JP2001307988A5 - - Google Patents

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Publication number
JP2001307988A5
JP2001307988A5 JP2000123143A JP2000123143A JP2001307988A5 JP 2001307988 A5 JP2001307988 A5 JP 2001307988A5 JP 2000123143 A JP2000123143 A JP 2000123143A JP 2000123143 A JP2000123143 A JP 2000123143A JP 2001307988 A5 JP2001307988 A5 JP 2001307988A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000123143A
Other languages
Japanese (ja)
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JP2001307988A (ja
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Publication date
Application filed filed Critical
Priority to JP2000123143A priority Critical patent/JP2001307988A/ja
Priority claimed from JP2000123143A external-priority patent/JP2001307988A/ja
Publication of JP2001307988A publication Critical patent/JP2001307988A/ja
Publication of JP2001307988A5 publication Critical patent/JP2001307988A5/ja
Withdrawn legal-status Critical Current

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JP2000123143A 2000-04-24 2000-04-24 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法 Withdrawn JP2001307988A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000123143A JP2001307988A (ja) 2000-04-24 2000-04-24 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000123143A JP2001307988A (ja) 2000-04-24 2000-04-24 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2001307988A JP2001307988A (ja) 2001-11-02
JP2001307988A5 true JP2001307988A5 (enExample) 2007-06-14

Family

ID=18633504

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000123143A Withdrawn JP2001307988A (ja) 2000-04-24 2000-04-24 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法

Country Status (1)

Country Link
JP (1) JP2001307988A (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007333965A (ja) * 2006-06-14 2007-12-27 Adtec Engineeng Co Ltd 露光用照明装置
JP5184767B2 (ja) * 2006-09-04 2013-04-17 株式会社日立ハイテクノロジーズ 露光装置
JP4955436B2 (ja) * 2007-03-26 2012-06-20 フェニックス電機株式会社 光源装置ならびにこれを用いた露光装置
CN108897198A (zh) * 2018-08-31 2018-11-27 武汉华星光电技术有限公司 曝光机的光源更换系统以及曝光机

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