JP2001502067A - 光ファイバを正確に位置合せするための位置合せ装置及びそれに関連した製造方法 - Google Patents
光ファイバを正確に位置合せするための位置合せ装置及びそれに関連した製造方法Info
- Publication number
- JP2001502067A JP2001502067A JP10514623A JP51462398A JP2001502067A JP 2001502067 A JP2001502067 A JP 2001502067A JP 10514623 A JP10514623 A JP 10514623A JP 51462398 A JP51462398 A JP 51462398A JP 2001502067 A JP2001502067 A JP 2001502067A
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- alignment
- support structure
- optical fiber
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 292
- 238000004519 manufacturing process Methods 0.000 title description 5
- 230000003287 optical effect Effects 0.000 claims abstract description 142
- 239000000835 fiber Substances 0.000 claims abstract description 88
- 239000000463 material Substances 0.000 claims abstract description 57
- 238000000034 method Methods 0.000 claims description 37
- 238000007789 sealing Methods 0.000 claims description 12
- 239000000853 adhesive Substances 0.000 claims description 10
- 230000001070 adhesive effect Effects 0.000 claims description 10
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 230000033001 locomotion Effects 0.000 claims description 10
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 230000000638 stimulation Effects 0.000 claims description 8
- 239000004020 conductor Substances 0.000 claims description 6
- 230000004936 stimulating effect Effects 0.000 claims description 4
- 238000005476 soldering Methods 0.000 claims description 3
- 238000003825 pressing Methods 0.000 claims description 2
- 239000000969 carrier Substances 0.000 claims 3
- 230000013011 mating Effects 0.000 claims 2
- 229910000679 solder Inorganic materials 0.000 description 17
- 239000000758 substrate Substances 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 238000010438 heat treatment Methods 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 9
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 6
- 229910052737 gold Inorganic materials 0.000 description 6
- 239000010931 gold Substances 0.000 description 6
- 241000125145 Pimpinella Species 0.000 description 4
- 239000011230 binding agent Substances 0.000 description 4
- 229910000833 kovar Inorganic materials 0.000 description 4
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 4
- 230000010287 polarization Effects 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 239000006117 anti-reflective coating Substances 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 238000005323 electroforming Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 239000007769 metal material Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 2
- 229920006362 Teflon® Polymers 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- 238000000347 anisotropic wet etching Methods 0.000 description 2
- 239000007767 bonding agent Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- -1 for example Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical compound FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- RZVHIXYEVGDQDX-UHFFFAOYSA-N 9,10-anthraquinone Chemical compound C1=CC=C2C(=O)C3=CC=CC=C3C(=O)C2=C1 RZVHIXYEVGDQDX-UHFFFAOYSA-N 0.000 description 1
- 229920001410 Microfiber Polymers 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 239000006023 eutectic alloy Substances 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000003698 laser cutting Methods 0.000 description 1
- 238000004093 laser heating Methods 0.000 description 1
- 239000000155 melt Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 239000003658 microfiber Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000003094 perturbing effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4225—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements by a direct measurement of the degree of coupling, e.g. the amount of light power coupled to the fibre or the opto-electronic element
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3801—Permanent connections, i.e. wherein fibres are kept aligned by mechanical means
- G02B6/3803—Adjustment or alignment devices for alignment prior to splicing
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/422—Active alignment, i.e. moving the elements in response to the detected degree of coupling or position of the elements
- G02B6/4226—Positioning means for moving the elements into alignment, e.g. alignment screws, deformation of the mount
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
- G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
- G02B6/3656—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being micropositioning, with microactuating elements for fine adjustment, or restricting movement, into two dimensions, e.g. cantilevers, beams, tongues or bridges with associated MEMs
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4219—Mechanical fixtures for holding or positioning the elements relative to each other in the couplings; Alignment methods for the elements, e.g. measuring or observing methods especially used therefor
- G02B6/4236—Fixing or mounting methods of the aligned elements
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Couplings Of Light Guides (AREA)
- Mechanical Coupling Of Light Guides (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US08/473,106 US5602955A (en) | 1995-06-07 | 1995-06-07 | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
| US08/486,242 US5606635A (en) | 1995-06-07 | 1995-06-07 | Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method |
| PCT/US1996/015213 WO1998012587A1 (en) | 1995-06-07 | 1996-09-20 | An alignment apparatus for precisely aligning an optical fiber and an associated fabrication method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001502067A true JP2001502067A (ja) | 2001-02-13 |
| JP2001502067A5 JP2001502067A5 (enExample) | 2004-10-14 |
Family
ID=27044032
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10514623A Ceased JP2001502067A (ja) | 1995-06-07 | 1996-09-20 | 光ファイバを正確に位置合せするための位置合せ装置及びそれに関連した製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US5881198A (enExample) |
| EP (1) | EP0927375B1 (enExample) |
| JP (1) | JP2001502067A (enExample) |
| AU (1) | AU7116396A (enExample) |
| DE (1) | DE69619408T2 (enExample) |
| WO (1) | WO1998012587A1 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006510923A (ja) * | 2002-11-08 | 2006-03-30 | ナノリン インク． | 動的マイクロポジショナーとアライナー |
| JP2013083906A (ja) * | 2011-09-29 | 2013-05-09 | Fujitsu Ltd | 光コネクタ及びこれを用いた電子機器 |
| JP2015129925A (ja) * | 2013-12-04 | 2015-07-16 | 株式会社成和技研 | 融着機 |
| US9933572B2 (en) | 2016-02-24 | 2018-04-03 | Furukawa Electric Co., Ltd. | Fusion splicer |
| US9939584B2 (en) | 2016-02-12 | 2018-04-10 | Furukawa Electric Co., Ltd. | Base member used for fusion splicer for joining optical fibers and fusion splicer |
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| US5697423A (en) * | 1994-03-30 | 1997-12-16 | Lauener Engineering, Ltd. | Apparatus for continuously casting |
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| US6280100B1 (en) | 1998-12-30 | 2001-08-28 | Mcdonnell Douglas Corporation | Fiber optic connector with micro-alignable sensing fiber and associated fabrication method |
| US6210046B1 (en) | 1998-12-30 | 2001-04-03 | Mcdonnell Douglas Corporation | Fiber optic connector with micro-alignable lens having autofocus feature and associated fabrication method |
| US6253011B1 (en) | 1998-12-30 | 2001-06-26 | Mcdonnell Douglas Corporation | Micro-aligner for precisely aligning an optical fiber and an associated fabrication method |
| US6216939B1 (en) * | 1998-12-31 | 2001-04-17 | Jds Uniphase Photonics C.V. | Method for making a hermetically sealed package comprising at least one optical fiber feedthrough |
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| US5080458A (en) * | 1990-10-22 | 1992-01-14 | United Technologies Corporation | Method and apparatus for positioning an optical fiber |
| US5080461A (en) * | 1990-10-31 | 1992-01-14 | At&T Bell Laboratories | Retracting optical fiber connector |
| JPH04234006A (ja) * | 1990-12-28 | 1992-08-21 | Fujikura Ltd | 光ファイバの調心装置 |
| US5123073A (en) * | 1991-05-31 | 1992-06-16 | At&T Bell Laboratories | Precision optical fiber connector |
| US5181214A (en) * | 1991-11-18 | 1993-01-19 | Harmonic Lightwaves, Inc. | Temperature stable solid-state laser package |
| US5214727A (en) * | 1992-01-16 | 1993-05-25 | The Trustees Of Princeton University | Electrostatic microactuator |
| DE69426103T2 (de) * | 1993-08-25 | 2001-05-10 | Nippon Telegraph And Telephone Corp., Tokio/Tokyo | Optischer Schalter |
| CA2130862C (en) * | 1993-08-26 | 1997-10-21 | Isao Suzuki | Apparatus for adjusting alignment of optical fibers |
| US5450508A (en) * | 1994-12-08 | 1995-09-12 | International Business Machines Corporation | Apparatus and method for optical fiber alignment using adaptive feedback control loop |
| US5606635A (en) * | 1995-06-07 | 1997-02-25 | Mcdonnell Douglas Corporation | Fiber optic connector having at least one microactuator for precisely aligning an optical fiber and an associated fabrication method |
| US5602955A (en) * | 1995-06-07 | 1997-02-11 | Mcdonnell Douglas Corporation | Microactuator for precisely aligning an optical fiber and an associated fabrication method |
-
1996
- 1996-09-20 WO PCT/US1996/015213 patent/WO1998012587A1/en not_active Ceased
- 1996-09-20 JP JP10514623A patent/JP2001502067A/ja not_active Ceased
- 1996-09-20 EP EP96932310A patent/EP0927375B1/en not_active Expired - Lifetime
- 1996-09-20 DE DE69619408T patent/DE69619408T2/de not_active Expired - Fee Related
- 1996-09-20 AU AU71163/96A patent/AU7116396A/en not_active Abandoned
-
1997
- 1997-02-10 US US08/799,048 patent/US5881198A/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006510923A (ja) * | 2002-11-08 | 2006-03-30 | ナノリン インク． | 動的マイクロポジショナーとアライナー |
| JP2013083906A (ja) * | 2011-09-29 | 2013-05-09 | Fujitsu Ltd | 光コネクタ及びこれを用いた電子機器 |
| JP2015129925A (ja) * | 2013-12-04 | 2015-07-16 | 株式会社成和技研 | 融着機 |
| US9939584B2 (en) | 2016-02-12 | 2018-04-10 | Furukawa Electric Co., Ltd. | Base member used for fusion splicer for joining optical fibers and fusion splicer |
| US9933572B2 (en) | 2016-02-24 | 2018-04-03 | Furukawa Electric Co., Ltd. | Fusion splicer |
Also Published As
| Publication number | Publication date |
|---|---|
| DE69619408T2 (de) | 2002-11-21 |
| DE69619408D1 (de) | 2002-03-28 |
| AU7116396A (en) | 1998-04-14 |
| US5881198A (en) | 1999-03-09 |
| WO1998012587A1 (en) | 1998-03-26 |
| EP0927375A1 (en) | 1999-07-07 |
| EP0927375B1 (en) | 2002-02-20 |
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