JP2001354482A - Graphite jig for brazing ceramic - Google Patents
Graphite jig for brazing ceramicInfo
- Publication number
- JP2001354482A JP2001354482A JP2000172983A JP2000172983A JP2001354482A JP 2001354482 A JP2001354482 A JP 2001354482A JP 2000172983 A JP2000172983 A JP 2000172983A JP 2000172983 A JP2000172983 A JP 2000172983A JP 2001354482 A JP2001354482 A JP 2001354482A
- Authority
- JP
- Japan
- Prior art keywords
- graphite jig
- brazing
- thermal expansion
- ceramic
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体のセラミッ
クパッケージの位置決めやリードピン、リードフレーム
のろう付等に使用されるセラミックろう付け用黒鉛治具
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a graphite jig for ceramic brazing used for positioning a semiconductor ceramic package, brazing lead pins and lead frames, and the like.
【０００２】[0002]
【従来の技術】電子工業部品の多様化と短小軽薄化に伴
い、電子工業部品の製作に使用される耐熱性治具の形状
は複雑多岐となり、特に黒鉛治具は耐熱性や加工性など
が優れているため、その要請に応じて需要が増々高まり
つつある。特に半導体のセラミックパッケージのろう付
け用黒鉛治具はその性質上、セラミック基板、リードピ
ン、リードフレームなどの多くの電子部品を黒鉛治具本
体の表面に精度よく位置決めして載置する必要があるも
のである。2. Description of the Related Art With the diversification and shortening and thinning of electronic industrial parts, the shape of heat-resistant jigs used in the production of electronic industrial parts has become complicated and diverse. In particular, graphite jigs have improved heat resistance and workability. Because of their superiority, demand is increasing in response to their demands. In particular, graphite jigs for brazing semiconductor ceramic packages, due to their nature, require many electronic components such as ceramic substrates, lead pins, and lead frames to be accurately positioned and placed on the surface of the graphite jig body. It is.
【０００３】そのため、従来は黒鉛治具の所定の位置に
電子部品の位置決めをするための金属ピンが打ち込まれ
たり、黒鉛治具本体が精密に機械加工されていた。For this reason, conventionally, metal pins for positioning electronic components have been driven into predetermined positions of a graphite jig, or the graphite jig body has been precisely machined.
【０００４】しかしながら、従来の黒鉛治具を用いてセ
ラミックパッケージの位置決めやリードピン、リードフ
レームのろう付けを行った場合、出来上がったセラミッ
クパッケージの製品は寸法不良、特にリードピン、リー
ドフレームのピッチ間隔の不良やリードピン、リードフ
レームのろう付け部近傍にカーボン粉の付着等が発生し
たり、極端な場合は、セラミックパッケージと黒鉛製治
具とがかみ合って抜き取ることができないなどのトラブ
ルが発生し、生産収率を上げることが出来なかった。However, when the positioning of the ceramic package and the brazing of the lead pins and the lead frame are performed using a conventional graphite jig, the finished product of the ceramic package has a defective dimension, particularly a defective pitch interval between the lead pins and the lead frame. In the extreme case, the adhesion of carbon powder occurs near the brazing part of the lead pin or lead frame, or in extreme cases, the ceramic package and the graphite jig may not be able to be removed due to engagement. I couldn't increase the rate.
【０００５】そこで、これらの問題を解決するために、
特許第２６０８２８７号には、室温〜１２７３Ｋまでの
平均熱膨張係数が４．５×１０-6／Ｋ〜８．０×１０-6
／Ｋの範囲で、異方比が１．２５以下の黒鉛材をセラミ
ックパッケージのろう付け用黒鉛治具として使用するこ
とが開示されている。Therefore, in order to solve these problems,
Japanese Patent No. 2608287, the average thermal expansion coefficient of 4.5 × 10 -6 to room ~1273K /K~8.0×10 -6
It discloses that a graphite material having an anisotropic ratio of 1.25 or less in a range of / K is used as a graphite jig for brazing a ceramic package.
【０００６】[0006]
【発明が解決しようとする課題】しかしながら、この黒
鉛材であっても、熱膨張係数の一致性が十分だとはいえ
ず、ろう付け時に黒鉛治具とリードピン等が接触するこ
とがあり、そのため、黒鉛治具の摩耗等が発生してい
た。また、一般的に、これらセラミックパッケージのろ
う付けは空気中で行われるため、黒鉛治具が、酸化消耗
し、リードピン等の位置決め精度が悪くなるという問題
もあった。However, even with this graphite material, the thermal expansion coefficients cannot be said to be sufficiently consistent, and the graphite jig may come into contact with lead pins and the like during brazing. And the graphite jig was worn. Further, since the brazing of these ceramic packages is generally performed in air, there is a problem that the graphite jig is oxidized and consumed, and the positioning accuracy of lead pins and the like is deteriorated.
【０００７】そこで、本発明は、熱膨張率をセラミック
基板等と合わせるとともに、硬度を高め、耐摩耗性を向
上させ、さらには耐酸化性に優れたセラミックろう付け
用黒鉛治具を提供することを目的とする。Therefore, the present invention provides a graphite jig for ceramic brazing, which has a coefficient of thermal expansion that is higher than that of a ceramic substrate, increases hardness, improves wear resistance, and has excellent oxidation resistance. With the goal.
【０００８】[0008]
【課題を解決するための手段】前記課題を解決するため
の本発明のセラミックろう付け用黒鉛治具は、空気中、
９７３Ｋ、５時間における酸化消耗率が１０質量％以下
である。また、かさ密度が１．８０Ｍｇ／ｍ3 以上、シ
ョア硬度が８５以上であるものが好ましい。また、６２
３〜７２３Ｋでの熱膨張係数が７．０〜７．５×１０-6
／Ｋ、１０７３〜１１２３Ｋでの熱膨張係数が７．５〜
８．５×１０-6／Ｋであるものが好ましい。また、室温
での熱伝導率が６０Ｗ／（ｍ・Ｋ）以上であるものが好
ましい。Means for Solving the Problems A graphite jig for ceramic brazing according to the present invention for solving the above-mentioned problems is provided in air,
The oxidation consumption rate at 973K for 5 hours is 10% by mass or less. Further, those having a bulk density of 1.80 Mg / m 3 or more and a Shore hardness of 85 or more are preferable. Also, 62
Coefficient of thermal expansion at 3-723K is 7.0-7.5 × 10 -6
/ K, the coefficient of thermal expansion at 1073 to 1123K is 7.5 to 7.5.
It is preferably 8.5 × 10 −6 / K. Further, those having a thermal conductivity at room temperature of 60 W / (m · K) or more are preferable.
【０００９】本発明における黒鉛治具は、コークス等の
フィラー（骨材）と、ピッチ等のバインダー（結合材）
とを混合し、これを所定の形状に成形したのち、熱処理
によってバインダーを炭素化固結させて形成された黒鉛
材より所定の形状に加工されて得られる。そして、骨材
の熱的性質及び物理的性質について適切なものを選定す
ることにより酸化消耗率、かさ密度、ショア硬度、熱膨
張係数、熱伝導率を所定範囲に収めることができる。The graphite jig of the present invention comprises a filler (aggregate) such as coke and a binder (binder) such as pitch.
Is formed into a predetermined shape, and then processed into a predetermined shape from a graphite material formed by carbonizing and solidifying a binder by heat treatment. Then, by selecting an appropriate thermal property and physical property of the aggregate, the oxidation consumption rate, the bulk density, the Shore hardness, the thermal expansion coefficient, and the thermal conductivity can be kept within predetermined ranges.
【００１０】酸化消耗率は、予め質量を測定しておいた
黒鉛を、空気中で９７３Ｋで５時間熱処理した時の質量
変化から算出したものである。一般に、セラミックのろ
う付けは、セラミック基板を１０７３〜１２７３Ｋに加
熱して行われており、このセラミック基板を載置する黒
鉛治具の温度はこの温度より高くなることはない。した
がって、空気中で９７３Ｋで５時間熱処理した時の酸化
消耗率が１０質量％以下、好ましくは５質量％以下であ
れば、例えば、１０７３〜１２７３Ｋの温度範囲で処理
された場合と同等と考えることができ、ろう付け処理後
の寸法精度の低下を抑制することができる。The oxidation depletion rate is calculated from the change in mass when graphite whose mass has been measured in advance is heat-treated in air at 973 K for 5 hours. Generally, ceramic brazing is performed by heating a ceramic substrate to 1073 to 1273K, and the temperature of a graphite jig on which the ceramic substrate is mounted does not become higher than this temperature. Therefore, if the oxidation depletion rate when heat-treated at 973K in air for 5 hours is 10% by mass or less, preferably 5% by mass or less, it is considered to be equivalent to, for example, the case where the treatment is performed in a temperature range of 1073 to 1273K. Therefore, it is possible to suppress a decrease in dimensional accuracy after the brazing process.
【００１１】また、かさ密度を１．８０Ｍｇ／ｍ3 以
上、好ましくは１．８５Ｍｇ／ｍ3 以上とし、ショア硬
度を８５以上、好ましくは９０以上とする。かさ密度を
１．８０Ｍｇ／ｍ3 以上、好ましくは１．８５Ｍｇ／ｍ
3 以上とすることで、酸化活性点を減少させることがで
き、耐酸化性を向上させることができる。また、ショア
硬度を８５以上、好ましくは９０以上とすることで、耐
摩耗性が向上し、セラミックろう付け時にリードピン等
と接触した場合であっても、摩耗することがなく、ピン
ピッチ等の寸法精度が低下することがない。The bulk density is 1.80 Mg / m 3 or more, preferably 1.85 Mg / m 3 or more, and the Shore hardness is 85 or more, preferably 90 or more. Bulk density of 1.80 Mg / m 3 or more, preferably 1.85 Mg / m 3
By setting it to 3 or more, the oxidation active sites can be reduced, and the oxidation resistance can be improved. Further, by setting the Shore hardness to 85 or more, preferably 90 or more, the abrasion resistance is improved, and even when the ceramic material comes into contact with a lead pin or the like at the time of brazing, dimensional accuracy such as a pin pitch does not occur. Does not decrease.
【００１２】６２３〜７２３Ｋでの熱膨張係数が７．０
〜７．５×１０-6／Ｋで、且つ、１０７３〜１１２３Ｋ
での熱膨張係数が７．５〜８．５×１０-6／Ｋ、好まし
くは７. ８〜８．２×１０-6／Ｋとする。これによっ
て、セラミック基板との熱膨張係数を合わせることがで
きる。ここで、熱膨張係数については、理学電機株式会
社製の熱機械分析装置（ＴＭＡ８３１０）で求めた。The thermal expansion coefficient at 623 to 723K is 7.0.
７7.5 × 10 −6 / K and 1073 to 1123K
Has a thermal expansion coefficient of 7.5 to 8.5 × 10 −6 / K, preferably 7.8 to 8.2 × 10 −6 / K. Thereby, the coefficient of thermal expansion with the ceramic substrate can be matched. Here, the thermal expansion coefficient was determined using a thermomechanical analyzer (TMA8310) manufactured by Rigaku Corporation.
【００１３】また、室温での熱伝導率を６０Ｗ／（ｍ・
Ｋ）以上、好ましくは７０Ｗ／（ｍ・Ｋ）以上とする。
これによって、加熱時及び冷却時において、セラミック
基板と黒鉛治具との温度差をなくすことで、前述のよう
に、熱膨張係数を合わせているため、加熱時及び冷却時
に黒鉛治具とセラミック基板との温度による伸縮を略同
等とすることが可能となる。ここで、熱伝導率について
は、ＪＩＳ Ｒ１６１１−１９９１に準じて求めた。The thermal conductivity at room temperature is 60 W / (m ·
K) or more, preferably 70 W / (m · K) or more.
This eliminates the temperature difference between the ceramic substrate and the graphite jig at the time of heating and cooling, and as described above, the thermal expansion coefficient is matched, so that the graphite jig and the ceramic substrate are heated and cooled. Can be substantially equalized by the temperature. Here, the thermal conductivity was determined according to JIS R1611-1991.
【００１４】以上のように、酸化消耗率、かさ密度、シ
ョア硬度、熱膨張係数、熱伝導率を所定範囲に収めるよ
うにして黒鉛材を形成し、この黒鉛材より任意の形状に
加工することで、長時間使用しても寸法精度に変化のな
いセラミックろう付け用黒鉛治具として使用することが
可能となる。また、セラミックろう付け用黒鉛治具以外
にも、優れた酸化消耗率や、高い熱膨張係数、高い熱伝
導率等の特性を活かし、セラミック焼成用トレイ等とし
ても使用することが可能である。As described above, a graphite material is formed so that the oxidation consumption rate, the bulk density, the Shore hardness, the thermal expansion coefficient, and the thermal conductivity are within predetermined ranges, and the graphite material is processed into an arbitrary shape. Thus, it can be used as a graphite jig for ceramic brazing, which has no change in dimensional accuracy even when used for a long time. In addition to the graphite jig for ceramic brazing, it can also be used as a ceramic firing tray or the like by utilizing its properties such as excellent oxidation consumption rate, high thermal expansion coefficient, and high thermal conductivity.
【００１５】[0015]
【実施例】骨材の熱的性質及び物理的性質について適切
なものを選定することにより実施例１〜５、比較例１〜
４の物理特性を有するセラミックろう付け用黒鉛治具を
作製した。この治具を用いて、Ａｌ2 Ｏ3 からなる基板
にリードピンのろう付け作業を行った。黒鉛治具の物理
特性とろう付け作業の結果を表１に示す。その結果、実
施例１〜５の黒鉛治具は特に問題もなく使用できた。EXAMPLES Examples 1 to 5 and Comparative Examples 1 to 5 were selected by selecting appropriate ones for the thermal and physical properties of the aggregate.
A graphite jig for ceramic brazing having the physical characteristics of No. 4 was prepared. Using this jig, a lead pin was brazed to a substrate made of Al 2 O 3 . Table 1 shows the physical properties of the graphite jig and the results of the brazing operation. As a result, the graphite jigs of Examples 1 to 5 could be used without any problem.
【００１６】[0016]
【表１】 [Table 1]
【００１７】[0017]
【発明の効果】セラミックろう付け用黒鉛治具を、空気
中、９７３Ｋ、５時間における酸化消耗率を１０質量％
以下、また、かさ密度を１．８０Ｍｇ／ｍ3 以上、ショ
ア硬度を８５以上、６２３〜７２３Ｋでの熱膨張係数が
７．０〜７．５×１０-6／Ｋ、１０７３〜１１２３Ｋで
の熱膨張係数が７．５〜８．５×１０-6／Ｋ、室温での
熱伝導率が６０Ｗ／（ｍ・Ｋ) 以上となるような黒鉛材
料で形成することで、ろう付け後にリードピンが抜けな
くなるということもなく、また、ピンピッチ等の寸法精
度の低下もなくなり、製造効率が大幅に向上する効果を
奏する。The graphite jig for ceramic brazing was oxidized in air at 973K for 5 hours to a rate of 10% by mass.
Hereinafter, the bulk density is 1.80 Mg / m 3 or more, the Shore hardness is 85 or more, the thermal expansion coefficient at 623 to 723 K is 7.0 to 7.5 × 10 −6 / K, and the heat at 1073 to 1123 K. The lead pin comes off after brazing by being formed of a graphite material having an expansion coefficient of 7.5 to 8.5 × 10 −6 / K and a thermal conductivity at room temperature of 60 W / (m · K) or more. There is no loss, and there is no decrease in dimensional accuracy such as pin pitch, so that there is an effect that manufacturing efficiency is greatly improved.
フロントページの続き (72)発明者 三木 相煥 香川県三豊郡大野原町中姫2181−２ 東洋 炭素株式会社内 Ｆターム(参考） 4G026 BA01 BB01 BF31 BH06 4G032 AA04 BA04 Continuation of the front page (72) Inventor Miki Aihwan 2218-2 Nakahime, Onohara-cho, Mitoyo-gun, Kagawa Prefecture Toyo Carbon Co., Ltd. F-term (reference) 4G026 BA01 BB01 BF31 BH06 4G032 AA04 BA04
Claims (4)
消耗率が１０質量%以下であるセラミックろう付け用黒
鉛治具。1. A graphite brazing jig for ceramic brazing, wherein the oxidative consumption rate in air at 973 K for 5 hours is 10% by mass or less.
ョア硬度が８５以上である請求項１に記載のセラミック
ろう付け用黒鉛治具。2. The graphite jig for ceramic brazing according to claim 1, having a bulk density of 1.80 Mg / m 3 or more and a Shore hardness of 85 or more.
０〜７．５×１０-6／Ｋ、１０７３〜１１２３Ｋでの熱
膨張係数が７．５〜８．５×１０-6／Ｋである請求項１
又は２に記載のセラミックろう付け用黒鉛治具。3. The thermal expansion coefficient at 623 to 723K is 7.
0~7.5 × 10 -6 / K, the thermal expansion coefficient of 1073~1123K is 7.5~8.5 × 10 -6 / K claim 1
Or the graphite jig for ceramic brazing according to 2.
以上である請求項１乃至３のいずれかに記載のセラミッ
クろう付け用黒鉛治具。4. A thermal conductivity at room temperature of 60 W / (m · K).
The graphite jig for ceramic brazing according to any one of claims 1 to 3, which is as described above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000172983A JP2001354482A (en) | 2000-06-09 | 2000-06-09 | Graphite jig for brazing ceramic |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000172983A JP2001354482A (en) | 2000-06-09 | 2000-06-09 | Graphite jig for brazing ceramic |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009263380A Division JP2010090027A (en) | 2009-11-18 | 2009-11-18 | Graphite fixture for brazing of ceramic |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2001354482A true JP2001354482A (en) | 2001-12-25 |
Family
ID=18675289
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000172983A Pending JP2001354482A (en) | 2000-06-09 | 2000-06-09 | Graphite jig for brazing ceramic |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001354482A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7213737B2 (en) * | 2004-12-07 | 2007-05-08 | Delphi Technologies, Inc. | Graphite braze bar inserts |
| CN114230379A (en) * | 2022-01-06 | 2022-03-25 | 中钢集团洛阳耐火材料研究院有限公司 | Preparation method of SiC aerogel/ceramic coating structure integrated heat-insulation-preventing composite material |
-
2000
- 2000-06-09 JP JP2000172983A patent/JP2001354482A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7213737B2 (en) * | 2004-12-07 | 2007-05-08 | Delphi Technologies, Inc. | Graphite braze bar inserts |
| CN114230379A (en) * | 2022-01-06 | 2022-03-25 | 中钢集团洛阳耐火材料研究院有限公司 | Preparation method of SiC aerogel/ceramic coating structure integrated heat-insulation-preventing composite material |
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Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20061211 |
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