JP2001349718A - Outer diameter measuring method and device - Google Patents

Outer diameter measuring method and device

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Publication number
JP2001349718A
JP2001349718A JP2000174153A JP2000174153A JP2001349718A JP 2001349718 A JP2001349718 A JP 2001349718A JP 2000174153 A JP2000174153 A JP 2000174153A JP 2000174153 A JP2000174153 A JP 2000174153A JP 2001349718 A JP2001349718 A JP 2001349718A
Authority
JP
Japan
Prior art keywords
work
hole
outer diameter
head
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000174153A
Other languages
Japanese (ja)
Other versions
JP3390968B2 (en
Inventor
Susumu Sawafuji
進 沢藤
Masahiro Tomoe
雅洋 友枝
Kazuo Nakajima
和雄 中嶋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Priority to JP2000174153A priority Critical patent/JP3390968B2/en
Publication of JP2001349718A publication Critical patent/JP2001349718A/en
Application granted granted Critical
Publication of JP3390968B2 publication Critical patent/JP3390968B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide a low-cost outer diameter measuring method and device capable of measuring accurately the outer diameter of work. SOLUTION: In this measuring device 10, a reference hole 22A is formed on a head 22, and compressed air is supplied into the reference hole 22A. The work 30 is inserted into the reference hole 22A, and the back pressure at that time is detected by an A/E converter 18. The head 22 is floated and supported by jetting out the compressed air from a nozzle 28A of a base 28. Thus, when an automatic centripetal function works on the work 30, the head 22 is moved relatively with the work 30, to thereby arrange the work 30 in the center of the reference hole 22A.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ワークの外径を測
定する外径測定方法及び装置に関する。
The present invention relates to an outer diameter measuring method and apparatus for measuring the outer diameter of a work.

【0002】[0002]

【従来の技術】ワークの外径を測定する測定装置の一つ
として空気マイクロメータがある。従来の空気マイクロ
メータは、図9に示すように、測定ヘッド1に形成され
た穴2にワーク3を挿入し、該穴2にノズル4、4から
圧縮空気を穴2の軸と直交する方向に噴射してノズル4
の背圧を検出する。ノズル4の背圧は、ノズル4とワー
ク3との間隔に依存するので、予め求めたマスターの基
準値と比較することによって、前記検出値をワーク3の
外径寸法に換算できる。このような空気マイクロメータ
は、ワーク3と非接触で、高精度にワーク3の外径を測
定できる利点がある。
2. Description of the Related Art An air micrometer is one of measuring devices for measuring the outer diameter of a work. In a conventional air micrometer, as shown in FIG. 9, a work 3 is inserted into a hole 2 formed in a measuring head 1 and compressed air is applied to the hole 2 from nozzles 4 and 4 in a direction orthogonal to the axis of the hole 2. Spray on nozzle 4
Detects back pressure. Since the back pressure of the nozzle 4 depends on the distance between the nozzle 4 and the work 3, the detected value can be converted into the outer diameter of the work 3 by comparing it with a master reference value obtained in advance. Such an air micrometer has an advantage that the outer diameter of the work 3 can be measured with high accuracy without contact with the work 3.

【0003】[0003]

【発明が解決しようとする課題】しかしながら、従来の
空気マイクロメータは、高い測定精度を得るために、ノ
ズル4、4を小径で、且つ均等に加工しなければなら
ず、測定ヘッド1の加工費が高い欠点があった。また、
ワーク3とノズル4との隙間を厳しく管理しなければな
らないため、測定ヘッド1の加工手順が複雑であり、ノ
ズル4を測定ヘッド1に組み付けた後で穴2を加工し、
さらにこの状態からノズル4の位置を調節しなければな
らなかった。
However, in the conventional air micrometer, the nozzles 4 and 4 must be formed with a small diameter and uniformly in order to obtain high measurement accuracy. Had high drawbacks. Also,
Since the gap between the work 3 and the nozzle 4 must be strictly controlled, the processing procedure of the measuring head 1 is complicated, and the hole 2 is processed after the nozzle 4 is assembled to the measuring head 1.
Further, from this state, the position of the nozzle 4 had to be adjusted.

【0004】本発明はこのような事情に鑑みて成された
もので、ワークの外径を精度良く測定できる低コストの
外径測定方法及び装置を提供することを目的とする。
The present invention has been made in view of such circumstances, and has as its object to provide a low-cost outer diameter measuring method and apparatus which can accurately measure the outer diameter of a work.

【0005】[0005]

【課題を解決するための手段】本発明は前記目的を達成
するために、ワークの外径を測定する外径測定方法にお
いて、ヘッドに形成された穴にワークを挿入して該挿入
位置で前記ワークを支持し、前記ヘッドを前記穴と直交
する方向にスライド自在に支持し、前記穴に流体を前記
穴の軸方向に供給して、該流体が穴内壁と前記ワークと
の隙間を通過する際の流体の背圧、流量、又は前記ワー
クが受ける抗力、或いは前記ワークの変位量を検出し、
該検出値を基準値と比較して前記ワークの外径に換算す
ることを特徴としている。
According to the present invention, there is provided an outer diameter measuring method for measuring an outer diameter of a work, the method comprising the steps of: inserting a work into a hole formed in a head; A work is supported, the head is slidably supported in a direction orthogonal to the hole, and a fluid is supplied to the hole in an axial direction of the hole, and the fluid passes through a gap between the inner wall of the hole and the work. When the back pressure of the fluid, the flow rate, or the drag received by the work, or the amount of displacement of the work,
It is characterized in that the detected value is compared with a reference value and converted into an outer diameter of the work.

【0006】また、本発明は前記目的を達成するため
に、ワークの外径を測定する外径測定装置において、前
記ワークを挿入する穴が形成されたヘッドと、該ヘッド
を前記穴と直交する方向にスライド自在に支持するヘッ
ド支持手段と、前記ワークを前記穴に挿入して該挿入位
置で前記ワークを支持するワーク支持手段と、前記穴に
流体を前記穴の軸方向に供給する流体供給手段と、該流
体供給手段で供給した流体が穴内壁と前記ワークとの隙
間を通過する際の流体の背圧、流量、又は前記ワークが
受ける抗力、或いは前記ワークの変位量を検出する検出
手段と、該検出手段で検出した検出値を基準値と比較し
て前記ワークの外径に換算する換算手段と、を備えたこ
とを特徴としている。
According to another aspect of the present invention, there is provided an outer diameter measuring apparatus for measuring an outer diameter of a work, wherein the head has a hole for inserting the work, and the head is perpendicular to the hole. Head support means for supporting the work slidably in the direction, work support means for inserting the work into the hole and supporting the work at the insertion position, and fluid supply for supplying fluid to the hole in the axial direction of the hole Means for detecting the back pressure and flow rate of the fluid when the fluid supplied by the fluid supply means passes through the gap between the inner wall of the hole and the work, or the drag received by the work, or the amount of displacement of the work And a conversion means for comparing a detection value detected by the detection means with a reference value and converting the detected value into an outer diameter of the work.

【0007】本発明によれば、ヘッドの穴にワークを挿
入して該挿入位置でワークを支持するとともに、ヘッド
を穴と直交する方向にスライド自在に支持したので、穴
に流体を供給してワークに自動求心作用が働くと、ヘッ
ドがスライドしてワークが穴の中心に配置される。した
がって、流体の背圧、流量、又は前記ワークが受ける抗
力、或いは前記ワークの変位量を検出することによって
ワークの外径寸法を精度良く求めることができる。
According to the present invention, the work is inserted into the hole of the head and the work is supported at the insertion position, and the head is slidably supported in a direction perpendicular to the hole. When the automatic centripetal action is applied to the work, the head slides and the work is placed at the center of the hole. Therefore, by detecting the back pressure and flow rate of the fluid, the drag received by the work, or the amount of displacement of the work, the outer diameter of the work can be accurately obtained.

【0008】[0008]

【発明の実施の形態】以下添付図面に従って本発明に係
る外径測定方法及び装置の実施の形態について説明す
る。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an outer diameter measuring method and apparatus according to the present invention.

【0009】図1は、第1の実施の形態の測定装置10
の構成を示すブロック図である。以下は、円柱状に形成
されたワーク30の外径を測定する例であるが、測定装
置10で測定するワーク30の形状は、これに限定され
るものではなく、球、円錐やそれらを組み合わせた形状
等であってもよい。
FIG. 1 shows a measuring apparatus 10 according to a first embodiment.
FIG. 3 is a block diagram showing the configuration of FIG. The following is an example of measuring the outer diameter of the work 30 formed in a cylindrical shape, but the shape of the work 30 measured by the measuring device 10 is not limited to this, and a sphere, a cone, or a combination thereof is used. Shape, etc.

【0010】図1に示すように、空気源12から供給さ
れる圧縮空気は、フィルタ14で除塵され、レギュレー
タ16で一定圧力に調整された後、A/E変換器18
(空気/電気変換器)内に設置された絞りを通り、コネ
クタ26を介してヘッド22内の基準穴22Aに該基準
穴22Aの軸方向に送気される。A/E変換器18は、
このときの圧力を、内蔵するベローズと差動変圧器とに
よって電気信号に変換し、管制部20に出力する。ワー
ク30の外径が異なる場合、圧力が微小変化し、管制部
20は、変化した電気信号に基づいてワーク30の外径
を算出し、算出したデータを例えば管制部20のモニタ
上に表示する。
As shown in FIG. 1, compressed air supplied from an air source 12 is dust-removed by a filter 14, adjusted to a constant pressure by a regulator 16, and then adjusted by an A / E converter 18.
The air is sent to the reference hole 22A in the head 22 via the connector 26 in the axial direction of the reference hole 22A through a throttle provided in the (air / electric converter). The A / E converter 18
The pressure at this time is converted into an electric signal by a built-in bellows and a differential transformer, and output to the control unit 20. When the outer diameter of the work 30 is different, the pressure slightly changes, and the control unit 20 calculates the outer diameter of the work 30 based on the changed electric signal, and displays the calculated data on, for example, a monitor of the control unit 20. .

【0011】前記フィルタ14で除塵された圧縮空気
は、レギュレータ24にも供給され、該レギュレータ2
4によって一定圧力に調整された後、コネクタ34を介
してベース28内に送気される。ベース28にはヘッド
22が載置され、前記圧縮空気によってヘッド22が浮
上支持される。
The compressed air removed by the filter 14 is also supplied to a regulator 24,
After being adjusted to a constant pressure by 4, the air is supplied into the base 28 via the connector 34. The head 22 is placed on the base 28, and the head 22 is levitated and supported by the compressed air.

【0012】一方、ワーク30は、剛体から成る支持部
材32を介してアーム36に取り付けられる。アーム3
6は、スライダ38、38を介して架台40に摺動自在
に取り付けられるとともに、モータ42の回転軸に連結
された送りねじ44が螺合される。これにより、モータ
42を駆動すると、送りねじ44が回動し、アーム36
が昇降する。
On the other hand, the work 30 is attached to an arm 36 via a support member 32 made of a rigid body. Arm 3
6 is slidably attached to a gantry 40 via sliders 38, 38, and is screwed with a feed screw 44 connected to a rotating shaft of a motor 42. Thus, when the motor 42 is driven, the feed screw 44 rotates, and the arm 36
Goes up and down.

【0013】アーム36の上方には、リニアスケール4
6が設けられている。リニアスケール46は、アーム3
6の昇降量を検出し、その検出信号を管制部20に出力
する。管制部20は、この検出信号に基づいてモータ4
2を駆動制御し、アーム36の昇降量、即ち、ワーク3
0の上下方向の位置を調節する。
A linear scale 4 is provided above the arm 36.
6 are provided. The linear scale 46 is the arm 3
6 and outputs the detection signal to the control unit 20. The control unit 20 controls the motor 4 based on the detection signal.
2 to control the amount of movement of the arm 36, that is, the work 3
Adjust the vertical position of 0.

【0014】図2は、ヘッド22及びベース28の側面
断面図である。
FIG. 2 is a side sectional view of the head 22 and the base 28.

【0015】ヘッド22は、円柱状に形成され、その中
央部に基準穴22Aが形成される。基準穴22Aの下端
には、コネクタ26が連結され、このコネクタ26を介
して圧縮空気が基準穴22Aに供給される。基準穴22
Aの上部には、径の小さい絞り22Bが設けられ、この
絞り22Bとワーク30との隙間を通って前記圧縮空気
が外部に吹き出される。絞り22Bの内径Dは、要求さ
れる感度と、測定するワーク30の外径dとによって設
定され、例えば、(D−d)が10〜100μm程度に
なるように設定される。この(D−d)が小さいほど感
度が良くなり、ワーク30の外径dが少し変化しただけ
でも、A/E変換器18の検出値が大きく変化するよう
になる。
The head 22 is formed in a columnar shape, and has a reference hole 22A formed in the center thereof. A connector 26 is connected to the lower end of the reference hole 22A, and compressed air is supplied to the reference hole 22A via the connector 26. Reference hole 22
A throttle 22B having a small diameter is provided above A, and the compressed air is blown to the outside through a gap between the throttle 22B and the work 30. The inner diameter D of the stop 22B is set by the required sensitivity and the outer diameter d of the work 30 to be measured, and for example, is set so that (D−d) is about 10 to 100 μm. The smaller the value (D−d) is, the higher the sensitivity is. Even if the outer diameter d of the work 30 is slightly changed, the detection value of the A / E converter 18 is greatly changed.

【0016】一方、ベース28は、円筒状に形成され、
その上面には多数のノズル28A、28A(2個のみ図
示)が形成されている。多数のノズル28A、28A
は、ベース28の穴28Bを中心に円周状に等間隔で配
置され、内部流路28Cを介してコネクタ34に連通さ
れる。また、ベース28には、前記ヘッド22が載置さ
れ、コネクタ26及びエアホール27が穴28Bの内部
に配置される。これにより、コネクタ34から基準穴2
2Aに圧縮空気を供給すると、ノズル28A、28Aか
らヘッド22の下面に向けて略均等に圧縮空気が噴射さ
れ、ヘッド22が浮上した状態に支持される。
On the other hand, the base 28 is formed in a cylindrical shape,
A number of nozzles 28A, 28A (only two are shown) are formed on the upper surface. Multiple nozzles 28A, 28A
Are arranged circumferentially at equal intervals around a hole 28B of the base 28, and communicate with the connector 34 via the internal flow path 28C. The head 22 is placed on the base 28, and the connector 26 and the air hole 27 are arranged inside the hole 28B. Thereby, the reference hole 2 is
When the compressed air is supplied to the nozzle 2A, the compressed air is jetted from the nozzles 28A, 28A substantially uniformly toward the lower surface of the head 22, and the head 22 is supported in a floating state.

【0017】次に上記の如く構成された測定装置10の
作用について説明する。
Next, the operation of the measuring device 10 configured as described above will be described.

【0018】まず、図1に示したモータ42を駆動して
アーム36を下降させ、ワーク30をヘッド22の基準
穴22Aに挿入する。基準穴22Aに挿入したワーク3
0は、支持部材32によってその挿入位置で支持され
る。
First, the motor 42 shown in FIG. 1 is driven to lower the arm 36, and the work 30 is inserted into the reference hole 22 A of the head 22. Work 3 inserted in reference hole 22A
0 is supported by the support member 32 at the insertion position.

【0019】次いで、空気源12を駆動し、レギュレー
タ16、24で一定圧に調整した圧縮空気をそれぞれ、
ヘッド22、ベース28に供給する。
Next, the air source 12 is driven, and the compressed air adjusted to a constant pressure by the regulators 16 and 24 is
Head 22 and base 28 are supplied.

【0020】ベース28に供給された圧縮空気は、多数
のノズル28A、28Aからヘッド22の下面に均等に
噴射される。これにより、ヘッド22は、圧縮空気によ
って浮上した状態に支持され、基準穴22Aの軸と直交
する方向(即ち水平方向)にスライド自在になる。
The compressed air supplied to the base 28 is uniformly jetted from a number of nozzles 28A, 28A to the lower surface of the head 22. As a result, the head 22 is supported by the compressed air in a floating state, and is slidable in a direction perpendicular to the axis of the reference hole 22A (that is, in the horizontal direction).

【0021】一方、ヘッド22に供給された圧縮空気
は、コネクタ26から基準穴22Aに、基準穴22Aの
軸方向に噴射される。噴射された圧縮空気は、ワーク3
0と絞り22Bとの隙間を通り抜けて上部開口から外部
に吹き出す。このときの背圧は、ワーク30と絞り22
Bとの隙間の大きさ、即ちワーク30の外径に依存する
ので、背圧をA/E変換器18で検出し、管制部20で
この検出値をマスターの基準値と比較することによって
ワーク30の外径に換算できる。ここで、マスターの基
準値とは、測定に先立って、測定時と同じ条件でマスタ
ーを測定した値であり、測定条件を変える度に行われ
る。
On the other hand, the compressed air supplied to the head 22 is jetted from the connector 26 to the reference hole 22A in the axial direction of the reference hole 22A. The injected compressed air is the work 3
It blows out from the upper opening through the gap between 0 and the stop 22B. The back pressure at this time is determined by the work 30 and the throttle 22
The back pressure is detected by the A / E converter 18 and the control unit 20 compares the detected value with the master reference value. It can be converted to an outer diameter of 30. Here, the reference value of the master is a value obtained by measuring the master under the same conditions as the measurement prior to the measurement, and is performed each time the measurement conditions are changed.

【0022】測定時におけるワーク30には、絞り22
Bとワーク30との隙間を通り抜ける圧縮空気によって
自動求心作用(又は自動調心作用)が働く。ワーク30
は、支持部材32によって固定されているので、浮上支
持されているヘッド22がワーク30に対して相対移動
し、これによってワーク30が基準穴22Aの中心に配
置される。したがって、圧縮空気は、ワーク30の回り
に略均等に形成された隙間を通り抜けることになり、こ
のときの背圧を検出することによってワーク30の外径
を精度良く測定できる。
At the time of measurement, the work 30 has an aperture 22
An automatic centripetal action (or an automatic centering action) works by the compressed air passing through the gap between B and the work 30. Work 30
Is fixed by the support member 32, the head 22 supported by the floating moves relative to the work 30, whereby the work 30 is arranged at the center of the reference hole 22A. Therefore, the compressed air passes through the gap formed substantially uniformly around the work 30. By detecting the back pressure at this time, the outer diameter of the work 30 can be accurately measured.

【0023】このように本実施の形態の測定装置10に
よれば、ヘッド22を圧縮空気によって浮上支持したの
で、ヘッド22が水平方向にスライドし、ワーク30が
自動的に基準穴22Aの中心に配置される。したがっ
て、ワーク30の外径を精度良く測定できる。
As described above, according to the measuring apparatus 10 of the present embodiment, since the head 22 is levitated and supported by the compressed air, the head 22 slides in the horizontal direction, and the work 30 automatically moves to the center of the reference hole 22A. Be placed. Therefore, the outer diameter of the work 30 can be accurately measured.

【0024】ところで、ワーク30を自動的に基準穴2
2Aの中心に配置するためには、ワーク30をスライド
自在に支持することも考えられる。例えば、支持部材3
2にフローティング機構を設けることが考えられる。し
かし、この場合には支持部材32の重量が増加し、アー
ム36にかかる負荷が大きくなるので、装置全体が大型
化する。これに対し、測定装置10は、支持部材32に
フローティング機構等を設ける必要がないので、アーム
36の負荷が小さく、装置全体を小型化できる。
By the way, the work 30 is automatically moved to the reference hole 2.
In order to arrange the work 30 at the center of 2A, the work 30 may be slidably supported. For example, the support member 3
2 may be provided with a floating mechanism. However, in this case, the weight of the support member 32 increases, and the load applied to the arm 36 increases, so that the size of the entire apparatus increases. On the other hand, in the measuring apparatus 10, since it is not necessary to provide a floating mechanism or the like on the support member 32, the load on the arm 36 is small, and the entire apparatus can be downsized.

【0025】また、測定装置10は、基準穴22Aに絞
り22Bを設けたので、常に一定の精度でワーク30を
測定できる。即ち、A/E変換器18の検出値は、ワー
ク30の外径dと絞り22Bの内径Dによってのみ変化
し、ワーク30の挿入量に依存しないので、ワーク30
の挿入量を高い精度で制御しなくても、常に一定の精度
でワーク30の外径を測定できる。
Since the measuring device 10 has the aperture 22B in the reference hole 22A, the work 30 can always be measured with a constant accuracy. That is, the detection value of the A / E converter 18 changes only depending on the outer diameter d of the work 30 and the inner diameter D of the stop 22B, and does not depend on the insertion amount of the work 30.
The outer diameter of the work 30 can always be measured with a constant accuracy without controlling the insertion amount of the work 30 with high accuracy.

【0026】なお、上述した実施の形態は、背圧を検出
したが、これに限定するものではなく、圧縮空気の流量
を検出してもよい。この場合も上述した測定装置10と
同様に、管制部20が、検出値をマスターの基準値と比
較することによって、ワーク30の外径を精度良く求め
ることができる。
In the above-described embodiment, the back pressure is detected. However, the present invention is not limited to this, and the flow rate of the compressed air may be detected. Also in this case, similarly to the above-described measuring device 10, the control unit 20 can accurately determine the outer diameter of the work 30 by comparing the detected value with the master reference value.

【0027】また、ワーク30が受ける抗力やワーク3
0の変位量を検出してもよい。図3が示す測定装置48
は、ワーク30の受ける抗力を検出する装置であり、支
持部材32が圧電ピックアップ50を介してアーム36
に取り付けられている。圧電ピックアップ50は、ワー
ク30が圧縮空気から受ける抗力を検出し、その検出信
号を管制部20に出力する。この場合も、管制部20が
検出値をマスターの基準値と比較することにより、ワー
ク30の外径に換算できる。
Further, the resistance of the work 30 and the work 3
A displacement amount of 0 may be detected. Measuring device 48 shown in FIG.
Is a device for detecting the drag received by the work 30, and the supporting member 32 is connected to the arm 36 via the piezoelectric pickup 50.
Attached to. The piezoelectric pickup 50 detects a drag received by the work 30 from the compressed air, and outputs a detection signal to the control unit 20. Also in this case, the control unit 20 can convert the detected value to the outer diameter of the work 30 by comparing the detected value with the master reference value.

【0028】また、図4に示すように、ワーク30の変
位量を検出してもよい。即ち、支持部材32をアーム3
6に形成された穴36Aに貫通させ、軸受け(不図示)
等で該支持部材32を垂直方向にスライド自在に支持す
る。そして、支持部材32の上端をリニアスケール46
に当接させ、リニアスケール46でワーク30の変位量
を検出する。ワーク30は、圧縮空気がワーク30を持
ち上げようとする抗力と、ワーク30や支持部材32の
重量とが拮抗する位置で浮上静止する。したがって、ワ
ーク30の外径が変化すると、ワーク30を持ち上げる
抗力も当然変化するので、ワーク30の静止位置も変化
する。したがって、ワーク30の変位量をリニアスケー
ル46で検出し、該検出値をマスターの基準値と比較す
ることによってワーク30の外径に換算できる。
Further, as shown in FIG. 4, the displacement of the work 30 may be detected. That is, the support member 32 is connected to the arm 3
6 through the hole 36A formed in the bearing (not shown)
The support member 32 is slidably supported in the vertical direction by the above method. Then, the upper end of the support member 32 is
, And the displacement of the work 30 is detected by the linear scale 46. The work 30 floats and stops at a position where the resistance of the compressed air to lift the work 30 and the weight of the work 30 and the support member 32 are opposed. Therefore, when the outer diameter of the work 30 changes, the drag for lifting the work 30 naturally changes, and the rest position of the work 30 also changes. Therefore, the displacement of the work 30 is detected by the linear scale 46, and the detected value can be converted into the outer diameter of the work 30 by comparing the detected value with the master reference value.

【0029】なお、ヘッド22とベース28の形状は、
上述した実施の形態に限定されるものではない。例え
ば、図5に示すヘッド56は、外周面に全周にわたって
凸条部56Bが形成される。一方、ベース58は、静圧
流体軸受であり、レギュレータ24から送気された圧縮
空気を、前記凸条部56Bの上面、及び下面に吹き付け
ることにより、ヘッド56を浮上支持する。これによ
り、ヘッド56は、水平方向にスライドするので、自動
求心作用を受けたワーク30が基準穴56Aの中心に配
置される。
The shapes of the head 22 and the base 28 are as follows.
The present invention is not limited to the above embodiment. For example, in the head 56 shown in FIG. 5, a ridge 56B is formed on the entire outer peripheral surface. On the other hand, the base 58 is a hydrostatic fluid bearing, and floats and supports the head 56 by blowing the compressed air supplied from the regulator 24 onto the upper and lower surfaces of the ridge 56B. As a result, the head 56 slides in the horizontal direction, so that the work 30 subjected to the automatic centripetal action is arranged at the center of the reference hole 56A.

【0030】また、上述した実施の形態では、ヘッド2
2をフローティング機構によって浮上支持したが、ヘッ
ド22が穴22Aの軸と直交する方向にスライドする構
造であればよい。例えば、図6に示すように、ヘッド2
2とベース28との間に3個以上の玉66、66(2個
のみ図示)を配置してもよい。このヘッド22は、玉6
6、66が転がることにより、水平方向にスライドす
る。玉66、66の転がる範囲は、リング状の規制部材
68によって規制される。
In the embodiment described above, the head 2
2 is floated and supported by the floating mechanism, but any structure may be used as long as the head 22 slides in a direction perpendicular to the axis of the hole 22A. For example, as shown in FIG.
Three or more balls 66, 66 (only two are shown) may be arranged between the base 2 and the base 28. This head 22 holds the ball 6
As 6, 6 rolls, they slide horizontally. The rolling range of the balls 66, 66 is regulated by a ring-shaped regulating member 68.

【0031】また、紐(不図示)等でヘッド22を吊設
することによってヘッド22が略水平方向に移動するよ
うにしてもよい。
The head 22 may be moved in a substantially horizontal direction by suspending the head 22 with a string (not shown) or the like.

【0032】なお、支持部材32は、ワーク30を着脱
自在に支持するものであればよく、例えばクランプ機構
によってワーク30の端部を挟持してもよい。また、ワ
ーク30が磁性体である場合には、支持部材32の下端
に磁石を設けてワーク30を吸着支持してもよい。ま
た、接着剤等によってワーク30を支持部材32に接着
し、ワーク30を取り外す際に加熱してもよい。さら
に、図5に示したように、支持部材60を円筒状に形成
し、該支持部材60の内部を負圧発生源62に連通して
もよい。この場合、負圧発生源62を駆動することによ
り、エアが吸引され、ワーク30が吸着支持される。な
お、図5の符号64は、ゴム等から成るリング状のシー
ル材であり、これによってワーク30の脱落が防止され
る。
The support member 32 only needs to support the work 30 in a detachable manner. For example, the end of the work 30 may be clamped by a clamp mechanism. When the work 30 is a magnetic material, a magnet may be provided at the lower end of the support member 32 to attract and support the work 30. Alternatively, the work 30 may be bonded to the support member 32 with an adhesive or the like, and heated when the work 30 is removed. Further, as shown in FIG. 5, the support member 60 may be formed in a cylindrical shape, and the inside of the support member 60 may communicate with the negative pressure generation source 62. In this case, by driving the negative pressure generating source 62, air is sucked, and the work 30 is suction-supported. Reference numeral 64 in FIG. 5 is a ring-shaped sealing material made of rubber or the like, which prevents the workpiece 30 from falling off.

【0033】また、上述した実施の形態は、基準穴22
Aに絞り22Bを設けたが、図5に示したように、絞り
22Bのない円柱状の基準穴56Aであってもよい。こ
の場合には、基準穴56Aの内径D1を、図2に示した
内径Dと同様に、ワーク30の外径dよりも若干大きい
値に設定する。これにより、ワーク30の外径を測定で
きる。
In the embodiment described above, the reference hole 22
Although the stop 22B is provided in A, as shown in FIG. 5, a cylindrical reference hole 56A without the stop 22B may be used. In this case, the inner diameter D1 of the reference hole 56A is set to a value slightly larger than the outer diameter d of the work 30 similarly to the inner diameter D shown in FIG. Thereby, the outer diameter of the work 30 can be measured.

【0034】また、ワーク30の先端部に、図7、図8
に示す求心作用部材70、72を取り付けて、自動求心
作用を効果的に得るようにしてもよい。図7に示す求心
作用部材70は、半球状に形成され、図8に示す求心作
用部材72は円錐状に形成される。この求心作用部材7
0、72は、簡単に剥がれる接着、或いは磁力等によっ
て着脱自在にワークに取り付けられる。これにより、ワ
ーク30の抵抗が減るとともに、圧縮空気がワーク30
の外周部に均等に流れやすくなるので、自動求心作用が
効果的に得られる。したがって、ワーク30が基準穴2
2Aの中心に配置され易くなるので、測定精度が向上す
る。なお、求心作用部材70、72の形状は、上述した
ものに限定されず、流体がワーク30の回りに略均等に
流れるような形状であればよく、例えば、球や円錐台、
或いは多角錘等であってもよい。
7 and 8 are attached to the tip of the work 30.
The centripetal members 70 and 72 shown in FIG. 7 may be attached to effectively obtain an automatic centripetal effect. The centripetal member 70 shown in FIG. 7 is formed in a hemispherical shape, and the centripetal member 72 shown in FIG. 8 is formed in a conical shape. This centripetal member 7
Numerals 0 and 72 are detachably attached to the work by adhesion that is easily peeled off, or by magnetic force or the like. Thereby, the resistance of the work 30 is reduced, and the compressed air is
Since it is easy to flow evenly on the outer peripheral portion, the automatic centripetal action can be effectively obtained. Therefore, the work 30 has the reference hole 2
Since it is easy to be arranged at the center of 2A, the measurement accuracy is improved. Note that the shapes of the centripetal members 70 and 72 are not limited to those described above, and may be any shape as long as the fluid flows substantially evenly around the work 30.
Alternatively, it may be a polygonal pyramid or the like.

【0035】なお、上述した実施の形態は、ヘッド22
の基準穴22Aに圧縮空気を噴射したが、空気以外の気
体や液体を噴射してもよい。また、その流体の温度を制
御する温度制御手段を設けてもよい。
In the embodiment described above, the head 22
Although compressed air is injected into the reference hole 22A, a gas or liquid other than air may be injected. Further, a temperature control means for controlling the temperature of the fluid may be provided.

【0036】また、上述した実施の形態において、A/
E変換器18から出力された検出信号を、管制部20で
A/D変換し、高周波成分を除去することにより、ワー
ク30の振動成分を除去してもよい。これにより、測定
精度をさらに向上させることができる。
In the above embodiment, A /
The detection signal output from the E converter 18 may be A / D-converted by the control unit 20 to remove high-frequency components, thereby removing the vibration component of the work 30. Thereby, the measurement accuracy can be further improved.

【0037】[0037]

【発明の効果】以上説明したように本発明に係る外径測
定装置によれば、ヘッドの穴にワークを挿入してその挿
入位置で支持するとともに、ヘッドを穴と直交する方向
にスライド自在に支持したので、自動求心作用を受けた
ワークが自動的に穴の中心に配置され、ワークの外径寸
法が精度良く測定される。
As described above, according to the outer diameter measuring apparatus of the present invention, a work is inserted into the hole of the head and supported at the insertion position, and the head is slidable in a direction perpendicular to the hole. Since the work is supported, the work subjected to the automatic centripetal action is automatically arranged at the center of the hole, and the outer diameter of the work is accurately measured.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る外径測定装置の実施の形態の構造
を示すブロック図
FIG. 1 is a block diagram showing the structure of an embodiment of an outer diameter measuring device according to the present invention.

【図2】ヘッド及びベースを示す側面断面図FIG. 2 is a side sectional view showing a head and a base.

【図3】図1と異なる検出手段を有する外径測定装置を
示すブロック図
FIG. 3 is a block diagram showing an outer diameter measuring device having detecting means different from that of FIG. 1;

【図4】図1と異なる検出手段を有する外径測定装置の
特徴部分を示す側面図
FIG. 4 is a side view showing a characteristic portion of the outer diameter measuring device having a detecting means different from that of FIG. 1;

【図5】図2と異なる形状のヘッド及びベースを示す側
面断面図
FIG. 5 is a side sectional view showing a head and a base having different shapes from those of FIG. 2;

【図6】図2と異なるヘッドの支持構造を示す側面断面
FIG. 6 is a side sectional view showing a head support structure different from that of FIG. 2;

【図7】ワークに取り付ける求心作用部材の一例を示す
側面図
FIG. 7 is a side view showing an example of a centripetal member attached to a work.

【図8】ワークに取り付ける求心作用部材の一例を示す
側面図
FIG. 8 is a side view showing an example of a centripetal member attached to a work.

【図9】従来装置の構造を示す断面図FIG. 9 is a sectional view showing the structure of a conventional device.

【符号の説明】[Explanation of symbols]

10…測定装置、12…空気源、16…レギュレータ、
18…A/E変換器、20…管制部、22…ヘッド、2
2A…基準穴、22B…絞り、28…ベース、28A…
ノズル、30…ワーク、32…支持部材、36…アー
ム、42…モータ、44…送りねじ、46…リニアスケ
ール、70、72…求心作用部材
10: measuring device, 12: air source, 16: regulator,
18 ... A / E converter, 20 ... Control unit, 22 ... Head, 2
2A: Reference hole, 22B: Aperture, 28: Base, 28A ...
Nozzle, 30 work, 32 support member, 36 arm, 42 motor, 44 feed screw, 46 linear scale, 70, 72 centripetal member

───────────────────────────────────────────────────── フロントページの続き (72)発明者 中嶋 和雄 東京都三鷹市下連雀9丁目7番1号 株式 会社東京精密内 Fターム(参考) 2F066 AA22 BB06 FF08 FF09 FF40 HH02 HH10 HH12 JJ12 MM03 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Kazuo Nakajima 9-7-1, Shimorenjaku, Mitaka-shi, Tokyo F-term (reference) 2F066 AA22 BB06 FF08 FF09 FF40 HH02 HH10 HH12 JJ12 MM03

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 ワークの外径を測定する外径測定方法に
おいて、 ヘッドに形成された穴にワークを挿入して該挿入位置で
前記ワークを支持し、前記ヘッドを前記穴と直交する方
向にスライド自在に支持し、前記穴に流体を前記穴の軸
方向に供給して、該流体が穴内壁と前記ワークとの隙間
を通過する際の流体の背圧、流量、又は前記ワークが受
ける抗力、或いは前記ワークの変位量を検出し、該検出
値を基準値と比較して前記ワークの外径に換算すること
を特徴とする外径測定方法。
1. An outer diameter measuring method for measuring an outer diameter of a work, comprising: inserting a work into a hole formed in a head, supporting the work at the insertion position, and moving the head in a direction orthogonal to the hole. It is slidably supported and supplies fluid to the hole in the axial direction of the hole, and the back pressure and flow rate of the fluid when the fluid passes through the gap between the hole inner wall and the work, or the drag received by the work Alternatively, an outer diameter measuring method comprising: detecting a displacement amount of the work; comparing the detected value with a reference value; and converting the detected value into an outer diameter of the work.
【請求項2】 ワークの外径を測定する外径測定装置に
おいて、 前記ワークを挿入する穴が形成されたヘッドと、 該ヘッドを前記穴と直交する方向にスライド自在に支持
するヘッド支持手段と、 前記ワークを前記穴に挿入して該挿入位置で前記ワーク
を支持するワーク支持手段と、 前記穴に流体を前記穴の軸方向に供給する流体供給手段
と、 該流体供給手段で供給した流体が穴内壁と前記ワークと
の隙間を通過する際の流体の背圧、流量、又は前記ワー
クが受ける抗力、或いは前記ワークの変位量を検出する
検出手段と、 該検出手段で検出した検出値を基準値と比較して前記ワ
ークの外径に換算する換算手段と、 を備えたことを特徴とする外径測定装置。
2. An outer diameter measuring apparatus for measuring an outer diameter of a work, comprising: a head having a hole into which the work is inserted; and a head supporting means for slidably supporting the head in a direction orthogonal to the hole. A work supporting means for inserting the work into the hole and supporting the work at the insertion position; a fluid supply means for supplying a fluid to the hole in an axial direction of the hole; a fluid supplied by the fluid supply means Detecting means for detecting the back pressure of the fluid when passing through the gap between the hole inner wall and the work, the flow rate, or the drag received by the work, or the amount of displacement of the work, and detecting the detection value detected by the detecting means. A conversion means for converting the work into an outer diameter of the work by comparing with a reference value.
JP2000174153A 2000-06-09 2000-06-09 Outer diameter measuring method and device Expired - Fee Related JP3390968B2 (en)

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Application Number Priority Date Filing Date Title
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009150780A (en) * 2007-12-20 2009-07-09 Honda Motor Co Ltd Back pressure type gas micrometer, and internal diameter simultaneous inspection system and internal diameter simultaneous inspection method of plurality of hole parts to be inspected
JP2018004521A (en) * 2016-07-06 2018-01-11 リョービ株式会社 Piston wear determination device
WO2021140887A1 (en) * 2020-01-10 2021-07-15 日本精工株式会社 Calculation method, bearing device, and spindle device for machine tool

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009150780A (en) * 2007-12-20 2009-07-09 Honda Motor Co Ltd Back pressure type gas micrometer, and internal diameter simultaneous inspection system and internal diameter simultaneous inspection method of plurality of hole parts to be inspected
JP2018004521A (en) * 2016-07-06 2018-01-11 リョービ株式会社 Piston wear determination device
WO2021140887A1 (en) * 2020-01-10 2021-07-15 日本精工株式会社 Calculation method, bearing device, and spindle device for machine tool
JP2021110639A (en) * 2020-01-10 2021-08-02 日本精工株式会社 Method for calculation, bearing device, and main shaft device of machine tool
CN115038538A (en) * 2020-01-10 2022-09-09 日本精工株式会社 Calculation method, bearing device, and spindle device of machine tool
EP4088839A4 (en) * 2020-01-10 2023-05-31 NSK Ltd. Calculation method, bearing device, and spindle device for machine tool
JP7543649B2 (en) 2020-01-10 2024-09-03 日本精工株式会社 Calculation method, bearing device and spindle device of machine tool

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