JP2001328609A - Method and device for classifying plate-shaped member by thickness - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance the reliability for the classification and quality and also enhance productivity. SOLUTION: A device is provided with a first unit group 2 measuring the thickness of photomasks m1 as a subject to be classified and assorting photomasks m2 by thickness based on the measured results, a second unit group 3 sticking labels 31 on which data is printed on respective packaged materials (photomasks m3 packaged by a shrinkable film 26) after packaging a plurality of photomasks m2 having a same thickness assorted by the first unit group 2 as a unit, and a controller 4 driving the second unit group 3 and the first unit group 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and a method for classifying plate members by thickness suitable for use in classifying a photomask for performing electron beam exposure in a semiconductor manufacturing process, for example.

[0002]

2. Description of the Related Art In recent years, with the increase in density and integration of semiconductor integrated circuits, research and development of pattern fine processing technology such as photolithography has been rapidly progressing.
Generally, in order to manufacture a photomask for electron beam exposure using this type of photolithography technology, for example, an electron beam non-transmissive thin film is laminated in a central region of the surface of a mask body (mask glass made of quartz), Next, the electron beam non-transmission thin film and the mask body are subjected to a dry etching process to form a pattern hole for forming an electron beam transmission hole, and then a vacuum deposition process is performed on an electron beam irradiation area including an inner surface of the pattern hole. Alternatively, it is performed by performing a sputtering process and laminating a conductive thin film for suppressing charge-up. By the way, in a photomask manufactured by using such a method, it is required that the photomask is shipped after being classified according to thickness without damage or contamination.

Heretofore, this type of photomask has been classified according to thickness as follows. That is, FIG.
As shown in FIG. 0, first, the thickness of the photomask (mask before thickness classification) M1 after manufacturing / inspection is measured by the ultrasonic measuring device 1.
00, and then, based on the measurement result, the photomasks M2 are sorted by thickness, and then the sorted photomasks M2 of the same thickness are packaged by the packaging device 101 with a plurality of sheets sandwiched between mounts. Then, a label on which data such as the measured thickness is printed by the printer 102 is attached to each of the packages (packaged photomask M3).

[0004]

However, in the conventional method of classifying the thickness of a plate-shaped member, the thickness of the photomask is measured and packaged by hand. Incorrect) and damage due to contact between the photomasks is liable to occur, resulting in a problem that reliability in classification and quality is reduced. In this type of plate-like member thickness classification method, the fact that the thickness of the photomask is measured manually requires that the measurement location be added to one point in the center of the mask to improve the thickness measurement accuracy. If the number of parts is four (a total of five), there is a problem that a great deal of time is required for measuring the thickness and the productivity is reduced.

The present invention has been made to solve such a technical problem, and has an extremely simple structure in which two unit groups are driven and controlled by a controller. It is an object of the present invention to provide an apparatus and a method for classifying plate-shaped members according to thickness, which can be performed in a reliable manner, thereby improving the reliability in classification and quality, and improving the productivity.

[0006]

In order to achieve the above-mentioned object, a plate-like member thickness classifying device measures the thickness of a plate-like member to be classified at a plurality of locations, and based on the measurement result. A first unit group that sorts plate members by thickness, and a plurality of plate members of the same thickness sorted by this first unit group are wrapped, and a label with data printed is attached to each of these packages. And a controller for controlling the driving of the second unit group and the first unit group.

[0007] With this configuration, the thickness measurement and packaging of a plate-like member such as a photomask are automatically performed by drive control of each unit group by the controller.
Therefore, the occurrence of damage due to classification errors and contact between the plate-like members can be suppressed, so that reliability in classification and quality can be improved. In addition, in order to increase the thickness measurement accuracy, the measurement location can be reduced to one point at the center of the plate-shaped member and four points at the periphery, because the thickness measurement is automatic, so the measurement time can be reduced. , Productivity can be improved.

Further, it is desirable to include a backing sheet supply unit that supplies two backing sheets sandwiching the plate-like member that has been sorted to the second unit group. As described above, when the second unit group includes the mount supply unit that supplies the two mounts sandwiching the allocated plate-like member, the packaged plate that has been sorted between the two mounts supplied by the mount supply unit is included. The member is automatically sandwiched.

It is desirable that the second unit group include a packaging unit for packaging the plate-like member with the backing from the backing supply unit with a heat-shrinkable film. In this way, the wrapping unit automatically wraps the board-mounted member from the backing supply unit with the heat-shrinkable film.

Further, it is desirable that the second unit group include a label sticking unit having a printer for printing data of a plate-like member on a label. As described above, when the second unit group includes the label sticking unit having the printer for printing the data of the plate member on the label, the data of the plate member is automatically printed on the label by the printer of the label sticking unit. .

In addition, it is desirable that the second unit group includes a buffer conveyor unit having a conveyor for storing labeled packages. As described above, when the second unit group includes the buffer conveyor unit having the conveyor for storing the labeled package, the labeled package is automatically stored by the conveyor of the buffer conveyor unit.

The method of classifying plate members by thickness includes a first step of measuring the thickness of the plate member to be classified at a plurality of locations and sorting the plate members by thickness based on the measurement result. A second step of packaging a plurality of the divided plate-shaped members, and a third step of attaching a label printed with data to each of these pavements, and controls the driving of each of these steps. . With such a method, it is possible to obtain a plate-like member in which thickness measurement, sorting, packaging, and labeling are automatically performed by drive control in each step.

[0013]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described.
This will be described with reference to the drawings. FIG. 1 is a block diagram schematically showing an apparatus for classifying plate members according to the first embodiment of the present invention, and FIGS. 2A and 2B are diagrams showing the thickness of the plate members according to the first embodiment. FIG. 3 is a plan view and a side view schematically illustrating the entire sorting apparatus, and FIG. 3 is a schematic diagram illustrating a sorting unit of a first unit in the sorting apparatus according to the first embodiment of the present invention. FIG. 4 is a side view (sectional view taken along the line AA in FIG. 1), and FIG. 4 is a side view schematically showing a sorting shelf of the first unit in the apparatus for classifying plate-like members according to the first embodiment of the present invention. FIG. 5 is a perspective view schematically showing a payout device of a first unit in the plate-like member thickness-sorting device according to the first embodiment of the present invention. In FIGS. 1 to 5, the apparatus for classifying the thickness of a plate-shaped member indicated by reference numeral 1 includes a first unit 2 group, a second unit 3 group, and a controller 4. As a result, when the controller 4 drives and controls each of the unit groups 2 and 3, the photomasks that have been inspected in the first unit group 2 are sorted by thickness, and the sorted photomasks are packaged in the second unit group 3. You. Then, a label is attached to the packaged photomask (heat-shrinkable film) and shipped.

"First Unit Group" The first unit group 2
The photomask m includes a supply unit 5, a measurement unit 6, a sorting / dispensing unit 7, and a backing sheet supply unit 8, and is arranged between an inspection station and a shipping station on a photomask m production line. Supply unit 5
Has a supply stage 9 and an XZ robot 10. Thus, when the worker B1 supplies the photomask m1 on the supply stage 9, the photomask m1
Supply stage 9 via Z (horizontal / vertical) robot 10
Is supplied to the measurement unit 6 from

The supply stage 9 has L-shaped positioning means 9a which is in contact with a corner of the photomask m1 and is positioned horizontally. As a result, a large number of photomasks m1 are positioned and mounted (laminated) on the supply stage 9. Although not shown, when the photomask m1 is supplied from the supply stage 9 to the measurement unit 6, in order to prevent the photomask m1 from dropping off from the supply stage 9 and separate them one by one,
It is desirable to supply air substantially horizontally between the uppermost photomask and the photomask immediately below.

The XZ robot 10 is a robot driven by a driving device (not shown), and has a transfer hand (vacuum chuck) 10a for holding the photomask m1, and a vertical guide member 10b for guiding the transfer hand 10a in the vertical direction. And a horizontal guide member 10c for guiding the vertical guide member 10b in the horizontal direction. This gives X
When the Z robot 10 is driven, the photomask m1 is guided by the vertical guide member 10b and the horizontal guide member 10c in the vertical and horizontal directions, respectively, while being held by the transfer hand 10a. It should be noted that the photomask m1 at the time of mask suction
The mask contact position is detected by a sensor (not shown) so as not to give an impact to the mask.

The measuring unit 6 includes a measuring stage 11 and a thickness measuring device 12, and is disposed between the supply unit 5 and the sorting / dispensing unit 7. Thus, when the photomask m2 is supplied from the supply unit 5 onto the measurement stage 11, the thickness of the photomask m2 is measured by the thickness measurement device 12. Then, it is carried out from the measurement stage 11 of the measurement unit 6 to the distribution / delivery unit 7.

The measurement stage 11 comprises a table which is rotated by a driving device (not shown), and has four mask mounting portions 11a to 11m for positioning and mounting the photomask m2.
11d. As a result, when the measurement stage 11 rotates, each mask mounting portion 11
The photomask m2 on a to 11d moves in the circumferential direction. That is, after the photomask m2 is supplied to the mask placement unit 11c, the photomask m2 moves through the mask placement unit 11b and the mask placement unit 11a (thickness measurement position) near the supply unit 5. Then, the thickness of the photomask m1 is changed to the thickness measurement device 1
6, the photomask m2 is measured at one point in the center and four points in the periphery as shown in FIG. In addition, on the turntable,
Although not shown, a through-hole into which a lower measuring element of the upper and lower measuring elements of the thickness measuring device 12 can be inserted is provided, and is configured to be able to contact the back surface of the photomask m1.

The thickness measuring device 12 comprises, for example, an electric micro-displacement meter, and has a measuring element 12a located on each of the upper and lower surfaces of the photomask m1 on the mask mounting portion 11a.
12b and a drive unit (not shown) connected to both the tracing styluses 12a and 12b via a rotary cam mechanism (not shown). As a result, when the thickness measuring device 12 is driven during the measurement of the photomask m2, both the measuring elements 12
a and 12b contact the upper and lower surfaces (five points) of the photomask m1, and the thickness of the photomask m1 is measured.

The distributing / dispensing unit 7 includes a distributing device 13, a distributing shelf 14, and a dispensing device 15, and is arranged adjacent to the measuring unit 6. Accordingly, when the sorting device 13 is driven, the photomask m2 from the mask placement unit 11d is sorted and arranged on the sorting shelf 14 according to the thickness according to the driving operation. And
When the payout device 15 is driven, the photomask m2 from the sorting shelf 14 is transported to the second unit group 3 with this driving operation.

The sorting device 13 is an XZ with a transfer hand (vacuum chuck) 16a that moves in two directions, horizontal and vertical.
It has a robot 16. Thus, when the sorting device 13 is driven in two directions, horizontal and vertical, the mask mounting portion 11
The photomask m2 from d is held by the transport hand 16a, and is sorted and arranged at each designated position on the sorting shelf 14 according to the thickness based on the measurement result by the measuring unit 6. Note that a mask contact position is detected by a sensor (not shown) so as not to give an impact to the photomask m2 when the mask is attracted. The distribution shelf 14 has three rows as shown in FIG.
Spaces 14a to 14 that can be stored in an area of three tiers (a total of nine)
i, and is disposed between the sorting device 13 and the payout device 15. As a result, the photomask m2 is sorted into an arbitrary number of levels for each designated quantity according to the thickness measurement value. The payout device 15 has an XZ robot 17 with a transfer hand (vacuum chuck) 17a that moves in two directions, horizontal and vertical. Thereby, the payout device 1
When 5 is driven in two horizontal and vertical directions, the photomask m2 from each designated position on the sorting shelf 14 is held by the transfer hand 17a and transferred to the second unit group 3.

"Second unit group" The second unit group 3
It comprises a backing sheet supply unit 8, a packaging unit 22, a heat shrinkage heater unit 23, a label sticking unit 24, and a buffer conveyor unit 25, and is arranged adjacent to the thickness classification station (first unit group). As a result, when the second unit group 3 is driven, the photomasks from the sorting station are wrapped in a plurality of sheets.

The backing paper supply unit 8 includes the backing paper cassette 1
8, a mount carrier 19 and a conveyor 20 are provided. As a result, first, the mount 21a is transported to the conveyor 2
After the photomask is supplied on the photomask 0, the photomasks from the first unit group 3 (distribution / dispensing unit 7) are stacked on the photomask to form a plurality of photomasks, and the backing paper 21b is supplied on the uppermost photomask. Thus, the photomask is sandwiched between the upper and lower mounts 21a and 21b.

The mount cassette 18 has a storage space 18a in which a large number of mounts 21a and 21b can be stacked in the vertical direction.
It is located on the side of the conveyor 20 and is disposed in the movement area of the mount carrier 19. The mount transport device 19 has a transport head 19a that holds the mounts 21a and 21b and moves in two horizontal and vertical directions. Thus, when the mount transport device 19 is driven, the transport head 19a moves in the horizontal and vertical directions in accordance with the driving operation. When the transport head 19a holds the mounts 21a of the mount cassette 18 one by one, the mount 21a is removed. Placed on the conveyor 20;
The mount 21b is arranged on the mount 21a via a plurality of photomasks m2.

The supply of the mounts 21a and 21b from the mount cassette 18 to the conveyor 20 is performed one by one by a sensor (not shown). The supply of the photomask m2 to the mount 21a on the conveyor 20 by the payout device 15 is performed after detection by a sensor (not shown). The transport conveyor 20 includes a conveyor that is driven in the horizontal movement direction of the transport hand 19a, and is disposed near the payout device 15. This allows
The upper and lower mounts 21a and 21b are transported from the mount supply unit 8 to the packaging unit 22 with a plurality of photomasks m2 sandwiched therebetween.

The packaging unit 22 converts the photomask m3 with the backing sheet into a heat-shrinkable film 2 such as a vinyl chloride film.
6 and the packaging device 2
The photomask m4 provided with the backing and packaged by the backing 7 is provided with a transfer conveyor 28 for transferring the photomask m4 to the next step, and is provided between the backing sheet supply unit 8 and the heat shrink heater unit 23. Thus, when the packaging unit 22 is driven, FIG.
The photomask m3 with the mount is wrapped with the heat-shrinkable film 26 as shown in FIG.
Is transported from the packaging device 27 to the heat shrinkable heater unit 23 via the transport conveyor 28.

The heat-shrinkable heater unit 23 includes a heating device 29 for heat-shrinking the heat-shrinkable film 26 of the photomask m4 to tightly wrap (seal) the photomask m5 sealed by the heating device 29 in the next step. , And is disposed between the packaging unit 22 and the label sticking unit 24. Thereby, when the heat-shrinkable heater unit 23 is driven, the heat-shrinkable film 26 is heat-shrinked as shown in FIG. 8 to tightly seal the photomask m4, and the transport conveyor 30 is transferred from the heating device 29 to the label sticking unit 24. Conveyed through.

The label sticking unit 24 includes a label printer 32 for printing mask data on the label 31, a label sticking device 33 for sticking the label 31 printed by the label printer 32 to the heat-shrinkable film 26 in the photomask, and a label sticking unit 33. A transport conveyor 34 (transport conveyor 20) for transporting each photomask m5 to the next process is provided near the attaching device 33, and is disposed between the heat shrink heater unit 23 and the buffer conveyor unit 25. As a result, when the label attaching unit 24 is driven, data such as the mask measurement thickness and the product number are printed on the label 31, and the printed label 31 is transferred to the transport conveyor 34.
Above, it is affixed to the heat-shrinkable film 26 containing the photomask m4 and transported to the buffer conveyor unit 25.

The buffer conveyor unit 25 includes a conveyor 35 (conveyor 34) for conveying the sealed photomask m5 on which the label has been attached, and a designated number (seven sets) of sealed photomasks on the conveyor 35. The most downstream sealed photomask m of the mask m5
5 has a sensor 36 for detecting the position, and is disposed adjacent to the label attaching unit 24. Thereby, when the buffer conveyor unit 25 is driven, the transport conveyor 3
5 is conveyed until the sealed photomask m5 reaches the designated quantity. Then, when the number of the sealed photomasks m5 reaches the designated number on the transport conveyor 35, the sensor 36 detects the most downstream sealed photomasks m5 (ON state), and the buffer conveyor unit 25 temporarily stops. At this time, the sealed photomask m5 on the conveyor 35 is collected by the operator. When the sensor 36 is turned off, the buffer conveyor unit 25
It is re-driven.

The controller 4 is composed of a personal computer in which a thickness-based classification sequence program is installed, and is connected to the first unit group 2 and the second unit group 3 (each unit). Thus, the controller 4 receives a detection signal from a sensor in each of the unit groups 2 and 3 and outputs a control signal to each of the unit groups 2 and 3, and the drive of each of the unit groups 2 and 3 is controlled based on the output signal. You. In the present embodiment, a case has been described where each unit is drive-controlled using a single personal computer. However, the present invention is not limited to this, and the number of units and drive control of each unit using a personal computer are described. Of course, you can.

Next, a method of classifying plate-like members according to the first embodiment of the present invention by thickness will be described with reference to FIGS. The classification of this plate-shaped member by thickness is as follows: "Supply of photomask", "Measurement of thickness of photomask", "Distribution and dispensing of photomask", "Supply of mount", "Packaging of photomask with mount" , "Sealing of pre-packaged photomasks"
And the steps of “sticking a label”.

[Supply of Photomask] A large number of photomasks m1 are positioned and mounted (laminated) on the supply stage 9 in advance.
The XZ robot 10 of the supply unit 5 is driven by inputting to the controller 4. At this time, based on the supply sequence, the transport hand 10a of the XZ robot 10 moves in the horizontal and vertical directions to hold the photomasks m1 on the supply stage 9 one by one, and the photomask m1 is moved to the measurement stage 11 of the measurement unit 6. (Mask mounting portion 11c).

[Measurement of Photomask Thickness] First, the photomask m1 on the mask mounting portion 11c of the supply stage 11 is transferred to a thickness measuring position (mask mounting portion 11a). At this time, the thickness measurement device 12 is driven based on the measurement sequence, and the thickness measurement of the photomask m1 is started. That is, both rotating cam mechanisms are driven, and with this driving operation, the both tracing styluses 12a and 12b contact the front and back surfaces of the photomask m1, and the thickness of the photomask m1 is measured at five locations. The measurement data and the information such as the type are stored in the controller 4 (memory). Next, after separating both the probes from the front and back surfaces of the photomask m1,
The measured photomask m2 is transferred to the transfer standby position.

"Distribution / Discharge of Photomask" First, the photomask m2 on the mask mounting portion 11d at the transfer standby position is distributed and transferred to the spaces 14a to 14i of the distribution shelf 14 by the XZ robot 16 of the distribution device 13. At this time, based on the distribution sequence, the thickness data of the photomask m2 is called from the controller 4 (memory), and the thickness data and the thickness data corresponding to the previously stored spaces 14a to 14i are subjected to arithmetic processing. A comparison is made by the apparatus, and a space as a storage destination of the photomask m2 is selected. Next, the sorting shelf 14
The photomask m2 in the spaces 14a to 14i is transferred by the XZ robot 17 of the dispensing device 15 to the backing sheet supply unit 8 (backing sheet 21a on the conveyor 20). At this time, a predetermined number of photomasks m2 at each designated position are held by the transfer hand 17a of the XZ robot 17 based on the payout sequence.

[Supply of Mount] After the mount 21a is transferred from the mount cassette 18 onto the conveyor 20 and then placed on the mount 21a via the photomask m2 (transferred from the dispenser 15 onto the mount 21a). Backing cassette 1
From 8, the mount 21 b is transferred and placed. At this time, the mounts 21a and 21b are held one by one by the transfer head 19a of the mount transfer device 19 based on the mount supply sequence.
These are supplied on the conveyor 20 and the photomask m2, respectively. Then, the photomask m3 with the mount is transported by the conveyor 20 to the packaging device 27 of the packaging unit 22.
Transfer to

[Packaging of Photomask with Mount] First, the photomask m3 with the mount is packaged by the packaging device 27. At this time, based on the packaging sequence, the photomask m3 is included in the heat-shrinkable film 26 in a state where the photomask m3 is sandwiched between the mounts 21a and 21b. Next, the packed photomask m4 is transferred to the heat shrinking unit 23 by the transfer conveyor 28.

[Sealing of Packaged Photomask] First, the packaged photomask m4 is sealed by the heating device 29. At this time, based on the heat shrink sequence, the heat shrink film 26 is heat shrunk to securely pack the photomask m4. Next, the sealed photomask m5 is transferred to the label sticking unit 24 by the transport conveyor 30.

"Labeling" First, the labeling device 3
3, the label 31 is attached to the heat shrinkable film 26. At this time, based on the label sticking sequence, the label printer 32 sticks the label 31 on which the data such as the mask measurement thickness and the product number are printed in advance to the heat-shrinkable film 26 (including the photomask m5).
Next, the photomask m5 sealed with the heat shrinkable film 26 is transferred to the buffer conveyor unit 25 by the transfer conveyor 34.

In this way, the photomasks can be classified according to their thickness. After the classification of the photomasks m5, the buffer conveyor unit 25 is driven, and the designated number of photomasks m5 with the label attached are stored on the transport conveyor 35 and collected as shipment.

Therefore, in the present embodiment, the thickness measurement and packaging (classification) of the photomask m can be automatically performed, so that it is possible to prevent classification errors and damage caused by contact between the photomasks. . Further, in the present embodiment, the fact that the thickness of the photomask m can be automatically measured means that even if the number of measurement points on the photomask m increases, the measurement time can be more reliably measured than in the case of manual thickness measurement. Can be shortened.

Further, in this embodiment, the case where the production line has a plane I-shape has been described, but the present invention is not limited to this, and the production line may be a plane L-shape as shown in FIG. . In this case, the supply unit 5, the measurement unit 6, the sorting / dispensing unit 7, and the mount supply unit 8 are arranged on the same line (the XZ robot 1).
0 is inclined at 45 ° to the line),
The packaging unit 22, the heat shrinking unit 23, the label pasting unit 24, and the buffer conveyor unit 25 are arranged on a line perpendicular to this line. In addition, the distribution shelf 14 of the distribution / payout unit 7 has three rows ×
It is not limited to three stages (9 classifications).
It is possible to have storage spaces of three rows × 12 rows (12 classifications), and perform the same number of classifications as the number of these storage spaces.

In addition, in this embodiment, the case where the present invention is applied to the classification of the photomask m has been described. However, the present invention is not limited to this, and the structure (shape) of each unit can be appropriately changed to obtain a semiconductor. The present invention can be applied to the classification of a wafer or the like as a device material similarly to the embodiment.

[0043]

As described above, according to the present invention, a first unit group for measuring a plate-like member and distributing it according to the thickness, and a plate-like member from the first unit group are packaged to form a plate-like member. Since a second unit group for attaching a label to a member and a controller for controlling the driving of the second unit group and the first unit group are provided, the thickness measurement and packaging of the photomask are automatically performed. Therefore, it is possible to prevent mask classification errors and damage caused by contact between the photomasks, thereby improving classification and quality reliability. In addition, the fact that the thickness of the photomask can be automatically measured means that even if the number of measurement points on the photomask increases, the measurement time can be reliably reduced as compared with the case of manual thickness measurement. Also, productivity can be improved.

[Brief description of the drawings]

FIG. 1 is a block diagram schematically showing a device for classifying plate-shaped members according to a first embodiment of the present invention by thickness.

FIGS. 2 (a) and 2 (b) are a plan view and a side view showing the entire plate-like-member-thickness sorting apparatus according to the first embodiment of the present invention.

FIG. 3 is a side view schematically showing an apparatus for sorting the first unit group in the apparatus for classifying plate-shaped members according to the first embodiment of the present invention.

FIG. 4 is a side view schematically showing a distribution shelf of a first unit group in the plate-like member thickness classification apparatus according to the first embodiment of the present invention.

FIG. 5 is a perspective view schematically showing a payout device in the plate-like member thickness-sorting device according to the first embodiment of the present invention.

FIG. 6 is a perspective view shown to explain a measurement location of the photomask.

FIG. 7 is a perspective view showing a photomask packaged with a heat-shrinkable film (before heat-shrinkage).

FIG. 8 is a perspective view showing a photomask sealed with a heat-shrinkable film (after heat-shrinkage).

FIG. 9 is a plan view showing the entire device for classifying plate-like members by thickness according to the second embodiment of the present invention.

FIG. 10 is a plan view for explaining a conventional classification of plate members by thickness.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Classification apparatus according to thickness of plate-shaped member 2 First unit group 3 Second unit group 4 Controller 5 Supply unit 6 Measurement unit 7 Sorting / dispensing unit 8 Base sheet supply unit 9 Supply stage 10 XZ robot 10a Transfer hand 10b Vertical guide member Reference Signs List 10c Horizontal guide member 11 Thickness measuring device 11a to 11d Mask placing part 12 Thickness measuring device 13 Sorting device 14 Sorting shelf 14a to 14i Space 15 Dispensing device 16 XZ robot 16a Transfer hand 17 XZ robot 17a Transfer hand 18 Mount cassette 19 Mount carrier 20 Transport conveyor 21a, 21b Mount 22 Packaging unit 23 Heat shrink heater unit 24 Label sticking unit 25 Buffer conveyor unit 26 Heat shrink film 27 Packaging device 28 Transport conveyor

Claims (7)

[Claims] 1. A first unit group for measuring the thickness of a plate-like member as a classification target at a plurality of locations, and sorting the plate-like members by thickness based on a result of the measurement. A second unit group for packaging a plurality of plate members having the same thickness, and affixing a label on which each package data is printed, and a controller for driving and controlling the second unit group and the first unit group A classification device according to thickness of a plate-shaped member, comprising: 2. The plate-like member according to claim 1, wherein the second unit group includes a mount supply unit that supplies two mounts sandwiching the sorted plate-like member. Sorting device by thickness. 3. A packaging unit for packaging a plate-like member with a backing from the backing supply unit in a heat-shrinkable film in the second unit group.
2. The apparatus for classifying plate-shaped members according to thickness described in 1. above. 4. The label attaching unit according to claim 1, wherein the second unit group includes a label sticking unit having a printer for printing data of a plate member on the label. An apparatus for classifying plate members by thickness. 5. The plate-like sheet according to claim 1, wherein the second unit group includes a buffer conveyor unit having a conveyor for storing the labeled package. Device for classifying member thickness. 6. The apparatus according to claim 1, wherein the plate member is a photomask. 7. A first step of measuring the thickness of a plate member as a classification target at a plurality of locations, and a second step of sorting the plate members by thickness based on a result of the measurement. A third step of packaging a plurality of plate-like members having a thickness, and a fourth step of attaching a label printed with data to each of these packages, and drive controlling each of these steps. A method for classifying plate members by thickness.