JP2001307988A5 - - Google Patents
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- Publication number
- JP2001307988A5 JP2001307988A5 JP2000123143A JP2000123143A JP2001307988A5 JP 2001307988 A5 JP2001307988 A5 JP 2001307988A5 JP 2000123143 A JP2000123143 A JP 2000123143A JP 2000123143 A JP2000123143 A JP 2000123143A JP 2001307988 A5 JP2001307988 A5 JP 2001307988A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000123143A JP2001307988A (ja) | 2000-04-24 | 2000-04-24 | 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000123143A JP2001307988A (ja) | 2000-04-24 | 2000-04-24 | 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001307988A JP2001307988A (ja) | 2001-11-02 |
| JP2001307988A5 true JP2001307988A5 (enExample) | 2007-06-14 |
Family
ID=18633504
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000123143A Withdrawn JP2001307988A (ja) | 2000-04-24 | 2000-04-24 | 照明装置と照明方法、および該照明装置を備えた露光装置とこれらによるデバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001307988A (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007333965A (ja) * | 2006-06-14 | 2007-12-27 | Adtec Engineeng Co Ltd | 露光用照明装置 |
| JP5184767B2 (ja) * | 2006-09-04 | 2013-04-17 | 株式会社日立ハイテクノロジーズ | 露光装置 |
| JP4955436B2 (ja) * | 2007-03-26 | 2012-06-20 | フェニックス電機株式会社 | 光源装置ならびにこれを用いた露光装置 |
| CN108897198A (zh) * | 2018-08-31 | 2018-11-27 | 武汉华星光电技术有限公司 | 曝光机的光源更换系统以及曝光机 |
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2000
- 2000-04-24 JP JP2000123143A patent/JP2001307988A/ja not_active Withdrawn