JP2002009036A5 - - Google Patents

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Publication number
JP2002009036A5
JP2002009036A5 JP2000186474A JP2000186474A JP2002009036A5 JP 2002009036 A5 JP2002009036 A5 JP 2002009036A5 JP 2000186474 A JP2000186474 A JP 2000186474A JP 2000186474 A JP2000186474 A JP 2000186474A JP 2002009036 A5 JP2002009036 A5 JP 2002009036A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000186474A
Other languages
Japanese (ja)
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JP2002009036A (ja
JP4369022B2 (ja
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Publication date
Application filed filed Critical
Priority to JP2000186474A priority Critical patent/JP4369022B2/ja
Priority claimed from JP2000186474A external-priority patent/JP4369022B2/ja
Publication of JP2002009036A publication Critical patent/JP2002009036A/ja
Publication of JP2002009036A5 publication Critical patent/JP2002009036A5/ja
Application granted granted Critical
Publication of JP4369022B2 publication Critical patent/JP4369022B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000186474A 2000-06-21 2000-06-21 スピン処理装置 Expired - Fee Related JP4369022B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000186474A JP4369022B2 (ja) 2000-06-21 2000-06-21 スピン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000186474A JP4369022B2 (ja) 2000-06-21 2000-06-21 スピン処理装置

Publications (3)

Publication Number Publication Date
JP2002009036A JP2002009036A (ja) 2002-01-11
JP2002009036A5 true JP2002009036A5 (cg-RX-API-DMAC10.html) 2007-08-16
JP4369022B2 JP4369022B2 (ja) 2009-11-18

Family

ID=18686630

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000186474A Expired - Fee Related JP4369022B2 (ja) 2000-06-21 2000-06-21 スピン処理装置

Country Status (1)

Country Link
JP (1) JP4369022B2 (cg-RX-API-DMAC10.html)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1676312A2 (en) * 2003-10-21 2006-07-05 Semitool, Inc. System for processing a workpiece
JP2008246436A (ja) * 2007-03-30 2008-10-16 Kureo:Kk 洗浄容器の遠心脱水装置
JP4995669B2 (ja) * 2007-08-30 2012-08-08 大日本スクリーン製造株式会社 基板処理装置および基板処理方法
JP5676143B2 (ja) * 2010-05-20 2015-02-25 株式会社ディスコ 洗浄装置
JP5956946B2 (ja) * 2013-03-13 2016-07-27 東京エレクトロン株式会社 液処理装置および液処理方法
AU2019202067B1 (en) * 2019-03-18 2020-07-09 Yantai Tanyi Crafts&Gifts Co., Ltd. A crystal jewelry cleaning apparatus

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