JP2002006224A - Dark/bright field vertical illuminating device for microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To optionally select the insertion/detachment of a dimming member to/from an illumination optical path at switching from a dark filed illumination to a bright field illumination in accordance with the kinds of sample and the purpose of microscopic inspection. SOLUTION: As for the bright/dark field vertical illuminating device for the microscope for vertically illuminating the dark field and the bright field by switching a reflection mirror and an illuminating lens, the device is provided with optical path switching frames 7 and 17 which are provided with dark field illuminating optical systems 9, 10, 11, 12 and 18 and a bright field illuminating optical system and which is movably loaded on the main body frame 1, the dimming member 19 which is loaded on the main body frame 1 so that it may be moved in parallel to the moving direction of the optical path switching frames 7 and 17 at switching to the bright field illumination, and connecting mechanisms 14, 15 and 16 capable of selecting so that the optical path switching frames 7 and 17 and the dimming member 19 may be integrally or individually moved to the illumination optical path (n).

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an epi-illumination / dark-field illumination device for a microscope, and more particularly, to a coupling mechanism between an optical path switching frame and a dimming member.

[0002]

2. Description of the Related Art Heretofore, switching between epi-illumination dark-field illumination and epi-illumination bright-field illumination of an epi-illumination bright-field illumination device of a microscope has been performed by using a ring-shaped reflector for dark-field illumination and a semi-transparent mirror for bright-field illumination. The necessary dark-field illumination lens and bright-field illumination lens are integrally formed, and are switched and inserted into the illumination optical path. However, in these devices, there is a large difference in the brightness of the observation field when switching from dark-field illumination to bright-field illumination, so that it is necessary to separately adjust the brightness.

In order to solve this problem, a technique (conventional example) disclosed in Japanese Patent Publication No. Hei 2-8283 is disclosed as "Epi-illumination bright / dark field illumination device". This technology automatically inserts a dimming member such as an ND filter into the illumination optical path in conjunction with the illumination switching operation when switching from dark-field illumination to bright-field illumination to reduce the difference in brightness due to illumination switching. In addition to reducing the brightness, there is no need to adjust the brightness at the time of switching, thereby improving the efficiency of observation.

[0004]

However, the above conventional example has the following problems. That is, in the above-described conventional epi-illumination bright / dark field illumination device, when the dark field illumination is switched to the bright field illumination, the dimming member is automatically inserted into the illumination optical path in conjunction with the illumination switching operation. When a low-reflectance sample that does not require insertion of a member is examined under a microscope or when bright illumination is always required in photography or the like, a useless operation of removing the dimming member every time occurs. Such useless operations in the inspection process of semiconductor factories, etc.
This resulted in a decrease in work efficiency and an increase in fatigue of the speculum.

The present invention has been made in view of the above-mentioned conventional problems, and an object of the invention according to claims 1, 2 and 3 is to illuminate a dimming member when switching from dark-field illumination to bright-field illumination. It is an object of the present invention to provide an epi-illumination / dark-field illuminating device for a microscope, which can arbitrarily select the insertion / removal to / from the optical path according to the type of a specimen or the purpose of a microscope.

[0006]

In order to solve the above-mentioned problems, the invention according to claim 1, 2 or 3 is directed to a microscope for performing epi-illumination dark-field illumination and epi-illumination bright-field illumination by switching a reflecting mirror and an illumination lens. In an epi-illumination / dark-field illumination device,
An optical path switching frame having a dark-field illumination optical system and a bright-field illumination optical system, the optical path switching frame being movably mounted on the main body frame, and the optical path switching frame being movable parallel to the moving direction of the optical path switching frame when switching to bright field illumination. A dimming member mounted on the main body frame, and a coupling mechanism that can be selected so that the optical path switching frame and the dimming member can be moved integrally or individually to the illumination optical path.

In the epi-illumination / dark-field illumination device for a microscope according to the first, second or third aspect of the present invention, when performing dark-field illumination observation according to the type of specimen or the purpose of the speculum, the light path switching frame and the dimming are used. The dark-field illumination optical system of the optical path switching frame is moved to the illumination optical path while the member and the member remain connected or released. In the case of a specimen having a high reflectance in bright field illumination observation, the bright field illumination optical system and the dimming member of the optical path switching frame are moved to the illumination optical path in a state where the optical path switching frame and the dimming member are connected. In the case of a sample having a low reflectance in bright-field illumination observation or when bright illumination is required for photographing or the like, the bright-field illumination of the optical path switching frame is performed with the connection between the optical path switching frame and the dimming member released. Only the optical system is moved to the illumination optical path.

[0008] In the epi-illumination / dark-field illumination device for a microscope according to the second aspect of the present invention, in addition to the above-described operation, the connecting mechanism is configured to mechanically connect and disconnect the optical path switching frame and the dimming member. Accordingly, connection and disconnection between the optical path switching frame and the dimming member are performed using mechanical means.

According to a third aspect of the present invention, in addition to the above-described operation, the connecting mechanism connects and disconnects the optical path switching frame and the dimming member by magnetic force. The connection between the optical path switching frame and the dimming member is connected by using a magnetic force, and the disconnection between the optical path switching frame and the dimming member is released against the magnetic force.

[0010]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific embodiments will be described.

(Embodiment 1) FIGS. 1 to 5 show Embodiment 1, FIG. 1 is a longitudinal sectional view of an optical path switching section of an epi-illumination bright / dark field illumination device, and FIG. FIG. 3 is a top view of the part, and FIG.
4 is a cross-sectional view of FIG. 1 and FIG. 4 is a cross-sectional view of FIG.
FIG. 5 is a cross-sectional view taken along line XX of FIG. 1 in the case of bright field illumination at the time of release.

1 and 2, the main body frame 1 has a revolver mounting portion formed at a lower portion, and a lens barrel mounting frame 2 mounted at an upper portion. On the lower surface of the lens barrel mounting frame 2, a groove 2a into which a polarizing plate slider for differential interference observation can be inserted is formed,
A slider receiving plate 3 for holding the polarizing plate slider on the lens barrel mounting frame 2 so as not to drop is attached.
The main body frame 1 is formed in a container shape, and shaft guides 6 and 8 are laid horizontally on upper and lower sides of a side wall. An optical path switching frame 7 is fitted to the shaft guides 6 and 8, and is movable in the direction of arrow A along the shaft guides 6 and 8.
An upper light-shielding tube 9 for dark-field illumination, a ring-shaped reflecting mirror 10, and an intermediate light-shielding tube receiver 12 to which an intermediate light-shielding tube 11 are fixed are mounted on the optical path switching frame 7 from above. In parallel with these, a semi-transparent mirror 20 for bright field illumination is mounted.

A lens frame 17 is attached to a side of the optical path switching frame 7 opposite to the shaft guides 6 and 8 by screws (not shown). The lens frame 17 is provided with a dark-field stop plate 18 at a position corresponding to the ring-shaped reflecting mirror 10 of the optical path switching frame 7, and a bright-field illumination lens 21 at a position corresponding to the semi-transparent mirror 20. The optical path switching frame 7 and the lens frame 17 constitute an optical path switching frame. The dark-field stop plate 18, the upper light-shielding tube 9, the ring-shaped reflecting mirror 10, and the intermediate light-shielding tube receiver 12 to which the intermediate light-shielding tube 11 are fixed constitute a dark-field illumination optical system in the optical path switching frame. The bright field illumination lens 21 and the semi-transparent mirror 20 constitute a bright field illumination optical system in the optical path switching frame. On the side surfaces of the optical path switching frame 7 on the shaft guides 6 and 8 side, a bright / dark field illumination switching knob 5 is attached, and can be moved in the horizontal direction through a slit hole of the front panel 4 attached to the main body frame 1. And protrudes outside the main body frame 1. By operating this bright / dark field illumination switching knob 5 in the direction of arrow A in FIG. 2, bright field illumination and dark field illumination can be selected and switched. On the left side of the illumination optical path n in FIG.
An illumination light source is arranged. The illumination light emitted from the illumination light source travels along the illumination optical path n, and is reflected downward by the semi-transparent mirror 20 of the bright-field illumination optical system or the ring-shaped reflecting mirror 10 of the dark-field illumination optical system in FIG. The observation sample is illuminated through a revolver and an objective lens attached to the lower part. The observation light from the observation sample is attached to the upper part of the main body frame 1 through the inner light paths of the semi-transparent mirror 20 of the bright-field illumination optical system or the intermediate light-shielding cylinder 11 and the upper light-shielding cylinder 9 of the dark-field illumination optical system. It is led to the observation lens barrel.

A light-shielding tube 13 is provided below the main body frame 1 and on the observation optical path m directly below the optical path switching frame 7 so that dark field illumination light does not directly enter an objective lens (not shown). A groove 25 is laid on the inner bottom surface of the main body frame 1 in parallel with the shaft guides 6 and 8, and an ND slider frame 19 is slidably fitted therein. An ND filter 26 is mounted on the ND slider frame 19 at a portion corresponding to the bright field illumination lens 21 constituting the bright field illumination optical system. The ND slider frame 19 and the ND filter 26 constitute a dimming member. An ND slider frame lever 23 is attached to a lower portion of the end surface of the ND slider frame 19, and the ND slider frame lever 23 protrudes outside through a side wall of the main body frame 1. By operating the ND slider frame lever 23, the ND slider frame 19 moves in the direction of arrow B in FIG.

As shown in FIG. 3, two click grooves 19a are formed on the upper surface of the ND slider frame 19.
A click roller 27 is engaged with the click groove 19a,
The ND slider frame 19 is positioned at a desired position.
The click roller 27 is mounted in the groove of the lens barrel mounting frame 2 while being constantly urged downward by the click leaf spring 28. The click holding plate 29 for holding the click roller 27 and the click leaf spring 28 from being protruded by the sliding of the ND slider frame 19 is provided on the lens barrel mounting frame 2.
Is attached.

In FIGS. 1 and 2, an L-shaped ND slider connecting plate for connecting the ND slider frame 19 and the optical path switching frame 7 is attached to the lens frame 17 attached to and integrated with the optical path switching frame 7. 14 is screwed by a mounting screw 22 (hereinafter, the ND slider connecting plate 14 will be described as being fixed to the optical path switching frame 7). ND slider connection plate 1
4, a connection screw receiver 16 in the form of a cylindrical container is fixed, and a connection screw 15 is fitted in a center hole of the connection screw receiver 16. As shown in FIG. 19b. The connecting screw 15 has a retaining shape so that it does not fall off the ND slider connecting plate 14 even when it is not connected to the ND slider frame 19. The mounting screw 22 has a shape of a stepped screw, and the ND slider connecting plate 14 is attached to the optical path switching frame 7.
It is fixed with a play so that it can move in any direction within a minute range. The play is set to such a degree that the ND slider frame 19 and the optical path switching frame 7 can move smoothly when they are connected and move integrally. The ND slider connection plate 14, the connection screw 15, the connection screw receiver 16, and the screw hole 19b of the ND slider frame 19 constitute a connection mechanism.

As shown in FIG. 3, a tubular hexagonal driver guide 24 is disposed on the side wall of the main body frame 1 on an extension of the axis of the connecting screw 15. As shown in FIG. 5, the hexagonal driver guide 24 serves as a guide for the hexagonal driver 30. The connection and disconnection of the ND slider frame 19 and the optical path switching frame 7 by the connection screw 15 are performed by the hexagonal driver 30. The connection screw 15 is turned into the hexagonal hole 15a (see FIG. 1) in the head of the head and the connection screw 15 is turned smoothly.

The operation of the epi-illumination / dark-field illumination device having the above-described configuration will be described with a focus on connection and disconnection between the optical path switching frame 7 and the ND slider frame 19. As shown in FIG. 3, when the optical path switching frame 7 (see FIG. 2) and the ND slider frame 19 are connected via the ND slider connecting plate 14 by the connecting screw 15, the bright / dark field illumination switching knob 5 (see FIG. 2). ), The ND slider frame 19 also moves. That is, when the illumination optical system in the optical path switching frame is switched, the ND slider frame 19 is simultaneously switched from the dark field illumination state shown in FIG. 3 to the bright field illumination state shown in FIG. Conversely, even if the state of the bright field illumination shown in FIG. 4 is switched to the state of the dark field illumination shown in FIG.
Is always switched in conjunction.

Next, as shown in FIG. 5, when the connection screw 15 is loosened using the hexagonal driver 30, the connection between the optical path switching frame 7 (see FIG. 2) and the ND slider frame 19 is released. . In this state, when in the state of bright field illumination, N
When the D slider frame lever 23 is inserted / removed in the direction of arrow B in FIG. 5, the ND slider frame 19 can be switched from the state of being inserted into the illumination optical path n to the state of being released. The reverse operation can be performed in the same manner. The positioning of the ND slider frame 19 at the time of this switching is reliably determined by the position of the click roller 27 (see FIG. 3). However,
By operating the bright / dark field illumination switching knob 5 (see FIG. 2),
When switching from the bright-field illumination state to the dark-field illumination state, the ND slider frame 19 is pushed by the ND slider connecting plate 14 fixed to the optical path switching frame 7 and is automatically removed from the illumination optical path n. Conversely, when the dark field illumination state is switched to the bright field illumination state, the ND slider frame 19
Is not connected to the light path switching frame 7, and therefore, the illumination light path n
Waiting in a position excluded from

With the above configuration and operation, the following specific effects can be obtained. When the optical path switching frame 7 and the ND slider frame 19 are connected by the connecting screw 15, the ND slider frame 19 equipped with the ND filter 26 is always inserted into the illumination optical path n during bright field illumination.
When observing a sample with high reflectivity such as a silicon wafer, reduce the difference in brightness due to illumination switching when switching from dark field illumination to bright field illumination, and protect the eyes of the speculum, Adjustment of brightness at the time of switching can be made unnecessary. The connection screw 15 allows the optical path switching frame 7 and N
When the connection with the D slider frame 19 is released, the ND slider frame 19 is not always inserted into the illumination optical path n when switching from dark field illumination to bright field illumination. When an unnecessary low-reflectance sample is examined under a microscope, or when bright illumination is always required for photographing or the like, there is no needless operation of removing a dimming member such as an ND filter each time. In this state,
When observing a plurality of specimens having different reflectances, the ND slider frame 19 can be inserted into and removed from the illumination optical path n by only a simple operation according to the brightness of the observation visual field.

According to the present embodiment, the insertion / removal of the dimming member into / from the illumination optical path when switching from dark-field illumination to bright-field illumination is arbitrarily set according to the type of specimen and the purpose of the microscopy. be able to. As a result, in the inspection process at a semiconductor factory or the like, it is possible to improve the working efficiency and reduce the fatigue of the examiner.

The optical path switching frame 7 and the ND slider frame 19
The connection position of the optical path switching frame 7 and the ND slider frame 19 may be any position as long as the connection and disconnection between the optical path switching frame 7 and the ND slider frame 19 can be smoothly performed. The insertion / removal of the ND slider frame 19 into / from the illumination optical path n is not limited to sliding along the groove 25 as in the present embodiment, but a mechanism that slides along a shaft similarly to the optical path switching frame 7 and a mirror. Tube mounting frame 2
Alternatively, a rotation mechanism provided with a rotation axis on the main body frame 1, a mechanism that slides a groove or a shaft provided on a side surface of the optical path switching frame 7, or the like may be used. Further, although the present embodiment has been described with reference to only the epi-illumination / dark-field illumination device, it can be applied in combination with a transmission illumination device, and the same effects can be obtained.

(Embodiment 2) FIGS. 6 to 9 show Embodiment 2, and FIG.
FIG. 7 is a cross-sectional view corresponding to a cross-section, FIG. 7 is a top view of an optical path switching unit of the epi-illumination bright / dark field illuminating device (partly Y-Y cross-sectional view of FIG. 6),
7 is a view as viewed in the direction of the arrow Z in FIG. 7 at the time of connection, and FIG. 9 is a view as viewed in the direction of the arrow Z in FIG. This embodiment differs from the first embodiment only in the coupling mechanism between the optical path switching frame and the ND slider frame.
The other parts are the same as those in the first embodiment, so only different parts are shown, and the drawings and description of the same parts are omitted. 6 to 9, the same members are denoted by the same reference numerals, and description thereof will be omitted.

Referring to FIGS. 6 and 7, the epi-illumination bright / dark field illuminating device is the ND slider connecting plate 1 according to the first embodiment.
4 to the ND slider connecting plate 44, the connecting screw 15 to the connecting lever 45, and the connecting screw receiver 16 to the connecting lever receiver 46.
In addition, the ND slider frame 19 is provided on the ND slider frame 49, and the latter is provided instead of the former.
Other members are the same as those of the first embodiment.

An L-shaped ND slider connecting plate 44 for connecting the ND slider frame 49 and the optical path switching frame 7 is screwed to the lens frame 17 attached to and integrated with the optical path switching frame 7 by a mounting screw 22. (Hereinafter, the ND slider connecting plate 44 will be described as being fixed to the optical path switching frame 7). A bush-shaped connecting lever receiver 46 with a flange is fixed to the ND slider connecting plate 44, and a connecting lever 45 is rotatably fitted in the center hole of the connecting lever receiver 46.
As shown in FIGS. 8 and 9, a plate-like lever portion 45b is formed at the tip of the. A hexagon hole 45a is formed in the head of the connection lever 45, and a hexagon driver 30 (see FIG. 5) is inserted so that the connection lever 45 can be rotated. On the other hand, a lever groove 49a is formed in the ND slider frame 49, and the lever portion 45b of the connecting lever 45 is engaged with the lever groove 49a, so that
The ND slider frame 49 and the optical path switching frame 7 are connected. ND slider connection plate 44, connection lever 4
5. The connection mechanism is constituted by the connection lever receiver 46 and the lever groove 49a of the ND slider frame 49. Also, N
The D slider frame 49 and the ND filter 26 constitute a dimming member. Other configurations are the same as those of the first embodiment.

The operation of the above-described epi-illumination / dark-field illumination device will be described focusing on connection and disconnection between the optical path switching frame 7 and the ND slider frame 49. As shown in FIG. 8, when the lever portion 45b of the connection lever 45 is engaged with the lever groove 49a of the ND slider frame 49, the optical path switching is performed in the same manner as shown in FIG. The frame 7 and the ND slider frame 49 are connected. Further, as shown in FIG. 9, when the lever portion 45b of the connecting lever 45 is not engaged with the lever groove 49a of the ND slider frame 49, as shown in FIG. Optical path switching frame 7 and N
The connection with the D slider frame 49 is released. Other operations are the same as those of the first embodiment.

According to the present embodiment, in addition to the same effects as those of the first embodiment, the connecting mechanism can be simply configured.

The connection mechanism between the optical path switching frame and the ND slider frame described in the first and second embodiments is not limited to this, but may be any as long as it can be easily connected and released mechanically. It is possible.

(Embodiment 3) FIGS. 10 and 11 show Embodiment 3, and FIG. 10 corresponds to a cross section XX of FIG. 1 in the case of dark field illumination when an epi-illumination bright-dark illumination device is connected. FIG. 11 is a sectional view corresponding to the section taken along line XX of FIG. 1 in the case of dark field illumination when the epi-illumination bright / dark field illumination device is released. This embodiment is different from the first embodiment in the coupling mechanism between the optical path switching frame and the ND slider frame and the groove of the main body frame for guiding the ND slider frame, and the other parts are the same as those in the first embodiment.
Therefore, only different parts are shown, and drawings and descriptions of the same parts are omitted. 10 and 11, the same members are denoted by the same reference numerals, and description thereof is omitted.

10 and 11, the epi-illumination bright / dark field illuminating apparatus according to the first embodiment has the main frame 1 as the main frame 61, the ND slider connecting plate 14 as the ND slider connecting plate 74, and the connecting screw 15 as the connecting magnet. 75, the ND slider frame 19 is provided on the ND slider frame 79, and the latter is provided instead of the former. Further, the connecting screw receiver 16, the hexagonal screwdriver guide 24, the click roller 27, the click leaf spring 28, and the click suppressing plate 29 of the first embodiment are eliminated. Other members are the same as those of the first embodiment.

The lens frame 17 attached to and integrated with the optical path switching frame 7 (see FIG. 2) has an N-shaped magnetic material made of an L-shaped magnetic material for connecting the ND slider frame 79 and the optical path switching frame 7.
The D-slider connecting plate 74 is screwed by the mounting screw 22 (hereinafter, the ND-slider connecting plate 74 is connected to the optical path switching frame 7).
It will be described as being fixed to.) ND slider frame 7
A connecting magnet 75 is fixed to 9 at the same height as the ND slider connecting plate 74 so that the connecting magnet 75 can be connected to the ND slider connecting plate 74 by magnetic force. Naturally, the coupling force by the magnetic force is set to be larger than the friction force in the groove 25 in which the ND slider frame 79 slides. The body frame 61 is provided with a retractable space C by extending the sliding groove 25 so that the ND slider frame 79 can move outside the illumination optical path n more than the body frame 1. As shown in FIG. 11, when the ND slider frame lever 23 is pulled out from the main frame 61 in the direction of arrow B, the ND slider frame 79 moves to the retreat space C,
The connection with the ND slider connection plate 74 is released. The connecting plate 74, the connecting magnet 75 and the retreat space C constitute a connecting mechanism. Further, the ND slider frame 79 and the ND filter 26 constitute a dimming member. Other configurations are the same as those of the first embodiment.

The operation of the epi-illumination / dark-field illuminating apparatus having the above-described configuration will be described focusing on connection and disconnection between the optical path switching frame 7 and the ND slider frame 79. As shown in FIG.
When the slider connecting plate 74 and the connecting magnet 75 are in contact with each other by magnetic force, the optical path switching frame 7 and the ND slider frame 79 are connected. As shown in FIG. 11, when the ND slider connecting plate 74 and the connecting magnet 75 are not in contact with each other, the connection between the optical path switching frame 7 and the ND slider frame 79 is released. Further, merely by pulling out the ND slider frame lever 23 from the main frame 61 to the outside against the magnetic force of the connecting magnet 75, the ND slider frame 79 moves to the retreat space C, and the optical path switching frame 7 and the ND slider frame 19 The connection is automatically released, and the connection can be automatically made by magnetic force only by pushing in until the contact is made. Other operations are the same as those of the first embodiment.

According to the present embodiment, in addition to the effects of the first embodiment, the connection and disconnection between the optical path switching frame 7 and the ND slider frame 79 can be performed only by inserting and removing the ND slider frame lever 23. Therefore, the operation of disconnection can be performed more easily. Further, there is no need for a tool for connection and disconnection such as a hexagonal screwdriver, and there is no fear of losing the tool. In the inspection process at a semiconductor factory or the like, it is possible to further improve the working efficiency and reduce the fatigue of the examiner. In addition, since there is no need for members such as connecting screw receivers and their locations, the number of parts can be reduced and assembly work can be simplified.
Product cost can be reduced.

The mechanism for connecting and releasing the ND slider connecting plate 74 and the connecting magnet 75 shown in the present embodiment is not necessarily limited to this mechanism, and is connected by electrical ON and OFF using electromagnets. , Release mechanism, snap-fit mechanism made of flexible material such as resin, mechanism with repetitive sticking force such as magic tape (registered trademark), etc.
Any mechanism that can provide a coupling force greater than the sliding friction force in the groove 25 of the D slider frame 79 can be adopted.

[0035]

According to the first, second or third aspect of the present invention, the insertion and removal of the dimming member into and from the illumination optical path when switching from dark-field illumination to bright-field illumination can be performed by changing the type of specimen or the purpose of the speculum. It is possible to provide an epi-illumination / dark-field illumination device for a microscope which can be arbitrarily selected according to the conditions.

According to the second aspect of the present invention, in addition to the above effects, the connection and disconnection of the optical path switching frame and the dimming member are performed using mechanical means, so that a plurality of samples having different reflectances are provided. When observing, the dimming member can be inserted into and removed from the illumination optical path only by a simple operation according to the brightness of the observation visual field.

According to the third aspect of the present invention, in addition to the above effects, the connection between the optical path switching frame and the dimming member is performed by using a magnetic force, and the connection between the optical path switching frame and the dimming member is released. Since the connection is released against the magnetic force, the connection and disconnection operations can be performed more easily.

[Brief description of the drawings]

FIG. 1 is a vertical sectional view of an optical path switching unit of an epi-illumination bright / dark field illumination device according to a first embodiment.

FIG. 2 is a top view of an optical path switching unit of the epi-illumination / dark-field illumination device according to the first embodiment.

FIG. 3 is a cross-sectional view taken along line XX of FIG. 1 in the case of dark field illumination when the first embodiment is connected.

FIG. 4 is a sectional view taken along line XX of FIG. 1 in the case of bright field illumination when the first embodiment is connected.

FIG. 5 is a sectional view taken along the line XX of FIG. 1 in the case of bright field illumination when the first embodiment is released.

FIG. 6 is a cross-sectional view of the epi-illumination bright-field illumination device according to the second embodiment, which corresponds to a cross section XX in FIG. 1;

FIG. 7 is a top view (a cross-sectional view taken along a line YY in FIG. 6) of an optical path switching unit of the epi-illumination bright-field illumination device according to the second embodiment.

FIG. 8 is a view on arrow Z in FIG. 7 at the time of connection in the second embodiment.

FIG. 9 is a view on arrow Z in FIG. 7 when the second embodiment is released.

FIG. 10 is a cross-sectional view corresponding to the cross section XX of FIG. 1 in the case of dark field illumination when the epi-illumination light / dark field illumination device of the third embodiment is connected.

FIG. 11 is a cross-sectional view corresponding to a cross section taken along line XX of FIG. 1 in the case of dark-field illumination when the epi-illumination bright-field illumination device of the third embodiment is released.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 body frame 7 optical path switching frame 9 upper light shielding tube 10 ring-shaped reflecting mirror 11 intermediate light shielding tube 12 intermediate light shielding tube receiver 14 ND slider connection plate 15 connection screw 16 connection screw receiver 17 lens frame 18 dark field stop plate 19 ND slider frame n Illumination light path

Claims (3)

[Claims] 1. An epi-illumination / dark-field illumination device for a microscope that performs epi-illumination dark-field illumination and epi-illumination bright-field illumination by switching a reflecting mirror and an illumination lens, comprising a dark-field illumination optical system and a bright-field illumination optical system. An optical path switching frame movably mounted on the optical path switching frame, a dimming member mounted on the main body frame so as to be movable in parallel with a moving direction of the optical path switching frame when switching to bright field illumination, the optical path switching frame, and An epi-illumination / dark-field illumination device for a microscope, comprising: a coupling mechanism that can be selected so that movement to an illumination optical path with a dimming member can be performed integrally or individually. 2. The illumination device according to claim 1, wherein the connection mechanism mechanically connects and disconnects the optical path switching frame and the dimming member. . 3. The epi-illumination dark-field illumination device for a microscope according to claim 1, wherein the connection mechanism is configured to connect and disconnect the optical path switching frame and the dimming member by magnetic force.