, 61 and 62 lithium niobate-based optical waveguide core, 63a, 63 b are voltage application pressure electrode, 64 denotes an insulating film, 65 is a lithium niobate board, 30
Is a waveguide development part.

As described above, the invention made by the present inventor is:
Although specifically described based on the embodiment, the present invention
It is needless to say that the present invention is not limited to the above-described embodiment, but can be variously modified without departing from the scope of the invention.

[0097]

The effects obtained by typical aspects of the invention disclosed in the present application will be briefly described as follows.

(1) The circuit length (optical path length) can be greatly reduced as compared with a matrix switch having a conventional configuration, even though a double gate type optical switch element capable of obtaining a high extinction ratio is used. In addition, the insertion loss can be reduced.

(2) The light guide type modified 2 × 2 optical switch of the present invention is used not only as a basic component of the light guide type matrix optical switch but also as a double light guide type 2 × 2 optical switch. In this case, the size can be reduced as compared with the conventional light guide type 2 × 2 optical switch arranged in parallel.

(3) It is extremely effective in putting a matrix optical switch having a high extinction ratio and an insertion loss into practical use.

[Brief description of the drawings]

FIG. 1 is an enlarged plan layout view and a cross-sectional view when a waveguide-type modified 2 × 2 optical switch according to a first embodiment of the present invention is configured by a Mach-Zehnder interferometer.

FIGS. 2A and 2B are an enlarged plan layout view and a cross-sectional view when the waveguide-type modified 2 × 2 optical switch according to the first embodiment is configured by a Y-branch optical waveguide.

FIGS. 3A and 3B are an enlarged plan view and a cross-sectional view when the waveguide-type modified 2 × 2 optical switch according to the first embodiment is configured by a directional coupler.

FIG. 4 is an overall plan layout view of the waveguide type 4 × 4 matrix optical switch of the first embodiment.

FIG. 5 is an overall plan layout view of the waveguide type 6 × 6 matrix optical switch of the first embodiment.

FIG. 6 is an overall plan view of a waveguide type 5 × 5 matrix optical switch according to a second embodiment of the present invention.

FIG. 7 is an overall plan layout view of a waveguide type 8 × 8 matrix optical switch according to a third embodiment of the present invention.

FIG. 8 is an overall plan layout view of a waveguide type 8 × 8 matrix optical switch according to a fourth embodiment of the present invention.

FIG. 9 is a conceptual diagram illustrating a configuration of a 4 × 4 matrix optical switch.

FIG. 10 is an overall plan layout view of a conventional thermo-optical 4 × 4 matrix optical switch.

FIG. 11 is an enlarged plan view of a conventional double-gate type 2 × 2 optical switch element, a cross-sectional view thereof, and a plan view in which two of them are arranged in parallel.

FIG. 12 is an overall plan layout view of a conventional 4 × 4 waveguide matrix optical switch having a path independent configuration.

FIG. 13 is a conceptual diagram illustrating that an optical switch according to the present invention is a switch having a matrix configuration.

FIG. 14 is a diagram illustrating a configuration example of a conventional 2 × 2 optical switch.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Silicon substrate, 2 ... Quartz glass clad layer, 11
a-11b, 21a-21b ... quartz-based input line waveguide core,
12a-12b, 22a-22b: silica-based output line waveguide core; 13a-13b, 23a-23b: silica-based bypass waveguide core; 14a, 14b, 15a, 15b, 24a,
24b, 25a, 25b ... directional coupler, 16a, 16
b, 17a, 17b, 26a, 26b, 27a, 27b
... thin-film heaters (phase shifters), 18a, 28a ... first Mach-Zehnder interferometer circuits, 18b, 28b ... second Mach-Zehnder interferometer circuits, 19, 29 ... input line optical waveguides in a double gate type optical switch element Cross waveguides of output line optical waveguides, 31a... Cross waveguides of input line optical waveguides generated between switch blocks on the output end side of switch elements, 32
b: cross waveguide of the output line optical waveguide generated between the switch blocks on the input end side of the switch element, 30: waveguide development part, 40: Y branch optical waveguide, 41, 42, 43: polymer optical waveguide core , 44a, 44b ... thin film heater data, 1a-
1d, 2a-2d ~4 a- 4 d ... input line waveguide, 1C -
1b, 2c-2b ~4 c- 4 b ... output line optical waveguide, S11
~ S44 ... 2 × 2 optical switch elements, SLU ... waveguide modification 2 × 2 optical switch, # 1 to # 8 ... optical switch stage, 51
a, 51b, 51c: a waveguide developing section for forming a cross waveguide between switch stages; SW1, SW2: a conventional double-gate type optical switch element; 60, a directional coupler;
62: lithium niobate-based optical waveguide core, 63a, 63
b: voltage application electrode, 64: insulating film, 65: lithium niobate-based substrate, 70a-70e, 71a-71j: optical waveguide bundle, 70b - 70d, 71b - 71i: bent waveguide bundle.

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masayuki Okuno 3-19-2 Nishi Shinjuku, Shinjuku-ku, Tokyo Nippon Telegraph and Telephone Corporation (72) Masahiro Yanagisawa 3-19 Nishishinjuku, Shinjuku-ku, Tokyo No. 2 Nippon Telegraph and Telephone Corporation (72) Katsuhide Onose Inventor Nippon Telegraph and Telephone Corporation 3-9-1, Nishishinjuku 3-chome, Shinjuku-ku, Tokyo (56) References JP-A-6-51354 (JP, A) (58) Field surveyed (Int.Cl. ⁷ , DB name) G02F 1/313 G02B 6/12 JICST file (JOIS)

Claims (9)

(57) [Claims] A first bypass optical waveguide; a first bypass optical waveguide;
A first input disposed on the same side of the bypass optical waveguide;
A power line optical waveguide and a first output line optical waveguide.
Is, the input unit and the first input line optical waveguide, the output section
A first 1 × 2 optical switch according to claim 1 of the the input line optical waveguide first bypass waveguide, said first input unit
The output line optical waveguide and the first bypass optical waveguide,
A first 2 × 1 having an output section as the first output line optical waveguide;
An optical switch , wherein the first input line optical waveguide and the
A first output line optical waveguide intersects at a first intersection with a first output line optical waveguide;
Waveguide optical switch, a second bypass optical waveguide, and the second bypass optical waveguide.
A second input line optical waveguide and a second input line optical waveguide located on the same side of the path.
And a second output line optical waveguide, with the input section in front.
The second input line optical waveguide is used, and the output section is connected to the second input optical waveguide.
A second optical waveguide and a second bypass optical waveguide.
A 1 × 2 optical switch, and an input unit connected to the second output line optical waveguide.
Path and the second bypass optical waveguide, and the output section is the second bypass optical waveguide.
And a second 2 × 1 optical switch having two output line optical waveguides.
Having the second input line optical waveguide and the second output line light
A second waveguide type optical switch which intersects with the waveguide at a second intersection;
And a waveguide-type optical switch pair comprising a first switch and a second switch .
Or a second input line optical waveguide, or said first or
An arbitrary line parallel to the linear portion of the second output line optical waveguide is sandwiched.
, And the first input line optical waveguide is arranged to face the first 1 × 2 optical switch.
After the switch has been configured, the first intersection at the first intersection.
Intersects the field line optical waveguide, and then at the third intersection, the second
And the second input line optical waveguide is arranged to intersect with the second input line optical waveguide.
After the switch has been configured, the second exit at the second intersection.
Intersects the field line optical waveguide, and then at said third intersection
The first output line optical waveguide is disposed so as to intersect the first input line optical waveguide, and the second output line optical waveguide is disposed at a fourth intersection.
Intersects the output line optical waveguide of
After crossing the first input line optical waveguide, the first
Arranged to form a 2 × 1 optical switch, wherein the second output line optical waveguide is arranged at the fourth intersection.
Intersects a first output line optical waveguide followed by said second intersection
After intersecting the second input line optical waveguide at the section,
2 × 1 optical switches, wherein the first and second bypass optical waveguides are arranged in parallel.
The first 1 × 2 optical switch, the first 2 × 1 optical switch, disposed farthest from any line.
Switch, the second 1 × 2 optical switch, and the second
The 2 × 1 optical switch is arranged so as to surround each of the intersections.
And the first 1 × 2 optical switch and the second
× 2 optical switch, and the first 2 × 1 optical switch
The second 2 × 1 optical switch is any of the parallel arbitrary lines
Are arranged to face each other with the
Wave type optical switch pair. 2. A waveguide type matrix optical switch including at least 2M (M is a positive integer) input line optical waveguides and 2M output line optical waveguides, each comprising one input line optical waveguide and an output. 2. A waveguide type 2 × 2 optical switch comprising a linear optical waveguide, and a waveguide according to claim 1.
And a M- type optical switch pair according to claim 1 arranged in parallel to form a (2k-1) -th stage (k is an integer of 1 or more and M or less). the waveguide-type 2 × 2 optical switch, (M-1) pieces of the請
2. The waveguide type optical switch pair according to claim 1, wherein said waveguide type 2 × 2 optical switch is arranged in parallel in this order to form a 2kth stage, and said 2M input line optical waveguides are provided between said stages. Wave path and the 2M
A waveguide type matrix optical switch, wherein a total of 4M optical waveguides of the output line optical waveguides are connected without crossing each other. 3. A waveguide type matrix optical switch including at least 2M (M is a positive integer) input line optical waveguides and 2M output line optical waveguides, each comprising one input line optical waveguide and an output. 2. A waveguide type 2 × 2 optical switch comprising a linear optical waveguide, and a waveguide according to claim 1.
2. A waveguide type optical switch pair , wherein M waveguide type optical switch pairs according to claim 1 are arranged in parallel to form a 2k-th stage (k is an integer of 1 or more and M or less); type 2 × 2 optical switch, (M-1) pieces of the請
The waveguide type optical switch pair according to claim 1 and the waveguide type 2 × 2 optical switch are arranged in this order in parallel to form a (2k−
1) forming a stage, wherein the 2M input line optical waveguides and the 2M
A waveguide type matrix optical switch, wherein a total of 4M optical waveguides of the output line optical waveguides are connected without crossing each other. 4. (2M-1) (M is a positive integer of 2 or more)
A waveguide type matrix optical switch including at least one input line optical waveguide and (2M-1) output line optical waveguides, wherein each of the waveguide type matrix optical switch includes one input line optical waveguide and one output line optical waveguide. A × 2 optical switch and the waveguide according to claim 1.
And a road-type optical switch pair consists of (2M-1) stage switch stage, odd switch stage, the waveguide-type 2 × 2 optical switches and (M-1) pieces of the claims 1 The waveguide type optical switch described in
Itchipea a is configured by arranging in parallel in this order, the even-numbered switch stage, (M-1) pieces of the claims 1
And the waveguide type 2 × 2
Optical switches are arranged in this order in parallel, and a total of 2 (2M-1) input line optical waveguides and (2M-1) output line optical waveguides are provided between each stage.
1) A waveguide-type matrix optical switch, wherein the optical waveguides are connected without crossing each other. 5. (2M-1) (M is a positive integer of 2 or more)
A waveguide type matrix optical switch including at least one input line optical waveguide and (2M-1) output line optical waveguides, wherein each of the waveguide type matrix optical switch includes one input line optical waveguide and one output line optical waveguide. A × 2 optical switch and the waveguide according to claim 1.
It consists of and a road type optical switch pairs (2M-1) stage switch stage, the odd-numbered switch stage, (M-1) pieces of the claims 1
And the waveguide type 2 ×
The two-optical switch is arranged in parallel in this order, and the even-numbered switch stages include the waveguide-type 2 × 2 optical switch and (M−1) waveguide-type optical switches according to claim 1.
A switch pair is arranged in this order in parallel, and a total of 2 (2M−1) of the (2M−1) input line optical waveguides and the (2M−1) output line optical waveguides is provided between the respective stages.
1) A waveguide-type matrix optical switch, wherein the optical waveguides are connected without crossing each other. 6. The waveguide type 2 × 2 optical switch comprises one switch.
Input line optical waveguide, one output line optical waveguide and one
A path optical waveguide, the input part being the input line optical waveguide, and the output part being the input line optical waveguide.
Waveguide and a third 1 × 2 optical waveguide as the bypass optical waveguide.
A switch, and an input unit, the output line optical waveguide and the bypass optical waveguide.
Third 2 × 1 light whose path and output section are the output line optical waveguide
And a third 1 × 2 optical switch and a third 2 × 1 optical switch.
Between the input line optical waveguide and the output line optical waveguide.
Specially, it is a crossed waveguide type 2 × 2 optical switch.
The method according to any one of claims 2 to 5, wherein
Waveguide type matrix optical switch. 7. The first to third 1 × 2 optical switches.
H, and the first to third 2 × 1 optical switches are:
Two optical waveguides are close at two places and two directional couplers
And Machze with switch drive terminals
7. An interferometer circuit according to claim 6,
Placing waveguide type matrix optical switch. 8. The first to third 1 × 2 optical switches.
H, and the first to third 2 × 1 optical switches are:
Be a Y-branch switch with switch drive terminals
The waveguide type matrix optical switch according to claim 6, wherein: 9. The first to third 1 × 2 optical switches.
H, and the first to third 2 × 1 optical switches are:
Two optical waveguides are close to each other at one location, and a switch driving end
A directional coupler having a directional coupler.
7. The waveguide type matrix optical switch according to item 6 .