JP2001343228A - Method and apparatus for detecting edge position and method and apparatus for measuring distance between edges - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method and an apparatus for detecting an edge position and a method and an apparatus for measuring a distance between edges whereby the edge position of a rough part formed to a work surface can be simply and correctly detected and the distance between edges can be simply and correctly measured. SOLUTION: A peripheral face of the work 12 is traced by a probe 30 formed in a conical shape. When the work 12 is traced, a leading end part 30A of the probe 30 butts against a peripheral surface 12C of the work 12 and a taper face 30B butts against an edge part 12E1. A shift amount of the probe 30 when the leading end part 30A traces and a shift amount of the probe 30 when the taper face 30B traces are measured. The edge position is obtained by calculating an intersection of the measured data.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an edge position detecting method and apparatus for detecting an edge position of an uneven portion such as a groove or a projection formed on a surface of a work and measuring an inter-edge distance, and a method for measuring an inter-edge distance. Related to the device.

[0002]

2. Description of the Related Art As a method of measuring the width of a groove formed on the surface of a work, a stylus is brought into contact with the surface of the work, and the surface of the work is traced with the stylus to thereby measure the edge portions on both sides of the groove. The width of the groove is measured by detecting the position of the groove and calculating the distance between the two edges.

In this case, the positions of the edges on both sides of the groove are detected by tracing the surface of the work and the wall surface of the groove with a stylus and finding a boundary point between them, but tracing both wall surfaces of the groove at once. Since the measurement cannot be performed, the measurement is conventionally performed twice on each side of the groove. That is, FIG.
As shown in FIG. 1A, first, the groove 3 of the work 2 is set to be inclined with respect to the stylus 1, and the wall 3 a on one side of the groove 3 and the surface 4 of the work 2 are traced by the stylus 1. One edge 5
The polar coordinate position of a is detected. Next, as shown in FIG. 1B, the work 2 is rotated to set the groove 3 at an angle to the opposite side, and the wall 3b on the other side of the groove 3 and the surface 4 of the work 2 are traced by the stylus 1. Then, the polar coordinate position of the other edge 5b is detected. Then, the edges obtained separately are synthesized, and the distance between the edges 5a and 5b is calculated to obtain the width of the groove 3.

[0004]

However, the conventional method of detecting the edge position separately on each side has a drawback that it takes a long time for measurement including setting of a work. In particular, for a work having a plurality of uneven portions, there is a drawback that a large amount of time is required for one measurement. Further, the method of separately detecting the edge position on each side has a disadvantage that a calculation error is likely to be included when calculating the groove width later.

The present invention has been made in view of such circumstances, and has an edge position detection method capable of easily and accurately detecting an edge position of an uneven portion formed on the surface of a workpiece and measuring a distance between edges. It is an object of the present invention to provide a method and apparatus, and a method and apparatus for measuring a distance between edges.

[0006]

According to the present invention, there is provided an edge position detecting method for detecting an edge position of a step formed on an outer peripheral surface or an inner peripheral surface of a cylindrical or cylindrical work. In the above, the tip of the stylus, which is formed in a tapered shape, is brought into contact with the surface of the work, the work is rotated, and the tip of the stylus is brought into contact with the surface of the work, and at the edge of the work, The surface of the work is traced with the stylus by abutting the tapered surface of the stylus, and the rotation angle of the work at the time of the tracing is measured, and the displacement of the stylus is measured. with a surface portion distal of the probe to calculate the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing in contact, the edge portion of the workpiece Calculating the linear equation Y ₂ the tapered surfaces of the serial probe representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contacts, linear equation Y ₁ and linear equation Y ₂ An edge position detection method is provided, wherein the intersection is calculated as the edge position of the step of the work.

According to the present invention, the peripheral surface of a columnar or cylindrical workpiece is traced with a tapered stylus to detect the edge position of a step formed on the peripheral surface. . That is, when the peripheral surface of the work is traced with the tapered stylus, the tip of the stylus contacts the surface of the work to trace the work, and the tapered surface of the stylus contacts the edge to trace the work. You. When determining the edge position, first, the linear equation Y ₁ representing the relationship between the relative movement and displacement of the stylus of the workpiece when tracing the surface of the workpiece, when tracing the edge portion of the workpiece Linear formula Y ₂ representing the relationship between the amount of movement of the work and the amount of displacement of the stylus
Is calculated. Then, by calculating the intersection point of the straight line formula Y ₁ and linear equation Y _2, and acquires the intersection point as the edge position.

According to another aspect of the present invention, there is provided an edge position detecting method for detecting an edge position of a step formed on an outer peripheral surface or an inner peripheral surface of a cylindrical or cylindrical work. The spherical stylus is brought into contact with the surface of the work, the work is rotated, and the tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus at the edge of the work. The surface of the work is traced with the stylus in contact with the probe, the rotation angle of the work at the time of the trace is measured, and the displacement of the stylus is measured. Is a linear expression Y representing the relationship between the rotation angle of the work and the displacement of the stylus obtained by tracing the contact.
Calculates a _1, a curve equation Y ₂ where the peripheral surface of the stylus edge portion of the workpiece represents the relationship between the rotational angle and a displacement amount of the stylus of the workpiece obtained by tracing contacts calculated, to calculate the intersection of the linear equation Y ₁ and the curve equation Y _2, provides an edge position detecting method characterized by obtaining the intersection point as the edge position of the stepped portion of the work.

In the present invention, the edge position of the step formed on the peripheral surface of the work is determined by tracing the peripheral surface of the work having a cylindrical or cylindrical shape with a stylus having a spherical tip. To detect. When the surface of the work is traced with the spherically formed stylus, the tip of the stylus abuts on the surface of the work to trace the work, and at the edge, the peripheral surface of the stylus abuts and the work is traced. . When determining the edge position, first, the linear equation Y ₁ representing the relationship between the displacement amount of the moving amount and the stylus of the workpiece when tracing the surface of the workpiece, the movement of the workpiece when tracing the edge portion of the workpiece calculating a curve equation Y ₂ representing the relationship between the displacement amount of the amount and stylus. Then, by calculating the intersection point of the straight line formula Y ₁ and the curve equation Y _2, and acquires the intersection point as the edge position.

According to another aspect of the present invention, there is provided an edge position detecting method for detecting an edge position of a step formed on a surface of a work, wherein a stylus having a tapered tip is provided. Abuts against the surface of the work, relatively moves the work and the stylus, and abuts the tip of the stylus at the surface of the work, and at the edge of the work, the tapered surface of the stylus The surface of the work is traced by the stylus in contact with the probe, the relative movement amount of the work at the time of the trace is measured, and the displacement amount of the stylus is measured. calculates the linear equation Y ₁ the tip of the needle showing the relationship between the amount of movement and the displacement amount of the stylus of the workpiece obtained by tracing abuts a tapered edge portion of the workpiece of the stylus There was calculated the linear equation Y ₂ representing the relationship between the displacement amount of the moving amount and the stylus of the workpiece obtained by tracing contact to calculate the intersection of the linear equation Y ₁ and linear equation Y ₂ And acquiring the intersection point as an edge position of the step of the work.

In the present invention, the surface of the work is traced by using a stylus having a tapered tip, and the edge position of the step formed on the surface of the work is detected.

According to another aspect of the present invention, there is provided an edge position detecting method for detecting an edge position of a step formed on a surface of a work, wherein a stylus having a spherical tip is formed on the surface of the work. , The workpiece and the stylus are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus is brought into contact with the edge of the work. Trace the surface of the work with the stylus, measure the relative movement of the work at the time of the trace, measure the displacement of the stylus, and move the surface of the work to the tip of the stylus. calculates the linear equation Y _1, the edge portion of the workpiece circumferential surface of the stylus is equivalent to but representing the relationship between the displacement amount of the moving amount and the stylus of the workpiece obtained by tracing contacts Touching tray Curve equation Y movement amount of the work obtained by the representative of the relationship between the displacement amount of the stylus
Calculates and _2, by calculating the intersection of the linear equation Y ₁ and the curve equation Y _2, provides an edge position detecting method characterized by obtaining the intersection point as the edge position of the stepped portion of the work.

In the present invention, the surface of the work is traced using a stylus having a spherical tip, and the edge position of the step formed on the surface of the work is detected.

According to another aspect of the present invention, there is provided a method for measuring a distance between two edges formed on an outer peripheral surface or an inner peripheral surface of a cylindrical or cylindrical workpiece. In the above, the tip of the stylus, which is formed in a tapered shape, is brought into contact with the surface of the work, the work is rotated, and the tip of the stylus is brought into contact with the surface of the work, and at the edge of the work, The surface of the work is traced with the stylus by abutting the tapered surface of the stylus, and the rotation angle of the work at the time of the tracing is measured, and the displacement of the stylus is measured. with the first surface portion is the tip of the stylus to calculate the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing in contact, the said workpiece Linear equation Y tapered surface of the edge portion of the stylus represents a relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contacts
₂ is calculated, to calculate the intersection point P ₁ between the linear equation Y ₁ and linear equation Y _2, rotating the second face portion of the work tip of the stylus of the workpiece obtained by tracing contacts calculates the linear equation Y ₃ representing a relationship between the displacement amount of the angle between the stylus, the tapered surface of the second edge portion and the stylus of the workpiece of the workpiece obtained by tracing contacts calculating the linear equation Y ₄ representing the relationship between the displacement amount of the angle of rotation stylus, to calculate the intersection point P ₂ between the linear equation Y ₃ and linear equation Y _4, between the intersection point P ₁ and the point of intersection P ₂ The distance between edges formed on the surface of the workpiece is calculated and the distance is obtained as the distance between edges formed on the surface of the work.

In the present invention, the tip is formed in a tapered shape.
Of a workpiece formed in a columnar or cylindrical shape with a stylus
By tracing the surface, it is formed on the peripheral surface of the work
The distance between the two edges is measured. The distance between the edges
When measuring, first trace the first surface of the work
The relationship between the amount of workpiece movement and the amount of stylus displacement
Straight line Y₁And trace the first edge of the workpiece
The relationship between the amount of movement of the workpiece and the amount of displacement of the stylus
Linear Y_TwoIs calculated. And the linear formula Y ₁And a straight line
Formula Y_TwoIntersection P of₁Is calculated. Also, the second side of the work
Of work and displacement of stylus when tracing part
Linear formula Y representing the relationship with_ThreeAnd the second edge of the workpiece
Of the workpiece and the displacement of the stylus when tracing
Linear formula Y representing the relationship_FourIs calculated. And that straight line
Formula Y_ThreeAnd straight line Y_FourIntersection P of_TwoIs calculated. And exchange
Point P₁And intersection P_TwoCalculate the distance between
Obtained as the distance between edges formed on the surface of the work
You.

According to another aspect of the present invention, there is provided a method of measuring a distance between two edges formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work. A stylus having a spherical tip is brought into contact with the surface of the work, the work is rotated, and the tip of the stylus is brought into contact with the surface of the work. The surface of the work is traced with the stylus by abutting a surface, and the rotation angle of the work at the time of the tracing is measured, and the displacement of the stylus is measured, and the first surface portion of the work is measured. A linear equation Y1 representing the relationship between the rotation angle of the work and the displacement of the stylus obtained by tracing the tip of the stylus while contacting the tip is calculated, and a _first equation of the work is obtained.
The peripheral surface of the stylus edge portion abuts calculates the curve equation Y ₂ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing, the linear equation Y ₁ calculating an intersection point P ₁ between the curve equation Y _2, the second surface portion of the workpiece is the tip of the stylus with the displacement of the rotational angle and the stylus of the workpiece obtained by tracing contacts calculates the linear equation Y ₃ representing a relationship, and the amount of displacement of the rotational angle and the stylus of the second of said workpiece circumferential surface of the edge portion wherein the stylus is obtained by tracing contacts of said workpiece calculating a curve equation Y ₄ representing the relationship, to calculate the intersection point P ₂ between the linear equation Y ₃ and the curve equation Y _4, and calculates the distance between the intersection P ₁ and the intersection point P _2, the distance A distance between edges formed on the surface of the workpiece, wherein the distance is obtained as a distance between edges formed on the surface of the work. Provide a method for measuring separation.

In the present invention, the distance between two edges formed on the surface of the work is measured by tracing the surface of the work having a cylindrical or cylindrical shape with a stylus having a spherical tip. I do. When measuring the distance between the edges, first, a straight line Y representing the relationship between the amount of movement of the work and the amount of displacement of the stylus when tracing the first surface of the work.
₁ and a curve expression Y ₂ representing the relationship between the amount of movement of the work and the amount of displacement of the stylus when the first edge of the work is traced.
Is calculated. Then, to calculate the intersection point P ₁ of the linear equation Y ₁ and the curve equation Y _2. Further, the linear equation Y ₃ representing a relationship between the displacement amount of the moving amount and the stylus of the workpiece when the trace of the second surface of the workpiece, the movement amount of the work at the time of tracing the second edge portion of the workpiece calculating a curve equation Y ₄ representing the relationship between the displacement amount of the stylus with. Then, to calculate the intersection point P ₂ of the linear equation Y ₃ and the curve equation Y _4. Then, by calculating the distance between the intersection P ₁ and the intersection point P _2, and acquires the distance as the distance between the formed edge on the surface of the workpiece.

According to another aspect of the present invention, there is provided a method for measuring a distance between two edges formed on a surface of a workpiece, the tip having a tapered tip. The needle is brought into contact with the surface of the work, the work and the stylus are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the taper of the stylus at the edge of the work. The surface of the work is traced with the stylus by bringing the surface into contact with the stylus, and the relative movement amount of the work at the time of the trace is measured, and the displacement amount of the stylus is measured. with the first surface portion is the tip of the stylus to calculate the linear equation Y ₁ representing the relationship between the moving amount and the displacement amount of the stylus of the workpiece obtained by tracing contacts, first of the work 1 Edge of The calculated linear equation Y ₂ the tapered surfaces of the stylus represents a relationship between the moving amount and the displacement amount of the stylus of the workpiece obtained by tracing contacts,
Calculating an intersection point P ₁ between the linear equation Y ₁ and linear equation Y _2, wherein a moving amount of the obtained workpiece by a second surface portion of the workpiece is the tip of the stylus to trace contact probe calculates the linear equation Y ₃ representing a relationship between the amount of displacement, the tapered surface of the second edge portion and the stylus of the workpiece touch the amount of movement of the workpiece obtained by tracing contacts Linear formula Y ₄ representing the relationship with the needle displacement
It is calculated, to calculate the intersection point P ₂ between the linear equation Y ₃ and linear equation Y _4, and calculates the distance between the intersection P ₁ and the intersection point P _2, which is formed the distance to the surface of the workpiece Provided is a method for measuring a distance between edges, which is obtained as a distance between edges.

According to the present invention, by tracing the peripheral surface of the work with a stylus having a tapered tip,
The distance between two edges of the step formed on the surface of the work is measured.

In order to achieve the above object, the present invention provides a method for measuring a distance between two edges formed on a surface of a work, comprising: , The workpiece and the stylus are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus is brought into contact with the edge of the work. Tracing the surface of the work with the stylus, measuring the relative movement of the work at the time of tracing, measuring the displacement of the stylus, and touching the first surface of the work with the stylus. A linear formula Y representing the relationship between the amount of movement of the workpiece and the amount of displacement of the stylus obtained by tracing the tip of the needle in contact.
₁ and a curve expression representing the relationship between the amount of movement of the work and the amount of displacement of the stylus obtained by tracing the first edge portion of the work by contacting the peripheral surface of the stylus. calculating a Y _2, to calculate the intersection point P ₁ between the linear equation Y ₁ and the curve equation Y _2, the second surface portion of the workpiece is the tip of the stylus of the workpiece obtained by tracing contacts calculating the linear equation Y ₃ representing a relationship between the displacement amount of the moving amount of the stylus, the peripheral surface of the second edge portion of the workpiece the stylus of the workpiece obtained by tracing contacts calculating a curve equation Y ₄ amount of displacement of the moving amount and the stylus and representing the relationship, the point of intersection of the straight line formula Y ₃ and the curve equation Y ₄ P ₂
Calculating the distance between the intersection point P ₁ and the intersection point P _2, and obtaining the distance as the distance between the edges formed on the surface of the workpiece. provide.

In the present invention, the distance between the two edges of the step formed on the surface of the work is measured by tracing the surface of the work with a stylus having a spherical tip.

[0022]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of an edge position detecting method and apparatus and an edge distance measuring method and apparatus according to the present invention will be described below in detail with reference to the accompanying drawings.

FIG. 1 is an overall configuration diagram of a first embodiment of an edge position detecting device to which the present invention is applied. The edge position detecting device 10 detects an edge position of a step portion such as a groove formed on an outer peripheral surface or an inner peripheral surface of a work 12 formed in a cylindrical or cylindrical shape, and measures a distance between the edges. It is a device to do.

As shown in FIG. 1, the work 12 is set via a fixing jig 18 on a tilt cross table 16 installed on a main body base 14. The tilt cross table 16 is rotated by being driven by a rotation driving device (not shown), and its rotation angle is read by a built-in rotation scale 20. The work 12 set on the tilt cross table 16 is subjected to centering and tilting by a centering mechanism and a tilting mechanism (not shown) provided in the tilt cross table 16.

On the main body base 14, a column 22 is erected vertically. The column 22 is provided with a detector moving table 24. The detector moving table 24 is moved up and down along the column 22 by being driven by a vertical driving device (not shown). An arm 26 is horizontally supported by the detector moving table 24.
6 is moved in a horizontal direction from the detector moving table 24 by being driven by a horizontal driving device (not shown).

At the tip of the arm 26, a detector 28 is provided. The detector 28 is provided with a stylus 30,
The amount of displacement of the stylus 30 in the horizontal direction is
Read by.

Here, as shown in FIG. 2, the stylus 30 is formed in a conical shape, and its tip is formed in a spherical shape with a predetermined radius R. The tip 30A of the stylus 30 and the tapered surface 30B abut on the surface of the work 12, and trace the surface of the work 12.

FIG. 3 is a block diagram of the control device 34 incorporated in the edge position detecting device 10 described above. The control device 34 controls each operation of the edge position detection device 10 and performs data processing of each measurement data.

As shown in the figure, a rotary drive device 36 for rotating the tilt cross table 16 is driven based on a drive signal output from a driver unit 38. Similarly, a horizontal driving device 40 for moving the detector 28 in the horizontal direction and a vertical driving device 42 for moving the detector moving table 24 in the vertical direction are also driver units 38.
Is driven based on the drive signal output from.

The rotation angle of the tilt cross table 16 driven by the rotation driving device 36 is measured by the rotation scale 20, and the measured data is output to the data processing section 44. The displacement of the stylus 30 is measured by the linear scale 32 provided in the detector 28, and the measurement data is output to the data processing unit 44.

The data processing unit 44 determines the rotation angle of the tilt cross table 16 (= the rotation angle of the work 12) and the displacement of the stylus 30 based on the input measurement data. The edge position and the distance between edges of the step formed in the step are calculated. Then, the calculation result is displayed on the display unit (CRT) 46 and printed out from the printer 48 as necessary.

Next, a method of detecting an edge position and a method of measuring a distance between edges using the edge position detecting device 10 configured as described above will be described.

Here, as shown in FIG. 4, a case will be described in which the width of a groove 12G formed on the outer periphery of a cylindrical work 12 is measured.

First, the work 12 is set on the tilt cross table 16 via the fixing jig 18. Next, the set work 12 is aligned. That is, the tilting and centering of the work 12 are performed using the tilting mechanism and the centering mechanism. Next, the vertical driving device 42 and the horizontal driving device 40 are driven to
0 is brought into contact with the outer peripheral surface of the work 12. Thus, measurement preparation is completed.

Next, the rotary drive device 36 is driven to rotate the work 12 (rotate in the direction of arrow A in FIG. 4). When the work 12 is rotated, the stylus 30 in contact with the outer peripheral surface of the work 12 traces the outer peripheral surface of the work 12. At this time, the rotation angle of the work 12 is
0, and the measurement data is output to the data processing unit 44. At the same time, the amount of displacement of the stylus 30 corresponding to the rotation angle of the
2 and the measurement data is output to the data processing unit 44.

The measurement is performed for one rotation of the work. The data processing unit 44 stores the input rotation angles of the work 12 and the measured data of the displacement of the stylus 30 corresponding to the rotation angle of the work 12 in the memory.

The stylus 30 for tracing the outer peripheral surface of the work 12 is formed in a conical shape. For this reason, the stylus 30 traces the outer peripheral surface of the work 12 as follows. That is, as shown in FIG. 5, in the circular portion 12C of the work 12, the tip portion 30A of the stylus 30 contacts the circular portion 12C of the work 12 to trace the work 12, and the edges 12E ₁ , in 12E _2, the tapered surface 30B of the stylus 30 traces the edge portion 12E _1, 12E contact with the workpiece 12 to the _second workpiece 12.

Here, since the work 12 is cylindrical,
The displacement of the stylus 30 is zero at the circular portion 12C of the work 12.
Becomes On the other hand, the edge portion 12E of the workpiece 12₁, 12E
_TwoThen, the tapered surface 30B of the stylus 30 comes into contact with the trace
Therefore, the amount of displacement of the stylus 30 changes at a constant rate.
Good. Therefore, the edge 12E on one side of the work 12 ₁
Near the rotation angle of the work 12 and the displacement of the stylus 30
Is as shown in the graph of FIG.

As can be seen from this graph, the work 12
By tracing the tapered surface 30B of the stylus 30 to the edge portion 12E _1, since the measurement data of the displacement amount of the stylus 30 changes, the change point of the measurement data of the displacement amount of the stylus 30, i.e., touch The tip 30A of the needle 30 is
If the boundary point between the measured data of the displacement of the stylus 30 when tracing is performed and the measured data of the displacement of the stylus 30 when the tapered surface 30B of the stylus 30 traces the workpiece 12, the work 12 can be obtained. it is possible to obtain the position of the edge portion 12E _1.

As shown in FIG. 7, this boundary point is a straight line representing the relationship between the rotation angle of the work 12 and the displacement of the stylus 30 obtained by the stylus 30 tracing the circular portion 12C of the work 12. The formula Y ₁ and the linear formula Y ₂ representing the relationship between the rotation angle of the work 12 and the displacement of the stylus 30 obtained by the stylus 30 tracing the edge 12E1 on _one side of the work 12 are calculated. And the two linear formulas Y ₁ ,
It can be determined from the intersection of Y _2. The two straight lines Y ₁ and Y ₂ are calculated by the least square method from the measured data of the rotation angle of the work 12 and the measured data of the displacement of the stylus 30. That is, the rotation angle of the work 12 is x, the displacement of the stylus 30 is y, and the straight line to be obtained is y = ax
+ B, the constants a and b are

[0041]

(Equation 1) n: It is determined by the total number of data used in the calculation, whereby the straight lines Y ₁ and Y ₂ can be obtained.

Here, the stylus 30 of the present embodiment is the same as that shown in FIG.
As shown in the figure, the tip is formed in a spherical shape. For this reason, as shown in FIG.
₁ and Y ₂ are corrected by the radius R of the tip of the stylus 30. That is, if the straight-line equation Y before correction is y = ax + b and the straight-line equation Y ′ after correction is y = ax + b ′, b ′ becomes

[0043]

## EQU2 ## b ′ = b−R × cos (tan^-1(A)), which is supplemented by the radius R of the tip of the stylus 30.
Straight line Y₁', Y _Two'Is obtained.

The two straight lines Y obtained as described above₁'
 , Y_Two', The intersection P₁Is calculated and the calculated intersection
P₁Is obtained as the edge position of the work 12. Sand
The stylus 30 traces the circular portion 12C of the work 12.
Angle of the workpiece 12 and the stylus 30
Linear expression Y representing the relationship with the amount of displacement of₁'To y = a₁x + b
₁And the edge 12E of the work 12₁Stylus 30
The rotation angle of the work 12 obtained by racing
Linear formula Y representing the relationship with the displacement of the stylus 30_Two'To y = a
_Twox + b_TwoThen the intersection P₁(X₁, Y₁)

[0045]

Equation 3] x ₁ = a _{(b 2 -b 1) / (} a 1 -a 2) y 1 = a 1 x 1 + b 1.

Here, assuming that the radius of the work 12 is r,
Polar coordinate position P ₁ ′ (x ₁ ′) of _one edge portion 12E ₁
, Y ₁ ′)

[0047]

[Number 4] _{x 1 '= (y 1 +} r) cosx 1 y 1' = a _{(y 1 + r) sinx 1} .

The radius r of the work 12 is input to the data processing unit 44 by an operator before measurement.

As described above, the position P ₁ ′ of the edge 12E ₁ on one side of the groove 12G formed in the work 12
(X ₁ ′, y ₁ ′) can be obtained.

In the same procedure, the other edge portion of the groove 12G
12E_TwoPosition P_Two'(X_Two', Y _Two').
That is, the stylus 30 traces the circular portion 12C of the work 12.
Rotation angle and contact of the workpiece 12 obtained by
Linear formula Y representing the relationship with the displacement of the needle 30_ThreeAnd work 1
2 the other edge 12E_TwoIs traced by the stylus 30
Angle of the workpiece 12 and the stylus 30
Linear expression Y representing the relationship with the amount of displacement of_FourAnd this 2
Two linear formulas Y_Three, Y_FourIntersection P of_Two(X_Two, Y_Two)
The polar coordinate position P_Two'(X_Two', Y_Two').

[0051] In this case, the stylus 30 first ride the edge portion 12E ₂ the tapered surface 30B comes into contact with the edge portion 12E _2, followed by the tip portion 30A and a work 12
Since the workpiece 12 is traced by contacting the circular portion 12C, the relationship between the rotation angle of the workpiece 12 and the displacement of the stylus 30 is as shown in the graph of FIG.

After the polar coordinate positions P ₁ ′, P ₂ ′ of both edges 12 E ₁ , 12 E ₂ of the groove 12 G formed on the work 12 are determined as described above, the width (distance between edges) of the groove 12 G is obtained. Calculate w (see FIG. 4).

It should be noted that the width w of the groove 12 G is
12E₁, 12E_TwoPolar coordinate position P ₁'(X₁',
y₁'), P_Two'(X_Two', Y_Two')

[0054]

W = 数 (x ₂ ′ −x ₁ ′) ² + (y ₂ ′ −y
₁ ') ^{2 2} can be calculated.

As described above, the detection of the positions P ₁ ′ and P ₂ ′ of both edges 12 E ₁ and 12 E ₂ of the groove 12 G formed in the work 12 in a series of steps and the measurement of the width w of the groove 12 G are completed. The detection and measurement results are displayed on a display unit (CRT) 46 and printed out from a printer 48 as needed.

As described above, according to the edge position detecting method and the inter-edge distance measuring method of the present embodiment, it is possible to detect the edge position of the groove 12G or the like formed in the work 12,
In addition, the measurement of the distance between edges can be performed at one time.
Thus, detection and measurement can be performed in a short time.
In particular, for a workpiece having a groove formed on the peripheral surface, the measurement time can be drastically reduced.

Further, without using the method of synthesis, the groove 1
Since the width w (distance between edges) of 2G can be directly obtained, an accurate measurement result can be obtained.

In this embodiment, the groove 12G is formed on the outer periphery.
Has been described as an example of detecting the edge position and measuring the groove width of the work 12 on which one piece is formed, but by applying the edge position detection method and the edge-to-edge distance measurement method of the present embodiment. As shown in FIG. 9, the measurement of the width w _P of the protrusion 12P formed on the outer periphery of the work 12 and the detection of the positions of both edges 12E _P and 12E _P of the protrusion 12P can be performed.

In the case where a step 12g is formed in the groove 12G, as shown in FIG.
g of the edge position 12E _g and the width w _{g of the} step 12g
Can also be measured.

Further, as shown in the figure, when a groove 13G or a projection 13P is formed on the inner periphery of the cylindrical work 12, the width of the groove 13G is measured,
It is possible to detect the positions of both edges 13E _G , 13E _G of _G. Similarly, measurement of the width of the projection 13P and projection 1P
It is also possible to measure the positions of both edges 13E _P , 13E _P of 3P.

In the present embodiment, the measurement is performed using the stylus 30 formed in a conical shape. However, as long as the stylus is formed in a tapered shape, another shape may be used. The measurement may be performed using a stylus. For example, the measurement may be performed using a quadrangular pyramid-shaped stylus.

Further, the measurement was carried out using a stylus formed in a spherical shape.
Can also be performed. In this case, the stylus is:
The work 12 is traced. That is, as shown in FIG.
Thus, in the circular portion 12C of the work 12, the stylus 50
Of the workpiece 12 comes into contact with the circular portion 12C of the work 12
The workpiece 12 and trace the edge 12E of the workpiece 12. ₁
In this case, the peripheral surface 50B of the stylus 50
J part 12E₁And traces the workpiece 12.

[0063] Tracing edge portion 12E ₁ of the workpiece 12 by a probe 50 which is formed into a spherical shape in this manner, displacement of the stylus 50 relative to the change in the rotational angle of the workpiece 12 is curved changes. The position of the edge 12E ₁ of the workpiece 12, as in the case of conical stylus 30 described above, the rotation angle of the workpiece 12 which the tip 50A of the stylus 50 a circular portion 12C of the workpiece 12 is obtained by tracing The linear formula Y ₁ representing the relationship with the displacement amount of the stylus 50, the rotation angle of the work 12 and the displacement of the stylus 50 obtained by tracing the edge 12 E ₁ of the work 12 with the peripheral surface 50 B of the stylus 50. calculating a curve equation Y ₂ representing the relationship between the amount, the linear equation Y
It can be determined from the intersection of the ₁ and the curve equation Y _2. Then, the width between the grooves, the width of the protrusion, the width of the step, and the like can be obtained in the same manner as described above by obtaining the distance between the edges from the obtained edge positions.

In the present embodiment, the work 12 is rotated once in one direction to obtain the rotation angle of the work 12 and the measurement data of the displacement of the stylus 30 corresponding to the rotation angle. However, more accurate measurement can be performed by performing measurement in the following manner.

That is, first, the work 12 is rotated once in the direction of arrow A in FIG. 4 to acquire the rotation angle of the work 12 and the measurement data of the displacement of the stylus 30. Next, the workpiece 12 is moved in the opposite direction, that is, the arrow B in FIG.
One rotation in the direction, the rotation angle of the work 12 and the stylus 30
The measurement data of the amount of displacement of is acquired. Then, in order to detect one side position of the edge portion 12E ₁ of the groove 12G is detected using the measured data when rotating in the direction of arrow A the work 12 in FIG. 4, the groove 12G on the other side to detect the position of the edge portion 12E ₂ is detected using the measured data when rotating in the direction of arrow B the work 12 in FIG. 4. That is, the detection is performed using the measurement data of the direction in which the stylus 30 falls into the groove 12G. This is because when the stylus 30 rides over the edge of the groove 12G, there is a possibility that the stylus 30 may be bent.
The edge position is detected by using the measurement data in the direction in which the edge falls. This makes it possible to detect the edge position with higher accuracy.

FIG. 11 is an overall configuration diagram of the second embodiment of the edge position detecting device to which the present invention is applied. The edge position detection device 60 is a device that detects an edge position of a step portion such as a groove formed on the surface of the work 12 and measures a distance between the edges.

As shown in the figure, a work 62 is fixed to a moving table 66 mounted on a main body base 64 by a fixing jig 68.
Is set via The moving table 66 is driven and moved by a traveling device (not shown), and the moving amount is read by the linear scale 70. The work 62 set on the moving table 66 is
The leveling adjustment is performed by a not-shown leveling mechanism provided in the camera.

On the main body base 64, a column 72 is erected vertically. The column 72 is provided with a detector moving table 74, and the detector moving table 74 is moved up and down along the column 72 by being driven by a vertical driving device (not shown). An arm 76 is horizontally supported by the detector moving table 74.
6 is moved in a horizontal direction from the detector moving table 74 by being driven by a horizontal driving device (not shown).

At the tip of the arm 76, a detector 78 is provided. The detector 78 is provided with a stylus 80,
The vertical displacement of the stylus 80 is the linear scale 82.
Read by.

Here, the stylus 80 is formed in a conical shape similarly to the stylus 30 of the first embodiment described above, and its tip is formed in a spherical shape with a predetermined radius. The tip of the stylus 80 and the tapered surface of the
And traces the surface of the work 62.

FIG. 12 shows the edge position detecting device 60 described above.
FIG. 6 is a block diagram of a control device 84 incorporated in the controller. The control device 84 controls each operation of the edge position detection device 60 and performs data processing of each measurement data.

As shown in the figure, a traveling device 86 that rotationally drives the moving table 66 is driven based on a driving signal output from a driver unit 88. A horizontal driving device 90 for moving the detector 78 forward and backward in the horizontal direction.
The vertical driving device 92 for moving the detector moving table 74 in the vertical direction is also driven based on the driving signal output from the driver unit 88.

The moving table 66, which is driven by the traveling device 86 and moves, has a moving amount of the linear scale 7.
0, and the measured data is stored in the data processing unit 9.
4 is output. The displacement of the stylus 80 is measured by a linear scale 82 provided in the detector 78, and the measured data is output to the data processing unit 94.

The data processing unit 94 forms the data on the surface of the work 62 based on the input measurement data of the movement amount of the movement table 66 (= the movement amount of the work 62) and the measurement data of the displacement amount of the stylus 80. The edge position of the step, and
Calculate the distance between edges. Then, the calculation result is displayed on the display unit (CRT) 96 and printed out from the printer 98 as necessary.

Next, a description will be given of a method of detecting an edge position and a method of measuring a distance between edges using the edge position detecting device 60 configured as described above.

Here, the case of measuring the width of the groove 62G formed on the upper surface of the rectangular parallelepiped work 12 as shown in FIG. 13 will be described.

First, the fixing jig 68 is placed on the moving table 66.
The work 62 is set via. Next, leveling adjustment of the set work 62 is performed. Next, the vertical drive device 92 and the horizontal drive device 90 are driven to bring the stylus 80 into contact with the surface of the work 62. Thus, measurement preparation is completed.

Next, the traveling device 86 is driven to drive the work 62.
To move. When the work 62 is moved, the work 62
The stylus 80 in contact with the surface of the workpiece traces the surface of the work 62. At this time, the movement amount of the work 62 is read by the linear scale 70, and the measured data is output to the data processing unit 94. At the same time, the work 62
The amount of displacement of the stylus 80 corresponding to the amount of movement is read by the linear scale 82, and the measured data is output to the data processing unit 94.

The measurement is performed from one end of the work 62 to the other end. The data processing unit 94 stores the input movement amount of the work 62 and measurement data of the displacement amount of the stylus 80 corresponding to the movement amount of the work 62 in the memory.

Since the stylus 80 of the present embodiment is formed in a conical shape like the stylus 30 of the first embodiment, the surface of the work 62 is traced as follows. . That is, in the flat portion 62C of the work 62, the tip 80A of the stylus 80 is
2C, the workpiece 62 is traced, and at the edge portions 62E ₁ and 62E ₂ of the workpiece 62, the tapered surface 80B of the stylus 80 is moved to the edge portions 62E ₁ and 62E of the workpiece 62.
_The workpiece 62 is traced in contact with the workpiece ₂ .

Since the work 62 has a rectangular parallelepiped shape, the displacement of the stylus 80 is zero at the flat portion 62C of the work 62. On the other hand, the edge portions 62E ₁ , 6E
In 2E _2, since the tapered surface 80B of the stylus 80 abuts, the displacement amount of the stylus 80 is slide into changes at a constant rate.

Accordingly, similarly to the case of the columnar work 12 of the first embodiment described above, the measurement data of the displacement of the stylus 80 when the tip 80A of the stylus 80 traces the work 62 and When the boundary point between the tapered surface 80B of the stylus 80 and the measurement data of the displacement of the stylus 80 when the work 62 is traced is obtained, the edge 62 of the work 62 can be obtained.
The positions of E ₁ and 62E ₂ can be obtained. And
The boundary points are linear formulas Y ₁ and Y ₃ representing the relationship between the amount of movement of the work 62 and the amount of displacement of the stylus 80 obtained by the stylus 80 tracing the flat portion 62C of the work 62, and Linear formulas Y ₂ and Y ₄ representing the relationship between the movement amount of the work 62 and the displacement amount of the stylus 80 obtained by the stylus 80 tracing the edge portions 62E ₁ and 62E ₂ are calculated, and the linear formulas are calculated. It can be obtained from the intersection points P ₁ and P _{2 of} Y ₁ and Y ₂ and the linear expressions Y ₃ and Y ₄ .

The linear formulas Y ₁ , Y ₂ , Y ₃ , and Y ₄ correspond to the measurement data of the movement amount of the work 62 and the measurement data of the displacement amount of the stylus 80 as in the first embodiment. From the least squares method.

Since the tip of the stylus 80 of this embodiment is formed in a spherical shape as in the first embodiment, the straight lines Y ₁ , Y ₂ , Y ₃ , Y ₄ to stylus 8
The correction is made by the radius R of the zero point.

Then, the corrected linear expression Y ₁ ′,
From Y ₃ ′ and the linear expressions Y ₂ ′ and Y ₄ ′, the respective intersection points P
₁ , P _2, and the calculated intersection point P ₁ (x ₁ , y ₁ ), P
₂ (x ₂ , y ₂ ) to the edge position 62E _{1 of} the workpiece 62,
Obtaining a coordinate position of 62E _2.

After the coordinate positions P ₁ and P ₂ of both edges 62E ₁ and 62E ₂ of the groove 62G formed in the work 62 are determined as described above, the width (distance between edges) w of the groove 62G is determined. It is calculated (see FIG. 13).

The width w of the groove 62G is determined by the coordinate positions P ₁ (x ₁ , y ₁ ), P ₂ of the edge portions 62E ₁ , 62E _2.
2 (x ₂ , y ₂ )

[0088]

[6] can be calculated by _{w = √ {(x 2 -x} 1) 2 + (y 2 -y 1) 2}.

As described above, the detection of the positions P ₁ and P ₂ of both edges 62E ₁ and 62E ₂ of the groove 62G formed in the work 62 and the measurement of the width w of the groove 62G are completed in a series of steps. The detection and measurement results are displayed on a display unit (CRT) 96 and printed out from a printer 98 as needed.

As described above, according to the method for detecting the edge position and the method for measuring the distance between the edges according to the present embodiment, the grooves 62G and the like formed in the work 62 are similar to the first embodiment described above. Of the edge position and measurement of the distance between edges can be performed at one time. Thus, detection and measurement can be performed in a short time. Further, since the width w (distance between edges) of the groove 62G can be directly obtained without using a combining method, an accurate measurement result can be obtained.

In this embodiment, the edge position 62E of the groove 62G formed on the surface of the rectangular parallelepiped work 62 is set.
₁ , 62E ₂ and the groove width w have been described. However, by applying the edge position detection method and the edge distance measurement method of the present embodiment, the protrusion from the surface of the rectangular parallelepiped work is performed. It is possible to measure the width of the formed protrusion and to detect the positions of both edges of the protrusion. Further, when a step is formed in the groove, it is also possible to detect the edge position of the step and measure the width of the step.

In the present embodiment, the measurement is performed using the stylus 80 formed in a conical shape. However, as long as the stylus is formed in a tapered shape, another shape may be used. The measurement may be performed using a stylus. For example, the measurement may be performed using a quadrangular pyramid-shaped stylus.

Further, as in the case of the first embodiment described above, the measurement can be performed using a stylus formed in a spherical shape. In this case, the stylus is attached to the flat portion 6 of the work 62.
In 2C, the workpiece 62 is traced tip of the stylus is brought into contact with the flat portion 62C of the workpiece 62, in the edge portion 62E ₁ of the workpiece 62, the peripheral surface of the stylus to the edge portion 62E ₁ of the workpiece 62 equivalents The workpiece 62 is traced by contact.

[0094] Tracing edge portion 62E ₁ of the workpiece 62 by a probe which is formed into a spherical shape in this manner, the workpiece 62
The displacement of the stylus changes in a curved line with respect to the change in the amount of movement of the stylus. relationship curve equation Y ₂ representing a, the linear equation Y ₁ where the tip of the stylus flat portion 62C of the workpiece 62 represents a relationship between the displacement amount of the moving amount and the stylus of the workpiece 62 which is obtained by tracing it can be calculated, and determine the position of the edge portion 62E ₁ of the workpiece 62 from the intersection of the linear equation Y ₁ and the curve equation Y _2. Then, the distance between edges is obtained from the obtained edge position, and the groove width, the width of the protrusion, the width of the step, and the like can be obtained in the same manner as in the first embodiment.

In this embodiment, the work 12 is moved once in one direction to obtain the movement amount of the work 62 and the measurement data of the displacement amount of the stylus 80 corresponding to the movement amount. However, as in the first embodiment, the work 62 is moved in the forward and reverse directions to
And the measurement data of the displacement of the stylus 80
By detecting the edge position using the measurement data of the direction in which the stylus 80 falls into the groove 62G, it is possible to detect the edge position with higher accuracy.

In the present embodiment, the measurement is performed by moving the work 62 side. However, the measurement may be performed by moving the stylus 80 side.

According to the edge position detecting method and the edge distance measuring method of the first and second embodiments described above, the measurement data of the displacement amount of the stylus obtained by tracing the surface of the work is obtained. Since the detection of the edge position and the measurement of the distance between the edges are performed by utilizing this, the fine shape measurement can be performed simultaneously with the detection of the edge position and the measurement of the distance between the edges.

[0098]

As described above, according to the present invention,
By tracing the surface of the work once using a stylus whose tip is formed in a tapered shape or a stylus formed in a spherical shape, the edge position of the uneven portion formed on the surface of the work can be detected and detected. The distance between edges can be measured easily and accurately.

[Brief description of the drawings]

FIG. 1 is an overall configuration diagram of a first embodiment of an edge position detection device.

FIG. 2 is a front view showing a configuration of a stylus;

FIG. 3 is a block diagram of a control device incorporated in the edge position detection device.

FIG. 4 is a plan view of a work.

FIG. 5 is an explanatory diagram showing a movement locus of a stylus;

FIG. 6 is a graph showing a relationship between a rotation angle of a work and a displacement amount of a stylus;

FIG. 7 is a graph showing a relationship between a rotation angle of a work and a displacement amount of a stylus;

FIG. 8 is a graph showing a relationship between a rotation angle of a work and a displacement amount of a stylus;

FIG. 9 is a plan view of a work.

FIG. 10 is an explanatory diagram showing a movement trajectory of a stylus formed in a spherical shape.

FIG. 11 is an overall configuration diagram of a second embodiment of the edge position detection device.

FIG. 12 is a block diagram of a control device incorporated in the edge position detection device.

FIG. 13 is a side view of a work.

FIG. 14 is an explanatory diagram of a conventional measurement method.

[Explanation of symbols]

10 ... edge position detecting device, 12 ... workpiece, 12C ... circular section, 12E _1, 12E ₂ ... edge section, 12G ... groove, 1
4 ... body base, 16 ... tilt cross table, 18 ...
Fixing jig, 20 ... rotating scale, 22 ... column, 24 ...
Detector moving table, 26 arm, 28 detector, 30 stylus, 30A tip, 30B taper surface, 32 linear scale, 34 control device, 36 rotary drive device, 38
... Driver unit, 40 ... Horizontal drive unit, 42 ... Vertical drive unit, 44 ... Data processing unit, 46 ... Display unit, 48
... Printer, 50 ... Touch, 50A ... Tip, 50B ... Peripheral surface, 60 ... Edge position detector, 62 ... Work, 62E
₁ , 62E ₂ ... edge portion, 62G ... groove, 64 ... body base, 66 ... moving table, 68 ... fixing jig, 70 ... linear scale, 72 ... column, 74 ... detector moving table, 76
... Arm, 78 ... Detector, 80 ... Stylus, 80A ... Tip, 80B ... Tapered surface, 82 ... Linear scale, 84 ...
Control device, 86: travel device, 88: driver unit, 90: horizontal drive device, 92: vertical drive device, 94:
Data processing unit, 96 ... Display unit, 98 ... Printer

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2F069 AA15 AA31 AA83 CC02 CC05 DD15 GG01 GG33 GG62 HH02 HH14 HH15 JJ07 JJ14 JJ17 LL04 NN16 NN18 QQ07

Claims (16)

[Claims] 1. An edge position detecting method for detecting an edge position of a step formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work, wherein a stylus having a tapered tip is formed. The tip of the stylus is brought into contact with the surface of the work, and the tapered surface of the stylus is brought into contact with the edge of the work. By tracing with the stylus, measuring the rotation angle of the work at the time of tracing, measuring the amount of displacement of the stylus, and tracing the surface of the work with the tip of the stylus abutting. calculates the linear equation Y ₁ the rotation angle of the workpiece obtained to represent the relationship between the displacement amount of the stylus, the edge portion of the workpiece that the tapered surface of the stylus traces in contact with Ri rotation angle of the workpiece and resulting calculates the linear equation Y ₂ representing the relationship between the displacement amount of the stylus, to calculate the intersection of the linear equation Y ₁ and linear equation Y _2, of the intersection point the work An edge position detection method characterized by acquiring as an edge position of a stepped portion. 2. An edge position detecting device for detecting an edge position of a step formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work, wherein a tip is formed in a tapered shape, and a surface of the work is formed. The workpiece is rotated by rotating the work so that the tip of the stylus abuts on the surface of the work, and the tapered surface of the stylus abuts on the edge of the work. Rotation means for tracing the surface of the workpiece with the stylus, rotation angle measurement means for measuring the rotation angle of the work at the time of tracing, displacement amount measurement means for measuring the displacement amount of the stylus at the time of tracing, calculates the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of said workpiece a surface of the workpiece is the tip of the stylus is obtained by tracing in contact, before Calculating the linear equation Y ₂ the tapered surfaces of the edge portion of the workpiece the stylus represents a relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contacts, linear equation Y ₁ and calculates the intersection of the linear equation Y _2, the edge position detecting device comprising a calculation means for obtaining the intersection as an edge position of the stepped portion of the workpiece, in that it consists of. 3. An edge position detecting method for detecting an edge position of a step formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work, wherein a stylus having a spherical tip is formed on a surface of the work. The tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus is brought into contact with the edge of the work to touch the surface of the work. Tracing with a needle, measuring the rotation angle of the work at the time of tracing, measuring the displacement of the stylus, and tracing the surface of the work with the tip of the stylus in contact with the trace. calculates the linear equation Y ₁ representing the relationship between the rotation angle of the workpiece and the displacement amount of the stylus, the word that the circumferential surface of the stylus edge portion of the workpiece is obtained by tracing contacts Calculating a curve equation Y ₂ representing the relationship between the rotational angle of the click and the displacement amount of the stylus, to calculate the intersection of the linear equation Y ₁ and the curve equation Y _2, the stepped portion of the intersecting point the work An edge position detection method characterized by acquiring as an edge position. 4. An edge position detecting device for detecting an edge position of a step formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work, wherein a tip is formed in a spherical shape and abuts on a surface of the work. The stylus is rotated, and the tip of the stylus is brought into contact with the surface portion of the work, and the peripheral surface of the stylus is brought into contact with the edge portion of the work, thereby changing the surface of the work. Rotation means for tracing with the stylus; rotation angle measurement means for measuring the rotation angle of the work at the time of tracing; displacement amount measurement means for measuring the displacement amount of the stylus at the time of tracing; with a surface portion distal of the probe to calculate the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contact, edge of the workpiece Part was calculated curve equation Y ₂ where the peripheral surface of the stylus represents a relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contacts, linear equation Y ₁ and curve formula calculates the intersection of the Y _2, the edge position detecting device for an arithmetic means for obtaining the intersection as an edge position of the stepped portion of the work, characterized in that it consists of. 5. An edge position detecting method for detecting an edge position of a step formed on a surface of a work, wherein a stylus having a tapered tip is in contact with the surface of the work, and The tip of the stylus is brought into contact with the surface of the work, and the tapered surface of the stylus is brought into contact with the edge of the work so that the surface of the work is touched. By tracing with a stylus, measuring the relative movement amount of the work at the time of the tracing, measuring the displacement amount of the stylus, and tracing the surface of the work with the tip of the stylus abutting. calculates the linear equation Y ₁ movement amount of the resulting workpiece to represent the relationship between the displacement amount of the stylus, resulting et by the tapered surface of the stylus edge portion of the workpiece is traced in contact A linear equation Y ₂ representing the relationship between the moving amount and the displacement amount of the stylus of the workpiece is calculated to be, to calculate the intersection of the linear equation Y ₁ and linear equation Y _2, stepped portion of the intersecting point the work Edge position detection method, wherein the edge position is obtained as an edge position. 6. An edge position detecting device for detecting an edge position of a step formed on a surface of a work, a stylus having a tapered tip and abutting against a surface of the work, And the stylus are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the tapered surface of the stylus is brought into contact with the edge of the work to reduce the surface of the work. Moving means for tracing with the stylus, moving amount measuring means for measuring a relative moving amount of the work at the time of tracing, displacement amount measuring means for measuring a displacement amount of the stylus at the time of tracing, It calculates the linear equation Y ₁ representing the relationship between the moving amount and the displacement amount of the stylus of said workpiece a surface of the workpiece is the tip of the stylus is obtained by tracing in contact, the work The edge portion tapered surface of the stylus is in contact to calculate the linear equation Y ₂ representing the relationship between the displacement amount of the moving amount and the stylus of the workpiece obtained by tracing, linear equation Y ₁ and the straight line calculating an intersection of the formula Y _2, the edge position detecting device for an arithmetic means for obtaining the intersection as an edge position of the stepped portion of the work, characterized in that it consists of. 7. An edge of a step formed on a surface of a work
In the edge position detecting method for detecting a position, a stylus having a spherical tip is brought into contact with a surface of a work, and the work and the stylus are relatively moved, and
Contact the tip of the stylus on the surface of the
At the edge of the work, contact the peripheral surface of the stylus
Trace the surface of the work with the stylus, and determine the relative movement amount of the work at the time of the trace
Measure and measure the amount of displacement of the stylus. Trace the tip of the stylus against the surface of the workpiece.
The amount of movement of the workpiece and the stylus
Linear expression Y representing the relationship with the amount of displacement of₁And calculate
The edge of the work is brought into contact with the peripheral surface of the stylus.
The amount of movement of the workpiece obtained by tracing
Curve formula Y representing the relationship with the displacement of the stylus _TwoAnd calculate
Then, linear formula Y₁And the curve formula Y_TwoCalculate the intersection with
Is obtained as the edge position of the step of the work.
An edge position detection method that is a feature. 8. An edge of a step formed on a surface of a work
In an edge position detection device that detects the position, a stylus whose tip is formed in a spherical shape and abuts against the surface of the work
And relatively moving the work and the stylus,
Contact the tip of the stylus on the surface of the
At the edge of the work, contact the peripheral surface of the stylus
Moving means for tracing the surface of the work with the stylus; and a relative movement amount of the work during the tracing.
A moving amount measuring means for measuring, and a variable for measuring a displacement amount of the stylus during the tracing.
Position measuring means, and the tip of the stylus is in contact with the surface of the work and traced
The amount of movement of the workpiece and the stylus
Linear expression Y representing the relationship with the amount of displacement of₁And calculate
The edge of the work is brought into contact with the peripheral surface of the stylus.
The amount of movement of the workpiece obtained by tracing
Curve formula Y representing the relationship with the displacement of the stylus _TwoAnd calculate
And the straight line Y₁And the curve formula Y_TwoCalculate the intersection with
A function of acquiring the intersection as the edge position of the step of the work
Edge position detecting device, comprising:
Place. 9. A method for measuring a distance between two edges formed on an outer peripheral surface or an inner peripheral surface of a cylindrical or cylindrical workpiece, wherein the tip has a tapered tip. The needle is brought into contact with the surface of the work, the work is rotated, and the tip of the stylus is brought into contact with the surface of the work, and the tapered surface of the stylus is brought into contact with the edge of the work, thereby forming the work. The surface of the workpiece is traced with the stylus, the rotation angle of the work at the time of the trace is measured, and the displacement of the stylus is measured. The tip of the stylus contacts the first surface of the work. calculates the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing Te, a first tapered surface of the edge portion the stylus of the workpiece is brought Touch Calculating the linear equation Y ₂ where the rotational angle of the workpiece obtained by the race represents the relationship between the displacement amount of the stylus, to calculate the intersection point P ₁ between the linear equation Y ₁ and linear equation Y _2, wherein calculates the linear equation Y ₃ that the second surface portion of the workpiece tip of the stylus representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing in contact, the work Calculating a linear equation Y ₄ representing the relationship between the rotation angle of the work and the displacement of the stylus obtained by tracing the second edge of the stylus with the tapered surface of the stylus in contact therewith; calculating an intersection point P ₂ between Y ₃ and linear equation Y _4, and calculates the distance between the intersection P ₁ and the intersection point P _2, acquires the distance as the distance between the formed edge on the surface of the workpiece A method for measuring the distance between edges. 10. An edge-to-edge distance measuring device for measuring a distance between two edges formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work, wherein a tip is formed in a tapered shape, A stylus in contact with the surface of the work, the tip of the stylus is brought into contact with the surface of the work, and the tapered surface of the stylus is brought into contact with the edge of the work, Rotation means for tracing the surface of the workpiece with the stylus, rotation angle measurement means for measuring the rotation angle of the work at the time of tracing, displacement amount measurement means for measuring the displacement amount of the stylus at the time of tracing, calculating the linear equation Y ₁ representing the relationship between the amount of displacement of the rotational angle and the stylus of the workpiece obtained by the first surface portion of the workpiece is the tip of the stylus to trace contacts Both calculated linear equation Y ₂ representing the relationship between the first tapered surface of the edge portion the stylus rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contacts of said workpiece And the intersection P of the straight line formula Y ₁ and the straight line formula Y _2
1 is calculated, and a linear expression Y representing the relationship between the rotation angle of the work and the displacement of the stylus obtained by tracing the second surface portion of the work with the tip of the stylus in contact with the tip.
₃ and a linear expression representing the relationship between the rotation angle of the work and the displacement of the stylus obtained by tracing the second edge portion of the work with the tapered surface of the stylus in contact with the second edge. calculates the Y _4, the linear equation Y ₃ and linear equation Y
₄ to calculate the intersection point P ₂ between, by calculating the distance between the intersection P ₁ and the intersection point P _2, the arithmetic means for obtaining the distance as the distance between the surface formed edges of the workpiece, An edge-to-edge distance measuring device, characterized in that: 11. A method for measuring a distance between two edges formed on an outer peripheral surface or an inner peripheral surface of a cylindrical or cylindrical work, wherein a stylus having a spherical tip is formed on the work. The tip of the stylus is brought into contact with the surface portion of the work, and the peripheral surface of the stylus is brought into contact with the edge portion of the work, thereby bringing the surface of the work into contact with the surface of the work. Tracing with the stylus, measuring the rotation angle of the work at the time of the tracing, measuring the displacement of the stylus, and tracing the first surface of the work with the tip of the stylus in contact with the first surface portion calculates the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by the peripheral surface of the first edge portion of the workpiece the stylus is in contact with trace To do Calculating a curve equation Y ₂ representing the relationship between the displacement amount of the stylus and the rotational angle of the workpiece more obtained, to calculate the intersection point P ₁ between the linear equation Y ₁ and the curve equation Y _2, first the workpiece with the second surface portion to calculate the linear equation Y ₃ representing a relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by the tip of the stylus traces in contact, the said workpiece 2 of the peripheral surface of the edge portion wherein the stylus is in contact to calculate the curve equation Y ₄ representing the relationship between the displacement amount of the rotation angle and the stylus of the workpiece obtained by tracing, the linear equation Y ₃ calculating an intersection point P ₂ between the curve equation Y _4, and calculates the distance between the intersection P ₁ and the intersection point P _2, to obtain the distance as the distance between the formed edge on the surface of the workpiece Characteristic method for measuring the distance between edges. 12. An edge-to-edge distance measuring device for measuring a distance between two edges formed on an outer peripheral surface or an inner peripheral surface of a columnar or cylindrical work, wherein a tip is formed in a spherical shape and is formed on a surface of the work. The stylus to be contacted, the work is rotated, and the tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus is brought into contact with the edge of the work, thereby changing the surface of the work. Rotation means for tracing with the stylus; rotation angle measurement means for measuring the rotation angle of the work at the time of tracing; displacement amount measurement means for measuring the displacement amount of the stylus at the time of tracing; with the first surface portion is the tip of the stylus to calculate the linear equation Y ₁ representing the relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing in contact, the Calculating a curve equation Y ₂ to the first edge portion of the over-click peripheral surface of the stylus represents a relationship between the rotation angle and displacement amount of the stylus of the workpiece obtained by tracing contacts, calculating an intersection point P ₁ between the linear equation Y ₁ and the curve equation Y _2, the rotation angle of the workpiece obtained and by a second surface portion of the workpiece is the tip of the stylus to trace contact probe as well as the calculated linear equation Y ₃ representing a relationship between the displacement amount, the peripheral surface of the second edge portion of the workpiece the stylus is touching the angle of rotation of the obtained workpiece by tracing contacts calculating a curve equation Y ₄ representing the relationship between the displacement amount of the needle, to calculate the intersection point P ₂ between the linear equation Y ₃ and the curve equation Y _4, and calculates the distance between the intersection P ₁ and the intersection point P ₂ Computing means for acquiring the distance as a distance between edges formed on the surface of the workpiece. Edge distance measuring apparatus characterized by comprising. 13. A method for measuring a distance between two edges formed on a surface of a work, comprising: a step of contacting a stylus having a tapered tip with a surface of the work; And the stylus are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the tapered surface of the stylus is brought into contact with the edge of the work to reduce the surface of the work. Tracing with the stylus, measuring the relative movement amount of the work at the time of the trace, and measuring the displacement amount of the stylus, the tip of the stylus contacts the first surface of the work. calculates the linear equation Y ₁ the amount of movement of the workpiece obtained by tracing in contact to represent relationships between the displacement amount of the stylus, the first tapered surface of the edge portion the stylus of the workpiece Contact and train Calculating the linear equation Y ₂ representing the relationship between the displacement amount of the moving amount and the stylus of the obtained workpiece by over scan, calculating the intersection point P ₁ between the linear equation Y ₁ and linear equation Y _2, calculates the linear equation Y ₃ representing a relationship between the displacement amount of the moving amount and the stylus of the workpiece obtained by the tip of the second surface portion of the stylus traces in contact of the workpiece, the calculating the linear equation Y ₄ tapered surface of said second edge portion of the workpiece the stylus represents a relationship between the moving amount and the displacement amount of the stylus of the workpiece obtained by tracing contacts, straight calculating an intersection point P ₂ between the formula Y ₃ and linear equation Y _4, and calculates the distance between the intersection P ₁ and the intersection point P _2, the distance as the distance between the formed edge on the surface of the workpiece A method for measuring a distance between edges, which is obtained. 14. An inter-edge distance measuring device for measuring a distance between two edges formed on a surface of a work, comprising: a stylus having a tip formed in a tapered shape and being in contact with the surface of the work; The work and the stylus are relatively moved, and the tip of the stylus is brought into contact with the surface portion of the work, and the tapered surface of the stylus is brought into contact with the edge portion of the work so that Moving means for tracing the surface with the stylus; moving amount measuring means for measuring a relative moving amount of the work at the time of tracing; displacement amount measuring means for measuring a displacement amount of the stylus at the time of tracing If, Tomo calculating the linear equation Y ₁ representing the relationship between the moving amount and the displacement amount of the stylus of the workpiece obtained by the tip of the first surface portion of the stylus traces abuts the workpiece Calculates the linear equation Y ₂ representing the relationship between the first moving amount and the displacement amount of the stylus of the workpiece tapered surface of the edge portion wherein the stylus is obtained by tracing contacts of said workpiece calculates the intersection point P ₁ between the linear equation Y ₁ and linear equation Y _2, the second surface portion of the workpiece is the tip of the stylus touch the amount of movement of the workpiece obtained by tracing contacts wherein to calculate the linear equation Y ₃ representing a relationship between the displacement amount of the needle, the tapered surface of said second edge portion of the workpiece the stylus and the moving amount of the workpiece obtained by tracing contacts calculating the linear equation Y ₄ representing the relationship between the displacement amount of the stylus, to calculate the intersection point P ₂ between the linear equation Y ₃ and linear equation Y _4, calculates the distance between the intersection P ₁ and the intersection point P ₂ And calculating the distance as a distance between edges formed on the surface of the work. Edge distance measuring device comprising a stage, in that it consists of. 15. A method for measuring a distance between two edges formed on a surface of a work, comprising: contacting a stylus formed in a spherical shape with a surface of the work; Are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus is brought into contact with the edge of the work to trace the surface of the work with the stylus. Measuring the relative movement amount of the work at the time of tracing, measuring the displacement amount of the stylus, and tracing the first surface portion of the work with the tip of the stylus abutting thereon. calculates the linear equation Y ₁ movement amount of the resulting workpiece to represent the relationship between the displacement amount of the stylus, the peripheral surface of the first edge portion of the workpiece the stylus traces in contact with Obtained by Curve formula Y ₂ representing the relationship between the amount of movement of the work and the amount of displacement of the stylus
Is calculated, to calculate the intersection point P ₁ between the linear equation Y ₁ and the curve equation Y _2, the amount of movement of the workpiece obtained by the tip of the second surface portion of the stylus traces abuts the workpiece And the displacement of the stylus is calculated to calculate the linear formula Y _3, and the movement amount of the work obtained by tracing the second edge portion of the work with the peripheral surface of the stylus abutting. calculating a curve equation Y ₄ which represent the relationship between the displacement amount of the stylus, to calculate the intersection point P ₂ between the linear equation Y ₃ and the curve equation Y _4, the distance between the intersection P ₁ and the intersection point P ₂ And calculating the distance as an inter-edge distance formed on the surface of the workpiece. 16. An inter-edge distance measuring device for measuring a distance between two edges formed on a surface of a work, comprising: a stylus formed in a spherical shape and in contact with the surface of the work; Are relatively moved, and the tip of the stylus is brought into contact with the surface of the work, and the peripheral surface of the stylus is brought into contact with the edge of the work to trace the surface of the work with the stylus. A moving device for measuring a relative moving amount of the work at the time of tracing; a moving amount measuring device for measuring a moving amount of the stylus at the time of tracing; with the first surface portion is the tip of the stylus to calculate the linear equation Y ₁ representing the relationship between the displacement amount of the moving amount and the stylus of the workpiece obtained by tracing in contact, of said workpiece Curve formula Y ₂ where the peripheral surface of the first edge portion and the stylus indicates the relationship between the amount of movement and the displacement amount of the stylus of the workpiece obtained by tracing contacts
Is calculated, to calculate the intersection point P ₁ between the linear equation Y ₁ and the curve equation Y _2, the amount of movement of the workpiece obtained by the tip of the second surface portion of the stylus traces abuts the workpiece calculating the linear equation Y ₃ representing a relationship between the displacement amount of the stylus and the movement amount of the second of said workpiece circumferential surface of the edge portion wherein the stylus is obtained by tracing contacts of said workpiece the calculated curve equation Y ₄ representing the relationship between the displacement amount of the stylus, to calculate the intersection point P ₂ between the linear equation Y ₃ and the curve equation Y ₄ and,
Calculating means for calculating a distance between the intersection points P ₁ and P ₂ and obtaining the distance as a distance between edges formed on the surface of the workpiece. apparatus.