JP2001332173A5 - - Google Patents

Claims (11)

In the manufacturing method of the image display device,
a: A substrate on which a conductor and wiring connected to the conductor are formed is placed on a support, a portion of the wiring is removed, the conductor on the substrate is covered with a container, and the inside of the container is Applying a voltage to the conductor through the part of the wiring, thereby forming an electron-emitting device on a part of the conductor, thereby creating an electron source substrate;
b: a step of preparing a phosphor substrate on which a phosphor that emits light by an electron-emitting device is arranged, and arranging the electron source substrate and the phosphor substrate in a vacuum atmosphere;
c: One or both of the electron source substrate and the phosphor substrate are loaded into a getter processing chamber in a vacuum atmosphere under a vacuum atmosphere, and one of the loaded substrates or both loaded substrates or A step of gettering both substrates, and d: a step of carrying the electron source substrate and the phosphor substrate into a sealing treatment chamber in a vacuum atmosphere in a vacuum atmosphere and heat-sealing in an opposing state. Of manufacturing an image display device. 2. The method for manufacturing an image display device according to claim 1, wherein the steps b, c and d are steps set in an inline. 2. The steps b, c, and d are steps set in an in-line, and a heat shielding member is disposed between the getter processing chamber and the sealing processing chamber. Manufacturing method of image display apparatus. 2. The steps b, c and d are steps set in-line, and a gate valve is disposed between the getter processing chamber and the sealing processing chamber. Manufacturing method of image display device. 2. The method of manufacturing an image display device according to claim 1, wherein the steps b, c, and d are steps arranged in a star. 2. The method for manufacturing an image display device according to claim 1, wherein the steps b, c and d are arranged in a star and the getter processing chamber and the sealing processing chamber are separated by an independent chamber. In an apparatus for manufacturing an image display device,
a: a support that supports the substrate on which the conductor is formed, a gas inlet and a gas outlet, a container that covers a partial region of the substrate surface, and the gas inlet that is connected to the gas inlet Means for introducing gas into the container; means for exhausting the interior of the container connected to the gas exhaust port; and applying a voltage to the conductor to form an electron-emitting device on a part of the conductor. An electron source substrate manufacturing apparatus for manufacturing an electron source substrate thereby,
b: transport means for transporting the phosphor substrate provided with the electron source substrate and the phosphor obtained by the electron source substrate manufacturing apparatus ;
c: a first vacuum chamber in which one or both of the electron source substrate and the phosphor substrate can be carried in a vacuum atmosphere by the transport means;
d: a getter applying means having a getter precursor disposed in the first vacuum chamber and a getter activating means for activating the getter precursor;
e: a second vacuum chamber in which the electron source substrate and the phosphor substrate can be carried in a vacuum atmosphere by the transfer means;
f: a substrate arrangement means arranged in the second vacuum chamber, the electron-emitting device and the phosphor facing each other inward, and an electron source substrate and a phosphor substrate facing each other; and g: the first 2. An apparatus for manufacturing an image display device, comprising sealing means for heat-sealing an electron source substrate and a phosphor substrate, which are arranged in the vacuum chamber of 2 and faced by the substrate arranging means, at a predetermined temperature. 8. The manufacturing apparatus according to claim 7, wherein the first vacuum chamber and the second vacuum chamber are arranged in-line. The manufacturing apparatus according to claim 7 , wherein the first vacuum chamber and the second vacuum chamber are arranged in-line, and each chamber is partitioned by a heat shielding member. The manufacturing apparatus according to claim 7 , wherein the first vacuum chamber and the second vacuum chamber are arranged on one line, and each chamber is partitioned by a gate valve. The manufacturing apparatus according to claim 7 , wherein the first vacuum chamber and the second vacuum chamber are arranged in a star, and each room is partitioned by an independent room.