JP2002030478A - Molten salt electrodepositing device and molten salt electrodepositing method - Google Patents

Molten salt electrodepositing device and molten salt electrodepositing method

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Publication number
JP2002030478A
JP2002030478A JP2000213650A JP2000213650A JP2002030478A JP 2002030478 A JP2002030478 A JP 2002030478A JP 2000213650 A JP2000213650 A JP 2000213650A JP 2000213650 A JP2000213650 A JP 2000213650A JP 2002030478 A JP2002030478 A JP 2002030478A
Authority
JP
Japan
Prior art keywords
molten salt
electrodeposition
salt
processed
cylindrical body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000213650A
Other languages
Japanese (ja)
Inventor
Koichi Izumiya
宏一 泉屋
Shozo Ono
昇造 小野
Yoshitaka Hamanaka
義孝 濱中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Engineering and Shipbuilding Co Ltd
Original Assignee
Mitsui Engineering and Shipbuilding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Engineering and Shipbuilding Co Ltd filed Critical Mitsui Engineering and Shipbuilding Co Ltd
Priority to JP2000213650A priority Critical patent/JP2002030478A/en
Publication of JP2002030478A publication Critical patent/JP2002030478A/en
Withdrawn legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a molten salt electrodepositing device and a molten salt electrodepositing method by which a coating layer can easily be formed by using a molten salt electrolytic bath shallower than the length of the bar-shaped or tubular member to be treated. SOLUTION: This device contains a cylindrical body 3 to be stored with a salt, a molten salt melting means 5 for heating and melting the salt excepting the vicinity of the bottom part of the cylindrical body 3, an electrode 7 arranged on the inside of the cylindrical body 3 and a power source part 15 electrically connected to the electrode 7 and the bar-shaped or tubular member 23 to be treated, the cylindrical body 3 has a bottom board 17 clogging the bottom part, and the bottom board 17 is formed with a through-hole 19 through which the member 23 to be treated can be inserted and passed. In this way, the cylindrical body 3, i.e., the molten salt electrolytic bath 25 is relatively moved to the member 23 to be treated, by which the surface of the member 23 to be treated can be successively be formed with a coating layer, so that the coating layer can easily be formed by using the molten salt electrolytic bath 25 shallower than the length of the bar-shaped or tubular member to be treated.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、部材表面に被覆層
を形成するための溶融塩電析技術に係り、特に、棒状ま
たは管状の部材表面に被覆層を形成するための溶融塩電
析技術に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a molten salt electrodeposition technique for forming a coating layer on a member surface, and more particularly to a molten salt electrodeposition technique for forming a coating layer on a rod-shaped or tubular member surface. About.

【0002】[0002]

【従来の技術】溶融塩電析により部材表面に被覆層を形
成する処理を行う場合、従来の溶融塩電析技術では、被
処理部材を槽に収容された溶融塩電解浴中に浸漬して溶
融塩電析を行うことで部材表面に被覆層を形成してい
る。
2. Description of the Related Art In a process of forming a coating layer on a member surface by molten salt electrodeposition, in a conventional molten salt electrodeposition technique, a member to be processed is immersed in a molten salt electrolytic bath housed in a bath. A coating layer is formed on the member surface by performing molten salt electrodeposition.

【0003】[0003]

【発明が解決しようとする課題】従来の溶融塩電析技術
によって棒状または管状の被処理部材に被覆層を形成す
る場合、棒状または管状の被処理部材の長さに応じた深
さの溶融塩電解浴、つまり溶融塩を収容した槽が必要と
なる。しかし、使用する溶融塩の量が多くなってしまう
ことや、装置が大型化してしまうことなどから、槽の大
きさには限界がある。このため、槽を大型化せずに従来
の溶融塩電析技術によって棒状または管状の被処理部材
に被覆層を形成する場合、棒状または管状の被処理部材
の一部分を槽中の溶融塩電解浴に浸漬して被覆層を部分
的に形成し、さらに残りの部分を槽中の溶融塩電解浴に
浸漬することを繰り返して被処理部材の表面全体に被覆
層を形成することになり、処理工程が煩雑になってしま
う。さらに、被処理部材の長さによっては、槽を大型化
しなければ溶融塩電析を行うことができない場合もあ
る。
When a coating layer is formed on a rod-shaped or tubular member to be processed by a conventional molten salt electrodeposition technique, the molten salt has a depth corresponding to the length of the rod-shaped or tubular member. An electrolytic bath, that is, a tank containing a molten salt is required. However, the size of the tank is limited because the amount of the molten salt to be used increases and the size of the apparatus increases. For this reason, when forming a coating layer on a rod-shaped or tubular member to be processed by a conventional molten salt electrodeposition technique without increasing the size of the tank, a part of the rod-shaped or tubular member to be processed is partially melted in the molten salt electrolytic bath. To form a coating layer partially, and further immersing the remaining portion in a molten salt electrolytic bath in a tank to form a coating layer on the entire surface of the member to be processed. Is complicated. Furthermore, depending on the length of the member to be treated, molten salt electrodeposition may not be performed without increasing the size of the tank.

【0004】本発明の課題は、棒状または管状の被処理
部材の長さよりも浅い溶融塩電解浴を用いて容易に被覆
層を形成できるようにすることにある。
An object of the present invention is to make it possible to easily form a coating layer using a molten salt electrolytic bath that is shallower than the length of a rod-shaped or tubular member to be processed.

【0005】[0005]

【課題を解決するための手段】本発明の溶融塩電析装置
は、塩が収容される筒体と、この筒体の底部近傍を除い
て塩を加熱融解する塩融解手段と、筒体の内側に配設さ
れた電極と、電極及び棒状または管状の被処理部材に電
気的に接続された電源部とを含み、筒体は、底部を閉塞
する底板を有し、この底板には、被処理部材が挿通可能
な貫通孔が形成された構成とすることにより上記課題を
解決する。さらに、塩融解手段は、筒体の両端部近傍を
除いて塩を加熱融解する構成とする。
SUMMARY OF THE INVENTION A molten salt electrodeposition apparatus of the present invention comprises: a cylindrical body for accommodating salt; salt melting means for heating and melting the salt except for the vicinity of the bottom of the cylindrical body; The tubular body includes an electrode disposed inside and a power supply unit electrically connected to the electrode and a rod-shaped or tubular member to be processed, and the cylinder has a bottom plate that closes a bottom portion. The above object is achieved by forming a through-hole through which a processing member can be inserted. Further, the salt melting means is configured to heat and melt the salt except for the vicinity of both ends of the cylindrical body.

【0006】また、本発明の溶融塩電析方法は、棒状ま
たは管状の被処理部材の溶融塩電解浴中にある部分の表
面に溶融塩電析により被覆層を形成する電析工程と、被
処理部材に対して溶融塩電解浴を被処理部材の軸方向に
相対移動させる移動工程とを繰り返し行うことにより上
記課題を解決する。
Further, the molten salt electrodeposition method of the present invention comprises an electrodeposition step of forming a coating layer on the surface of a rod-shaped or tubular member to be treated in a molten salt electrolytic bath by molten salt electrodeposition. The above problem is solved by repeatedly performing a moving step of moving the molten salt electrolytic bath relative to the processing member in the axial direction of the member to be processed.

【0007】このような溶融塩電析装置及び溶融塩電析
方法とすれば、塩溶融手段によって融解された溶融塩電
解浴中にある被処理部材の部分の表面に被覆層を形成し
た後、被処理部材に対して筒体つまり溶融塩電解浴を相
対移動することで、被処理部材の異なる部分の表面に被
覆層を形成することができる。このような被覆層を形成
する電析工程と、被処理部材に対して溶融塩電解浴を相
対移動する移動工程とを繰り返すことにより棒状または
管状の被処理部材表面に順次被覆層を形成することがで
きる。すなわち、棒状または管状の被処理部材の長さよ
りも浅い溶融塩電解浴を用いて容易に被覆層を形成でき
る。
According to such a molten salt electrodeposition apparatus and a molten salt electrodeposition method, after a coating layer is formed on the surface of a portion of a member to be treated in a molten salt electrolytic bath melted by salt melting means, By moving the cylindrical body, that is, the molten salt electrolytic bath relative to the member to be processed, a coating layer can be formed on the surface of a different portion of the member to be processed. Forming a coating layer sequentially on a rod-shaped or tubular surface of the member to be processed by repeating the electrodeposition step of forming such a coating layer and the moving step of moving the molten salt electrolytic bath relative to the member to be processed. Can be. That is, the coating layer can be easily formed by using a molten salt electrolytic bath that is shallower than the length of the rod-shaped or tubular member to be processed.

【0008】ところで、筒体内の塩は、筒体の底部近傍
または両端部近傍では、塩融解手段により加熱されてい
ないため、筒体の底部または両端部に向かうに従い、部
分融解した部分融解塩そして固体の固体塩となってい
る。この部分融解塩または固体塩は、溶融塩が底部から
流れ出さないようにするため、または溶融塩が大気と接
触しないようにするためなどのシールとなる。しかし、
筒体の底部または両端部と被処理部材との間が固体塩で
閉塞されていると、固体塩が筒体の底部と被処理部材と
の間を固定してしまい、被処理部材に対して筒体を相対
移動させることができなくなる場合がある。
By the way, since the salt in the cylindrical body is not heated by the salt melting means near the bottom or both ends of the cylindrical body, the partially melted salt is partially melted toward the bottom or both ends of the cylindrical body. It is a solid salt. The partially molten or solid salt provides a seal, such as to prevent the molten salt from flowing out of the bottom or to prevent the molten salt from contacting the atmosphere. But,
If the space between the bottom or both ends of the cylindrical body and the member to be processed is closed with solid salt, the solid salt fixes the space between the bottom of the cylindrical body and the member to be processed, and The relative movement of the cylinder may not be possible.

【0009】そこで、被処理部材を加熱する部材加熱手
段を含む構成とする。さらに、固体塩によりシールされ
た溶融塩電解浴により、棒状または管状の被処理部材の
溶融塩電解浴中にある部分の表面に溶融塩電析により被
覆層を形成する電析工程と、被処理部材に接する固体塩
を融解する固体塩の融解工程と、被処理部材に対して溶
融塩電解浴を被処理部材の軸方向に相対移動させる移動
工程とを繰り返し行う方法とする。このようにすれば、
部材加熱手段で被処理部材が加熱されることにより、固
体塩の被処理部材に接触している部分が融解されるの
で、被処理部材に対して筒体を相対移動させることがで
きるので好ましい。
In view of the above, a structure including a member heating means for heating the member to be processed is adopted. Further, an electrodeposition step of forming a coating layer by molten salt electrodeposition on the surface of a portion of the rod-shaped or tubular member to be treated in the molten salt electrolytic bath by the molten salt electrolytic bath sealed with a solid salt; A method of repeatedly performing a solid salt melting step of melting the solid salt in contact with the member and a moving step of moving the molten salt electrolytic bath relative to the member to be processed in the axial direction of the member to be processed. If you do this,
When the member to be processed is heated by the member heating means, a portion of the solid salt in contact with the member to be processed is melted, so that the cylindrical body can be relatively moved with respect to the member to be processed, which is preferable.

【0010】さらに、部材加熱手段は、筒体の一方の端
部側に配設された第1の部材加熱手段と、筒体の他方の
端部側に配設された第2の部材加熱手段とからなる構成
の溶融塩電析装置とする。一方、電析工程と同時に、被
処理部材の被覆層を形成する部分を予め加熱しておく予
熱工程と、被処理部材の被覆層が形成された部分のこの
被覆層と被処理部材との界面に拡散層を形成する拡散処
理工程とを被処理部材の異なる部分に対して行う方法と
する。
Further, the member heating means comprises a first member heating means provided at one end of the cylindrical body and a second member heating means provided at the other end of the cylindrical body. And a molten salt electrodeposition apparatus having the following configuration. On the other hand, at the same time as the electrodeposition step, a preheating step of previously heating a portion of the member to be formed on which the coating layer is to be formed, and an interface between the coating layer and the member at the portion where the coating layer of the member to be processed is formed. And a diffusion process step of forming a diffusion layer on a different portion of the member to be processed.

【0011】このような溶融塩電析装置及び溶融塩電析
方法とすれば、第1の部材加熱手段と第2の部材加熱手
段とにより、各々被処理部材を電析工程に必要な温度ま
で予め加熱しておく予熱工程や、電析工程で被覆層を形
成した被処理部材の部分に拡散層を形成する拡散処理工
程も同時に行うことができるので好ましい。さらに、第
1の部材加熱手段と第2の部材加熱手段とは、固体塩の
融解工程も行うことができる。さらに、部材加熱手段が
高周波加熱器であれば、導電性材料からなる被処理部材
のみを効率的に加熱できるので好ましい。
According to the molten salt electrodeposition apparatus and the molten salt electrodeposition method, the first member heating means and the second member heating means each bring the member to be treated to a temperature required for the electrodeposition step. A preheating step of heating in advance and a diffusion processing step of forming a diffusion layer on the portion of the member to be processed on which the coating layer has been formed in the electrodeposition step can be performed at the same time, which is preferable. Furthermore, the first member heating means and the second member heating means can also perform a solid salt melting step. Further, it is preferable that the member heating means is a high-frequency heater because only the member to be processed made of a conductive material can be efficiently heated.

【0012】また、筒体の底板に形成された貫通孔には
シール部材が設けられている構成とすれば、筒体の底部
にある粉体状の塩が筒体外に漏出するのを防げるので好
ましい。
Further, if a seal member is provided in the through hole formed in the bottom plate of the cylindrical body, powdery salt at the bottom of the cylindrical body can be prevented from leaking out of the cylindrical body. preferable.

【0013】[0013]

【発明の実施の形態】以下、本発明を適用してなる溶融
塩電析装置の一実施形態について図1乃至図4を参照し
て説明する。図1は、本発明を適用してなる溶融塩電析
装置の概略構成を示す斜視図である。図2は、被覆層及
び拡散層の形成手順を示すフロー図である。図3は、溶
融塩電析装置の動作を示す断面図である。図4は、本発
明を適用してなる溶融塩電析方法の工程を示すフロー図
である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a molten salt electrodeposition apparatus to which the present invention is applied will be described below with reference to FIGS. FIG. 1 is a perspective view showing a schematic configuration of a molten salt electrodeposition apparatus to which the present invention is applied. FIG. 2 is a flowchart showing a procedure for forming the coating layer and the diffusion layer. FIG. 3 is a sectional view showing the operation of the molten salt electrodeposition apparatus. FIG. 4 is a flowchart showing steps of a molten salt electrodeposition method according to the present invention.

【0014】本実施形態の溶融塩電析装置1は、図1に
示すように、塩を収容する筒体3、筒体3の外側中央部
を囲むように設けられた塩融解手段となる電気炉5、筒
体3の中央部内側に設けられた筒状に形成された陽極と
なる電極7、筒体3の両端部近傍に設けられた高周波加
熱器9、11、そして電極7と図示していない被処理部
材とに配線13で電気的に接続される電源15などで構
成されている。筒体3は、耐火物、例えばセラミックな
どで形成されており、軸を上下方向に向けた状態に設置
されている。筒体3の底部は、底板17を有しており、
底板17の中央部には、被処理部材の断面形状とほぼ同
じ形状の貫通孔19が形成されている。貫通孔19、内
周面部分にはリング状のシール部材21が取り付けられ
ている。高周波加熱器9は、筒体3の上方に、高周波加
熱器11は、筒体3の下方に設置されている。電源15
の正極は、陽極となる電極7に、電源15の負極は、陰
極となる図示していない被処理部材に各々配線13を介
して接続されている。
As shown in FIG. 1, a molten salt electrodeposition apparatus 1 according to the present embodiment is a cylindrical body 3 for accommodating salt, and an electric power serving as a salt melting means provided so as to surround a central portion outside the cylindrical body 3. The furnace 5, a cylindrical electrode 7 serving as an anode provided inside the central portion of the cylindrical body 3, high-frequency heaters 9 and 11 provided near both ends of the cylindrical body 3, and the electrode 7 are shown. The power supply 15 is electrically connected to the unprocessed member by the wiring 13. The cylindrical body 3 is formed of a refractory material, for example, ceramics, and is installed with its axis directed vertically. The bottom of the cylinder 3 has a bottom plate 17,
At the center of the bottom plate 17, a through hole 19 having substantially the same shape as the cross-sectional shape of the member to be processed is formed. A ring-shaped seal member 21 is attached to the through hole 19 and the inner peripheral surface portion. The high-frequency heater 9 is provided above the cylinder 3, and the high-frequency heater 11 is provided below the cylinder 3. Power supply 15
The positive electrode is connected to the electrode 7 serving as the anode, and the negative electrode of the power supply 15 is connected to the member to be processed (not shown) serving as the cathode via the wiring 13.

【0015】ここで、溶融塩電析により被処理部材表面
の被覆層、そして拡散処理により被処理部材と被覆層と
の界面に拡散層を形成する手順について説明する。すな
わち被覆層及び拡散層は、図2に示すように、被覆層の
形成処理を行う被処理部材の表面の汚れや酸化膜などを
除去するために酸洗浄を行う前処理工程101、被処理
部材を予め溶融塩電析を行う温度付近まで上昇させてお
くための予熱工程103、被処理部材の表面に溶融塩電
析により被覆層を形成する電析工程105、被処理部材
と電析工程105で形成した被覆層との界面に加熱処理
により拡散層を形成しする拡散処理工程107、そして
被処理部材表面の不要な溶融塩をブロー除去した後、処
理後の被処理部材表面を洗浄する溶融塩除去及び洗浄工
程109により形成される。
Here, a procedure for forming a coating layer on the surface of the member to be processed by molten salt electrodeposition and a diffusion layer at the interface between the member to be processed and the coating layer by diffusion treatment will be described. That is, as shown in FIG. 2, the coating layer and the diffusion layer are subjected to a pre-treatment step 101 in which acid cleaning is performed to remove stains, oxide films, and the like on the surface of the member to be processed on which the coating layer is formed. Preheating step 103 for raising the temperature to near the temperature at which molten salt electrodeposition is to be performed in advance, an electrodeposition step 105 for forming a coating layer on the surface of the member to be treated by molten salt electrodeposition, Diffusion treatment step 107 of forming a diffusion layer by heat treatment at the interface with the coating layer formed in the step, and after blowing off unnecessary molten salts on the surface of the member to be treated, washing the surface of the member to be treated after the melting. It is formed by a salt removal and washing step 109.

【0016】このような本実施形態の溶融塩電析装置の
動作と本発明の特徴部について説明する。なお、本実施
形態では、ステンレス製の管を被処理部材とし、この管
の表面に被覆層としてシリコン層を、拡散層として珪化
物層を形成する場合を一例として説明する。また、本実
施形態の溶融塩電析装置1は、図2に示した被覆層及び
拡散層の形成工程のうち、予熱工程103、電析工程1
05、そして拡散処理工程107を行う装置である。し
たがって、前処理工程101と溶融塩除去及び洗浄工程
109とは、溶融塩電析装置1とは別の装置や機器類で
行っている。
The operation of the molten salt electrodeposition apparatus of this embodiment and the features of the present invention will be described. In the present embodiment, a case will be described as an example in which a stainless steel tube is used as a member to be processed, and a silicon layer is formed as a coating layer and a silicide layer is formed as a diffusion layer on the surface of the tube. Further, the molten salt electrodeposition apparatus 1 of the present embodiment includes a preheating step 103, an electrodeposition step 1 in the coating layer and the diffusion layer forming steps shown in FIG.
05, and a device for performing the diffusion process step 107. Therefore, the pretreatment step 101 and the molten salt removing and washing step 109 are performed by a different device or equipment from the molten salt electrodeposition apparatus 1.

【0017】筒体3には、図3に示すように、貫通孔1
9から同軸に被処理部材であるステンレス製の管23が
挿通される。筒体3に被処理部材23が挿通された状態
で筒体3内に、粉体状の金属塩、例えばNaCl−KC
lと、粉体状の珪素化合物との混合物が収容される。こ
のとき、筒体3の底板17に形成された貫通孔19と管
23との隙間は、シール部材21によってシールされて
おり、粉体状の金属塩などが筒体3外に漏出するのを防
いでいる。
As shown in FIG. 3, a through hole 1 is formed in the cylindrical body 3.
From 9, a stainless steel tube 23 as a member to be processed is inserted coaxially. In a state where the member 23 to be processed is inserted into the cylindrical body 3, a powdery metal salt, for example, NaCl-KC
1 and a mixture of a powdery silicon compound. At this time, a gap between the through hole 19 formed in the bottom plate 17 of the cylindrical body 3 and the pipe 23 is sealed by the seal member 21, so that a powdery metal salt or the like leaks out of the cylindrical body 3. I'm preventing.

【0018】収容された粉体状の金属塩のうち、電気炉
5によって加熱された金属塩、つまり筒体3の中央部に
位置する金属塩は、融解して溶融塩となり溶融塩層25
を形成する。この溶融塩層25で粉体状の珪素化合物が
溶け、溶融塩層25は、溶融塩電析における溶融塩電解
浴となる。筒体3に収容された金属塩は、電気炉5によ
って加熱された溶融塩層25の部分から筒体3の底部と
上端部、つまり両端部に向かうにしたがい温度が漸次低
下する。このため、溶融塩層25部分から筒体3の両端
部に向かうに連れ、金属塩は、金属塩が部分的に融解し
た部分溶融塩層27、そして金属塩が非融解状態、つま
り固体状態にある固体塩層29を形成する。なお、固体
塩層29は、粉体状の部分や、一旦融解した塩が固まっ
たような塊状の固体の塩を含んでいる。これらの部分溶
融塩層27と固体塩層29とは、本実施形態の溶融塩電
析装置1において、溶融塩層25の溶融塩の漏出や、溶
融塩層25が筒体3外部の大気と接触しないようにする
ためのシールの役目を果たしている。
Among the powdered metal salts contained, the metal salt heated by the electric furnace 5, that is, the metal salt located at the center of the cylindrical body 3 is melted to become a molten salt, and the molten salt layer 25 is formed.
To form The powdered silicon compound is melted in the molten salt layer 25, and the molten salt layer 25 becomes a molten salt electrolytic bath in molten salt electrodeposition. The temperature of the metal salt contained in the cylindrical body 3 gradually decreases from the portion of the molten salt layer 25 heated by the electric furnace 5 toward the bottom and upper ends of the cylindrical body 3, that is, both ends. For this reason, as the metal salt moves from the molten salt layer 25 to both ends of the cylindrical body 3, the metal salt becomes a partially molten salt layer 27 in which the metal salt is partially melted, and the metal salt becomes a non-melted state, that is, a solid state. A certain solid salt layer 29 is formed. The solid salt layer 29 includes a powdery portion and a massive solid salt such as a salt that has once melted and solidified. In the molten salt electrodeposition apparatus 1 according to the present embodiment, the partial molten salt layer 27 and the solid salt layer 29 are connected to the molten salt leaking out of the molten salt layer 25 or the molten salt layer 25 is connected to the atmosphere outside the cylinder 3. It serves as a seal to prevent contact.

【0019】この状態で、本実施形態の溶融塩電析装置
1は、管23の異なる部分に対して予熱工程103、電
析工程105、そして拡散処理工程107を同時に行
う。前述のように、予熱工程103は、高周波加熱器9
によって溶融塩電析を行う温度付近まで管23を加熱す
る工程である。電析工程105は、溶融塩層25中、つ
まり溶融塩電解浴中にある管23の表面に溶融塩電析に
よって被覆層としてシリコン層を形成する工程である。
拡散処理工程107は、高周波加熱器11によって管2
3を加熱し、電析工程105によって形成されたシリコ
ン層と管23との界面に拡散層として珪化物層を形成す
る工程である。
In this state, the molten salt electrodeposition apparatus 1 of this embodiment simultaneously performs the preheating step 103, the electrodeposition step 105, and the diffusion processing step 107 on different portions of the tube 23. As described above, the preheating step 103 includes the high-frequency heater 9
Is a step of heating the tube 23 to a temperature near the temperature at which molten salt electrodeposition is performed. The electrodeposition step 105 is a step of forming a silicon layer as a coating layer in the molten salt layer 25, that is, on the surface of the tube 23 in the molten salt electrolytic bath by molten salt electrodeposition.
The diffusion process 107 is performed by the high-frequency heater 11 for the pipe 2.
3 is a step of forming a silicide layer as a diffusion layer at the interface between the silicon layer formed in the electrodeposition step 105 and the pipe 23 by heating.

【0020】予熱工程103、電析工程105、そして
拡散処理工程107のうち、処理時間が最も長い工程が
終了した後、溶融塩電析装置1は、筒体3と管23の軸
方向に沿って上方へ、つまり矢印31方向へ移動する。
このとき、筒体3の両端部に形成された固体塩層29に
より、筒体3の両端部と管23とは、固定された状態に
なっている。したがって、溶融塩電析装置1が矢印31
方向に移動するためには、固体塩層29による筒体3の
両端部と管23との固定を解除する必要がある。このた
め、高周波加熱器9、11を作動させて筒体3の両端部
に位置する管23の部分を加熱し、固体塩層29の管2
3周囲の部分33を融解させた後、溶融塩電析装置1が
移動する。
After the step having the longest processing time among the preheating step 103, the electrodeposition step 105, and the diffusion processing step 107 is completed, the molten salt electrodeposition apparatus 1 moves along the axial direction of the cylindrical body 3 and the pipe 23. And moves upward, that is, in the direction of arrow 31.
At this time, both ends of the cylindrical body 3 and the pipe 23 are fixed by the solid salt layers 29 formed at both ends of the cylindrical body 3. Therefore, the molten salt electrodeposition device 1 is
In order to move in the direction, it is necessary to release the fixing between the tube 23 and both ends of the cylindrical body 3 by the solid salt layer 29. For this reason, the high-frequency heaters 9 and 11 are operated to heat the portions of the tubes 23 located at both ends of the cylindrical body 3, and the tubes 2 of the solid salt layer 29 are heated.
After the surrounding portion 33 is melted, the molten salt electrodeposition apparatus 1 moves.

【0021】したがって、本実施形態の溶融塩電析装置
1は、図4に示すように、同時に行われる予熱工程10
3、電析工程105、拡散処理工程107、固体塩層2
9の管23の周囲部分のみを融解させる固体塩の融解工
程111、そして溶融塩電析装置1が管23に沿って移
動する移動工程113を繰り返し行うことにより、管2
3の表面に被覆層であるシリコン層と拡散層である珪化
物層とを連続的に順次形成して行く。
Accordingly, as shown in FIG. 4, the molten salt electrodeposition apparatus 1 of the present embodiment comprises
3, electrodeposition step 105, diffusion processing step 107, solid salt layer 2
9 by repeatedly repeating a solid salt melting step 111 for melting only the peripheral portion of the pipe 23 and a moving step 113 in which the molten salt electrodeposition apparatus 1 moves along the pipe 23.
On the surface of No. 3, a silicon layer as a coating layer and a silicide layer as a diffusion layer are successively formed.

【0022】このように本実施形態の溶融塩電析装置及
び溶融塩電析方法では、被覆層を形成する電析工程10
5と、溶融塩電析装置1を移動する移動工程113とを
繰り返すことにより、管23の長さよりも浅い溶融塩層
25が管23に沿って移動しながら溶融塩層25中にあ
る管23の部分表面に被覆層を順次形成することができ
る。したがって、棒状または管状の被処理部材の長さよ
りも浅い溶融塩電解浴を用いて容易に被覆層を形成でき
る。
As described above, in the molten salt electrodeposition apparatus and the molten salt electrodeposition method of the present embodiment, the electrodeposition step 10 for forming the coating layer is performed.
5 and the moving step 113 for moving the molten salt electrodeposition apparatus 1 are repeated, so that the molten salt layer 25 shallower than the length of the tube 23 moves along the tube 23 while the tube 23 in the molten salt layer 25 is moving. A coating layer can be sequentially formed on the partial surface of. Therefore, the coating layer can be easily formed by using a molten salt electrolytic bath that is shallower than the length of the rod-shaped or tubular member to be processed.

【0023】さらに、棒状または管状の被処理部材の長
さよりも浅い溶融塩電解浴を用いて容易に被覆層を形成
できるため、溶融塩電析装置を小型化できる。加えて、
本実施形態の溶融塩電析装置1は、予熱工程103を行
うための高周波加熱器9を筒体3の上側端部の上方に、
拡散処理工程107を行うための高周波加熱器11を筒
体3の底部の下方に備えている。したがって、電析工程
105前の管23の予熱、及び電析工程105後の被覆
層形成後の拡散層形成を同時に行えるため、作業効率を
向上することができる。また、溶融塩電析装置は、前処
理工程101を行うための酸洗浄器を高周波加熱器9の
上方に、溶融塩除去及び洗浄工程109を行うためのブ
ロワと洗浄器を高周波加熱器11の下方に備えた構成と
することもできる。このような、図2に示す前処理工程
101から溶融塩除去及び洗浄工程109までの全ての
工程を行う溶融塩電析装置及び溶融塩電析方法とすれ
ば、一層作業効率を向上することができる。
Further, since the coating layer can be easily formed by using a molten salt electrolytic bath which is shallower than the length of the rod-shaped or tubular member to be treated, the molten salt electrodeposition apparatus can be downsized. in addition,
The molten salt electrodeposition apparatus 1 of the present embodiment includes a high-frequency heater 9 for performing the preheating step 103 above the upper end of the cylindrical body 3.
The high-frequency heater 11 for performing the diffusion process 107 is provided below the bottom of the cylindrical body 3. Therefore, the preheating of the tube 23 before the electrodeposition step 105 and the formation of the diffusion layer after the formation of the coating layer after the electrodeposition step 105 can be performed at the same time, so that the working efficiency can be improved. Further, the molten salt electrodeposition apparatus includes an acid washer for performing the pretreatment step 101 above the high-frequency heater 9, and a blower and a cleaner for performing the molten salt removal and cleaning step 109 which are provided in the high-frequency heater 11. It is also possible to adopt a configuration provided below. With such a molten salt electrodeposition apparatus and a molten salt electrodeposition method that perform all the steps from the pretreatment step 101 to the molten salt removal and washing step 109 shown in FIG. 2, the working efficiency can be further improved. it can.

【0024】また、本実施形態では、筒体3の両端部の
上方と下方に各々高周波加熱器9、11を設けている
が、拡散層の形成や被処理部材の予熱を別途行う場合な
どは、筒体3両端部の上方と下方に各々高周波加熱器
9、11を設ける必要はない。例えば、部材加熱手段
は、固体塩層29の管23周囲の部分33を融解するた
めにのみ使用されるため、固体塩層29の管23周囲の
部分33を効率的に融解できるように、固体塩層29が
位置する筒体3の部分の外側周囲に高周波加熱器を設け
ることもできる。
In this embodiment, the high-frequency heaters 9 and 11 are provided above and below both ends of the cylindrical body 3, respectively. However, when forming a diffusion layer or preheating a member to be processed separately, etc. It is not necessary to provide the high-frequency heaters 9 and 11 above and below both ends of the cylindrical body 3, respectively. For example, since the member heating means is used only to melt the portion 33 around the pipe 23 of the solid salt layer 29, the solid heating means is used to melt the portion 33 around the pipe 23 of the solid salt layer 29 efficiently. A high-frequency heater may be provided around the outside of the portion of the cylinder 3 where the salt layer 29 is located.

【0025】また、本実施形態では、部材加熱手段とし
て高周波加熱器9、11を設けたが、ヒータなどで管2
3を加熱する構成にすることもできる。ただし、高周波
加熱器を用いれば、導電性材料である被処理部材の所望
の部分を効率的に加熱することができるので好ましい。
In this embodiment, the high-frequency heaters 9 and 11 are provided as the member heating means.
3 may be heated. However, it is preferable to use a high-frequency heater because a desired portion of the member to be processed, which is a conductive material, can be efficiently heated.

【0026】また、本実施形態では、溶融塩電析装置1
が管23に沿って移動しているが、溶融塩電析装置は、
被処理部材に対して相対移動すればよい。例えば、被処
理部材が溶融塩電析装置の筒体の軸に沿って移動する構
成などにすることもできる。さらに、本実施形態では、
ステンレス製の管23にシリコン層と珪化物層を形成す
る場合を一例としているが、本発明はこれに限らず、様
々な棒状または管状の導電性の被処理部材に溶融塩電析
により様々な表面被覆層を形成する溶融塩電析装置及び
溶融塩電析方法に適用できる。
In this embodiment, the molten salt electrodeposition apparatus 1
Moves along the tube 23, but the molten salt electrodeposition device
What is necessary is just to move relatively with respect to a to-be-processed member. For example, a configuration in which the member to be processed moves along the axis of the cylindrical body of the molten salt electrodeposition apparatus may be employed. Further, in the present embodiment,
Although the case where the silicon layer and the silicide layer are formed on the stainless steel tube 23 is taken as an example, the present invention is not limited to this, and various rod-like or tubular conductive members to be treated are subjected to various kinds of molten salt electrodeposition. The present invention can be applied to a molten salt electrodeposition apparatus and a molten salt electrodeposition method for forming a surface coating layer.

【0027】[0027]

【発明の効果】本発明によれば、棒状または管状の被処
理部材の長さよりも浅い溶融塩電解浴を用いて容易に被
覆層を形成できる。
According to the present invention, a coating layer can be easily formed using a molten salt electrolytic bath which is shallower than the length of a rod-shaped or tubular member to be processed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明を適用してなる溶融塩電析装置の一実施
形態の概略構成を示す斜視図である。
FIG. 1 is a perspective view showing a schematic configuration of an embodiment of a molten salt electrodeposition apparatus to which the present invention is applied.

【図2】被覆層及び拡散層の形成手順を示すフロー図で
ある。
FIG. 2 is a flowchart showing a procedure for forming a coating layer and a diffusion layer.

【図3】本発明を適用してなる溶融塩電析装置の動作を
示す断面図である。
FIG. 3 is a sectional view showing the operation of a molten salt electrodeposition apparatus to which the present invention is applied.

【図4】本発明を適用してなる溶融塩電析方法の工程を
示すフロー図である。
FIG. 4 is a flowchart showing steps of a molten salt electrodeposition method according to the present invention.

【符号の説明】[Explanation of symbols]

1 溶融塩電析装置 3 筒体 5 電気炉 7 電極 9、11 高周波加熱器 15 電源 17 底板 19 貫通孔 23 被処理部材 25 溶融塩層 27 部分溶融塩層 29 固体塩層 REFERENCE SIGNS LIST 1 molten salt electrodeposition apparatus 3 cylinder 5 electric furnace 7 electrode 9, 11 high-frequency heater 15 power supply 17 bottom plate 19 through hole 23 member to be processed 25 molten salt layer 27 partially molten salt layer 29 solid salt layer

Claims (8)

【特許請求の範囲】[Claims] 【請求項1】 塩が収容される筒体と、該筒体の少なく
とも底部近傍を除いて前記塩を加熱融解する塩融解手段
と、前記筒体の内側に配設された電極と、該電極及び棒
状または管状の被処理部材に電気的に接続された電源部
とを含み、前記筒体は、前記底部を閉塞する底板を有
し、該底板には、前記被処理部材が挿通可能な貫通孔が
形成されてなる溶融塩電析装置。
1. A cylindrical body in which salt is stored, salt melting means for heating and melting the salt except at least near the bottom of the cylindrical body, an electrode disposed inside the cylindrical body, and the electrode And a power supply unit electrically connected to the rod-shaped or tubular member to be processed, wherein the cylindrical body has a bottom plate that closes the bottom, and the bottom plate has a through hole through which the member to be processed can be inserted. A molten salt electrodeposition device in which holes are formed.
【請求項2】 前記塩融解手段は、前記筒体の両端部近
傍を除いて前記塩を加熱融解してなることを特徴とする
請求項1に記載の溶融塩電析装置。
2. The molten salt electrodeposition apparatus according to claim 1, wherein the salt melting means heats and melts the salt except for near both ends of the cylindrical body.
【請求項3】 前記被処理部材を加熱する部材加熱手段
を含むことを特徴とする請求項1または2に記載の溶融
塩電析装置。
3. The molten salt electrodeposition apparatus according to claim 1, further comprising a member heating means for heating the member to be processed.
【請求項4】 前記部材加熱手段は、前記筒体の一方の
端部側に配設された第1の部材加熱手段と、前記筒体の
他方の端部側に配設された第2の部材加熱手段とからな
ることを特徴とする請求項1乃至3のいずれか1項に記
載の溶融塩電析装置。
4. The member heating means includes a first member heating means provided on one end side of the cylindrical body and a second member heating means provided on the other end side of the cylindrical body. The molten salt electrodeposition apparatus according to any one of claims 1 to 3, comprising a member heating means.
【請求項5】 前記部材加熱手段は、高周波加熱器であ
ることを特徴とする請求項1乃至4のいずれか1項に記
載の溶融塩電析装置。
5. The molten salt electrodeposition apparatus according to claim 1, wherein said member heating means is a high-frequency heater.
【請求項6】 棒状または管状の被処理部材の溶融塩電
解浴中にある部分の表面に溶融塩電析により被覆層を形
成する電析工程と、前記被処理部材に対して前記溶融塩
電解浴を前記被処理部材の軸方向に相対移動させる移動
工程とを繰り返し行い前記被処理部材表面に順次被覆層
を形成する溶融塩電析方法。
6. An electrodeposition step of forming a coating layer on a surface of a rod-shaped or tubular member to be processed in a molten salt electrolysis bath by molten salt electrodeposition, and performing the molten salt electrolysis on the member to be processed. A molten salt electrodeposition method wherein a moving step of relatively moving the bath in the axial direction of the member to be treated is repeated to form a coating layer on the surface of the member to be treated sequentially.
【請求項7】 固体塩によりシールされた溶融塩電解浴
により、棒状または管状の被処理部材の前記溶融塩電解
浴中にある部分の表面に溶融塩電析により被覆層を形成
する電析工程と、前記被処理部材に接する前記固体塩を
融解する固体塩の融解工程と、前記被処理部材に対して
前記溶融塩電解浴を前記被処理部材の軸方向に相対移動
させる移動工程とを繰り返し行い前記被処理部材表面に
順次被覆層を形成する溶融塩電析方法。
7. An electrodeposition step of forming a coating layer by molten salt electrodeposition on the surface of a portion of the rod-shaped or tubular member to be processed in the molten salt electrolytic bath, using a molten salt electrolytic bath sealed with a solid salt. Repeating a solid salt melting step of melting the solid salt in contact with the member to be processed, and a moving step of moving the molten salt electrolytic bath relative to the member to be processed in the axial direction of the member to be processed. A molten salt electrodeposition method for sequentially forming a coating layer on the surface of the member to be treated.
【請求項8】 前記電析工程と同時に、前記被処理部材
の被覆層を形成する部分を予め加熱しておく予熱工程
と、前記被処理部材の被覆層が形成された部分の該被覆
層と前記被処理部材との界面に拡散層を形成する拡散処
理工程とを前記被処理部材の異なる部分に対して行うこ
とを特徴とする請求項6または7に記載の溶融塩電析方
法。
8. A preheating step of preheating a portion of the member to be formed on which the coating layer is to be formed simultaneously with the electrodeposition step, and a step of forming a coating layer on the portion of the member to be processed where the coating layer is formed. The molten salt electrodeposition method according to claim 6, wherein a diffusion treatment step of forming a diffusion layer at an interface with the member to be treated is performed on different portions of the member to be treated.
JP2000213650A 2000-07-14 2000-07-14 Molten salt electrodepositing device and molten salt electrodepositing method Withdrawn JP2002030478A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000213650A JP2002030478A (en) 2000-07-14 2000-07-14 Molten salt electrodepositing device and molten salt electrodepositing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000213650A JP2002030478A (en) 2000-07-14 2000-07-14 Molten salt electrodepositing device and molten salt electrodepositing method

Publications (1)

Publication Number Publication Date
JP2002030478A true JP2002030478A (en) 2002-01-31

Family

ID=18709366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000213650A Withdrawn JP2002030478A (en) 2000-07-14 2000-07-14 Molten salt electrodepositing device and molten salt electrodepositing method

Country Status (1)

Country Link
JP (1) JP2002030478A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010273718A (en) * 2009-05-26 2010-12-09 Tadashi Murahira Salt melting device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010273718A (en) * 2009-05-26 2010-12-09 Tadashi Murahira Salt melting device

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