JP2001337246A - Optical waveguide parts, method for manufacturing optical waveguide parts, connecting member, optical parts, method for connecting optical waveguide parts and optical element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To easily connect two optical waveguide parts in such a manner that grooves for optical waveguides respectively disposed at these parts are connected to each other. SOLUTION: The first optical waveguide parts 17 which are formed with the groove 12 for the optical waveguide on a substrate 11 and are formed with recessed parts 13 for positioning in the predetermined position on the surface of the substrate 11 and second optical waveguide parts 18 of similar constitution are connected to each other by using pins 14 in such a manner that the groove 12 for the optical waveguide of the first optical waveguide parts 17 and the groove 12 for the optical waveguide of the first optical waveguide parts 18 are connected to each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide component mainly used for optical communication and the like, a connection method thereof, an optical element, and the like.

[0002]

2. Description of the Related Art In recent years, optical communication systems using wavelength-division multiplexing transmission and bidirectional transmission have been added to public communication and computer networks using optical communication having a wide band for the purpose of high speed and high functionality. Is infiltrating.

At present, the optical communication system is being expanded from a trunk system to a subscriber system for general homes and offices. In each home and office, the optical subscriber unit (ON
U, optical network unit) is required, but the ONU converts an optical signal sent from the station into an electric signal and receives it, or converts an electric signal transmitted from the subscriber into an optical signal and converts it into an optical signal. An optical module having a function of sending out to an optical fiber is essential. It is indispensable to reduce the cost of the optical module in order to spread the optical fiber to the subscriber system in the future.

As a method of efficiently using an optical fiber and transmitting a large amount of information, a wavelength multiplexing method (WDM, wav,
eleventh division multiple
xing) is promising. This is to transmit optical signals of a plurality of wavelengths through one optical fiber and increase the amount of information in proportion to the number of wavelengths used.

A general optical module for WDM is Si
An optical waveguide formed on a substrate, an interference film filter (wavelength filter), a transmission laser diode (LD), a reception
An LD light power monitoring photodiode (PD) is a main component.

[0006] The optical waveguide has a structure in which a core having a relatively higher refractive index than the periphery is embedded in a clad. Light propagates while being confined in a core having a high refractive index. By patterning the core into a circuit, a function of splitting and synthesizing light can be realized.

[0007] The multiplexed laser light is separated by an interference film filter via an optical waveguide.

Conventionally, such a module has been assembled by combining a large number of components such as lenses and prisms and positioning with high precision. However, the number of components is reduced by using an optical waveguide, and the size is reduced by integration. Became possible.

[0009]

However, such an optical module has the following problems in terms of cost and productivity.

One is that the optical waveguide device is expensive. In particular, optical connection has difficulty in positioning and the like, and it is necessary to connect optical waveguides using an expensive device in order to actually use a module.

Another problem is that a step of incorporating an interference film filter as shown in FIG. 7 is required. The interference film filter 75 has an important function of separating wavelengths. The interference film filter 75 is formed by laminating a dielectric oxide film on polyimide on a multi-layer. A groove 73 is previously formed on the substrate 71 by dicing, and the polyimide with a film is inserted into the groove 73 and fixed by adhesion. It is being done.

Although an interference film filter originally has a high wavelength selectivity (isolation ratio), its performance varies due to various factors when assembled in a groove. For example, the incident angle to the filter, the position of the reflected light, and the like slightly change due to the warp or inclination of the polyimide substrate inside the groove, and as a result, the wavelength separation performance and the transmission loss fluctuate. Further, the optical power after passing through the filter greatly varies depending on the positional accuracy at the time of groove processing.

[0013] Therefore, in order to reduce this, an extremely high-precision assembly process is required, and the tact time becomes longer,
An increase in equipment costs is inevitable. Therefore, at present, there is a problem that the interference film filter is not suitable for mass production and it is difficult to reduce the cost.

In view of the above problems, the present invention mainly provides an optical waveguide component having a new configuration as a base component of an optical module having an additional function such as wavelength separation, and a connection method for connecting the optical waveguide component. Suggestions,
An optical waveguide component capable of easily connecting the optical waveguide groove of the partner optical waveguide component to its own optical waveguide groove while easily connecting the optical waveguide groove to the partner optical waveguide component, and an optical waveguide component thereof It is an object of the present invention to provide a manufacturing method, a connecting member and an optical component for connecting two optical waveguide components, a method for connecting two optical waveguide components, and an optical element.

[0015]

According to a first aspect of the present invention (corresponding to claim 1), a groove for an optical waveguide is formed on a substrate, and a groove on the surface of the substrate is provided. An optical waveguide component having a positioning concave or convex portion formed at a predetermined position.

According to a second aspect of the present invention (corresponding to claim 2), the concave portion or the convex portion is formed on a surface of the substrate on which the optical waveguide groove is not formed. 1 is an optical waveguide component according to the present invention.

In a third aspect of the present invention (corresponding to claim 3), the optical waveguide groove and the concave portion or the convex portion are collectively formed by a mold having a convex portion or a concave portion on the surface. An optical waveguide component according to the first or second aspect of the present invention.

A fourth aspect of the present invention (corresponding to claim 4) is an optical waveguide in which a groove for an optical waveguide is formed on a substrate and a concave or convex portion for positioning is formed on an end surface of the substrate. A method for manufacturing a waveguide component, comprising: forming a groove for an optical waveguide on a material substrate; and forming the concave portion or the convex portion on the surface of the material substrate, wherein the concave portion of the optical waveguide component material is formed. A method of manufacturing an optical waveguide component, comprising manufacturing the optical waveguide component by cutting a shape portion or the convex shape portion.

A fifth invention (corresponding to claim 5) is characterized in that it is used for connecting two optical waveguide components according to any one of the first to third inventions. It is a connecting member.

According to a sixth aspect of the present invention (corresponding to claim 6), a connection is provided in which a predetermined plate portion is provided, and the plate portion is fitted with the concave portion or the convex portion of each of the two optical waveguide components. The connecting member according to the fifth aspect of the present invention, wherein a connecting convex portion or a connecting concave portion is formed.

A seventh aspect of the present invention (corresponding to claim 7) is an optical component for connecting two optical waveguide components according to any one of the first to third aspects of the present invention, The two optical waveguide components are each an optical waveguide component in which the concave portion is formed at an end surface portion of the substrate at a portion where the groove for the optical waveguide is formed. An optical component, wherein the optical component is fitted into the concave portion provided on the end face portion.

An eighth aspect of the present invention (corresponding to claim 8) is that the two optical waveguide parts according to any one of the first to third aspects of the present invention are replaced with the optical waveguide component according to the fifth or sixth aspect of the present invention. A method for connecting optical waveguide components, wherein the optical waveguide grooves of the two optical waveguide components are connected to each other using the connecting member of (1).

According to a ninth aspect of the present invention (corresponding to claim 9), two optical waveguide components according to any one of the first to third aspects of the present invention are replaced with an optical component according to the seventh aspect of the present invention. And connecting the optical waveguide components so that the optical waveguide grooves of the two optical waveguide components are connected to each other.

A tenth aspect of the present invention (corresponding to claim 10) is:
An optical element, wherein two optical waveguide components according to any one of the first to third aspects of the present invention are connected.

According to an eleventh aspect of the present invention (corresponding to claim 11),
An optical component is disposed between each of the optical waveguide grooves of the two optical waveguide components, and optically connects the optical waveguide grooves of the two optical waveguide components to each other. An optical element according to a tenth aspect of the present invention.

According to a twelfth aspect of the present invention (corresponding to claim 12),
An optical component is arranged between each of the optical waveguide grooves of the two optical waveguide components.
Is an optical element according to the present invention.

[0027]

(Embodiment 1) Hereinafter, an embodiment of the present invention will be described with reference to the accompanying drawings. Note that the parts denoted by the same reference numerals in the drawings indicate the same parts.

FIG. 1 is an explanatory diagram of the configuration and connection of the optical waveguide component according to the first embodiment of the present invention.

As shown in FIG. 1A, first, a groove-shaped optical waveguide groove 12 is formed on a surface of a first substrate 11 made of glass or transparent resin by molding using a mold (not shown).
A concave portion 13 for connection is formed, and a first optical waveguide component 17 is manufactured. Similarly, the second optical waveguide component 18
Is prepared.

Next, as shown in FIG. 1B, the first optical waveguide component 17 and the second optical waveguide component 18 are connected. Second
Regarding the positioning of the optical waveguide component 18, the pin 14 is installed in the connection concave portion formed by molding, and the pin 14 is inserted into the first optical waveguide component 17 and fixed. At this time, since the concave portions of the first and second optical waveguide components 17 and 18 and the optical waveguide groove 12 are relatively located at the same position, positioning can be performed with high accuracy.

Thus, the optical waveguide groove 12 formed on the first optical waveguide component 17 and the second optical waveguide component 18
It can be connected to the optical waveguide groove 12 formed thereon with almost no displacement. Finally, a UV resin is applied to the optical waveguide groove forming surfaces of the first and second optical waveguide components 17 and 18 to fill the grooves, and then the UV resin in the grooves is cured by irradiating ultraviolet rays. You. By using a UV resin having a higher refractive index than the first and second optical waveguide components 17 and 18, the UV resin in the groove functions as an optical waveguide core.

In this embodiment, UV resin is used as the core material of the optical waveguide. However, the present invention is not limited to this.
For example, a thermosetting resin may be used. Further, it is desirable from the viewpoint of production that the connection concave portion of the substrate is formed by molding as described in this embodiment, but the present invention is not limited to this, and it may be formed by etching as needed.

In this embodiment, the pins are used for connection. However, the present invention is not limited to this. It is sufficient that the second optical waveguide component has a connection projection at the time of connection. Also,
Even when a pin is used, the concave portions of the first optical waveguide component and the second optical waveguide component are abutted with each other, and a pin is fitted into both the concave portions from above, so that the first optical waveguide component and the second optical waveguide component are connected. May be connected.

Further, in this embodiment, a rectangular cross-sectional groove is shown as the connection concave portion, but the present invention is not limited to this, and may be, for example, a V-groove or a semi-circular cross-sectional groove. Further, in the present embodiment, the concave portion for connection is formed on the upper surface of the substrate, but is not limited to this, and may be formed on another surface of the substrate.

In this embodiment, the concave portion is formed in the optical waveguide component. However, the present invention is not limited to this. As shown in FIG. 8, the convex portion 83 is formed and connected to the optical waveguide components 87 and 88. You may. In this case, two optical waveguide components 8
A plate-like connecting member (substrate) 81 having a concave portion 84 for fitting into a convex portion 83 formed on each of the optical waveguide components 7 and 88 and connecting the two optical waveguide components 87 and 88 to each other. The parts 87 and 88 will be connected.

In the present embodiment, the length of the concave portion is shorter than that of the substrate. However, the present invention is not limited to this, and the length may be the same as that of the substrate.

(Embodiment 2) FIG. 2 is an explanatory view of a method for manufacturing an optical waveguide component according to Embodiment 2 of the present invention.

First, as shown in FIG. 2A, the surface of a first substrate 21 made of glass or transparent resin is connected to an optical waveguide groove 22 by molding using a mold (not shown). The concave portion 23 is formed, and an optical waveguide component is manufactured. Next, as shown in FIG. 2B, the substrate is cut so as to cross the groove 22 and the concave portion 23 for the optical waveguide. This allows the substrate to be
Is divided into a second optical waveguide component 28 and a second optical waveguide component 28.

Next, the first optical waveguide component 27 and the second optical waveguide component 28 are connected. The connection method is the same as that described in the first embodiment, and will not be described here. Finally, a UV resin is applied to the optical waveguide groove forming surfaces of the first and second optical waveguide components 27 and 28 to fill the grooves, and then the UV resin in the grooves is cured by irradiating ultraviolet rays. You. First and second optical waveguide components 27, 2 as UV resin
By using a material having a refractive index higher than 8,
The UV resin in the groove functions as an optical waveguide core.

It should be noted that in the above-described second embodiment, FIG.
An example in which the substrate 21 provided with the concave portion 23 is cut to produce two optical waveguide components as shown in FIG.
Instead of the concave portion 23, as shown in FIG.
The substrate 91 provided with 3 may be cut to manufacture two optical waveguide components 97 and 98.

Further, in the above-described second embodiment, FIG.
FIG. 10A shows an example in which two optical waveguide components are manufactured by cutting the substrate 21. As shown in FIG. 10, the substrate 101 (107, 108) provided with the concave portion 103 is provided.
Are prepared, and the two optical waveguide components 10
When the parts 7 and 108 are abutted with each other, the convex parts 104 can be fitted into the concave parts 103 provided in the two optical waveguide parts 107 and 108 to connect the two optical waveguide parts 107 and 108. A connecting member formed of a plate provided with
Alternatively, two substrates provided with 3 may be connected.

Similarly, two substrates each having a convex portion instead of the concave portion 103 are prepared, and when the two optical waveguide components are brought into contact with each other, they are provided on the two optical waveguide components. A connecting member composed of a plate provided with a concave portion, which can be connected to the convex portion, and which can connect the two optical waveguide components, is also provided, and the convex portion is provided using the connecting member. May be connected to each other.

(Embodiment 3) FIG. 3 shows an optical waveguide component and a connection member according to Embodiment 3 of the present invention.

First, an optical waveguide groove 32 and a concave portion 33 for connection are formed on the surface of a first substrate made of glass or transparent resin by molding using a mold (not shown). The optical waveguide component 37 is manufactured. Similarly, a second optical waveguide component 38 is manufactured.

Next, the first optical waveguide component 37 and the second optical waveguide component 38 are connected. As for the positioning of the optical waveguide component, a substrate 31 having a convex portion 34 on the surface is separately prepared, and the convex portion 34 is aligned with the concave portion 33 for connection, and fixed, whereby positioning can be performed with high precision. Thereby, the first
The optical waveguide groove 32 formed on the optical waveguide component 37 and the optical waveguide groove 3 formed on the second optical waveguide component 38
2 can be connected with almost no displacement.

In this embodiment, the connection recess is formed on the bottom surface of the substrate. However, the present invention is not limited to this, and the connection recess may be formed on another surface of the substrate. However, if the concave portion for connection is formed on the bottom surface (back surface) of the substrate, there is an advantage that the connection becomes easy when another optical element is inserted between the optical waveguide components.

In this embodiment, a rectangular cross-sectional groove is shown as a connecting concave portion. However, the present invention is not limited to this.
For example, a V-groove or a semicircular cross-sectional groove may be used. Further, in the present embodiment, the concave portion is formed in the optical waveguide component. However, the present invention is not limited to this, and a substrate having a concave portion on the surface may be used as a connecting member having a convex portion formed on the optical waveguide component. Also, the connection substrate may be formed by molding. Further, in the present embodiment, the length of the concave portion and the length of the convex portion are shorter than that of the substrate. However, the present invention is not limited to this, and may be the same length as the substrate.

(Embodiment 4) FIG. 4 shows an optical waveguide component, a connection member and the like according to Embodiment 4 of the present invention.

First, as shown in FIG. 4A, a mold (not shown) is formed on the surface of a first substrate made of glass or transparent resin.
A groove 43 for the optical waveguide and a concave portion 43 for connection are formed on the same surface as the optical waveguide groove 42 of the substrate by molding with the use of, and a first optical waveguide component 47 is manufactured. Similarly, the second optical waveguide component 48 is manufactured. Next, UV resin is applied to the optical waveguide groove forming surfaces of the first and second optical waveguide components 47 and 48 to fill the grooves.

Next, the first optical waveguide component 47 and the second optical waveguide component 48 are connected. Regarding the positioning of the optical waveguide component, a substrate having a convex portion 44 is formed on the surface of another substrate 41, and the convex portion 44 is aligned with the concave portion 43 for connection, and fixed, whereby positioning can be performed with high precision. This allows
Optical waveguide groove 4 formed on first optical waveguide component 47
2 and the optical waveguide groove 42 formed on the second optical waveguide component 48 can be connected with almost no displacement.

After that, by irradiating ultraviolet rays, U
The V resin is cured. By using a UV resin having a higher refractive index than the first and second optical waveguide components 47 and 48 and the substrate 41 having the convex portion 44 on the surface, the UV resin in the groove functions as an optical waveguide core. I do. At this time, the substrate 41 having the convex portions 44 on the surface as shown in FIG. 4B functions as an upper clad.

In this embodiment, a rectangular cross-sectional groove is shown as a connecting recess, but the present invention is not limited to this. For example, a V-groove or a semicircular cross-sectional groove may be used. In the present embodiment, the concave portion is formed in the optical waveguide component. However, the present invention is not limited to this, and a convex portion may be formed in the optical waveguide component, and a substrate having a concave portion on the surface for connection may be formed. Further, the connection substrate may be formed by molding. Further, in the present embodiment, the length of the concave portion and the length of the convex portion are shorter than that of the substrate. However, the present invention is not limited to this, and may have the same length as the substrate.

(Embodiment 5) FIG. 5 is an explanatory view of the configuration and connection of an optical waveguide component according to Embodiment 5 of the present invention.

First, on the surface of a first substrate 51 made of glass or transparent resin, a concave portion 53 for connection with an optical waveguide groove 52 is formed by molding using a mold (not shown). Is manufactured. Similarly the second
A concave portion 53 for connecting to the optical waveguide groove 52 is formed on the surface of the substrate, and a second optical waveguide component 58 is manufactured. The concave portion 53 is on the extension of the optical waveguide groove 52,
Formed on the end face of the substrate.

Next, the first optical waveguide component 57 and the second optical waveguide component 58 are connected. An optical component 55, for example, an optical fiber is installed in the connection concave portion 53 of the second optical waveguide component 58, and the other end of the optical component 55 is connected to the first optical waveguide component 57.
The positioning can be performed with high precision by inserting the concave portion 53 into the concave portion 53. Thus, the optical waveguide groove 52 formed on the first optical waveguide component 57 and the optical waveguide groove 52 formed on the second optical waveguide component 58 can be connected with almost no displacement.

In this embodiment, an optical fiber is used as an optical component. However, a ferrule or the like may be used as long as the external dimension accuracy is secured.

(Embodiment 6) FIG. 6 is an explanatory view of the configuration and connection of an optical waveguide component according to Embodiment 6 of the present invention.

First, on the surface of a first substrate 61 made of glass or transparent resin, a concave portion 63 for connection with an optical waveguide groove 62 is formed by molding using a mold (not shown). Is manufactured. Similarly the second
A concave portion for connection with the optical waveguide grooves 66 and 69 is formed on the surface of the substrate, and a second optical waveguide component 68 is manufactured.

Next, as shown in FIG. 6A, an optical thin film such as a thin film wavelength filter 65 or a reflection mirror is formed on the end face of the first optical waveguide component 67 by using a thin film forming process. As the film material, a metal may be used, but it is preferable to form a dielectric material such as TiO ₂ or SiO ₂ in multiple layers because the transmission loss is small. In addition, as a thin film forming process, UV
It is desirable that the deposition be performed without damaging the resin. In particular, ion-assisted deposition capable of forming an optical thin film having excellent characteristics and reliability is desirable.

Next, the first optical waveguide component 67 and the second optical waveguide component 68 are connected. The connection method is the same as that described in the first embodiment, and will not be described here. Lastly, a UV resin is applied to the optical waveguide groove forming surfaces of the first and second optical waveguide components to fill the groove, and then the UV resin in the groove is cured by irradiating ultraviolet rays. By using a UV resin having a higher refractive index than the first and second optical waveguide components, the UV resin in the groove functions as an optical waveguide core.

Thus, the optical element shown in FIG. 6B is completed.

For example, in FIG. 6B, the thin-film wavelength filter 65 transmits light having a wavelength of 1.3 μm and has a wavelength of 1.55 μm.
It shall have a specification of reflecting light of μm. Optical waveguide 6
6. External light having a wavelength of 1.3 μm and a wavelength of 1.55 μm
Is transmitted, the light transmitted through the optical waveguide 66 is split by the thin-film wavelength filter 65, and the light having a wavelength of 1.55 μm is reflected by the filter and then passes through the optical waveguide 69 in reverse. On the other hand, light having a wavelength of 1.3 μm is
After passing through 5, the light passes through the optical waveguide 62. That is, FIG.
The optical element (b) has a function of wavelength-separating light in the optical fiber.

In the present embodiment, the optical waveguide has been described by taking as an example an optical element having a two-branch pattern and having the function of wavelength separation, but the present invention is not limited to this. Can be applied to all patterns. Further, in the present embodiment, the respective optical waveguide components are separately formed, but the optical waveguide component having the optical waveguide groove and the concave portion formed therein may be cut and divided.

The number of optical waveguide components is not limited as long as it is two or more. Also, the number of optical components provided between the optical waveguide components is not limited as long as it is one or more. In this embodiment, the optical thin film is directly coated. Since light cannot be confined like a waveguide in an optical component, if the optical component is thick, light leakage increases and the loss increases, but if an optical thin film is formed directly on the end face of the optical waveguide, the optical component can be thinned. Therefore, it is more advantageous in performance.

However, depending on the tolerance of the coupling loss, a plate-shaped optical component such as a wave plate or an isolator may be attached to the end face of the optical waveguide component instead of forming the thin film directly. In any case, it becomes possible to incorporate an optical component more easily than inserting an optical filter into a conventional groove.

The uneven portions may be used for positioning for mounting light and electronic components such as light emitting elements, light receiving elements, electrode wiring, and semiconductor elements. By using this, for example, the alignment of the optical waveguide core with the LD or PD can be performed with high accuracy, and a low-loss connection can be made.

As described in the above embodiment, the optical waveguide component of the present invention has a configuration capable of mass production.
Very useful in cost and productivity.

[0068]

As is apparent from the above description, the present invention provides a method for easily connecting an optical waveguide groove of a partner optical waveguide component to its own optical waveguide groove, and Waveguide component that can be easily connected to the optical waveguide component, a method of manufacturing the optical waveguide component, a connection member and an optical component for connecting the two optical waveguide components, and a connection between the two optical waveguide components A method and an optical element can be provided.

Therefore, it is possible to easily mass-produce an optical module having an optical component such as a wavelength filter at low cost.

[Brief description of the drawings]

FIG. 1 is a diagram showing an optical waveguide component according to a first embodiment of the present invention.

FIG. 2 is a diagram showing an optical waveguide component according to a second embodiment of the present invention.

FIG. 3 is a diagram showing an optical waveguide component according to a third embodiment of the present invention.

FIG. 4 is a diagram showing an optical waveguide component according to a fourth embodiment of the present invention.

FIG. 5 is a diagram showing an optical waveguide component according to a fifth embodiment of the present invention.

FIG. 6 is a diagram showing an optical waveguide component according to a sixth embodiment of the present invention.

FIG. 7 is a diagram showing a conventional optical module.

FIG. 8 is a diagram showing an optical waveguide component according to the first embodiment of the present invention.

FIG. 9 is a diagram showing an optical waveguide component according to a second embodiment of the present invention.

FIG. 10 is a diagram showing an optical waveguide component according to a second embodiment of the present invention.

[Explanation of symbols]

11, 21, 31, 41, 51, 61, 71 Substrate 12, 22, 32, 42, 52, 62, 66, 69, 7
2, 76, 79 Optical waveguide groove 13, 23, 33, 43, 53, 63 Concave part 14, 64 pin 34, 44 Convex part 55, 65 Optical component 17, 27, 37, 47, 57, 67 First light guide Waveguide component 18, 28, 38, 48, 58, 68 Second optical waveguide component

 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Masanori Iida 1006 Kadoma Kadoma, Kadoma City, Osaka Prefecture Inside Matsushita Electric Industrial Co., Ltd. Terms (reference) 2H037 AA01 BA01 BA11 BA23 BA24 CA36 DA06 DA12 2H047 KA03 LA12 PA28 QA05 TA43

Claims (12)

[Claims] 1. An optical waveguide, wherein a groove for an optical waveguide is formed on a substrate, and a concave portion or a convex portion for positioning is formed at a predetermined position on the surface of the substrate. parts. 2. The optical waveguide component according to claim 1, wherein the concave portion or the convex portion is formed on a surface of the substrate on which the optical waveguide groove is not formed. 3. The optical waveguide groove and the concave portion or the convex portion are collectively formed by a mold having a convex portion or a concave portion on the surface. Optical waveguide components. 4. A method of manufacturing an optical waveguide component having a groove for an optical waveguide formed on a substrate and a concave or convex portion for positioning formed on an end surface of the substrate, comprising: An optical waveguide groove is formed on the top,
The optical waveguide component is manufactured by cutting the concave shape portion or the convex shape portion of the optical waveguide component material in which the concave shape or the convex shape is formed on the surface of the material substrate. Of manufacturing an optical waveguide component. 5. A connecting member used for connecting two optical waveguide components according to claim 1 or 2. 6. A predetermined plate portion is provided, and said plate portion has
The connection member according to claim 5, wherein a connection protrusion or a connection recess that fits with the recess or the protrusion of each of the optical waveguide components is formed. 7. An optical component for connecting two optical waveguide components according to claim 1 or 2, wherein each of the two optical waveguide components is an end face of the substrate and An optical waveguide component in which the concave portion is formed in a portion where an optical waveguide groove is formed, wherein the optical waveguide component is fitted in the concave portion provided in the end face portion of the two optical waveguide components. Optical components. 8. The two optical waveguide parts according to claim 1 or 2 are connected to each other using the connecting member according to claim 5, wherein the optical waveguide grooves of the two optical waveguide parts are connected to each other. A method for connecting optical waveguide components. 9. The two optical waveguide components according to claim 1 or 2, and the optical component according to claim 7, wherein the optical waveguide grooves of the two optical waveguide components are connected to each other. A method for connecting optical waveguide components. 10. An optical element to which two optical waveguide components according to claim 1 or 2 are connected. 11. An optical component disposed between each of the optical waveguide grooves of the two optical waveguide components and optically connecting the optical waveguide grooves of the two optical waveguide components. The optical element according to claim 10, wherein: 12. The optical element according to claim 10, wherein an optical component is disposed between each of the optical waveguide grooves of the two optical waveguide components.