JP2001337122A - Tester for vibrator characteristics - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrator characteristic tester, enabling carrying of a vibrator in/out between parallel flat plate counter electrodes without using a bush, capable of certainly holding the vibrator piece, even if influence of static electricity is present, and having the electrodes which can minimize the opportunity for a delivery. SOLUTION: This vibrator characteristic tester has the electrodes 1 and 2 for electrically connecting a vibrator 3, such as a quartz oscillator or a ceramic vibrator, for inspect a vibration characteristic in a manufacturing process or an inspection process for the vibrator 3. The tester has at least a pair of the electrodes 1 and 2 disposed opposite to each other, an electrode movable means capable of moving at least one electrode 1 of the electrodes 1 and 2, and a suction mechanism, which enables the movable electrode 2 to suck and hold the vibrator 3. The suction mechanism carries either carries in or carries out the vibrator 3 between the electrodes 1 and 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vibrator characteristic test including electrodes for electrically connecting the vibrators and inspecting vibration characteristics in a process of manufacturing or inspecting a quartz vibrator or a ceramic vibrator. Related to the device.

[0002]

2. Description of the Related Art Quartz resonators and ceramic resonators are generally manufactured as follows. First, a crystal piece or a ceramic piece (hereinafter, referred to as a vibrator piece) is cut out from a crystal or baked, and then polished to predetermined external dimensions and thickness. Subsequently, a metal is vapor-deposited on the vibrator piece to form an electrode, and the amount of vapor deposition is adjusted to finely adjust the vibration frequency of the vibrator.

[0003] At this time, if a large frequency adjustment is performed by metal deposition, the deposition time will be prolonged and the productivity will decrease. In addition, the crystal impedance may increase abnormally, and the secular change due to the peeling of the deposited metal may occur. There is a risk. Therefore, as shown in FIG. 5, the vibrator piece 23 before metal deposition is inserted between the parallel plate opposing electrodes 21 and 22 in which a plurality of electrodes are arranged to face each other.
It is widely practiced to connect a CI meter or a network analyzer to the devices 1 and 22 to measure and sort out vibration characteristics (vibration frequency, crystal impedance, etc.).

[0004]

In the system for measuring the vibration frequency of a vibrator piece by using the parallel plate opposing electrodes, a vibrator piece is carried between the parallel plate opposing electrodes to measure the vibration characteristics, and after the measurement is completed. Must take out the transducer piece. Conventionally, as shown in a side view 6A and a perspective view 6B, after a vibrator piece 26 is put in a positioning mechanism such as a bush 24 made of an insulating material, as shown in a side view 6C, Is often carried in between the electrodes by sliding, and the upper electrode 25 is brought close to the vibrator piece to perform measurement.

However, in recent years, the vibration frequency of the vibrator piece has increased, and in particular, a quartz crystal having a frequency exceeding 100 MHz has often been observed. Such a vibrator piece has a thickness of about 10 μm. Extremely thin. When the bush 24 is slid with respect to such a vibrator piece using the bush 24, the vibrator piece may fit between the bush 24 and the lower electrode 27. Also,
As described above, since the vibrator piece is extremely thin, there is also a problem that the vibrator piece is chipped only by contact with the bush.

Further, the vibrator piece having a thickness of about 10 μm as described above is thin and very light at the same time, and easily floats and is lost even with a small amount of static electricity. Or it sticks to an unexpected place and cannot be removed. In particular, there are three cases when the vibrator piece is carried into the bush, when the upper electrode is brought closer to the vibrator piece after the bush in which the vibrator piece is inserted is moved between the electrodes, and when the vibrator piece is removed from the bush. That is, when the vibrator piece is transferred from one place to the next place, or when something comes close to the vibrator piece, loss or sticking is likely to occur. Further, even in a state where no static electricity is generated on the vibrator piece, static electricity often occurs due to friction when the vibrator piece is put in the bush and moved between the electrodes. Various measures have been taken to discharge static electricity, such as humidification of the atmosphere and neutralization of static electricity by an ionizer, but these measures have been insufficient, and it has been difficult to improve the production yield. An object of the present invention is to carry out and discharge a vibrator piece between parallel plate opposed electrodes without using a bush, and to securely hold the vibrator piece even under the influence of static electricity to minimize the chance of delivery. It is an object of the present invention to provide an oscillator characteristic test apparatus provided with an electrode which can be used as a test piece.

[0007]

In order to achieve the above object, a vibrator characteristic testing apparatus according to the present invention electrically connects the vibrator in a manufacturing or inspection process of a quartz vibrator or a ceramic vibrator. A vibrator characteristic test apparatus including an electrode for inspecting vibration characteristics, wherein the electrode is at least a pair of opposed electrodes, and at least one of the electrodes is a movable movable electrode. Movable means, an adsorption mechanism for adsorbing and holding the vibrator on the movable electrode, and a structure in which the vibrator is loaded or unloaded between the pair of electrodes by the adsorption mechanism. In the vibrator characteristic test apparatus, the vibrator is sucked by the movable electrode, the vibrator is carried in between the pair of electrodes, the vibration characteristics are measured, and the vibrator is discharged from the carry-in when performing the discharge. Up to the movable electrode.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the apparatus according to the present invention will be described below with reference to the drawings. FIG. 1 is a perspective view showing a first embodiment of an oscillator characteristic test apparatus according to the present invention. In this embodiment, a cylindrical upper electrode 1, a lower electrode 2 having a similar outer shape, a vibrator element 3, a carrier 4, a vibration characteristic tester 7,
It consists of a vacuum pump 8. The transducer piece 3 to be measured is initially held on the carrier 4. The upper electrode 1 is a movable electrode, and can be moved up and down by a vertical mechanism (electrode moving means) not shown. On the lower surface of the upper electrode 1, that is, on the surface facing the vibrator element 3, micro holes 5 are provided. The micro holes 5 are connected to a vacuum pump 8 by a pipe 6, and these constitute an adsorption mechanism. . The upper electrode 1 and the lower electrode 2 are connected to a vibration characteristic tester.
The vibrator piece 3 previously placed in the carrier 4
The vibrator element 3 can be moved below the upper electrode 1 by moving the carrier 4 by a horizontal moving mechanism (not shown).

In this embodiment, a vibration test of a vibrator piece is performed as follows. 2A to 2E are schematic diagrams for explaining the operation of the device. First, as shown in FIG. 2A, the upper electrode 1 is raised, and a space sufficiently larger than the thickness of the carrier 4 is formed between the upper electrode 1 and the lower electrode 2. Next, FIG.
As shown in B, the carrier 4 is moved during the above-mentioned interval, and is stopped when the vibrator piece 3 to be measured is just below the upper electrode 1. Subsequently, as shown in FIG. 2C, the upper electrode 1 descends as far as not to contact the vibrator piece 3, and operates the vacuum pump 8 to suck air from the micro holes 5 provided in the upper electrode 1. Transducer piece 3
To adsorb. Subsequently, as shown in FIG. 2D, the upper electrode 1 rises while adsorbing the vibrator piece 3, and the carrier 4 moves from between the upper electrode 1 and the lower electrode 2. Further, as shown in FIG. 2E, the upper electrode 1 adsorbs the vibrator piece 3 while the lower electrode 2
Falls until the interval with becomes a predetermined value,
In this state, the vibration characteristic is measured by the vibration characteristic tester 7.

The electrode spacing at the time of measuring the vibration characteristics is a value determined in advance by experiments so as to be optimal for measuring the vibration characteristics. In addition, a device suitable for measuring the characteristics of the vibrator piece, such as a CI meter or a network analyzer, is selected as the characteristic tester. Subsequently, after raising the upper electrode, the above steps are reversed, and the vibrator piece 3 is placed on the carrier 4. By repeating the above steps from the beginning, the next transducer piece is measured. The carrier on which the vibrator piece having been measured is placed may be the carrier on which the vibrator piece was placed before the measurement, or another carrier. Also,
A plurality of transducer pieces may be placed on the carrier.

According to the above configuration, since the positioning of a bush or the like is not used when the vibrator piece is carried in and out between the upper and lower electrodes, the vibrator is fitted between the bush and the lower electrode. In addition, the disadvantage that the vibrator is chipped when hitting the bush is completely eliminated. Further, in the present invention, after the vibrator piece is once attracted from the carrier to the upper electrode, the vibrator piece is still attracted to the upper electrode until the measurement is completed and the vibrator piece is returned to the carrier. During this time, the vibrator piece is not transferred from one to another, so that there is no problem that the vibrator piece is not transferred due to the floating or sticking of the vibrator piece which is likely to occur at the time of transfer.

FIGS. 3A to 3D are schematic diagrams for explaining the operation of the second embodiment of the oscillator characteristic test apparatus according to the present invention. In the embodiment described with reference to FIGS. 1 to 2E, the carrier 4 is moved between the upper electrode 1 and the lower electrode 2. In this embodiment, the position of the carrier 13 is fixed, and instead, the upper electrode 9 moves not only up and down but also left and right, and after being moved onto the vibrator piece 11 to be measured, the upper electrode 9 is moved from a vacuum source (not shown). By guiding a vacuum to the minute holes 12 of the upper electrode 9, the vibrator piece 11 is sucked as in the first embodiment (FIG. 3A). Subsequently, the upper electrode 9 once rises while adsorbing the vibrator piece 11, and then moves right above the lower electrode 10. Then, as shown in FIG. 3B, the distance between the upper electrode 9 and the lower electrode 10 is reduced. It descends so that it may become the most suitable for a vibration test, and measures a vibration characteristic by a vibration characteristic tester not shown. Subsequently, as shown in FIG. 3C, the upper electrode 9 rises while adsorbing the vibrator piece 11. Then, after the electrodes are moved onto the carrier 13, the suction is released by turning off the vacuum source or the like, and the vibrator piece 11 is placed on the carrier 13 as shown in FIG. 3D.

The carrier on which the vibrator piece 11 is placed is arbitrary, and is not limited to the place where the vibrator piece was located before the measurement. That is, the vibrator piece may be placed before measurement beforehand, or the vibrator piece may be moved to another carrier according to the measurement result. 4A-
FIG. 4F is a schematic view for explaining the operation of still another embodiment of the resonator characteristic test apparatus according to the present invention. In this embodiment, as in the second embodiment, the carrier is fixed and the upper electrode is movable, but unlike the second embodiment, the lower electrode also moves.

First, as shown in FIG. 4A, after the upper electrode 14 is moved onto the vibrator piece 16 to be measured on the supply carrier 19, as in the second embodiment described above, By guiding a vacuum from a vacuum source not to the fine hole 17 of the upper electrode 14, the vibrator piece 16 is sucked as in the first embodiment. Subsequently, as shown in FIG. 4B, the upper electrode 14 once rises while adsorbing the vibrator piece 16, and then the lower electrode 1
After moving to just above 5, the distance between the upper electrode 14 and the lower electrode 15 is lowered so as to be optimal for the vibration test, and the vibration characteristics are measured by a vibration characteristics tester (not shown). As shown in FIG. 4C, the lower electrode 15 of this embodiment
4 are provided, and after the measurement of the vibration characteristics is completed, the upper electrode 14 is turned off by turning off the vacuum source or the like.
The suction from the vibrator element 1 is released by simultaneously introducing the vacuum from the second vacuum source (not shown)
6 is attracted to the lower electrode 15. Subsequently, FIGS. 4D and 4E
The lower electrode 15 is moved into the classification carrier 20 as shown in FIG. 4E (a plan view). Then, as shown in FIG. 4F, the adsorption to the lower electrode 15 is released, and at the same time, the lower electrode 1 is released.
5 is lowered further down and the transducer piece 16 is placed in the sorting carrier 20. In addition, the lower electrode 15 is inserted into the classification carrier 20 so that the lower electrode 15 can enter as shown in FIG. 4E.
A groove having a width larger than the diameter of the groove is provided.

Various modifications can be made to the embodiment described in detail above within the scope of the present invention. As described above, in the above three embodiments, an example using a plurality of vacuum sources as the suction means has been described. However, as long as the above configuration is satisfied, a single vacuum source may be switched by a valve or the like. . In addition, the method is not limited to vacuum suction, and a method such as air blowing or electrostatic suction may be used. Further, in the above three embodiments, the upper and lower electrodes are used, but a plurality of electrodes may be opposed to one electrode.
Further, a plurality of electrodes may be opposed to each other and controlled simultaneously.

[0016]

As described above, according to the electrode of the present invention, a positioning mechanism such as a bush is not used when loading and unloading the vibrator piece between the parallel plate opposing electrodes in testing the vibration characteristics. The disadvantage that the vibrator piece fits between the positioning mechanism such as the bush and the lower electrode, and the problem that the vibrator piece is chipped when hitting the positioning mechanism are completely eliminated. Further, according to the second aspect of the present invention, after the vibrator piece is once attracted to the movable electrode, the vibrator piece is attracted to the movable electrode until the measurement is completed and the vibrator piece is discharged from between the parallel plate opposing electrodes. It remains. During this time, the vibrator piece is not transferred from one to another, so that there is no problem that the vibrator piece is not transferred due to the floating or sticking of the vibrator piece which is likely to occur at the time of transfer.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a first embodiment of an oscillator characteristic test apparatus according to the present invention.

FIG. 2A is a first operation explanatory view of the first embodiment of the resonator characteristic test apparatus.

FIG. 2B is a second operation explanatory view of the first embodiment of the resonator characteristic test apparatus.

FIG. 2C is a third operation explanatory view of the first embodiment of the resonator characteristic test apparatus.

FIG. 2D is a fourth operation explanatory view of the first embodiment of the resonator characteristic testing apparatus.

FIG. 2E is a fifth operation explanatory view of the first embodiment of the resonator characteristic test apparatus.

FIG. 3A is a first operation explanatory view of a second embodiment of the resonator characteristic test apparatus of the present invention.

FIG. 3B is a second operation explanatory view of the second embodiment of the resonator characteristic testing apparatus of the present invention.

FIG. 3C is a third operation explanatory view of the second embodiment of the resonator characteristic test apparatus of the present invention.

FIG. 3D is a fourth operation explanatory view of the second embodiment of the resonator characteristic testing apparatus of the present invention.

FIG. 4A is a first side view operation explanatory view (side view) of a third embodiment of the resonator characteristic testing apparatus of the present invention.

FIG. 4B is a second operation explanatory view (side view) of the embodiment.

FIG. 4C is a third operation explanatory view (side view) of the embodiment.

FIG. 4D is a fourth operation explanatory view (side view) of the embodiment.

FIG. 4E is a fourth operation explanatory view (plan view) of the embodiment.

FIG. 4F is a fifth operation explanatory view (side view) of the embodiment.

FIG. 5 is a diagram showing a basic arrangement example of electrodes for measuring vibration characteristics of a conventional vibrator characteristic test apparatus.

FIG. 6A is a side view showing another example of an electrode for measuring vibration characteristics of a conventional vibrator characteristic test apparatus.

FIG. 6B is a perspective view of the electrode for measuring vibration characteristics shown in FIG. 6A.

FIG. 6C is a side view showing the relationship at the measurement position of the vibration characteristic measuring electrode shown in FIGS. 6A and 6B.

[Explanation of symbols]

 1, 9, 14, 21, 25 Upper electrode 2, 10, 15, 22, 27 Lower electrode 3, 11, 16, 23, 26 Transducer piece 4, 13, 19, 20 Carrier 5, 12, 17, 18 Micro Hole (suction hole) 6 Pipe 7 Vibration characteristic tester 8 Vacuum pump 24 Bush

Claims (2)

[Claims] 1. A vibrator characteristic testing apparatus comprising an electrode for electrically connecting the vibrator and inspecting vibration characteristics in a manufacturing or inspection process of a crystal resonator, a ceramic vibrator, or the like, wherein the electrode is At least one pair of opposed electrodes, an electrode moving means having at least one of the electrodes as a movable electrode, an adsorption mechanism for adsorbing and holding the vibrator on the movable electrode, and the adsorption mechanism A vibrator characteristic test apparatus configured to carry in or discharge the vibrator between the pair of electrodes. 2. When the vibrator is attracted by the movable electrode, the vibrator is carried in between the pair of electrodes, vibration characteristics are measured, and when the vibrator is discharged, the vibrator is moved from loading to discharging of the vibrator. The vibrator characteristic test apparatus according to claim 1, wherein the vibrator characteristic test apparatus is configured to be held while being attracted to the electrode.