JP2001341060A - Corrective roller for facing device and facing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent chips from being produced by the cutting of the surface of a lapping surface plate when a facing machining is performed so as to prevent the service period of the lapping surface plate from being shorten and to protect an environment. SOLUTION: In a corrective roller for facing device 13 used for a facing device to correct the surface of the lapping surface plate 9, the corrective roller makes flat the surface and engraves a groove in the surface at a specified position while rotating pressingly against the surface of the lapping surface lathe 9.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus that can face-process a lap surface plate to a desired flat state on a lapping machine and measure the shape.

[0002]

2. Description of the Related Art In recent years, as electronic devices such as piezoelectric devices have become smaller, lighter and more sophisticated, demands for high precision and high quality in the manufacturing process have been increasing. Along with this, planar accuracy and finished surface roughness after polishing in the manufacturing process have become important issues.

In the polishing process, the flatness and surface roughness of the surface of the material to be polished are governed by the flatness of the lapping plate and the abrasive used.

[0004] In particular, the flatness of the lapping plate is stably maintained in order to transfer the flatness of the lapping plate to the polished material and obtain a desired flatness on the polished material surface. It is important to manage.

As a method for maintaining and managing the flatness of the lap surface plate, a flattening method using a correction ring and a method using a facing device are widely used. Hereinafter, a method of correcting a plane using a correction ring and a method of using a facing device will be sequentially described.

[0006] The method of correcting the flat surface of a lap surface plate using a correction ring starts with measuring the shape of the lap surface plate.
Measure the plane accuracy of the lap surface plate using a displacement measuring device, etc.
The position of the correction ring is determined from the obtained measurement result.

If it is determined from the measurement result that the center of rotation of the lap plate is depressed, the correction ring is rotated toward the outer peripheral side of the lap plate to correct the surface of the lap plate to a flat surface. When the rotation center side of the lap surface plate is convex, the correction ring is moved toward the rotation center to correct the lap surface surface.

[0008] This correction method involves many factors due to the skill of the worker, and therefore, the man-hour, accuracy and the like for each worker vary. Further, it is extremely difficult to correct a state accompanied by undulation that moves up and down when the lap plate is rotated.

On the other hand, the method of correcting the surface of the lap plate by the facing device is to slightly cut the surface of the lap plate at the same time as the cutting tool moves in accordance with the guide surface having good straightness. To a highly accurate flat surface. Here, FIG. 2 is a diagram showing a configuration of a conventional facing device. In the figure, 1 is a guide rail guide, 2 is a fixed bar material, 3 is a parallel support, 4
Is a parallel adjustment table, 5 is a reference pin, 6 is a tool holder, 7 is a displacement measuring device, 8 is an adjustment screw, 9 is a lapping plate, 10 is a lapping machine body, 11 is a cutting tool, and 18 is a slide portion. .

A method of correcting the inclination of the lap surface plate by the conventional facing device having such a configuration will be described below. First, the guide surface of the facing device is adjusted and fixed at a position substantially parallel to the surface of the lap surface plate 9.

Next, the cutting tool 11 is fixed to the tool holder 6 of the facing device. The cutting edge of the cutting tool 11 is adjusted and fixed to a height such that the lapping plate 9 is slightly cut, and the lapping plate 9 is rotated at a predetermined speed, and at the same time, using a feed mechanism (not shown) of the facing device. Tool holder 6
Is moved at a desired constant speed to cut the surface of the lap platen. When the cutting tool 11 has passed over the lapping plate 9, the feed of the tool holder 6 is stopped, and the cutting tool 11 is moved to the lapping plate 9 using a cutting bit height adjustment mechanism (not shown).
Up to a level where it can be sufficiently separated from the surface of the.

Next, a stylus type or non-contact type displacement measuring device 7 is mounted on the facing device. The measurement probe of the displacement measuring device 7 is not the above-mentioned cutting range, but the lap surface plate 9.
Is set at the position to measure the surface of the lapping machine on the opposite side from the center of rotation of.

The surface accuracy of the lapping plate 9 after the flattening by the facing device is determined by the linear accuracy of the guide surface for guiding the cutting tool 11 and the accuracy of the function of correcting the inclination of the guide surface with respect to the lapping plate. Normally, facing devices require high rigidity and high precision in the structure for guiding the cutting tool, making it difficult to reduce the size.Facing devices that integrate with a lapping machine to perform high-precision facing processing are usually used. General.

There is also a lapping machine without a facing device, and there is a method in which the facing process is performed by a facing device different from the lapping machine.

[0015]

When the surface condition of the lap surface plate 9 is corrected by using the above-described facing device, the cutting waste is generated by cutting the lap surface plate 9 with the cutting tool 11. appear. Also, burrs are generated on the surface of the lap plate 9 after cutting.

Conventionally, as a countermeasure against cutting chips and burrs, a suction port of a vacuum cleaner has been conventionally disposed near the lap surface plate 9 and the cutting tool 11 to collect cutting chips.

Furthermore, by rotating the lapping plate 9 after the cutting process and simultaneously rotating the correction ring on the lapping plate 9 to supply the slurry, the burrs can be set in the horizontal direction or the burrs can be rotated. A method was taken to promote the shedding.

However, these methods not only increase the time required for repairing the lap platen 9, but also shorten the life of the lap platen by cutting the lap platen. Also, the generation of cutting chips should be avoided in terms of environmental protection.

Further, since the fixing bar member 2 of the conventional facing device is often used in a holding structure, when the cutting tool 11 is moved to a region where the cutting of the lap plate 9 is completed, the fixed bar member 2 is fixed. When a telescopic bar material is used as 2, the flatness of the surface of the lap surface 9 is equal to that of the bar material when the fixed bar material 2 has completely extended to the region where cutting of the surface of the lap surface 2 is completed. It is not possible to face the correct plane, and for this correction, provide a slide part 18 as a cutting bit vertical movement axis to correct the deflection, operate it, or use a correction ring according to the operator's empirical rule. Therefore, it was necessary to supplement the planar accuracy, which also required skilled skills.

The present invention has been made in order to solve the above-mentioned problems, and realizes a stable and stable lapping process that does not rely on skilled skills by simply and highly accurately facing the lapping plate on the machine. The purpose is to do.

[0021]

To achieve the above object, a first aspect of the present invention (corresponding to claim 1) is a correction roller for a facing device used in a facing device for correcting the surface of a lap platen. The correction roller is a correction roller for a facing device, which flattens the surface while stamping and rotating the surface while pressing and rotating the surface of the lap platen, and engraving a groove at a predetermined position on the surface. is there.

The second invention (corresponding to claim 2)
The present invention is characterized in that the rotary column has a substantially rotary column shape, and the rotary column surface of the rotary column is pressed against the surface of the lap platen.

The third invention (corresponding to claim 3)
Has the shape of a substantially truncated cone, and is pressed against the surface of the lap platen at the truncated cone surface of the truncated cone.

The fourth invention (corresponding to claim 4)
The present invention is characterized in that the present invention is characterized in that the present invention is characterized in that at least one row of substantially convex sections in cross section is provided on the rotary columnar surface portion or the truncated conical surface portion.

The fifth invention (corresponding to claim 5)
The present invention is characterized in that the present invention is characterized in that the present invention is characterized in that the present invention is characterized in that it comprises a plurality of substantially convex ridges provided at equal pitches on the rotating column surface or the truncated cone surface.

The sixth invention (corresponding to claim 6)
The above-mentioned correction roller for facing device of the present invention, a fixed bar material, a tool holder for fixing the correction roller for facing device, a tool holder movably fixed on the fixed bar material, and the fixed bar material. Provided on one side,
A parallel support base rotatably fixed to the fixed bar member, a parallel adjustment base provided on the other of the fixed bar members and separable from the fixed bar member, and the parallel adjustment base A first inclination adjustment mechanism provided above, which adjusts the inclination of the correction roller for the facing device by adjusting the inclination of the fixed bar member, and a first inclination adjustment mechanism provided immediately below the first inclination adjustment mechanism. A second tilt adjustment mechanism that performs the tilt adjustment finer than the first tilt adjustment mechanism, wherein the second tilt adjustment mechanism has a plurality of blocks having different thicknesses and a plurality of blocks having different thicknesses. Wherein the fine adjustment is performed by a combination of the above blocks.

Further, a seventh aspect of the present invention (corresponding to claim 7)
Is a facing method using the facing roller or the facing device according to any one of claims 1 to 6.

In the present invention as described above, the linear projections on the surface of the correction roller are transferred to the surface of the lap plate while the correction roller is in contact with the lap plate with a constant pressing force, instead of the cutting tool used in the past. By forming the grooves, generation of cutting chips is eliminated. Also, unlike the cutting with a cutting tool, no burrs are generated, so that it is also possible to eliminate measures against burrs by a correction ring after the surface of the lap surface plate is corrected.

[0029]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIG.
This will be described with reference to the following.

(Embodiment 1) FIG. 1A is a front view of a correcting roller for a facing device according to Embodiment 1 of the present invention, and FIG. 1B is a side view. In the figure, reference numeral 13 denotes a correction roller for a facing device,
5 is a correction roller shaft, 16 is an engraved projection, and 1
7 is a roller support.

FIG. 3 is a configuration diagram of a facing device using the compensation roller for the facing device according to the first embodiment of the present invention. As shown in FIG.
The guide rail guide 1 is fixed with screws (not shown), and the slide portion 18 of the guide rail guide 1 is provided with a correction roller 13 according to the embodiment of the present invention, which is provided with a guide that moves in the vertical direction. Tool holder 6 for holding
And a displacement measuring device 7 capable of measuring the shape of the surface of the lap plate 9
Is attached by a fixing jig.

On the lapping machine main body 10, a parallel support 3 and a parallel adjusting table 4 for supporting and fixing the fixed bar 2 at an arbitrary position are arranged, and support both ends of the fixed bar 2 respectively. The parallel support 3 supporting one of the fixed bar members 2 has a reference hole formed in a direction orthogonal to the longitudinal direction. The parallel adjustment table 4 arranged on the opposite side of the parallel support table 3 has an adjustment screw 8 for adjusting the inclination. Here, the adjusting screw 8 of the present embodiment is the first screw of the present invention.
This corresponds to a tilt adjusting mechanism.

A reference hole having the same size as the reference hole formed in the fixed bar 2 is formed in the parallel support 3, and the reference pin 5 is fitted into the reference hole and the reference hole of the fixed bar 2. As a result, the fixed bar 2 rotates around the reference pin 5, so that the end of the fixed bar 2 opposite to the reference pin 5 moves substantially up and down. Fixed bar 2 and parallel support 3 at any position
Screw.

A groove into which the fixing bar 2 is inserted is formed in the parallel adjustment table 4, and the fixing bar 2 is held by fixing screws 12 from both sides of the groove. Using this configuration, the inclination of the guide rail guide 1 is measured with the displacement length measuring device 7 so as to have a desired inclination with respect to the lap surface plate 9, and the inclination is adjusted by the parallel support 3 and the parallel adjustment stand 4. Then, the guide rail guide is fixed to the parallel support base 3 and the parallel adjustment base 4.

In this state, the correction roller 13 supported by the roller support 17 is mounted on the correction tool holder 6 mounted on the slide portion 16 of the guide rail guide.

The operation of the facing device using the compensation roller for the facing device according to the present embodiment having the above-described configuration is performed by rotating the lap surface plate 9 and lapping the slide portion 16 of the guide rail guide 1 by the motor. The lapping plate 9 is driven to be slightly longer than the lap surface width of one side radius of the platen 9, and the lapping platen 9 is formed into an arbitrary shape by the correction roller 13.

At this time, as shown in FIG. 1, the correction roller 13 of the present invention rotates around the correction roller shaft 15 while making surface contact with the surface of the lap platen 9, and rotates on the lap platen 9. In order to do this, the surface of the lap plate 9 is pressed. Thereby, the surface of the lap surface plate 9 can be processed with high precision without cutting chips.

The engraving projection 16 provided so as to go around the outer circumference of the correction roller 13 engraves a concave groove on the surface of the lap surface plate 9 when the correction roller 13 rotates.
As a result, the lap platen 9 retains an appropriate amount of slurry,
Alternatively, the lapping plate is provided with a temporary hang-up place for polishing debris generated by the polishing process of the object to be polished, so that polishing can be performed efficiently.

When the surface of the lap plate 9 formed in an arbitrary shape by the correction roller 13 is measured by the displacement measuring device 7, the opposite lap plate 9 formed by the correction roller 13 is measured.
By measuring the surface of the lap surface plate 9 having a radius of one side, shape measurement can be performed with high accuracy, and the measured shape is fed back to the facing process, so that high-precision facing can be performed.

In the present embodiment, the engraved projection 1
6 has a triangular cross-section as shown in FIG. 1, but is not limited to this, and other ridges, rounded ridges,
It may be polygonal. In short, it is only necessary that the shape be such that a desired groove can be imprinted on the lap surface plate 9 with the rotation of the correction roller 13. In addition, the number of the engraved projections 16 is one, but may be plural. Further, a plurality of engraved projections 16 may be arranged at equal intervals.

(Embodiment 2) FIG. 4 is a configuration diagram of a facing device using a compensation roller for facing device according to Embodiment 2 of the present invention. As shown in the figure, the same or corresponding portions as those in FIG. 1 are denoted by the same reference numerals, and description thereof is omitted. Reference numeral 14 denotes a cone correction roller which is a correction roller for a facing device according to the second embodiment of the present invention.

The cone correction roller 14 according to the present embodiment
The correction roller 1 according to the first embodiment has a basic configuration.
3, except that the outer diameter is not a cylinder (substantially rotating column) but a truncated cone.

The length of the cone correction roller 14 in the direction of the rotation axis is set to a size approximating the working width of the lap plate 9 in one radial direction from the rotation center of the lap plate 9, and
5 mm longer each before and after the size of the use area in one radial direction.

On the surface of the cone correcting roller 14, a convex and linear engraved convex portion 16 at a constant pitch is formed over the entire length of the cone correcting roller 14. The engraved convex portion 16 of the cone correction roller 14 may be (a) completed by one rotation on the outer periphery or (b) may be continuous in a spiral shape, but there is no particular limitation on which one is used. FIG. 4 shows the case (a) as an example.

According to the cone correction roller 14 of the present embodiment having such a configuration, the cone correction roller 1
Since the entire length of 4 can sufficiently correct the surface of the lap plate 9, it is not necessary to move the cone correction roller 14 along the guide rail guide 1.

The method of correcting the relative inclination angle between the cone correction roller 14 and the surface of the lap plate 9 at this time is the same as that of the first embodiment. The angle θ between the center axis and the surface of the lap surface plate 9 is 30 degrees in FIG.

In this embodiment, it is necessary that the angle θ can be obtained by properly adjusting the angle θ. Therefore, the parallel adjustment table 4 has a structure in which at least one block gauge 19 can be arranged. Here, the block gauge 19 of the present embodiment corresponds to the second tilt adjusting mechanism of the present invention.

Adjustment screw 8 arranged at end of fixed bar 2
The parallelism between the fixed bar material 2 and the lapping plate 9 is adjusted by taking in and out, and the adjustment accuracy is governed by the pitch and lead of the screw. Furthermore, in order to maintain the rigidity and the like of the facing device itself, screws having a small diameter and a small pitch cannot be adopted. For this reason, the adjusting screw 8 is necessarily used for coarse movement adjustment.

Therefore, in the present embodiment, the block gauge 19 is disposed immediately below the adjusting screw 8, and the tilt angle is finely adjusted while changing the thickness of the block gauge.
As an example of using a block gauge for fine adjustment of the inclination angle, assuming that the distance from the center of the reference pin 5 of the fixed bar member 2 to the center axis of the adjustment screw 8 is 500 mm and the diameter of the lap plate 9 is 12 inches. When the flatness of the lap plate 9 is corrected by 1 μm, the following is performed.

The diameter of the lap plate 9 is 12 inches, and the lap plate 9 is to be rotated.
The required correction angle per inch is determined. From the correction angle, a dimension required for correcting the inclination of the fixed bar 2 is obtained.
In the case of this calculation example, it is obtained as follows.

[0051]

Tan ^-1 θ = tan ^-1 ｛0.001 (mm) /
(6 (inch) x 25.4 (mm)) {θ} 0.000376 [deg]

[0052]

H = θ × 500 (mm) where θ = 0.000376

[0053]

H = 0.188 (mm) However, in the above equation (Equation 2), H is a dimension required for fine adjustment of 1 μm.

As in the above calculation example, 2 μm, 3 μm
A block gauge 19 having dimensions calculated in advance, such as μm and 4 μm, is prepared, and the cone correction roller 14 is formed using the block gauge 19 corresponding to the result obtained by measuring the flatness of the lap platen 9. Is corrected, and the inclination of the lap surface plate 9 is corrected. At this time, it goes without saying that the fixed bar member 2 and the parallel adjustment table 4 have a mechanism for connecting and fixing the fixed bar member 2 so that the fixed bar member 2 is not lifted by the pressing force at the time of facing. In the above description, the block gauge has been described as being used only for the facing device equipped with the cone correction roller 14 of the second embodiment. However, the present invention is not limited to this. The present invention may be applied to a facing device equipped with one correction roller 13, and it is possible to perform highly accurate correction as described above.

In this embodiment, the engraved projection 1
6 may be triangular in cross section, rounded ridge, or polygonal shape. In short, it is only necessary that the lap plate 9 has a shape capable of imprinting a desired groove with the rotation of the cone correction roller 14.

As described above, since the present invention is a method by pressing using a correction roller, the surface of the lap plate is not scraped off during the facing process of the lap plate to prevent the generation of debris. The longer the life period, the more efficient use of resources in terms of environmental resistance.

Further, since the processing time for burrs is eliminated, the cycle time of the lap operation time is also reduced. The facing device is made smaller and lighter so that it can be easily attached to and detached from the lapping machine, so that the lapping plate does not move to another lapping machine.

In this way, inexpensive and high-precision facing can be easily performed, and the surface shape of the formed lap plate can be measured. By measuring the radial direction opposite to the formed radial direction, measurement can be performed with double precision. Since it is possible, shape management can be performed with high accuracy.

[0059]

As described above, according to the present invention, it is possible to realize the facing process without generating cutting chips obtained by shaving the surface of the lap surface plate.

[Brief description of the drawings]

FIG. 1 is a front view and a side view of a correction roller of the present invention.

FIG. 2 is a front view showing a conventional example of a facing device.

FIG. 3 is a front view showing the configuration of the first embodiment of the present invention.

FIG. 4 is a front view showing the configuration of a second embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Guide rail guide 2 Fixed bar material 3 Parallel support stand 4 Parallel adjustment stand 5 Reference pin 6 Tool holder 7 Displacement measuring device 8 Adjustment screw 9 Lapping platen 10 Lapping machine body 11 Cutting tool 12 Fixing screw 13 Correction roller 14 Conical correction Roller 15 Correction roller shaft 16 Engraved projection 17 Roller support 18 Slide 19 Block gauge

Claims (7)

[Claims] 1. A correcting roller for a facing device used for a facing device for correcting the surface of a lap surface plate, wherein the correction roller flattens the surface while pressing and rotating the surface of the lap surface plate. And a groove for engraving a groove at a predetermined position on the surface. 2. The correction roller for a facing device according to claim 1, wherein the correction roller has a substantially rotary column shape and is pressed against the surface of the lap plate at the rotary column surface of the rotary column. 3. The correction roller for a facing device according to claim 1, wherein the correction roller has a substantially frusto-conical shape, and is pressed against the surface of the lap platen at the frusto-conical surface of the frustum. 4. The facing according to claim 2, further comprising at least one row of substantially convex ridges provided on the rotary columnar surface portion or the truncated conical surface portion. Correction roller for equipment. 5. The facing device according to claim 2, further comprising a plurality of substantially convex ridge portions provided at an equal pitch provided on the rotating column surface or the truncated cone surface. Correction roller. 6. A fixing roller for a facing device according to claim 1, a fixed bar member, and a fixing bar member for fixing the correction roller for a facing device, the fixing roller member being movably fixed on the fixed bar member. A tool holder, provided on one of the fixed bar members, a parallel support base rotatably fixed to the fixed bar member, and the fixed bar member provided on the other of the fixed bar members. A parallel adjustment table that is separably disposed, and a first inclination adjustment mechanism that is provided on the parallel adjustment table and adjusts the inclination of the correction roller for the facing device by adjusting the inclination of the fixed bar member. The first tilt adjustment mechanism is provided directly below the first tilt adjustment mechanism.
At least a second tilt adjustment mechanism that performs the tilt adjustment more finely than the tilt adjustment mechanism, wherein the second tilt adjustment mechanism has a plurality of blocks having different thicknesses. A facing device wherein the fine adjustment is performed by a combination. 7. A facing method using the compensation roller or facing device for a facing device according to claim 1. Description: