JP2002011647A - Wire type cutting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To reduce size and simplify a device. SOLUTION: A main roll part 10 consists of a plurality of only driven groove rolls 12 and a drive motor is not present. A tension regulating mechanism (a dancer mechanism) 30 of a wire 9 for cutting controlled based on the detected tension of a tension detector 34 is situated on at least the input side of a tension detector 34. The wire 9 for cutting is wound from the output side of the main roll part 10 not through a capstan stern mechanism but directly by a winding mechanism 50. The winding mechanism 50 is provided with a drive motor 51. The number of revolutions of the drive motor 51 is controlled based on the detecting speed of a speed detector 35. A driven groove roll 12 of the main roll part 10 is rotationally driven by the wire 9 for cutting wound by the winding mechanism 50.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a wire type cutting apparatus suitable for cutting a so-called brittle material such as a semiconductor material, a magnetic material, ceramics, a printed wiring board and the like into a wafer or other shapes.

[0002]

2. Description of the Related Art A wire-cutting apparatus, also called a wire saw, moves a wire stretched on a plurality of parallel grooved rolls and presses a material to be cut on the running wire. This is for cutting the cutting material.

Conventional wire saws have too complicated structures and controls to control the tension, speed and winding of a saw wire (cutting wire) with high precision.
It tended to be expensive.

For example, considering a drive motor, a saw wire feeding mechanism, its traverse mechanism, a main roll having a plurality of groove rolls, a saw wire winding mechanism,
The traverse mechanism and the winding mechanism require a capstan mechanism for reducing the wire tension and at least six drive motors, and control of each of them is complicated, so that the control is complicated.

Further, the groove roll of the main roll part needs to be replaced because it is worn. Groove rolls must be replaced when changing the dimensions or material to be cut. Changing the groove roll requires a great deal of labor and time.

[0006]

DISCLOSURE OF THE INVENTION The present invention provides a wire-type cutting apparatus having a configuration as simple as possible.

Another object of the present invention is to facilitate replacement of the groove roll.

According to the present invention, a cutting wire fed from a wire feeding mechanism is supplied to an input side of a main roll portion and is applied to a plurality of groove rolls of the main roll portion. · In a wire cutting device in which the output side of the roll section is wound by a wire winding mechanism, the main roll section is constituted only by a plurality of driven groove rolls, and cutting is performed on at least the input side of the main roll section. A wire tension detector is provided,
At least an input side of the main roll unit is provided with a first tension adjusting mechanism for a cutting wire controlled based on a detected tension of the tension detector, and at least an input and output side of the main roll unit is provided. Either one is provided with a speed detector for the cutting wire, and the cutting wire is
It is wound directly from the output side of the roll section by the winding mechanism without passing through a tension conversion mechanism, and the winding mechanism has a drive motor, and the rotation speed of the drive motor is based on the speed detected by the speed detector. At least the driven groove roll of the main roll portion is driven to rotate by a cutting wire wound by the winding mechanism.

Here, the input side and the output side of the main roll are relative to each other. In the above, the cutting wire travels from the feeding mechanism to the winding mechanism via the main roll. Conversely, there is also a case where the cutting wire travels from the winding mechanism via the main roll to the feeding mechanism (a reciprocating traveling type described later).

The meaning of the fact that the cutting wire is sent directly from the output side of the main roll to the winding mechanism is as follows.
It does not exclude that a traverse mechanism can be inserted between them.

According to the present invention, since the drive motor does not exist in the main roll portion, the configuration of the main roll portion is extremely simplified. Also, there is no tension conversion (separation) mechanism called a so-called capstan mechanism. Thus, according to the present invention, at least two drive motors can be omitted, the configuration is simplified, and the control is also simplified. The rotation of the groove roll of the main roll can be controlled at a winding speed by a winding mechanism. The control of the winding speed can be controlled based on the detection speed of at least one speed detector. Control of the tension is also sufficient with at least one tension detector. The present invention is particularly advantageous for a small or simple wire cutting machine.

In a preferred embodiment of the present invention, a frame for rotatably holding all the driven groove rolls of the main roll portion is provided, and the frame is detachably attached to a machine base of the wire type cutting apparatus. Fixed. Since there is no drive motor in the main roll section and the main roll section is unitized by a frame, the replacement is easy and simple, and the work can be speeded up. When changing the thickness of the wafer to be cut or when the groove roll is worn, the groove roll can be easily replaced.

[0013] In one embodiment, the wire-type cutting apparatus includes a first travel in which a cutting wire travels from a pay-out mechanism to a winding mechanism via a main roll portion, and a wire from the winding mechanism to the main roll. This is a reciprocating traveling type that is capable of performing a second traveling traveling toward the feeding mechanism via a section.

In the reciprocating traveling type wire cutting apparatus, a second tension adjusting mechanism for a cutting wire controlled based on the tension detected by the tension detector is provided on the output side of the main roll. , A drive motor is provided in the above-mentioned feeding mechanism. In the first traveling, the drive motor of the winding mechanism is controlled based on the speed detected by the speed detector, and the operation of the second tension adjusting mechanism is stopped.
The first tension adjusting mechanism is controlled based on the tension detected by the tension detector. In the second running, the drive mechanism is controlled based on the speed detected by the speed detector, the operation of the first tension adjusting mechanism is stopped, and the second tension is controlled. The adjusting mechanism is controlled based on the tension detected by the tension detector.

In one embodiment, the first and second tension adjusting mechanisms are realized by dancer mechanisms each having a dancer roll. These dancer mechanisms are
Each is provided with a position detector for detecting the position of the roll.

In the reciprocating traveling type, in the first traveling, the rotation of the drive motor of the feeding mechanism is controlled based on the position detection output of the position detector of the first tension adjusting mechanism. The rotation of the drive motor of the winding mechanism, which serves for feeding, is controlled based on the position detection output of the position detector of the tension adjusting mechanism. The dancer mechanism also functions to absorb the difference between the feeding speed of the fed cutting wire and the winding speed of the cutting wire wound on the winding side.

Generally speaking, the feeding mechanism or the winding mechanism when functioning as the feeding mechanism is controlled so as to feed the cutting wire at substantially the same speed as the running speed of the cutting wire on the winding side. .

The present invention is applicable not only to the reciprocating traveling type described above, but also to a wire type cutting apparatus which performs one-way traveling (travel of a cutting wire only from a pay-out side to a winding side via a main roll portion). However, the delivery speed control of the delivery mechanism is preferably performed as follows.

That is, the feeding mechanism has a drive motor, and the rotation of the drive motor makes the traveling speed of the cutting wire fed from the feeding mechanism substantially equal to the traveling speed of the cutting wire wound by the winding mechanism. Is controlled as follows.

In one embodiment, the tension adjustment mechanism includes a dancer
The dancer mechanism includes a roll. The dancer mechanism includes a position detector that detects the position of the dancer roll, and the rotation of the drive motor of the feeding mechanism is controlled based on the position detection output of the position detector.

In another embodiment, the feeding mechanism includes a brake for braking the bobbin around which the cutting wire is wound, and the tension adjusting mechanism is a dancer mechanism including a dancer roll. A position detector for detecting the position of the roll is provided, and the brake is controlled by a position detection output of the position detector.

The tension adjustment can be performed as follows. That is, the tension adjusting mechanism includes a brake for braking the bobbin provided in the feeding mechanism, and the brake is controlled based on the detected tension of the tension detector.

[0023]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment FIG. 1 shows the overall configuration of a wire cutting apparatus (wire saw) according to a first embodiment. In this embodiment, a saw wire (cutting wire) reciprocates.

The main roll section 10 has two driven groove rolls.
It has twelve. Grooves are formed on the peripheral surface of the driven groove roll 12 at regular intervals. The spacing between the grooves defines the thickness of the wafer formed by cutting. These groove rolls 12
Are rotatably supported by a frame 11 in parallel with each other, as shown in FIG. The frame 11 is detachably fixed to a machine base (or a main frame) of a wire-type cutting apparatus. Thereby, the replacement of the main roll unit 10 is easy. That is, the main roll unit 10 is unitized by the frame 11, and the entire unit is replaced. The groove rolls 12 of the main roll portion 10 are all driven groove rolls, and the main roll portion 10 is not provided with a motor for rotating and driving the groove roll 12 and other power devices. Since no drive motor is provided in the main roll unit 10, replacement of the main roll unit is easier.

Material feed device (work feed device)
(Not shown) is disposed above the middle of the two groove rolls 12. A work (material to be cut, ingot) W is detachably held at a tip end of a work holding portion of the work feeding device. The work W moves up and down between the two groove rolls 12 by the work feeder.

As will be described later, a machining liquid containing abrasive grains is applied near a portion (machining portion) where the saw wire (cutting wire) 9 hung on the groove roll 12 and the work W entering the saw wire 9 come into contact. A nozzle (not shown) for supplying the material to the processing location is provided.

A dancer mechanism (tension adjustment) is provided between the unwinding mechanism 20 of the saw wire 9 and the input side of the main roll section 10 and between the output side of the main roll section 10 and the winding mechanism 50 of the saw wire 9. (Mechanism) 30 and 40 are arranged (the input side and the output side of the main roll unit 10 are based on the case where the saw wire 9 travels in the forward direction (FIG. 3)).

One saw wire (cutting wire) 9 is
The wire is fed from the wire feeding mechanism 20, and the traverse mechanism 25,
It is supplied to the main roll unit 10 via the dancer mechanism 30 and the guide sheave 13. In the main roll section 10, the saw wire 9 is sequentially wound along the groove of the groove roll 12,
It is wound by the number of grooves in each groove roll 12.

The saw wire 9 further includes a guide sheave 1
4. The wire is wound around the wire winding mechanism 50 via the dancer mechanism 40 and the traverse mechanism 55. Dancer mechanism 40 and traverse mechanism
There is no capstan mechanism for converting (or separating) the wire tension between the capstan mechanism 55 and the winding mechanism 50. Since the saw wire 9 reciprocates in the forward and reverse directions,
The feeding mechanism 20 and the winding mechanism 50 are also relative to each other, and are named based on the forward running of the saw wire.

As will be described later, all the groove rolls 12 of the main roll portion 10 are driven to rotate by the tension applied to the saw wire 9 when the saw wire 9 is wound by the winding mechanism 50. Therefore, the main roll part
At 10, the saw wire 9 runs horizontally between the groove rolls 12. The work W is advanced vertically downward toward the saw wire 9 traveling horizontally by the work feeder. The workpiece W is gradually fed in a vertical direction toward the saw wire 9, the workpiece W is pressed against the saw wire 9 traveling horizontally between the groove rolls 12, and the workpiece W is grinded from a nozzle to a processing location where the saw wire 9 and the workpiece W are in contact with each other. A working fluid containing grains is supplied.
Thereby, the work W is cut into a plurality of wafers having a constant width.

As described above, since the main roll section 10 is not provided with a drive motor and has no capstan mechanism, in the first embodiment, the drive motor is provided by the motor 21 of the feeding mechanism 20 and the traverse mechanism. Motor 2 of mechanism 25, 55
6, 56 and the motor 51 of the winding mechanism 50 in total are four. This moves the saw wire 9 in both (forward and reverse) directions (reciprocating).
This is because the mechanism makes the vehicle run. Saw wire 9
If the vehicle travels in one direction, the third and fourth
As in the embodiment, at least the motor of the traverse mechanism 55
Two motors 56 and the motor 51 of the winding mechanism 50 are sufficient.

The saw wire winding mechanism 50 includes a winding bobbin (reel or drum). The winding bobbin is driven to rotate by a drive motor 51. The saw wire 9 used for cutting the work W in the main roll unit 10 is sequentially wound on a winding bobbin. Saw wire 9
A traverse mechanism 55 is provided in order to wind (at a constant pitch) in line with the winding bobbin. The traverse mechanism 55 includes a sheave on which the saw wire 9 is wound to bring the saw wire 9 to the winding position, and a drive motor 56 is provided to move the position of the sheave as the saw wire 9 is wound. . In the bidirectional traveling of the saw wire 9, the winding mechanism 50 functions as a winding mechanism when the saw wire is traveling in the forward direction, but functions as a saw wire feeding mechanism when the saw wire is traveling in the reverse direction.

The feeding mechanism 20 for the saw wire 9 is a feeding bobbin (reel or drum) around which the saw wire 9 is wound.
And a drive motor 21 for rotating the bobbin. The feeding mechanism 20 also has a function as a saw wire feeding mechanism (during forward running) and a function as a winding mechanism (during reverse running). However, when the saw wire 9 only travels in one direction as in another embodiment to be described later, the feeding mechanism 20 is exclusively used for feeding the saw wire, and the feeding bobbin may be a driven bobbin.
21 may not be necessary. The traverse mechanism 25 has the same configuration as the traverse mechanism 55, and includes a drive motor 26. When the feeding mechanism 20 is dedicated to feeding, the traverse mechanism 25 is not always necessary. The saw wire 9 fed from the feeding bobbin of the feeding mechanism 20 is connected to the dancer mechanism 30.
Supplied to

The dancer mechanism 30 includes two fixed rolls (or sheaves) 31 and 32 and a dancer roll (or sheave) 33 which is movably held up and down. Saw wire 9
Is wound on the roll 32 from the roll 31 via the dancer roll 33, and supplied to the main roll unit 10. Some dancer mechanisms consist of one fixed roll and one dancer roll held up and down, and the saw wire is reciprocated between these rolls multiple times. A mechanism can also be used.

The other dancer mechanism 40 has basically the same configuration as the dancer mechanism 30. Two dancer rolls (or sheaves) 41 and 42 and a dancer roll (or sheave) 43 held movably up and down are provided. And Main roll section
The saw wire 9 drawn from 10 is a dancer
The traverse mechanism 55
Sent to

The roll (sheave) 32 of the dancer mechanism 30 is used as a part of a tension detector. For example, since the tension of the saw wire 9 acts on a support member such as a bearing thereof via the roll 32, the tension of the saw wire 9 is detected by detecting the force acting on the support member with a load cell or the like. Reference numeral 34 denotes a tension detector of the saw wire 9. Similarly,
Another tension detector having a roll (sheave) 42 of the dancer mechanism 40 as a part of its component is provided, and the tension detector detects the tension of the saw wire 9 at the output side of the main roll section 10. You may. However, since the tension of the saw wire 9 is equal on the input side and the output side of the main roll section 10, it is sufficient to provide one tension detector 34 as shown in FIG. Needless to say, the tension detector can be realized by another known method without using the roll of the dancer mechanism.

The dancer mechanisms 30 and 40 are provided with position detectors 36 and 46 for detecting the positions (height positions) of the dancer rolls 33 and 43, respectively. The height position of dancer roll 33 or 43 is the dancer mechanism 30 or 40
Represents the speed difference between the input side and the output side saw wire 9. Therefore, as described later, dancer roll 33 or 43
It is possible to control the saw wire feeding speed of the feeding mechanism in accordance with the detection of the height position.

The dancer mechanism 30 or 40 is a dancer roll.
By changing the force applied to 33 or 43, the tension of the saw wire 9 is controlled or adjusted. Various configurations for adjusting the tension are known, but one example is shown here.

The dancer roll of the dancer mechanism is provided at the other end of the arm pivotally connected at one end. This arm is driven by an air cylinder (or hydraulic cylinder). The saw wire tension applied to the dancer roll is adjusted by the pressure applied to the air cylinder. The height position of the dancer roll is detected based on the swing angle of the arm (the rotation angle of the pivot of the arm) (position detector 36 or 46).

The roll (sheave) 13 on the entrance side of the main roll 10 forms a part of the speed detector 35. The speed detector 35 outputs a signal indicating the traveling speed (linear speed) of the traveling saw wire 9 by measuring the rotation speed of the roll 13. The speed detector 35 also outputs a signal (length measurement signal) indicating the length of the traveling saw wire 9. Saw wire 9
Since the speed and the length of the main roll unit 10 are equal on the input side and the output side, a speed detector may be provided on either the input side or the output side. For example, roll (sheave)
The traveling speed of the saw wire 9 can be detected based on the rotation of the fourteen.

Referring to FIG. 3, a description will be given of the control when the saw wire 9 is caused to travel in the forward direction.

When the saw wire 9 is caused to travel in the forward direction, the motor 51 of the winding mechanism 50 is driven to drive the saw wire 9.
At a constant speed. The running of the saw wire 9 causes the groove roll 12 of the main roll portion 10 to rotate. Based on the speed detected by the speed detector 35, the motor of the winding mechanism 50 is controlled so that the traveling speed of the saw wire 9 is always substantially constant.
51 rotation speeds are controlled. The function of the take-up side dancer mechanism (tension adjustment mechanism) 40 as the tension adjustment mechanism is stopped. That is, the position of the dancer roll 43 is fixed (for example, by the above-described air cylinder), and the dancer roll is a fixed roll (it goes without saying that it is rotatable).

The main roll unit 10 is controlled by the dancer mechanism 30.
The wire tension of the saw wire 9 supplied to is adjusted.
The wire tension of the saw wire 9 on the input side of the main roll unit 10 is detected by a tension detector 34. The dancer and the dancer mechanism 30 are adjusted so that the detected tension is almost equal to the set value.
The air pressure of the air cylinder that drives the arm provided with the roll 33 is adjusted (the force applied to the dancer roll 33 is adjusted or controlled). As a result, the tension of the saw wire 9 supplied to the main roll unit 10 is controlled so that the tension is always substantially constant.

Further, the dancer roll 33 of the dancer mechanism 30
Is detected by the position detector 36. As described above, the height position of the dancer roll is determined by the difference between the traveling speed of the saw wire on the input and output sides of the dancer mechanism 30 (more specifically, the winding speed of the saw wire by the winding mechanism 50 and the saw wire by the feeding mechanism 20). (The difference from the feeding speed), so that the height position of the dancer roll 33 is almost constant at all times.
To control the rotation of

The traverse mechanism 55 on the winding side is driven. The feed-side traverse mechanism 25 does not necessarily need to be driven, but desirably moves (drives) the sheave so as to match the position of the saw wire to be fed.

FIG. 4 shows a state of control when the saw wire is driven in the reverse direction.

Using the feeding mechanism 20 as a winding mechanism, the motor 21
Is driven to wind the saw wire 9 around the feeding mechanism 20. The motor 21 is connected to the saw wire 9 based on the speed detected by the speed detector 35.
Is controlled so that the speed is constant. The position of the dancer roll 33 of the dancer mechanism 30 is fixed.

The force applied to the dancer roll 43 of the dancer mechanism 40 is controlled based on the tension detected by the tension detector 34 so that the tension on the entrance side of the main roll portion 10 is always substantially constant (as described above for the air). Control of arm by cylinder). A tension detector may be provided on the dancer mechanism 40 side, and the force applied to the dancer roll 43 may be controlled based on the tension detected by the tension detector. In addition, based on the position of the dancer roll 43 detected by the position detector 46, the rotation of the motor 51 of the winding mechanism 50 serving as a feeding mechanism is performed so that the height position of the dancer roll 43 is almost always constant. Acceleration / deceleration control.

There are various methods for reciprocating the saw wire 9. One is that almost all the saw wires 9 are wound from the feeding mechanism 20 to the winding mechanism 50 in the forward running, and then the saw wire 9 is run from the winding mechanism 50 to the feeding mechanism 20 by switching to the reverse running. Things.
Second, the traveling direction of the saw wire 9 is repeatedly switched a plurality of times while one workpiece W is being cut. Preferably, the saw wire 9 travels a predetermined length (for example, 150 m) in the forward direction, and then switches in the reverse direction and travels half the length (for example, 75 m) in the reverse direction. By repeating this, the saw wire 9 is finally wound around the winding mechanism 50.

Second Embodiment A second embodiment is a wire-type cutting apparatus (wire saw) for moving a saw wire in only one direction, and its entire configuration is shown in FIG.

The difference from the configuration of the first embodiment is that the dancer mechanism on the winding side is omitted. When the saw wire 9 travels in the forward direction in the first embodiment, the dancer mechanism 40
The dancer roll 43 is fixed, and the dancer mechanism 40 is in a state of not working as a tension adjusting mechanism. Therefore, in the configuration in which the saw wire 9 travels only in one direction, the dancer mechanism on the winding side is unnecessary. Main roll section
Although the saw wire 9 is shown to pass directly from the roll (sheave) 14 on the exit side of 10 to the traverse mechanism 55,
Needless to say, a roll (sheave) or the like for changing the direction can be provided between them.

The rotation control of the motor 51 of the winding mechanism 50, the rotation control of the motor 21 of the feeding mechanism 20, and the tension adjustment control by the dancer mechanism 30 are the same as in the first embodiment (FIG. 3).
Compare with). It is possible to omit the traverse mechanism 25 on the feeding side, so that the motor is
Only 51 and 56 units are needed.

Third Embodiment FIG. 6 shows a third embodiment. The difference from the second embodiment is that in the feeding mechanism, a brake is used instead of a motor.
61 is provided. The brake 61 applies a braking force to the delivery bobbin (reel or drum). The braking force by the brake 61 is controlled based on the output of the position detector 36. That is, the braking force by the brake 61 is adjusted so that the height position of the dancer roll 33 of the dancer mechanism 30 is always substantially constant.

The rotation control of the motor 51 of the winding mechanism 50 and the tension adjustment control by the dancer mechanism 30 are the same as in the first and second embodiments. In this embodiment as well, the traverse mechanism 25 on the pay-out side can be omitted, so that only two motors are required.

Fourth Embodiment A fourth embodiment shown in FIG. 7 has a further simplified configuration. The difference from the third embodiment is that the braking force of the brake 61 is controlled based on the detected tension of the tension detector 34. The braking force of the brake 61 is controlled so that the tension detected by the tension detector 34 is always substantially constant. The dancer mechanism 30 functions to absorb the speed difference of the saw wire 9 on the input / output side by the arrangement of the dancer roll 33, rather than the tension adjusting mechanism. Needless to say, the force applied to the dancer roll 33 may be controlled based on the tension detected by the tension detector 34. Also in this embodiment, the traverse mechanism 25 on the feeding side can be omitted.

Other Embodiments In the above embodiment, the main roll portion 10 is constituted by two groove rolls 12, but the number of groove rolls in the main roll portion may be three or more. For example, FIG.
As shown in the figure, a main roll portion 10 composed of three groove rolls 12 arranged at the vertices of a triangle when viewed from the side.
A can also be used. Saw wire 9 running horizontally
FIG. 1 shows an embodiment in which a workpiece W is moved downward from above and cut off.
The work W may be pressed against the saw wire 9 traveling vertically. Also, a saw wire in which a large number of abrasive grains are fixed (adhered) to the wire can be used.

[Brief description of the drawings]

FIG. 1 shows an overall configuration of a wire cutting apparatus according to a first embodiment.

FIG. 2 is a perspective view of a main roll unit.

FIG. 3 shows control in the case where the saw wire is caused to travel in the forward direction in the first embodiment.

FIG. 4 shows control in the case where the saw wire is caused to travel in the reverse direction in the first embodiment.

FIG. 5 shows the overall configuration and control of a wire cutting machine according to a second embodiment.

FIG. 6 shows the overall configuration and control of a wire cutting machine according to a third embodiment.

FIG. 7 shows the overall configuration and control of a wire cutting machine according to a fourth embodiment.

FIG. 8 is a side view showing another configuration of the main roll section.

[Explanation of symbols]

 9 saw wire 10, 10A main roll section 11 frame 12 groove roll 20 wire feeding mechanism 21, 26, 51, 56 drive motor 25, 55 traverse mechanism 30, 40 dancer mechanism 34 tension detector 35 speed detector 36, 46 position detection Container 50 Wire take-up mechanism 61 Brake

Claims (9)

[Claims] 1. A cutting wire fed from a wire feeding mechanism is supplied to an input side of a main roll portion, and is wound on a plurality of groove rolls of the main roll portion. In the wire cutting apparatus, the main roll portion is constituted only by a plurality of driven groove rolls, and a cutting wire is provided at least on the input side of the main roll portion. A tension detector is provided, and at least an input side of the main roll unit is provided with a first tension adjusting mechanism for a cutting wire that is controlled based on a detected tension of the tension detector. A speed detector for the cutting wire is provided on at least one of the input and output sides, and the cutting wire converts the tension from the output side of the main roll. The winding mechanism is directly wound around the winding mechanism without passing through a mechanism, and the winding mechanism is provided with a drive motor. The number of rotations of the drive motor is controlled based on the speed detected by the speed detector. A wire cutting machine, wherein the driven groove roll of the roll portion is driven to rotate by a cutting wire wound by the winding mechanism. 2. The wire cutting apparatus according to claim 1, wherein a traverse mechanism is provided between the main roll portion and the winding mechanism. 3. A cutting wire is moved from a feeding mechanism to a main wire.
A reciprocating traveling type wire-type cutting that is capable of a first traveling traveling to a winding mechanism via a roll section and a second traveling traveling to a feeding mechanism from a winding mechanism via a main roll section. A processing device, wherein a second tension adjusting mechanism for a cutting wire controlled based on a detected tension of the tension detector is provided on an output side of the main roll unit, and a drive motor is provided for the feeding mechanism. In the first traveling, the drive motor of the winding mechanism is controlled based on the speed detected by the speed detector, the operation of the second tension adjusting mechanism is stopped, and the first tension adjusting mechanism is operated. In the second traveling, control is performed based on the detected tension of the tension detector, and in the second traveling, the drive motor is controlled based on the detection speed of the speed detector, using the feeding mechanism for winding, and the first tension is controlled. Adjustment mechanism The operation is stopped, and controls on the basis of the second tension adjusting mechanism to the detected tension of the tension detector, wire type cutting apparatus of claim 1. 4. The first and second tension adjusting mechanisms are dancer mechanisms each having a dancer roll. These dancer mechanisms each include a position detector for detecting the position of the dancer roll, In the traveling, the rotation of the drive motor of the feeding mechanism is controlled based on the position detection output of the position detector of the first tension adjusting mechanism, and in the second traveling, the position of the position detector of the second tension adjusting mechanism is controlled. 4. The wire-type cutting apparatus according to claim 3, wherein the rotation of a drive motor of the winding mechanism, which works for feeding, is controlled based on the position detection output. 5. The delivery mechanism includes a drive motor, and the rotation of the drive motor determines the travel speed of the cutting wire fed from the delivery mechanism and the travel speed of the cutting wire wound by the winding mechanism. The wire-type cutting device according to claim 1, wherein the device is controlled to be substantially equal. 6. The first tension adjusting mechanism is a dancer mechanism having a dancer roll. The dancer mechanism includes a position detector for detecting a position of the dancer roll, and a rotation of a drive motor of the feeding mechanism. 6. The wire-type cutting apparatus according to claim 5, wherein the control is performed based on a position detection output of the position detector. 7. The delivery mechanism includes a brake for braking a bobbin around which a cutting wire is wound, and the first tension adjustment mechanism is a dancer mechanism including a dancer roll, and the dancer mechanism is a dancer mechanism. The wire cutting apparatus according to claim 1, further comprising a position detector that detects a position of the roll, wherein the brake is controlled by a position detection output of the position detector. 8. The apparatus according to claim 1, wherein the first tension adjusting mechanism includes a bobbin braking brake provided on the feeding mechanism, and the brake is controlled based on a detected tension of the tension detector. The wire-type cutting apparatus according to the above. 9. The main roll portion includes a frame for rotatably holding all the driven groove rolls, and the frame is detachably mountable to a machine base of a wire cutting apparatus.
The wire-type cutting device according to any one of claims 1 to 8.