JP2001318318A - Specimen temperature controller for microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve difficulty in making the heat generation temperature of a heating plate uniform in the entire area by being affected by the heat radiation effect, etc., of a frame of the conventional specimen temperature controller for a microscope and the infeasibility of controlling the heat generation temperature of the heating plate by each of arbitrary regions. SOLUTION: Transparent conductive films 13 for heat generation which are formed on the heating plate 17 and generate heat when energized are formed in the patterns meeting the desired heat generation patterns on the transparent plate 7. Then, the heat generation patters of the heating plate 7 are easy in both of causing the heat generation of the entire surface at a uniform temperature and conversely in arbitrarily creating temperature differences by each of the regions. The countermeasure for the heat radiation by the frame 3 may be corrected by making the density and total area of the patterns in the peripheral edges slightly larger than those of others. The need for the special correction means, like the conventional heat diffusion plate, is thereby eliminated.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a specimen temperature controller for a microscope, and more particularly to a microscope having a structure in which a transparent conductive film as a heating element for heating is provided on a transparent plate on which a specimen is directly or indirectly placed. The present invention relates to a sample temperature controller for use.

[0002]

2. Description of the Related Art One type of apparatus used for maintaining a specimen at a desired temperature during microscopic observation is a plate-shaped apparatus. This type of temperature control device for microscopic observation includes those dedicated to heating, those dedicated to cooling,
There are several types such as a type that also serves as a cooling device. However, a type having at least a heating function generally uses a transparent conductive film as a heating element for heating.

FIGS. 16 to 18 show an example of a conventional plate-type temperature controller for microscopic observation provided with such a conductive film.
Shown in In the drawing, only the main body a of the temperature controller, that is, a portion to be mounted on the stage of the microscope is shown. The main body a is used by fitting it into the round hole o of the microscope stage s.
It has a relatively shallow circular dish-shaped frame b made of a synthetic resin, and a bottom wall of the frame b has an oval-shaped relatively large light-transmitting hole c with its center at the center.
Are formed. In the frame b, two upper and lower disc-shaped transparent plates d and e are tightly fitted together in a state of being bonded to each other, and an adhesive is provided between the two transparent plates d and e. Transparent insulating material f
Is inserted.

The upper transparent plate d is for heating a specimen (hereinafter, when only the transparent plate for heating is referred to as "heating plate"), the lower transparent plate e is for protection. It is. A transparent heat-generating conductive film g formed by vapor deposition of metal is provided on the entire lower surface of the heating plate d.
The two electrode strips h are bonded. The electrode band h is disposed so that portions other than both ends extend along the linear edge of the light transmitting hole c of the frame b when viewed from above and below, and both ends are positioned between right and left ends. As it goes, it extends in an oblique direction so as to approach each other and almost reaches the end of the heating plate d. Further, a temperature sensor i is bonded to an intermediate position between one ends of the electrode strips h in the conductive film g.

Power is supplied to one of the two electrode strips h through a lead wire j, and the current flows from the other electrode strip h to the ground circuit through the conductive film g. This current causes the conductive film g to generate heat and heat the heating plate d. Therefore, if the target sample k is placed on the heating plate d directly or by using a slide glass m or a petri dish, the sample k Is heated. The heat generation temperature of the conductive film g is adjusted by a controller (not shown) to which the lead wire j is connected. In this main body a, since the area other than the area corresponding to the light transmitting hole c of the frame b is not a visible area that can be used for microscopic observation,
A portion of the upper surface of the heating plate d other than the region corresponding to the light-transmitting hole c of the frame b is coated with black paint n also serving as a makeup, indicating that the region is an invisible region.

The drawing shows a type in which the upper one d of the two transparent plates d and e is used as a heating plate, but a conductive film is formed on the upper surface of the lower plate e and this is added. There is also a type with a hot plate. In the drawings, the frame b has a circular outer shape, but there are various types of the outer shape. For example, many general-purpose types that are not fixed on the microscope stage have a rectangular shape such as a square or a rectangle, and those that fit a microscope stage that has a trapezoidal or other irregular shape have a different shape. Made to fit shape. The shapes of the transparent plates d and e are usually defined according to the shape of the frame b.

[0007]

The conventional sample temperature controller for a microscope has several problems with respect to the heat generation state of the conductive film g. One of the problems is that the heating temperature of the heating plate 7 is not necessarily uniform over the entire area. There are several possible causes, but the biggest factor is that depending on the outer shape of the heating plate, the pair of electrode bands h cannot be arranged in parallel with each other, and the electrical resistance of the conductive film differs depending on the location. Is considered to promote the heat radiation action and lower the temperature of the peripheral portion.

For example, when the outer shape of the heating plate is required to be circular such as the above-mentioned plate d, a pentagon or other irregular shape (the outer shape of the conductive film is also the same as the outer shape of those plates). If a pair of electrode strips is simply arranged along the periphery of the plate, the interval between the electrode strips will not be constant throughout, and as a result, the electrical resistance of the conductive film will differ depending on the location, and the heat generation temperature Will be mixed. For this reason, in the main body a shown in FIG. 14, the light transmitting hole c of the frame b is made into an oval shape so that the electrode strips h can be arranged in parallel at a distance as long as possible. However, even in such a case, the temperature non-uniformity cannot be completely eliminated, for example, the temperature is lowered at a place in contact with or close to the frame b. In this regard, if the external shape of the heating plate can be rectangular, the pair of electrode strips can be arranged in parallel with each other, but the temperature is still lowered in the area in contact with or close to the frame due to the heat radiation action of the frame. That is inevitable.

Further, in the specimen temperature controller for the inverted microscope, a transparent plate is provided with a light transmitting hole in the center of the transparent plate so that the objective lens L can be brought as close as possible to the specimen k. There is a perforated type that is used by placing the slide glass m so as to close the light-transmitting hole,
In this type, since the transparent plate itself has a light-transmitting hole, the temperature unevenness becomes more remarkable. In particular, the slide glass is not directly heated by the heating plate in the essential visible region corresponding to the light transmitting hole,
Since the heating must rely on conduction heat from the surroundings, the temperature of the slide glass is considerably different between the region closing the light transmitting hole and the other region.

Therefore, in the case of the perforated type, a heat diffusion plate (perforated plate) having good heat conductivity such as aluminum is attached to a transparent plate, and the heat of the conductive film is transferred by the heat diffusion plate. Although there is an attempt to disperse evenly, it is still impossible to completely eliminate the temperature unevenness, and the thickness and power consumption of the main body increase by the amount of the heat diffusion plate.

Another problem regarding the heat generation state of the conductive film g is that the heat generation temperature of the heating plate d cannot be controlled for each arbitrary region. That is,
When observing with a microscope, for example, it is often the case that a plurality of specimens of the same type are heated to different temperatures to compare and observe them. Since the conductive film is uniformly provided on the substrate, even if a plurality of samples of the same type are placed on the conductive film, they are all heated only to the same temperature, and at least intentionally create a temperature difference. Can not. For this reason, when performing observations at different temperatures, it is necessary to change the set temperature of the controller each time the sample is changed. For this reason, the operation was troublesome and the speed of observation did not increase.

The present invention has been made in view of the above-mentioned conventional problems, and the heat generation temperature of the heating plate can be controlled over the entire area only by the conductive film without providing a correction means such as a heat diffusion plate. It is an object of the present invention to provide a novel microscope sample temperature controller for a microscope, which can make the temperature difference uniform for each region, and conversely make it possible to make the temperature difference for each region.

[0013]

In order to achieve this object, a microscope sample temperature controller according to claim 1 is provided.
A frame to be mounted on a stage of a microscope, a transparent plate having an outer peripheral portion held by the frame, a transparent conductive film for heat generation formed on the transparent plate and being heated by being energized, and a power supply to the transparent conductive film. A specimen temperature controller for a microscope, comprising: a power supply unit for performing the operation; a transparent conductive film formed in a pattern corresponding to a desired heat generation pattern on a transparent plate.

Therefore, according to this sample temperature controller, the heat generation pattern of the heating plate can be arbitrarily set depending on the pattern of the conductive film. That is, it is easy to heat the entire surface of the heating plate at a uniform temperature, and conversely, to intentionally create a temperature difference for each region. In the present invention, since it is not always necessary to consider the interval between the electrodes in parallel, by selecting a conductive film pattern, almost the entire heating plate having a shape conforming to the required frame shape is directly visible. It can also be used as an area.

In the present invention, various forms are conceivable as specific patterns of the conductive film, but at least the transparent conductive film is not formed on the entire surface of the transparent plate without any blank space, but is described in claim 2. As described above, a desired heat generation pattern can be obtained by partially providing on the transparent plate. In this case, as described in claim 3,
If one or a plurality of linear and / or island shapes are used as the pattern, the pattern of the conductive film becomes a heat generation pattern as it is, so that the pattern design of the conductive film can be easily performed. As a method for forming the conductive film in such a pattern, a resist such as masking is applied to a portion to be blank, or conversely, a necessary portion of the conductive film formed on the entire area of the transparent plate is left. A method such as etching may be employed.

According to a fourth aspect of the present invention, there is provided the sample temperature controller for a microscope according to the third aspect, wherein a plurality of patterns of the transparent conductive film having different circuits are provided. Power supply means is connected to each of the plurality of patterns. In this way, a plurality of conductive films having different circuits can selectively generate heat or control the heat generation temperature individually, depending on the design of the control circuit of the controller. Even when one of the plurality of circuits is disconnected, only the conductive film of another circuit can be used.

According to a fifth aspect of the present invention, there is provided the microscope sample temperature controller according to any one of the second to fourth aspects, wherein the pattern of the transparent conductive film is:
The pattern is characterized in that a heat generation temperature in a region where heat is easily radiated, such as a region in contact with or in proximity to the frame, is higher than a heat generation temperature in other regions. Therefore, the heat generated in a region that is in contact with or in proximity to the frame, the light transmitting hole, or the like is higher than in other regions, so that the temperature of the heat radiation can be corrected. For this reason, a special correction means such as a conventional heat diffusion plate is not required, thereby making it possible to achieve a reduction in thickness and weight, and to apply to both perforated and non-perforated types. Can be. The pattern of the conductive film according to the present invention is for correcting a temperature drop due to heat radiation in a region in contact with or in proximity to the frame, the light-transmitting hole, or the like, and basically covers the entire visible region of the transparent plate. It is often used for the purpose of achieving a uniform temperature, but need not be limited to this.

A microscope specimen temperature controller according to claim 6 is the microscope specimen temperature controller according to any one of claims 2 to 4, wherein the pattern of the transparent conductive film is:
A pattern in which a temperature difference occurs in a plurality of regions on the transparent plate is provided.
Therefore, a plurality of specimens can be simultaneously heated to different temperatures on one transparent plate.

According to a seventh aspect of the present invention, there is provided the microscope sample temperature controller according to the sixth aspect, wherein a visual display for identifying a plurality of regions where temperature differences occur is provided. The transparent plate is provided. With this configuration, regions having different temperature conditions on the transparent plate can be visually distinguished, so that the possibility of mishandling is reduced. This indication may be provided directly on the transparent plate by paint or the like, or a transparent film provided with the indication may be attached to the transparent plate.

[0020]

Embodiments of the present invention will be described below with reference to the drawings. Since the conductive film is transparent,
In the drawings, the portion where the conductive film is formed is represented by a satin pattern surrounded by lines, and the portion having no satin pattern is represented by a blank portion where the electrofilm is not formed. The sample temperature controller of the present invention arranges a transparent conductive film and a blank portion in an appropriate combination, that is, a pattern corresponding to a desired heat generation pattern by partially providing a transparent conductive film on a transparent plate. To form. [A. First Embodiment] (FIGS. 1 to 3) FIGS. 1 to 3 show a main body 1 of a sample temperature controller for a microscope according to a first embodiment.

[A-1. Structure] Like the main body a of the above-mentioned conventional sample temperature controller, the main body 1 is also used by fitting it into the round hole 25a of the microscope stage 25 (see FIG. 3). It has a shallow circular dish-shaped frame 3, but the light-transmitting hole 5 a formed in the bottom wall 5 is not an oval shape but a circular shape slightly smaller than the outer shape of the frame 3. This frame 3
The two transparent plates 7 and 9 made of hard glass and having a disc shape are placed in a state of being overlapped with each other, and a transparent gel-like silicone adhesive 1 is placed between them.
The transparent plates 7 and 9 are bonded to each other by interposing 1 (the thickness is exaggerated in the drawing).

Also in the main body 1, the upper transparent plate 7 is a heating plate, and a transparent conductive film 13 as a heating element is provided on a lower surface thereof in a required pattern by partially providing a blank. Is formed. Conductive film 1
No. 3 is obtained by forming a thin film of a coating material such as an SiO 2 -indium alloy on glass by a sputtering method. As a method for forming the conductive film 13, in addition to the above, various vapor-phase methods such as vacuum deposition may be used. In some cases, a transparent conductive film is cut into a required pattern and adhered to the heating plate 7. You may do it.

The pattern of the conductive film 13 is one of patterns designed to heat the entire area of the heating plate 7 as evenly as possible. The overall shape extends so as to form a number of concentric circles centered on the center of the heating plate 7. Specifically, it is arranged symmetrically with each other in two regions divided at the center of the heating plate 7, and in each region, the central angle at the center is approximately 180 °.
Are arranged in the form of five equally-spaced ripples, and the five arc patterns 13a are
Are connected to one end by connecting both ends to the ends of two adjacent arc patterns. A small circular island pattern 13b is provided at the center, and this island pattern 13b is connected in parallel with the innermost arc pattern 13a. This linear conductive film 13
The line width is constant over the whole except that only the outermost arc pattern 13a 'is thinner than the other arc patterns 13 to some extent.

The conductive film 1 formed in such a pattern
3, two electrodes 15 made of a conductive metal such as a copper foil are separately bonded to both ends of the two arc patterns 13a 'located at the outermost sides. Two lead wires 17 on the power supply side and the ground side are separately connected. These electrodes 15 and lead wires 17
The power supply means is constituted by these. Arc pattern 1
A temperature sensor (not shown) is attached to 3a. Both the lead 17 and the temperature sensor 19 are connected to a temperature control circuit of a controller (not shown), and power is supplied to the conductive film 13 through the lead 17 on the power supply side, so that the conductive film 13 generates heat. In addition, on the upper surface of the heating plate 7, only a peripheral portion thereof (a portion facing the peripheral portion of the bottom wall 5 of the frame 3) is coated with the black paint 21 which also serves as a makeup, and is an unusable area. Is shown.

[A-2. Heating action] Since the main body 1 is configured as described above, the heating plate 7 generates heat at a substantially uniform temperature over the entire area. That is, the conductive film 13
Extend as a whole so as to form a large number of equally spaced concentric circles centered on the center of the heating plate 7, so that the heating plate 7 has a substantially uniform temperature in any region. Fever. Since the line width of the outermost arc pattern 13a 'is narrower to some extent than the line width of the other arc patterns 13a, the electric resistance becomes higher by that much, so that the heat generation temperature in this area is higher than that in other areas. However, since the heat radiation by the frame 3 works positively, the heat generation higher than the others and the above-mentioned heat radiation are canceled out, and as a result, the temperature is settled at a temperature equal to other regions. Then, heating plate 7
Generates heat at a uniform temperature in any position.

[B. Second Embodiment] (FIG. 4) FIG. 4 shows a second embodiment. The second embodiment is different from the main body 1 of the sample temperature controller shown in the first embodiment in that the second embodiment is formed on the outer shape of the frame and the transparent plate and on the heating plate. It is only the pattern of the conductive film. Accordingly, only the bottom surface of the heating plate 7A and the outer shape of the frame 3A are shown in the drawing, and only the difference will be described. (The same applies to the third to thirteenth embodiments described later.)

As shown in the drawing, the planar shape of the heating plate 7A according to this embodiment has a notch 31 in the middle of one side of a horizontally long rectangle, and the corners at both ends of another side opposite to this are oblique. It has a cut shape. The pattern of the conductive film 13A formed on the heating plate 7A also
This is one of the patterns designed to heat the entire area of the heating plate 7A as evenly as possible, and the entire area is a single line. The pattern has such a form that a large number of linear shapes substantially similar to the outer shape of the heating plate 7A are arranged at equal intervals with the central portions of the heating plate 7A being common.
Both ends of 3A are separately located on both sides of the notch 31,
The electrode 15 is bonded here. In the drawings, the line width of the conductive film is shown as being constant. However, in practice, it is preferable to make the outermost pattern thinner to some extent so as to offset the heat radiation by the frame 3A.

[C. Third Embodiment] (FIG. 5) FIG. 5 shows a third embodiment. The planar shape of the heating plate 7B according to this embodiment has an arc-shaped notch 33 in a portion of one side of the square except for both ends, and a side opposite to this has an arc-shaped notch 33 parallel to the notch 33. It has a bent shape. 3B shows a frame. The pattern of the conductive film 13B formed on the heating plate 7B is also one of the patterns designed to heat the entire area of the heating plate 7B as uniformly as possible.
U-shaped pattern 35 extending along the outer shape of the character
And a large number of arc-shaped patterns 36 arranged at equal intervals inside the U-shaped pattern 35 and having an arc shape substantially the same as the arc portion of the U-shaped pattern 35. Both ends are U-shaped so that they are connected in parallel.
It continues to the character pattern 35. U-shaped pattern 35
An electrode 15 (indicated by a two-dot chain line) is adhered to the entire length of the straight portion.

It is conceivable that the electrodes 15 are provided only at both ends of the U-shaped pattern 35. However, since the resistance value of the conductive film 13B and the electrode (such as copper foil) 15 is not small, all the arc patterns 36 are respectively provided. In order to allow the same amount of current to flow, it is desirable to provide them in the form shown in the drawing. Note that the heat radiation by the frame 3B may be corrected by making the line width of the arc pattern 36 at both ends somewhat narrower than the others.

[D. Fourth Embodiment] (FIG. 6) FIG. 6 shows a fourth embodiment. The heating plate 7C according to this embodiment is of a so-called perforated type, has a disk shape, and has a circular light transmitting hole 39 formed at the center thereof. 3C indicates a frame.

The pattern of the conductive film 13C formed on the heating plate 7C is one of the patterns designed so that the slide glass or the like placed on the heating plate 7C can be heated as uniformly as possible. To put it in perspective, a large number of circular patterns 41 each having a part of the circumference cut off are arranged concentrically around the center of the heating plate 7, and both ends of each circular pattern 41 are adjacent to each other. The two circular patterns 41 are connected to one end by being continuously connected to the respective ends. The free end of the innermost circular pattern 41 extends to the outer periphery of the heating plate 7C. Electrodes 15 are adhered to both ends of this one wire.

The innermost circular pattern 41 extends in the vicinity of the light transmitting hole 39 and has a slightly smaller line width than the other circular patterns 41. Therefore, the light transmitting hole 39
The exothermic temperature in the region extending along is somewhat higher than the others. As described above, when the slide glass is placed on the heating plate 7C provided with the light-transmitting hole 39, the temperature of the slide glass is inevitably lower in the essential visible region corresponding to the light-transmitting hole 39 than the others. However, if the heat generation temperature in the region along the light transmitting hole 39 is set higher than the others as in this embodiment, the visible region of the slide glass (the region closing the light transmitting hole). Is heated positively, so that the temperature of the entire slide glass can be made substantially uniform. Outermost circle pattern 41
Also, as for heat dissipation of the frame 3C, the line width is made thinner than the others.

[E. Fifth Embodiment] (FIG. 7) FIG. 7 shows a fifth embodiment. The heating plate 7C according to this embodiment is also a perforated type, and the outer shape is as follows.
It has a plate-like shape in which a rectangular middle portion is formed in a circular shape, and a circular light-transmitting hole 39 is formed in the center portion.
3D indicates a frame. The pattern of the conductive film 13D formed on the heating plate 7D is also one of the patterns designed so that the slide glass or the like placed on the heating plate 7D can be heated as uniformly as possible. Side patterns 43 arranged at both ends in the longitudinal direction so as to extend in parallel with each other;
3 and a large number of main patterns 45 arranged in the width direction of the heating plate 7D and are linear in any part. The electrode 15 is adhered to almost the entire length of the side pattern 43. The meaning of the arrangement of the electrodes is the same as that of the electrodes shown in FIG.

All of the main patterns 45 are bent at an intermediate portion into an arc shape substantially parallel to the contour of the light transmitting hole 39. Accordingly, since the heat generation temperature on the heating plate 7D becomes substantially uniform in a circular area centered on the light transmitting hole 39, for example, when a petri dish is placed on the heating plate 7D, the bottom of the petri dish is placed. The entire wall is heated at a substantially uniform temperature. Note that, even in the conductive film 13D, the line width of the innermost main pattern 45 and the outermost main pattern 45 extending close to the light transmitting hole 39 is slightly smaller than the other main patterns 45. Good.

[F. Sixth Embodiment] (FIG. 8) FIG. 8 shows a sixth embodiment. The pattern of the conductive film 13F according to this embodiment is also one of the patterns designed to heat the entire area of the heating plate 7F as evenly as possible, and the form is the same as that shown in FIG. But almost entirely two lines 4 running parallel to each other
7, 49. The electrodes 15 are adhered to both ends of the two wires 47 and 49, and the two wires 47 and 49 are separately supplied with power. Therefore, even if a failure such as disconnection occurs in one of the lines 47 and 49, it can be used with another line alone.

[G. Seventh Embodiment] (FIG. 9) FIG. 9 shows a seventh embodiment. The pattern of the conductive film 13 </ b> G according to this embodiment is mostly a main pattern 51 connected by one line, but a bypass connected in parallel with a part of the main pattern 51. A pattern 53 is provided. The electrodes 15 are bonded to both ends of the main pattern 51. In the drawing,
Since the sizes of these patterns 51 and 53 per unit area in the heating plate 7G are distributed so as to be substantially equal in any region, the entire area of the heating plate 7G is heated almost uniformly. Is the bypass pattern 53
If the size per unit area is made different from that of the main pattern 51, heating at different temperatures can be performed by one heating plate.

[H. Eighth Embodiment] (FIG. 10) FIG. 10 shows an eighth embodiment. The pattern of the conductive film 13 </ b> H according to this embodiment has a form similar to that shown in FIG. 2, in which a large number of concentric arc patterns 55 are sequentially connected and connected to one line. However, the line width is gradually reduced toward the outside. A circular island pattern 56 is provided at the center, and the island pattern 56 is the innermost arc pattern 5.
5 and in parallel.

The heating pattern of the heating plate 7H differs depending on how much the line width of the circular arc pattern 55 is sequentially reduced and the setting. That is, when the heat generation temperature on the outside is increased to the extent of compensating the heat radiation in the frame 3H, the heat generation pattern on the heating plate 7H is substantially uniform over the entire surface, and the heat generation pattern on the outside is higher than the heat radiation of the frame 3H. When the heat generation temperature in the heating plate 7H is increased, the heat generation pattern on the heating plate 7H becomes a pattern that changes so as to increase toward the outside. Therefore, for example, if two identical specimens are placed on the central part and the peripheral part, the specimens are heated to different temperatures. Of course, the line width at the central portion may be narrowed so that the central portion has a higher temperature than the peripheral portion.

As described above, as a method of adjusting the temperature when the heat generation temperature is changed in place, when the conductive film is formed as a single body as shown in the drawing, the whole is raised and lowered as a whole. However, if the circular arc pattern 55 is, for example, made independent of each other in the central area and in the outer area, it is also possible to control them separately.

[I. Ninth Embodiment] (FIG. 11) FIG. 11 shows a ninth embodiment. The pattern of the conductive film 13I according to the present embodiment is one of the patterns designed so that the heat generation temperature on the heating plate 7I varies locally, and the pattern is bent in a zigzag manner. And the line width is determined by the three divided areas A, B, and C in the longitudinal direction of the heating plate 7I.
It is changed so that it becomes thicker in the order of. Accordingly, the heating temperature on the heating plate 7I is intermediate in the area B, high in the area A, and low in the area C. On the upper surface of the heating plate 7I, that is, on the surface opposite to the surface on which the conductive film 13I is formed, a display line 61 (shown by a dashed line in the drawing) indicating the boundaries of the three regions A, B, and C. Is provided. The display line 61 allows the user to visually check regions having different heat-generating temperatures.

[J. Tenth Embodiment] (FIG. 12) FIG. 12 shows a tenth embodiment. The pattern of the conductive film 13J according to this embodiment is also one of the patterns designed so that the heat generation temperature on the heating plate 7J varies stepwise, and the form is the contour of the heating plate 7J. The three rectangular patterns 65, which are substantially similar to the above, are arranged with their central portions in common, and one corner of each rectangular pattern is interrupted. Connected to a book line. The innermost rectangular pattern 65 has a bypass pattern 66 passing through it.
Are connected in parallel. Then, each rectangular pattern 65
, The line width becomes wider as the line width increases. Therefore, the heat generation temperature on the heating plate 7J decreases from the central portion toward the peripheral portion.

[K. Eleventh Embodiment] (FIG. 13) FIG. 13 shows an eleventh embodiment. In this embodiment, a relatively wide linearly extending conductive film 13K is provided only in a region along the periphery of the heating plate 7K. Accordingly, in the heating plate 7K, only the peripheral portion generates heat at a required temperature, and the central portion has a much lower temperature than the peripheral portion.

[L. Twelfth Embodiment] (FIG. 14) FIG. 14 shows a twelfth embodiment. In this embodiment, the conductive film 13L is provided only at the center of the disk-shaped heating plate 7L.
In L, only the area inside the display line 61 generates heat at a temperature controlled by the controller, and the other areas have a much lower temperature than the central part.

[M. Thirteenth Embodiment] (FIG. 15) FIG. 15 shows a thirteenth embodiment. In this embodiment, the conductive film 13M is formed in an island shape. That is, two right and left island patterns 71 having rectangular island shapes having different sizes are provided in a range excluding the peripheral portion of the rectangular heating plate 7M.
These island patterns 71 are connected to each other by connection patterns 73, and lead patterns 75 are separately extended from the island patterns 71, and the electrodes 15 are bonded to the ends of the lead patterns 75. Therefore, the heat generation pattern on the heating plate 7M substantially follows the shapes of the island pattern 71 and the connection pattern 71. Note that power may be separately supplied to the two island patterns 71, and the two island patterns may be individually controlled.

The embodiment of the present invention has been described above.
The specific configuration of the present invention is not limited to this embodiment, and any change in design or the like without departing from the spirit of the present invention is also included in the present invention. In particular, the pattern of the conductive film is not limited to the type described in the embodiment, and various shapes can be considered. The present invention relates to a noiseless type in which a protective plate is provided with a grounding conductive film, a heating / cooling type in which a cooling element is provided, and a heating plate in which a conductive film is used as a heating element. The present invention can be widely applied to the provided sample temperature controllers for various microscopes. In the above embodiment, the power supply means is constituted by the electrode 15 and the lead wire 17, but the present invention is not limited to this, and is limited to these as long as the power can be supplied to the transparent conductive film. is not.

[0046]

As described above, according to the present invention, the heat generation temperature of the heating plate can be made uniform by using only the conductive film without providing a correction means such as a heat diffusion plate or the like. A temperature difference can be freely provided.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view showing a sample temperature controller according to a first embodiment of the present invention.

FIG. 2 is an enlarged bottom view of a heating plate of the specimen temperature controller shown in FIG.

FIG. 3 is an enlarged sectional view of the sample temperature controller shown in FIG. 1 taken along the line AA in FIG.

FIG. 4 is a view showing a pattern of a conductive film of a sample temperature controller according to a second embodiment of the present invention.

FIG. 5 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a third embodiment of the present invention.

FIG. 6 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a fourth embodiment of the present invention.

FIG. 7 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a fifth embodiment of the present invention.

FIG. 8 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a sixth embodiment of the present invention.

FIG. 9 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a seventh embodiment of the present invention.

FIG. 10 is a diagram showing a pattern of a conductive film of a sample temperature controller according to an eighth embodiment of the present invention.

FIG. 11 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a ninth embodiment of the present invention.

FIG. 12 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a tenth embodiment of the present invention.

FIG. 13 is a diagram showing a pattern of a conductive film of the sample temperature controller according to the eleventh embodiment of the present invention.

FIG. 14 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a twelfth embodiment of the present invention.

FIG. 15 is a diagram showing a pattern of a conductive film of a sample temperature controller according to a thirteenth embodiment of the present invention.

FIG. 16 is a plan view showing an example of a conventional sample temperature controller.

FIG. 17 is an enlarged perspective view of a heating plate of the sample temperature controller in FIG. 16;

FIG. 18 is an enlarged sectional view taken along the line BB of FIG. 16;

[Explanation of symbols]

1 ... Sample temperature controller for microscope 3 ... Frame 7
... Transparent plate 13 ... Transparent conductive film 13a, 13a '... Transparent conductive pattern 17 ... Lead wire 19 ... Temperature sensor 25 ... Microscope stage 3A ... Frame 7A ... Transparent plate 13A ... Transparent conductive film 3B ... Frame 7B ... Transparent plate 13B: Transparent conductive film 35, 36: Pattern of transparent conductive film 3C: Frame 7C: Transparent plate 13C: Transparent conductive film 41: Pattern of transparent conductive film 3D: Frame 7D: Transparent plate 13D: Transparent conductive film 43, 45: Transparent Pattern of conductive film 3F: Frame 7F: Transparent plate 13F: Transparent conductive film 47, 49: Pattern of transparent conductive film 3G: Frame 7G: Transparent plate 13G: Transparent conductive film 51, 53: Pattern of transparent conductive film 3H: Frame 7H ... Transparent plate 13H ... Transparent conductive film 55,56 ... Transparent conductive Film pattern 3I ... Frame 7I ... Transparent plate 13I ... Transparent conductive film 61 ... Display 3J ... Frame 7J ... Transparent plate 13J ... Transparent conductive film 65 ... Transparent conductive film pattern 3K ... Frame 7K ... Transparent plate 13K ... Transparent conductive film 3L ... Frame 7L ... Transparent plate 13L ... Transparent conductive film 3M ... Frame 7M ... Transparent plate 13M ... Transparent conductive film 71 ... (Island-shaped) transparent conductive film pattern
73, 75: Pattern of transparent conductive film

Claims (7)

[Claims] A frame mounted on a stage of a microscope; a transparent plate having an outer peripheral portion held by the frame; a transparent conductive film formed on the transparent plate and generating heat when energized; A specimen temperature controller for a microscope, comprising: a power supply unit for supplying power to a film, wherein the transparent conductive film is formed in a pattern corresponding to a desired heat generation pattern on a transparent plate. Sample temperature controller for use. 2. The microscope sample temperature controller according to claim 1, wherein the transparent conductive film is partially provided on the transparent plate and formed in a desired pattern. Sample temperature controller for use. 3. The sample temperature controller for a microscope according to claim 2, wherein the pattern of the transparent conductive film is formed into one or a plurality of linear and / or island shapes. Management device. 4. A sample temperature controller for a microscope according to claim 3, wherein a plurality of patterns of the transparent conductive film having different circuits are provided, and power supply means is connected to each of the plurality of patterns. Characteristic sample temperature controller for microscopes. 5. The sample temperature controller for a microscope according to claim 2, wherein the pattern of the transparent conductive film has a heat generation temperature in an area where heat is easily radiated such as an area in contact with or close to the frame. A specimen temperature controller for a microscope, wherein the pattern has a pattern that is higher than an exothermic temperature in a region. 6. A sample temperature controller for a microscope according to claim 2, wherein the pattern of the transparent conductive film is a pattern in which a temperature difference occurs in a plurality of regions on the transparent plate. A specimen temperature controller for microscopes, characterized by the following. 7. A sample temperature controller for a microscope according to claim 6, wherein a visual indication for identifying a plurality of regions where a temperature difference occurs is provided on said transparent plate. Sample temperature controller.