JP2001320837A - Power device and solution processing apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a power device provided with an emergency power source for monitoring leakage of a processing solution and reduction of the exhaust pressure of a processing chamber, during a specified time after power supply is cut off, and a solution processing apparatus which uses the power device and cleans semiconductor wafers, LCD boards, etc., for example. SOLUTION: The power device 200 has a switching power source 21 of a converting means which converts AC current into DC current, and a charging apparatus which has a charger 1 and a battery 2 to be charged by the charger 1. The device 200 outputs one of current supplied from the power source 21 and current supplied from the battery 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid processing apparatus for cleaning semiconductor wafers, LCD substrates, etc., for example, for a predetermined period of time after the power is turned off. The present invention relates to a power supply device provided with an emergency power supply for monitoring the presence or absence of a decrease in atmospheric pressure, and a liquid processing apparatus using the same.

[0002]

2. Description of the Related Art For example, in a liquid processing apparatus for cleaning a semiconductor wafer, an LCD substrate, or the like, when the power is unexpectedly turned off due to a power failure or the like, or when the processing is terminated and the apparatus is turned off. If the power of the apparatus is turned off for some reason, it is necessary to monitor whether or not the processing liquid has leaked or the exhaust pressure of the processing chamber has decreased in the apparatus for a predetermined time thereafter.

The current for operating such a monitoring system is generally supplied from the power supply of the apparatus when the power supply of the apparatus is turned on, and supplied from the emergency power supply when the power supply of the apparatus is turned off. Is done. As a power supply device having such an emergency power supply, for example, as shown in FIG. 4A, a current supplied from an AC power supply 99 is supplied to a UPS (unin
There is known a method using a method of operating a monitoring system through a terruptible power system 98 and further converting the DC voltage to a predetermined value by a switching power supply 97.

The UPS 98 has a built-in battery 96 as an emergency power supply, for example, as shown in FIG. 4 (b). And the function of charging the battery 96 and converting the current sent to the switching power supply 97 into an AC current by the AC converter 94 again. When the current supply from the AC power supply 99 is stopped, the current is sent from the battery 96 to the switching power supply 97 even when the liquid processing apparatus is entirely stopped, so that the monitoring system can be stopped without stopping. It can be operated for about hours.

[0005]

SUMMARY OF THE INVENTION However, UPS
The output of A. is generally C. It is as large as 100 V or 200 V and requires care in handling. In addition, since the UPS itself consumes energy, it is not suitable for long-time battery charging. Further, the battery charging voltage is
Generally, since the voltage is higher than the rated voltage by about 15%, it is expected that charging using the UPS becomes difficult when a high voltage is required for the battery depending on the equipment used. In addition, in order to extend the life of the battery, it is necessary to control the charging voltage value and the charging current value in accordance with the battery characteristics.
Output control becomes difficult.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and extends the charging condition of a battery as an emergency power supply according to battery characteristics without using a UPS. It is another object of the present invention to provide a power supply device capable of supplying a stable output voltage from a battery, and a liquid processing apparatus using the same.

[0007]

That is, according to the present invention, a charging device having a converter for converting an AC current to a DC current, a charger and a battery charged by the charger, and the converter , And a current control unit that outputs one of the currents supplied from the battery.

According to the present invention, the current supply path from the AC power supply to the output terminal is provided in two branches.
A power supply device also functioning as an emergency power supply, wherein a conversion means for converting an AC current to a DC current is provided on the AC power supply side and a diode is provided on the output terminal side. And a second current supply path in which a charger and a battery charged by the charger are provided on the AC power supply side, and a transistor is provided on the output terminal side. A power supply is provided.

In such a power supply device, while the AC current is being supplied from the AC power supply, the battery is charged in the charging device, while the output terminal is supplied with a current through a power supply that converts the AC current into a DC current. Is supplied, and when the current supply from the AC power supply is stopped, a predetermined amount of current is supplied from the battery without interruption of the current supply to the output terminal. Therefore, even when a device or the like that operates using the same AC power supply as a current supply source stops operating due to the cutoff of the AC power supply, the system using the power supply device including such a battery stops its operation. Without this, the operation can be continued for a predetermined time depending on the battery capacity.

In addition, a battery as an emergency power supply incorporated in such a power supply device can be charged in a charging pattern suitable for the battery characteristics using a dedicated charger, so that the battery has a long service life. Is achieved. Further, the DC current supplied from the battery is directly sent to the output terminal without performing the AC / DC conversion, so that the output characteristics are stabilized.

Further, according to the present invention, there is provided a liquid processing apparatus using the above-described power supply device, that is, a liquid processing section for supplying a processing liquid to an object to be processed and performing a liquid processing, and a processing liquid in a storage tank. A liquid processing apparatus comprising: a processing liquid supply unit for supplying the liquid processing unit; a power supply device having an emergency power supply; and a monitoring device operated by the power supply device. Conversion means for converting an alternating current to a direct current; a charging device for charging a battery using the current from the alternating current power supply; and a current from the conversion means and one of the currents from the battery output terminals. And a current control unit that supplies the current to the liquid processing apparatus.

In this liquid processing apparatus, for example, the liquid processing section is operated by an electric current supplied from an AC power supply, and when the monitoring apparatus is operated by an electric current from the same AC power supply, the liquid processing is terminated. Even after the AC power is turned off, the monitoring device is continuously operated by the current supply from the battery, so that the abnormality of the device can be detected and the maintenance of the liquid processing device can be easily performed.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be specifically described below with reference to the accompanying drawings, taking a liquid processing apparatus using a power supply unit of the present invention as an example. This liquid processing apparatus can be used as a cleaning processing apparatus or a liquid coating processing apparatus for various substrates, but in the following embodiments,
A case where the present invention is used as an apparatus for cleaning a semiconductor wafer (wafer) will be described.

FIGS. 1 and 2 are cross-sectional views showing one embodiment of a liquid processing section (cleaning section) 30 in a cleaning apparatus.
1 shows a state in which the inner chamber 27 is housed in the outer chamber 26, and FIG.
6 shows the state evacuated from 6 respectively.

The liquid processing section 30 removes a resist mask and a polymer layer, which is an etching residue, after the wafer W is subjected to an etching process. The liquid processing section 30 includes a vertically provided support wall 18 and a rotating shaft 23a. A motor 23 fixed horizontally to the support wall 18, a rotor 24 attached to a rotating shaft 23 a of the motor 23, and a rotating shaft 23 of the motor 23.
a, a cylindrical support tube 25 surrounding the rotor a, an outer chamber 26 supported by the support tube 25 and configured to surround the rotor 24, and an inner side for performing a chemical solution treatment in a state where the inner side is disposed inside the outer chamber 26. And a chamber 27.

The rotor 24 is capable of holding a plurality of (for example, 26) vertically arranged wafers W arranged in a horizontal direction. The rotor 24 is rotated by a motor 23 via a rotating shaft 23a. Locking members 71a and 71b (7
Located on the back of 1a. Not shown. ) 72a 72b (7
Located on the back of 2a. Not shown. ) And is rotated together with the plurality of wafers W held by the wafer holding members 83a and 83b (located on the back surface of the 83a; not shown). The locking members 71a and 7
1b, 72a and 72b are mounted on a pair of disks 70a and 70b arranged at a predetermined interval.

The outer chamber 26 and the inner chamber 27 are both substantially cylindrical, and the inner chamber 27 is housed in the outer chamber 26 as shown in FIG. 1 or supported from the outer chamber 26 as shown in FIG. It is structured to be slidable so that it can be retracted to the wall 18 side. Also, the outer chamber 26 itself is configured to be able to slide toward the support wall 18 side.

That is, in the state shown in FIG. 1, the liquid processing for the wafer W held by the rotor 24 is performed in the inner chamber 2.
7 and vertical processing chamber 5 formed by walls 26a and 26b
2, the rotor 24 can be accommodated in the processing chamber 51 formed by the outer chamber 26 and the vertical walls 26a and 26b to perform the liquid processing of the wafer W in the state of FIG.

The outer chamber 26 and the inner chamber 2
7 are slid toward the support wall 18, the lateral direction of the rotor 24 (radial side of the wafer W) is free. For example, a standby portion for the wafer W is provided below the rotor 24. The wafer W before processing and the wafer W after processing
Can be exchanged.

The vertical wall 26a is attached to the support cylinder 25, and a bearing 28 is provided between the support cylinder 25 and the rotating shaft 23a. Further, the vertical wall 26a and the distal end of the support cylinder 25 are sealed by a labyrinth seal 29 to prevent particles or the like generated by the motor 23 from entering the processing chambers 51 and 52. Note that a locking member 25a for locking the outer chamber 26 and the inner chamber 27 is provided at an end of the support cylinder 25 on the motor 23 side.

At the top of the vertical wall 26b, a number of discharge ports 5 are provided.
The discharge nozzle 54 having the number 3 is mounted so that its length direction is horizontal. This discharge nozzle 54
Moves the inner chamber 27 to the support wall 18 side, and in a processing chamber 51 formed by the outer chamber 26 and the vertical walls 26a and 26b, pure water supplied from a processing liquid supply unit not shown in FIG. Processing liquids such as IPA and various chemicals, and N ₂ gas can be discharged.

On the other hand, a discharge nozzle 56 having a large number of discharge ports 55 is mounted on the upper part of the inner chamber 27 so that its length direction is horizontal. From the discharge nozzle 56, various types of chemicals, pure water, and processing liquids such as IPA supplied from a processing liquid supply unit (not shown in FIG. 1) can be discharged. As these discharge nozzles 54 and 56, for example, those made of fluororesin such as PTFE and PFA, and those made of stainless steel are preferably used.

Incidentally, on the upper inner wall of the inner chamber 27,
Opposite surfaces of disks 70a and 70b (surfaces facing wafer W)
Are disposed on the vertical walls 26a and 26b for cleaning the surfaces of the disks 70a and 70b facing the vertical walls 26a and 26b, respectively. Discharge nozzle 74a for processing liquid
74b is provided. These discharge nozzles 74a
74b, 75a and 75b are mainly used for cleaning the disks 70a and 70b with pure water after various chemical treatments.

In the lower part of the vertical wall 26b, the outer chamber 2 is provided.
6 is provided with a first drain port 61 for discharging a used chemical solution or the like from the processing chamber 51 formed by
Above the drain port 61, the used chemical solution, pure water, IP
A second drain port 62 for discharging A is provided.
The first drain port 61 and the second drain port 62 have a first drain pipe 63 and a second drain pipe 64, respectively.
Is connected.

On the upper part of the vertical wall 26b, the outer chamber 2 is provided.
A first exhaust port 65 for exhausting the processing chamber 51 formed by the inner chamber 27 is provided below the first exhaust port 65.
A second exhaust port 66 for exhausting the air is provided. Further, the first exhaust port 65 and the second exhaust port 66
Have a first exhaust pipe 67 and a second exhaust pipe 6 respectively.
8 are connected.

The above-described outer chamber 26 and the discharge nozzle 5
The liquid processing of the wafer W using the nozzle 4 and the liquid processing of the wafer W using the inner chamber 27 and the discharge nozzle 56 can be performed by basically the same method. A method of supplying the processing liquid to the discharge nozzle 56 and a configuration thereof will be described.

FIG. 3 shows a processing liquid supply unit 100 for supplying a processing liquid to the discharge nozzle 56 shown in FIG.
Monitoring device 150 and monitoring device 150
FIG. 3 is an explanatory diagram mainly showing a configuration of a power supply device 200 that supplies a current for the operation of FIG. Processing liquid supply unit 10
Numeral 0 has a storage tank 11 having a double structure consisting of an inner tank 11a and an outer tank 11b, and the storage tank 11 is installed in a pan 13.

In the outer tank 11b, the processing liquid 12b used once or a predetermined number of times is collected from the drainage pipe 64a and stored, while the inner tank 11a contains unused processing liquid. Is stored. The processing liquid 12b in the outer tank 11b and the processing liquid 12a in the inner tank 11a are connected to a switch 41 such as a three-way cock.
, Only one of the discharge nozzles 5
6.

In this manner, for example, the cleaning process for a set of 26 wafers W accommodated in the rotor 24 is made up of two steps of pre-cleaning and main cleaning, and the processing liquid 12b in the outer tank 11b is used for pre-cleaning. The processing liquid used in the pre-cleaning is discharged from the drain pipe 64b and discarded or collected again. In the subsequent main cleaning, the inner tank 1 is used.
1a, the used liquid used for the main cleaning is passed through the drain pipe 64a to the outer tank 1a.
Collect in 1b. Thus, a processing cycle in which the processing liquid 12b newly stored in the outer tank 11b is used for the preliminary cleaning of the next set of wafers W can be used, and the processing liquid can be used efficiently. .

The processing liquids 12a and 12b stored in the inner tank 11a and the outer tank 11b are sent to the discharge nozzle 56 by the pump 31 or the like through the pipe 17 communicating with the discharge nozzle 56. A purification device such as a filter 42 can be attached to the pipe 17. Also,
Although only one chemical solution supply unit 100 is shown in FIG. 3, a configuration in which a plurality of chemical solutions are supplied to the discharge nozzle 56 from a plurality of chemical solution supply units by using a switching valve or the like is also possible. It is.

A water leak sensor 14 is attached to the pan 13, and mainly the processing liquid 12b from the outer tank 11b.
Detect leaks. This water leak sensor 14 is an alarm buzzer 4
Are connected to a monitor 5 provided therein, and these constitute a monitoring device 150. The monitoring device 150 is a power supply device 2
Driven by the current supplied from the water leak sensor 1
When the water leak is detected by the alarm 4, the alarm buzzer 4 issues an alarm by sound.

A drain 15 is provided on the bottom surface of the pan 13.
The processing liquid 12b accumulated in the nozzle 3 can be discharged. The valve 16 may be designed to automatically open and close when a signal from the water leak sensor 14 is received.

The liquid processing apparatus includes various devices operated by electricity, for example, a pump 19 and a motor 23. These devices include a power supply 2 branched from a main power supply (not shown).
Current is supplied from 0b and 20c. Also, the monitoring device 1
Similarly, a current supplied from a power supply 20a branched from the main power supply is used for the power supply device 200 for the operation of 50. In FIG. 3, the control device 3 of the liquid processing apparatus is used.
Is also configured to be operated by receiving a current supply from the power supply device 200, but a separate power supply can be used for the control device 3. In addition, the power supplies 20a to 2
0c is, for example, A.I. C. 100V / 200V power supply.

The main power supply or the power supplies 20a to 2a-2
When 0c is cut off, the pump 19 and the motor 23 stop their operations, but the monitoring device 150 and the control device 3 are operated for about a predetermined time by the emergency power supply (battery 2) of the power supply device 200. Is continued. Hereinafter, the configuration and operation of the power supply device 200 will be described.

In the power supply device 200, the supply path of the alternating current output from the power supply 20a is, for example, a terminal voltage of 24.
The output terminal 80 which is V is branched into two systems. On one side, a switching power supply 21 which is one of conversion means for converting an alternating current into a direct current is provided on the power supply 20a side, and a first diode (D1) is provided on the output terminal 80 side. This is the current supply path 8. In the first current supply path 8, the alternating current supplied from the power supply 20 a is, for example,
It is converted into a DC current having a voltage of 27 V and flows through the first diode (D1), and the second and third diodes (D2) disposed between the first diode (D1) and the output terminal 80. -It flows through (D3) and reaches the output terminal 80.

The first to third diodes (D1) to (D1)
(D3) plays a role of reducing the output voltage from the switching power supply 21 and adjusting the output voltage to the voltage required for the output terminal 80. The first diode (D1) is connected to the switching power supply 2 through the second current supply path 9 as described later.
Plays the role of preventing current from flowing into
The third diodes (D2) and (D3) may be used also as a part of a second current supply path 9 described later.

The other system from the power supply 20a to the output terminal 80 is connected to the power supply 20a as a charger 1 and an emergency power supply charged by the charger 1, for example, a voltage 27V which is the same output voltage as the switching power supply 21. Battery 2
And a second current supply path 9 in which a transistor (TR) is provided on the output terminal 80 side. The alternating current supplied from the power supply 20a is used for charging the battery 2 using the charger 1, and after the charging of the battery 2 is completed, the battery 2 is maintained in a fully charged state.

As the charger 1, a charger that can execute a charging program according to the charging characteristics of the battery 2 can be used. Thus, not only can charging be performed efficiently according to the characteristics of the battery 2, but also deterioration due to improper charging of the battery 2 can be avoided. Further, when the charging program can be changed, even when the type of the battery 2 is changed, for example, when the battery 2 is changed from a lead storage battery or the like to a lithium ion battery or the like, it is easy to deal with the change. .

In the power supply device 200, the first power supply 20a
When a current flows through the current supply path 8 and the current is supplied to the output terminal 80, no current is supplied to the output terminal 80 through the second current supply path 9. On the other hand, the power supply 20a
When the current supply from the battery 2 stops, the current stops flowing through the first current supply path 8, so that the transistor (TR) and the second and third Current is supplied to the output terminal 80 through the diodes (D2) and (D3). Thus, the current is always supplied to the output terminal 80 through one of the first current supply path 8 and the second current supply path 9.

For example, as the transistor (TR), a transistor which is turned on when the base voltage is 1 V or more and in which a current flows from the emitter to the collector is used. Also,
The resistors (R1) and (R2) serve to determine the base voltage based on the potential difference between the points P and Q in FIG.

In this case, when the voltages at the points P and Q are both 5 V, the potential difference between the points P and Q is 0 V. Therefore, regardless of the values of the resistors (R1) and (R2), the transistor ( The base voltage at TR) becomes 0 V, the transistor (TR) is turned off, and no current flows from the emitter to the collector. In this case, the current is supplied to the output terminal 80 through the first current supply path 8, that is, the current supplied from the switching power supply 21 flows through the first to third diodes (D1) to (D3). Is done.

However, when the voltage at the point Q drops to 1 V even though the voltage at the point P remains at 5 V,
The potential difference 4V is divided by the resistors (R1) and (R2). For example, if the resistance ratio is R1: R2 = 1: 3, the base voltage of the transistor (TR) increases to 1 V, and the transistor (TR) is turned on. Thus, the current flows through the second current supply path 9, that is, the transistor (TR) and the second and third diodes (D
2) It is supplied to the output terminal 80 through (D3).

In other words, the values of the resistors (R1) and (R2) are determined based on the characteristics of the transistor (TR), and the potential difference between the point P and the point Q determines the transistor (T
If R) is switched, a current can be supplied to the output terminal 80 from only one of the first current supply path 8 and the second current supply path 9.

The resistance (R1) connecting the points P and Q
A diode may be provided instead of the transistor (TR) so that the direction from point P to point Q is forward, without providing a circuit having (R2). 1 diode (D1) and transistor (T
R) by the rectifying action of the diode arranged in place of
The current can be sent to the output terminal 80 only from one of the first current supply path 8 and the second current supply path 9.

However, when a diode is used, the battery 2 cannot be charged unless the voltage at the point Q is higher than the voltage at the point P. In contrast, the aforementioned transistor (T
When R) is used, the transistor (TR) is turned off not only when the voltage at the point Q is higher than the voltage at the point P but also when the voltage at the point Q is lower than the voltage at the point P. Thus, the battery 2 can be charged.

The power supply device 200 prevents the current from flowing backward from the battery 2 to the charger 1 between the charger 1 and the battery 2 when the current supply from the power supply 20a to the charger 1 is stopped. Therefore, a relay (RY
3) is provided. It is preferable that the relay (RY3) be dynamically turned on / off in conjunction with the operation state of the power supply 20a. The opening / closing means is ON / O.
What is necessary is just to be able to switch FF, and it is not limited to a relay. The relay (RY
2) and the relay (RY1).

In the second current supply path 9, a relay (RY2) is provided between the battery 2 and the transistor (TR). This relay (RY2)
Operates to disconnect the circuit when the voltage drop of the battery 2 reaches a predetermined voltage before the battery 2 cannot be recharged while the battery 2 is being discharged. .

For this reason, while the battery 2 is being charged, the relay (RY2) may be in a state in which the contact is closed to make the circuit conductive, or may be shut off. When the circuit 2 shifts from the charge state to the discharge state, it is necessary to close the circuit. Also,
When the current supply from the power supply 20a stops, a predetermined current needs to be sent from the battery 2 to the output terminal 80 without interruption of the current supply to the output terminal 80. Therefore, it is preferable that the relay (RY2) be in a conductive state unless the voltage drop of the battery 2 is significant.

In the second current supply path 9, between the battery 2 and the output terminal 80, a transistor (TR) and second and third diodes (D2).
It is also preferable to form the bypass circuit 7 so as not to include any of 3). When the bypass circuit 7 is provided, the relay (RY1) is provided, and while the current is flowing through the first current supply path 8,
The current is not supplied to the battery 2 through the bypass circuit 7.

The relay (RY1) is closed only while the current is being supplied from the battery 2. However, while the charging capacity of the battery 2 is sufficiently large and the discharge voltage is sufficiently high, the relay (RY1) is closed. , The relay (RY1) is opened, and the bypass circuit 7 is not used. On the other hand, when the discharge of the battery 2 proceeds and the output voltage decreases, the second and third
The relay (RY1) is closed because it is necessary to apply a predetermined voltage to the output terminal 80 without causing a voltage drop by the diodes (D2) and (D3). Thereby, the load on the battery 2 can be reduced, and the battery life can be prolonged.

By providing the above-mentioned battery 2 as an emergency power supply, the control device 3 and the monitoring device 150 are continuously operated even when the supply of current from the power supply 20a is stopped. If it is monitored that the water leak has been detected, the control device 3 can operate the alarm buzzer 4.

Although the embodiment of the present invention has been described above by taking a semiconductor wafer cleaning process as an example, the chamber for performing the liquid process is not limited to a double-structured chamber.
Or more than two tanks, and the tank for storing the processing liquid does not need to have a double structure.

In the above description, the power supply device of the present invention
Although the present invention is applied to a semiconductor wafer cleaning processing apparatus as an example, the present invention is not limited to a semiconductor wafer, and a power supply of a processing apparatus for processing other substrates such as a liquid crystal display (LCD) substrate and a CD substrate. It can be used as a device. The power supply device of the present invention is not limited to use as a power supply device for a cleaning device, and is used in other liquid processing devices such as a resist liquid application processing device, and is not limited to a liquid processing device. For example, it can also be used as a power supply device for a temperature monitoring device of a heater in a heating device.

[0054]

As described above, according to the power supply device of the present invention, charging and discharging of a battery as an emergency power supply can be performed under appropriate conditions by a dedicated charger. The effect that the life can be extended can be obtained. Also, there is no need to convert the output voltage of the battery, and when the output voltage drops, the current can be supplied directly to the output terminal using a bypass circuit, so that the output voltage is stable and the device is stable. This has the effect that it is possible to drive the vehicle. Further, the liquid processing apparatus using the power supply device of the present invention can be configured such that the current supplied from the battery after the predetermined operation is completed and the power supply is turned off, or when the current supply from the AC power supply is suddenly stopped. As a result, the monitoring device continues to operate for a predetermined time, so that the safety of driving is ensured.

[Brief description of the drawings]

FIG. 1 is a sectional view showing an embodiment of a processing unit of a liquid processing apparatus using a power supply device of the present invention.

FIG. 2 is a sectional view showing another state of the processing unit shown in FIG. 1;

FIG. 3 is an explanatory diagram showing an embodiment of a processing liquid supply unit, a monitoring device, and a power supply device of a liquid processing apparatus using the power supply device of the present invention.

FIG. 4 is an explanatory diagram showing a configuration of a power supply device using a conventional UPS.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1; Charger 2; Battery (emergency power supply) 3; Control device 4; Alarm buzzer 8; First current supply path 9; Second current supply path 11a; Inner tank 11b; 20c; power supply 26; outer chamber 27; inner chamber 30; liquid processing unit 54, 56; discharge nozzle 100; processing liquid supply device 150; monitoring device 200; power supply device R1, R2; resistance D1 to D3; Relay TR; Transistor W; Wafer (substrate)

Claims (11)

[Claims] 1. A charging device having a converter for converting an alternating current into a direct current, a charger having a charger and a battery charged by the charger, a current supplied from the converter, and a current supplied from the battery. And a current control unit that outputs one of the currents. 2. A power supply device in which a current supply path from an AC power supply to an output terminal is provided in two branches, and also has a function as an emergency power supply. A first current supply path in which a diode is provided on the output terminal side, a charger and a battery charged by the charger are provided on the AC power supply side, And a second current supply path in which a transistor is disposed on the output terminal side. 3. The device according to claim 2, wherein another diode for reducing a supply voltage is provided between the diode and the output terminal in the first current supply path. Power supply. 4. The power supply device according to claim 3, wherein the supply voltage lowering diode is shared by a circuit portion between the transistor and the output terminal in the second current supply path. . 5. An opening / closing means for preventing a backflow of current from a battery to a charger when supply of current from the AC power supply to the charger is stopped between the charger and the battery. The power supply device according to any one of claims 2 to 4, wherein a power supply is provided. 6. The device according to claim 2, wherein an opening / closing means is provided between the battery and the transistor in the second current supply path. Power supply. 7. In the second current supply path, a bypass circuit is formed between the battery and the output terminal so as not to include any of the transistor and the voltage drop diode. The power supply device according to any one of claims 2 to 6, characterized in that: 8. The power supply device according to claim 7, wherein an opening / closing means is provided in the bypass circuit. 9. A liquid processing unit for supplying a processing liquid to an object to be processed to perform liquid processing, a processing liquid supply unit for supplying a processing liquid in a storage tank to the liquid processing unit, and a power supply having an emergency power supply A liquid processing apparatus comprising: a device and a monitoring device operated by the power supply device, wherein the power supply device converts an AC current from an AC power supply into a DC current, and a current from the AC power supply. A liquid processing apparatus comprising: a charging device that charges a battery by using the charging device; and a current control unit that supplies one of the current from the conversion unit and the current from the battery to an output terminal. . 10. The liquid processing apparatus according to claim 9, wherein the monitoring device includes a sensor for detecting a leakage of the processing liquid or a decrease in exhaust pressure of the liquid processing unit. 11. The liquid processing apparatus according to claim 10, wherein a signal from the sensor is identified and an alarm is issued.