JP2001326178A5 - - Google Patents
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- Publication number
- JP2001326178A5 JP2001326178A5 JP2001063900A JP2001063900A JP2001326178A5 JP 2001326178 A5 JP2001326178 A5 JP 2001326178A5 JP 2001063900 A JP2001063900 A JP 2001063900A JP 2001063900 A JP2001063900 A JP 2001063900A JP 2001326178 A5 JP2001326178 A5 JP 2001326178A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001063900A JP2001326178A (ja) | 2000-03-08 | 2001-03-07 | 半導体装置及びその作製方法 |
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000-64186 | 2000-03-08 | ||
| JP2000-63000 | 2000-03-08 | ||
| JP2000064186 | 2000-03-08 | ||
| JP2000063000 | 2000-03-08 | ||
| JP2001063900A JP2001326178A (ja) | 2000-03-08 | 2001-03-07 | 半導体装置及びその作製方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012161138A Division JP5483763B2 (ja) | 2000-03-08 | 2012-07-20 | 液晶表示装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001326178A JP2001326178A (ja) | 2001-11-22 |
| JP2001326178A5 true JP2001326178A5 (enExample) | 2008-02-28 |
Family
ID=27342606
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001063900A Withdrawn JP2001326178A (ja) | 2000-03-08 | 2001-03-07 | 半導体装置及びその作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001326178A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6916693B2 (en) * | 2000-03-08 | 2005-07-12 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| US7098084B2 (en) | 2000-03-08 | 2006-08-29 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and manufacturing method thereof |
| JP3969698B2 (ja) | 2001-05-21 | 2007-09-05 | 株式会社半導体エネルギー研究所 | 発光装置の作製方法 |
| US20020197393A1 (en) | 2001-06-08 | 2002-12-26 | Hideaki Kuwabara | Process of manufacturing luminescent device |
| JP2003224070A (ja) * | 2001-11-26 | 2003-08-08 | Semiconductor Energy Lab Co Ltd | 半導体装置の作製方法 |
| US8047442B2 (en) * | 2007-12-03 | 2011-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
| CN109097545B (zh) * | 2018-10-08 | 2023-09-15 | 吉林大学 | 激光预热与高频振动耦合非晶合金表面改性装置与方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07321335A (ja) * | 1994-05-24 | 1995-12-08 | Semiconductor Energy Lab Co Ltd | 半導体装置の作成方法 |
| JP3190520B2 (ja) * | 1994-06-14 | 2001-07-23 | 株式会社半導体エネルギー研究所 | 半導体装置およびその作製方法 |
| JP4162727B2 (ja) * | 1994-07-01 | 2008-10-08 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| JP3227392B2 (ja) * | 1996-09-27 | 2001-11-12 | シャープ株式会社 | 半導体装置およびその製造方法 |
| JP3493160B2 (ja) * | 1999-09-13 | 2004-02-03 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
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2001
- 2001-03-07 JP JP2001063900A patent/JP2001326178A/ja not_active Withdrawn