JP2001301968A - Tray conveyer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To favorably convey a tray arranged inclinedly on an elevator. SOLUTION: Elevation mechanisms 12a-12d are provided in a lower part of an elevation base 11, a tray base 13a is provided in a lower part of the mechanisms 12a, 12b, a tray base 13b is provided in a lower part of the mechanisms 12c, 12d, a tray holding claw 14a for grasping the tray is provided in the tray base 13a, and a tray holding claw 14b for grasping the tray is provided in the tray base 13b. The tray bases 13a, 13b are movable upwards and downwards independently each other, and the positions of the tray holding claws 14a, 14b are changed in response to the inclination of the tray by the independent vertical motion.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a tray transport device for transporting a tray, and more particularly to a tray transport device for transporting a tray sandwiched between the trays.

[0002]

2. Description of the Related Art When performing various inspections of a manufactured semiconductor, it is general that the semiconductor is transported to each inspection step for each tray containing a plurality of semiconductors. FIGS. 20 to 22 are front views showing the operation of the tray transport device 100 used when transporting such a tray containing a plurality of semiconductors.

[0003] The tray transport device 100 includes a lifting base 10.
1. Elevating mechanisms 102a and 102b attached to the tray transport device 100 to perform vertical correction movement, and a tray base 10 attached to the elevating mechanisms 102a and 102b.
3 and tray holding claws 104 a and 104 b attached to the tray base 103, and carry the work of transporting the tray 110 arranged on the elevator 120.

When carrying out the transport operation of the tray 110, first, as shown in FIG.
Direction), and the claw portions of the tray holding claws 104a and 104b are arranged at the edge of the tray 110 arranged at the uppermost stage. Thereafter, as shown in FIG. 21, the tray holding claws 104a, 104b are moved inward (T1, T2 directions).
, And the edge of the tray 110 is held by the tray holding claws 104a and 104b. Next, as shown in FIG. 22, the lifting base 101 is raised upward (U direction) in this state.
To carry out the transport operation of the tray 110.

[0005]

However, in the conventional tray transporting apparatus 100, the tray 110 is moved to the elevator 120.
When the tray 110 is disposed inclined upward, there is a problem that the tray 110 cannot be transported properly.

FIG. 23 to FIG. 25 are front views showing the operation of transporting the tray 110 when the tray 110 is arranged obliquely on the elevator 120. FIG. First, FIG.
As shown in FIG. 3, the elevating base 101 is moved downward (S direction), and the claw portions of the tray holding claws 104a and 104b are arranged on the edge portion of the tray 110 arranged at the uppermost stage. At this time, since the tray 110 is disposed obliquely, the claw portion of the tray holding claw 104a can be arranged at the edge of the tray 110, but the claw portion of the tray holding claw 104b is Cannot be placed at the edge. Therefore, in this state, the tray holding claw 1
24, the tray 110 is held only by the tray holding claws 104a, and the elevating base 101 is moved downward (S direction) as shown in FIG. 25), the tray 110 is disengaged from the tray holding claw 104a as shown in FIG. 25, and the tray 110 cannot be transported.

[0007] The present invention has been made in view of such a point, and a tray transport apparatus capable of transporting a tray satisfactorily even when the tray is disposed on an elevator at an angle. The purpose is to provide.

[0008]

According to the present invention, in order to solve the above-mentioned problems, in a tray transporting apparatus for transporting a tray, a lifting base arranged on an upper part and a first lifting mechanism attached to the lifting base are provided. A second elevating mechanism attached to the elevating base, a first tray base attached to the first elevating mechanism, a second tray base attached to the second elevating mechanism, The first tray holding claw attached to the tray base and holding the tray from one side by the holding operation, and the first tray holding claw attached to the second tray base and held by the first tray holding claw by the holding operation. And a second tray holding claw that holds the tray from the opposite side.

Here, the lifting base holds the entire apparatus, the first lifting mechanism moves the first tray base up and down, and the second lifting mechanism moves the second tray base up and down. , The first tray base holds a first tray holding claw, the second tray base holds a second tray holding claw, and the first tray holding claw and the second tray holding claw are The tray is held from both sides by the holding operation.

[0010]

Embodiments of the present invention will be described below with reference to the drawings. First, a first embodiment of the present invention will be described.

FIG. 1 shows a tray conveying device 10 according to the present embodiment.
2 is a right side view, FIG. 3 is a left side view, and FIG. 4 is a bottom view. Tray transport device 10
Is an elevating base 11 and an elevating base 11
Lifting mechanism 12 that is the first lifting mechanism attached to
a, 12b, 12j, a lifting mechanism 12c, 12d, 12 which is a second lifting mechanism attached to the lifting base 11.
e, a tray base 13a as a first tray base attached to the first elevating mechanism, a tray base 13 as a second tray base attached to the second elevating mechanism
b, elevating mechanisms 12h and 12i as third elevating mechanisms attached to the elevating base 11, and elevating mechanisms 12f and 12 as fourth elevating mechanisms attached to the elevating base 11.
g, a tray base 13d as a third tray base attached to the third lifting mechanism, and a tray base 13 as a fourth tray base attached to the fourth lifting mechanism
c, a tray holding claw 14a, which is a first tray holding claw that is attached to the first tray base and holds the tray from one side by the holding operation, is attached to the second tray base, and the first tray is held by the holding operation. Second holding the tray from the side opposite to the side holding the holding claw
The tray holding claw 14b, which is a tray holding claw, is attached to the third tray base, and the first holding claw 14b
3rd holding the tray from the side holding the tray holding claw
The tray holding claw 14d, which is the tray holding claw, is attached to the fourth tray base, and the second holding is performed by the holding operation.
4th holding the tray from the side holding the tray holding claw
Holding claw 14c, which is the tray holding claw of the shaft 1,
5a, 15b and knobs 16a, 16b.

In FIGS. 1 to 3, for the sake of illustration, three lifting mechanisms 12a, 12b and 12j are used as a first lifting mechanism, and a lifting mechanism 12 is used as a second lifting mechanism.
c, 12d and 12e, three elevating mechanisms, as third elevating mechanisms, two elevating mechanisms 12h and 12i,
Although only two elevating mechanisms 12f and 12g are described as the elevating mechanisms of the above, the first to fourth elevating mechanisms are:
It is assumed that each is constituted by four lifting mechanisms.

The elevating base 11 is arranged at the uppermost part of the apparatus and is connected to a drive unit for moving the whole apparatus up and down. The elevating mechanisms 12a to 12j include elevating mechanisms 12a, 12b, and 12j that constitute a first elevating mechanism, and elevating mechanisms 12c, 12d, and 12e that constitute a second elevating mechanism. Mechanisms 12h, 12i, etc., are divided into elevating mechanisms 12f, 12g, etc. constituting a fourth elevating mechanism,
It is connected to the lower part of the lifting base 11.

The tray base 13a is located below the lifting mechanisms 12a, 12b, 12j and the like constituting the first lifting mechanism, and the tray base 13b is located below the lifting mechanisms 12c, 12d and 12e constituting the second lifting mechanism. , Tray base 13
c is a lifting mechanism 12f, 12f constituting a fourth lifting mechanism.
The lower part such as g and the tray base 13d are attached to the lower part of the elevating mechanisms 12h and 12i constituting the third elevating mechanism so as to be vertically movable respectively.

The tray holding claws 14a are provided on the tray base 13
a, the tray holding claws 14b are located on the outer edge of the tray base 13b, and the tray holding claws 14c are located on the outer edge of the tray base 13c.
Are mounted on the outer edge portion of the tray base 13d such that the tray holding claws 14a and 14b and the tray base 13c and tray base 13d face each other. The tray holding claw 14a is configured by providing a plurality of types of claws 14aa that hold the tray on the outer periphery of a rotating body 14ab that is a first rotating body.
The claw 14a used for holding the tray by rotation of b
a can be selected. Similarly, tray holding claw 1
4b, by providing a plurality of types of claws 14ba on the outer periphery of the rotator 14bb as the second rotator, the tray holding claw 14d is provided with a plurality of types of claws 14da on the outer periphery of the rotator 14db as the third rotator. Is provided, the tray holding claw 14c is configured by providing a plurality of types of claws 14ca on the outer periphery of a rotating body 14cb as a fourth rotating body, and the tray holding claw 14c is rotated by rotating the rotating bodies 14bb, 14cb, and 14db. 14ba, 14 used for holding
ca, 14da can be selected. Rotating body 14
The ab and the rotator 14db are linked via a shaft 15b, and the rotator 14bb and the rotator 14cb are linked via a shaft 15a. A knob 16a for rotating the rotator 14cb is provided on the rotator 14cb. 14d
The knob 16b for rotating the rotating body 14db is connected to b.

Next, the operation of the tray transport device 10 will be described with reference to FIGS. Tray transport device 10
The whole can be moved up and down by driving a drive unit to which the elevating base 11 is attached, and the tray base 13a includes an elevating mechanism 12a that constitutes a first elevating mechanism.
The drive of the tray base 13b
Are lifting mechanisms 12c, 12 constituting a second lifting mechanism.
The tray base 13c is driven by d, 12e, etc.
The tray base 13d is driven by the lifting mechanisms 12f, 12g, etc., constituting the fourth lifting mechanism, and driven by the lifting mechanisms 12h, 12i, etc., constituting the third lifting mechanism.
The vertical movement with respect to the lifting base 11 is performed. Here, the vertical movement of the tray base 13a and the vertical movement of the tray base 13d, the vertical movement of the tray base 13b and the vertical movement of the tray base 13c are performed in conjunction with each other, and the vertical movement of the tray bases 13a and 13d and the tray Base 13
The vertical movements of b and 13c are performed independently.

By rotating the knob 16a, the rotating bodies 14bb and 14cb rotate in conjunction with each other.
b, the rotating bodies 14ab, 14db
Rotates in conjunction with. With these, the nail 14a to be used
a, 14ba, 14ca, and 14da can be selected. Here, the nails 14aa, 14b to be used are used.
a, 14ca, and 14da are selected according to the nail 14a to be selected.
a, 14ba, 14ca, 14da to the rotating body 14a
b, 14bb, 14cb, and 14db.

Rotors 14ab, 14bb, 14cb, 1
Claws 14aa, 14ba, 1 arranged at the bottom of 4db
4ca and 14da are tray bases 13a to 13a, respectively.
3d can be moved in parallel.
By performing a holding operation in which a, 14ba, 14ca, and 14da move inward, the tray can be held from the edge portion.

Next, the operation of the tray transporting device 10 for transporting a tray arranged in an inclined manner will be described. FIG. 5 to FIG. 9 are front views showing a state in which the tray transport device 10 transports the tray 30 arranged on the elevator 20 at an angle.

First, as shown in FIG.
Is driven by the drive unit to which the tray transport device 1 is attached.
0 is moved downward (direction A). The movement here is performed by the elevator 20 positioned by an optical sensor or the like.
Is performed by moving the entire tray transport device 10 by a fixed amount. The movement position of the entire tray transport device 10 may be controlled while detecting the position of the uppermost tray 30 using an optical sensor or the like.

When the tray transport device 10 reaches a predetermined position by the movement of the entire tray transport device 10, the tray base 13a is then driven by driving the lifting mechanisms 12a to 12j.
13d is performed. As described above, the movement of the tray bases 13a and 13d and the
b and 13c are performed independently of each other, and the movement here is also performed by the elevator 20 positioned by an optical sensor or the like.
Is performed by moving the entire tray transport device 10 by a fixed amount. Note that the movement position may be controlled while detecting the position of the uppermost tray 30 with an optical sensor or the like. In the case of FIG. 6, the tray rotating claw 14 attached to the tray base 13a
The claw 14aa of a has already reached the edge of the tray 30, but the claw 14ba of the tray rotating claw 14b attached to the tray base 13b has not reached the edge of the tray 30. Therefore, with the positions of the tray bases 13a and 13d fixed, only the tray bases 13b and 13c are lowered (in the direction B), and the claws 14ba of the tray rotating claws 14b attached to the tray base 13b are moved to the tray 3.
Move to the edge of 0.

FIG. 7 shows the tray base 13b,
13C shows a state in which only 13c is lowered (direction B),
Thus, even when the tray 30 is disposed at an angle, the tray holding claw 1 is securely attached to the edge of the tray 30.
4a to 14d claws 14aa, 14ba, 14ca, 14
da can be arranged.

Claws 14a of the tray holding claws 14a to 14d
When a, 14ba, 14ca, and 14da are arranged at the edge of the tray 30, the claws 14aa and 14da are then moved to FIG.
7, the claws 14ba, 14ca are respectively moved in the C2 direction shown in FIG. 7, and as shown in FIG. 8, the edges of the tray 30 are moved to the claws 14aa, 14ba, 14ca,
Hold by 14da.

Thereafter, the drive unit to which the lifting base 11 is attached is driven to move the entire tray transport device 10 upward (in the direction D) as shown in FIG. 8, and the tray bases 13b and 13c are raised upward (E). Direction). As a result, as shown in FIG.
Holds the tray 30, and the tray 30 can be transported.

As described above, in this embodiment, the tray base 1
Vertical movement of 3a, 13d and tray bases 13b, 13c
Of the tray 3
0, the edge portion of the tray 30 is securely held and the tray 3
0 can be transported favorably.

In this embodiment, four independent tray bases 13a to 13d are provided. However, by integrating the tray bases 13a and 13d and the tray bases 13b and 13c, respectively, two independent tray bases are provided. It is good also as being comprised from.

It is also possible to provide a configuration in which five or more independent tray bases are provided, and a tray holding claw is provided on each tray base. Next, a second embodiment of the present invention will be described.

This embodiment is an application of the first embodiment, and is different from the first embodiment in that all of the tray bases 13a to 13d can move up and down independently of each other. In the following, description will be made focusing on differences from the first embodiment,
The description of the same parts as those in the first embodiment will be omitted.

FIG. 10 is a right side view showing the configuration of the tray transport device 40 in the present embodiment, FIG. 11 is a left side view, and FIG. 12 is a bottom view. Here, the front view is omitted because it is similar to that of the first embodiment.

The difference of the configuration of the tray transport device 40 from the first embodiment is that Oldham couplings 41a to 41d are attached to the shafts 15a and 15b. As shown in FIGS. 10 to 12, the Oldham coupling 4
1a is between the rotating body 14bb and the shaft 15a, the Oldham coupling 41b is between the rotating body 14cb and the shaft 15a, the Oldham coupling 41c is between the rotating body 14db and the shaft 15b, and the Oldham coupling 41d is the rotating body 1
4ab and the shaft 15b are provided so as to be interposed respectively.

FIG. 13 to FIG.
Is a right side view showing a state in which a tray 30 arranged on the elevator 20 is inclined. Note that the inclination of the tray 30 in the first embodiment is
In this embodiment, the case where the tray 30 is inclined in the direction parallel to the shafts 15a and 15b will be described.

First, as shown in FIG.
The drive unit to which 1 is attached is driven to move the entire tray transport device 40 downward (F direction). When the tray transport device 40 reaches a predetermined position due to the movement of the entire tray transport device 40, the tray bases 13a to 13d are moved by driving the elevating mechanisms 12a to 12j. As described above, the tray bases 13a to 13a
The movement of 3d is performed independently of each other. In the case of FIG. 14, the tray rotating claw 14 attached to the tray base 13b
The claw 14ba of b has already reached the edge of the tray 30, but the claw 14ca of the tray rotating claw 14c attached to the tray base 13c has not reached the edge of the tray 30. Therefore, only the tray bases 13c and 13d are lowered (in the direction G), and the claws 14ca of the tray rotating claws 14c attached to the tray base 13c are moved to the tray 3.
Move to the edge of 0.

FIG. 15 shows the tray base 13 as described above.
This shows a state in which only c and 13d are lowered (G direction), whereby the tray holding claws 14a to 14d are surely provided on the edge portion of the tray 30 even when the tray 30 is inclined. Nails 14aa, 14ba, 14ca,
14 da can be arranged. Here,
The displacement of the shafts 15a and 15b connecting the tray bases 13c and 13d and the tray bases 13a and 13b due to the movement of the tray bases 13c and 13d is absorbed by the Oldham couplings 41a to 41d, respectively.

Claws 14a of the tray holding claws 14a to 14d
When a, 14ba, 14ca, and 14da are arranged at the edge of the tray 30, the edges of the tray 30 are then moved by the claws 14aa to 14da.
It is held by 4ba, 14ca, and 14da.

Thereafter, the drive unit to which the lifting base 11 is attached is driven to move the entire tray transport device 40 upward (I direction) as shown in FIG. 15, and the tray bases 13c and 13d are raised upward (H). Direction). As a result, as shown in FIG.
0 holds the tray 30, and the tray 30 can be transported.

As described above, in this embodiment, the tray base 1
Since the vertical movements of 3a to 13d are performed independently of each other, even when the tray 30 is arranged to be inclined on the elevator 20, the edge portion of the tray 30 is securely held and the transport of the tray 30 is performed. It can be performed well.

In the present embodiment, the case where the tray 30 is arranged to be inclined in the direction parallel to the shafts 15a and 15b has been described.
The tray base 13a may be disposed at an angle in the vertical direction with respect to the shaft 5a, may be disposed at an angle to the shafts 15a and 15b, or may be distorted in the shape of the tray 30. The vertical movement of 13d is performed independently of each other, so that the edge portion of the tray 30 is securely held and the tray 30 can be transported satisfactorily.

In this embodiment, four independent tray bases 13a to 13d are provided. However, five or more independent tray bases are provided with tray holding claws, and the respective tray bases are vertically moved independently of each other. It may be configured to be movable.

Furthermore, in this embodiment, the tray is held by the tray holding claws from two sides facing the tray, but the tray may be held by four sides. Next, a third embodiment of the present invention will be described.

This embodiment is an example in which the tray transport device is configured by using the tray transport device described in the first and second embodiments. In the following, the description of the tray transport device itself is given in the first embodiment or the second embodiment.
Since the configuration is the same as that of the embodiment, the description thereof will be omitted, and the description will focus on the overall operation of the tray transport device.

FIG. 17 is a configuration diagram showing the configuration of the tray transport device 50. The tray transport device 50 includes a tray supply elevator 53 for stacking and arranging trays containing semiconductors and the like, a tray discharge elevator 54 for stacking and arranging trays after taking out semiconductors and the like, and moving the tray to a predetermined position. The tray stacked on the XY table 55 and the tray supply elevator 53 is
Supply tray transport device 5 for transporting to Y table 55
1. The discharge tray transport device 52, the supply tray transport device 51, and the discharge tray transport device 52 that transport the tray from which the semiconductor and the like placed on the XY table 55 have been taken out to the tray discharge elevator 54 move. Rail 5
6, and optical sensors 57a and 57 for detecting the position of the tray
b.

Next, the operation of the tray conveying device 50 will be described. The tray transfer device 50 moves the tray containing semiconductors and the like placed on the tray supply elevator 53 to X
After being transported to the Y table 55 and the operation of taking out semiconductors and the like from the XY table 55 is completed, the empty tray is collected in the tray discharge elevator 54. Hereinafter, the details of these operations will be described.

First, the XY table 5 of the tray containing the semiconductors and the like placed on the tray supply elevator 53 is stored.
The operation of transporting to No. 5 will be described. First, the supply tray transport device 51 advances on the rail 56 in the X direction shown in FIG. 17 and moves to the upper portion of the tray supply elevator 53.
Next, the tray supply elevator 53 is raised until the uppermost tray disposed there reaches the optical axis of the optical sensors 57a and 57b. Then, the supply tray transport device 5
1 descends (Z direction), the uppermost tray arranged on the tray supply elevator 53 is grasped by the tray holding claw, and is raised as it is. The ascending supply tray transport device 51 advances on the rail 56 in the X direction, moves to the upper portion of the XY table 55, and then lowers again, and places the grasped tray on the XY table 55.

Next, a description will be given of a transport operation when the empty tray on the XY table 55 is collected in the tray discharge elevator 54. First, the discharge tray transport device 52 advances on the rail 56 in the X direction, and moves to the XY table 55. After that, the discharge tray transport device 52 is lowered, and the empty tray arranged on the XY table 55 is gripped by the tray holding claws. Thereafter, the discharge tray transport device 52 is raised while holding the empty tray, and is moved on the rail 56 to the upper portion of the tray discharge elevator 54 as it is. The discharge tray transport device 52 that has moved to the upper portion of the tray discharge elevator 54 descends there, and places the empty tray that has been gripped on the tray discharge elevator 54.

Next, the operation of the tray conveying device 50 will be described with reference to a flowchart. FIG. 18 is a flowchart showing the operation of transporting the trays arranged on the tray supply elevator 53 to the XY table 55.

[S1] The supply tray transport device 51 advances on the rail 56 in the X direction, and the tray supply elevator 5
Move to the top of 3. [S2] The tray supply elevator 53 is raised until the trays placed there reach the optical sensors 57a and 57b.

[S3] The supply tray transport device 51 is lowered, and the tray supply elevator 5 is moved by the tray holding claws.
Grab the upper tray. [S4] With the tray held, the supply tray transport device 51 is raised.

[S5] With the tray held, the supply tray transport device 51 advances on the rail 56 in the X direction, and
Move to the upper part of the table 55. [S6] The supply tray transport device 51 is lowered.

[S7] The tray holding claws are opened, and the grasped tray is placed on the XY table 55. [S8] The supply tray transport device 51 is raised.

FIG. 19 is a flowchart showing a transport operation when the empty tray on the XY table 55 is collected in the tray discharge elevator 54. [S10] The discharge tray transport device 52 moves on the rail 56, moves to the XY table 55, descends as it is, and grasps an empty tray arranged on the XY table 55 by the tray holding claw.

[S11] With the empty tray held,
The discharge tray transport device 52 rises. [S12] With the empty tray held, the discharge tray transport device 52 moves on the rail 56 and moves to the upper part of the tray discharge elevator 54.

[S13] The discharge tray transport device 52 descends. [S14] The tray holding claws are opened, and the empty tray being gripped is placed on the tray discharge elevator 54.

[S15] The discharge tray transport device 52 moves up, and then moves on the rail 56 to the upper portion of the XY table 55.

[0054]

As described above, according to the present invention, the first tray base and the second tray base can be moved up and down independently of each other, and the first tray holder attached to the first tray base can be moved. Since the tray is held by the holding operation of the claw and the second tray holding claw attached to the second tray base, the edge portion of the tray is securely held even when the tray is inclined. In addition, the tray can be transported favorably.

[Brief description of the drawings]

FIG. 1 is a front view showing a configuration of a tray transport device.

FIG. 2 is a right side view illustrating a configuration of the tray transport device.

FIG. 3 is a left side view showing the configuration of the tray transport device.

FIG. 4 is a bottom view showing the configuration of the tray transport device.

FIG. 5 is a front view illustrating a state in which the tray transport device transports a tray that is arranged on the elevator at an angle.

FIG. 6 is a front view illustrating a state in which the tray transport device transports a tray that is arranged to be inclined on an elevator.

FIG. 7 is a front view illustrating a state in which the tray transport device transports a tray that is arranged to be inclined on the elevator.

FIG. 8 is a front view illustrating a state in which the tray transport device transports a tray that is arranged on the elevator at an angle.

FIG. 9 is a front view showing a state in which the tray transport device transports a tray that is arranged on the elevator at an angle.

FIG. 10 is a right side view showing the configuration of the tray transport device.

FIG. 11 is a left side view showing the configuration of the tray transport device.

FIG. 12 is a bottom view showing the configuration of the tray transport device.

FIG. 13 is a right side view illustrating a state in which the tray transport device transports a tray arranged on an elevator in an inclined manner.

FIG. 14 is a right side view illustrating a state in which the tray transport device transports a tray that is arranged to be inclined on an elevator.

FIG. 15 is a right side view showing a state in which the tray transport device transports a tray that is arranged on an elevator in an inclined manner.

FIG. 16 is a right side view illustrating a state in which the tray transport device transports a tray arranged on an elevator in a tilted manner.

FIG. 17 is a configuration diagram illustrating a configuration of a tray transport device.

FIG. 18 is a flowchart illustrating a transport operation of a tray arranged on a tray supply elevator to an XY table.

FIG. 19 is a flowchart illustrating a transport operation when an empty tray on the XY table is collected in the tray discharge elevator.

FIG. 20 is a front view showing the operation of a tray carrying device used for carrying a tray containing a plurality of semiconductors.

FIG. 21 is a front view showing the operation of a tray carrying device used when carrying a tray containing a plurality of semiconductors.

FIG. 22 is a front view showing the operation of a tray transport device used when transporting a tray containing a plurality of semiconductors.

FIG. 23 is a front view showing the operation of transporting the tray when the tray is arranged inclined on the elevator.

FIG. 24 is a front view showing the operation of transporting the tray when the tray is arranged inclined on the elevator.

FIG. 25 is a front view showing the operation of transporting the tray when the tray is arranged inclined on the elevator.

[Explanation of symbols]

10, 40: transport device, 11: elevating base, 12a-1
2j: lifting mechanism, 13a to 13d: tray base, 14
a to 14d: tray holding claws, 14aa, 14ba, 14
ca, 14da ... nail, 14ab, 14bb, 14cb,
14db: rotating body, 15a, 15b: shaft, 16
a, 16b: knob, 20: elevator, 30: tray, 41a to 41d: Oldham coupling, 50: tray transport device, 51: supply tray transport device, 52: discharge tray transport device, 53: tray supply elevator, 54 ...
Elevator for tray discharge

Claims (10)

[Claims] 1. A tray transport device for transporting a tray, comprising: an elevating base arranged at an upper part; a first elevating mechanism attached to the elevating base; a second elevating mechanism attached to the elevating base; A first tray base attached to the first elevating mechanism; a second tray base attached to the second elevating mechanism; attached to the first tray base; And a second tray holding claw attached to the second tray base and holding the tray from a side opposed to a side held by the first tray holding claw by a holding operation. A tray transport device, comprising: 2. The tray transport device according to claim 1, wherein the first tray base and the second tray base can move up and down independently of each other. 3. The first tray base is moved to a position where the first tray holding claw can hold the tray, and the second tray base is moved by the second tray holding claw. 3. The tray transport device according to claim 2, wherein the tray transport device moves to a position where the tray can be held. 4. The first tray holding claw is provided by providing a plurality of types of claws for holding the tray on an outer periphery of a first rotating body. The claw to be used for holding is selectable, and the second tray holding claw is configured by providing a plurality of types of claws for holding the tray on the outer periphery of a second rotating body, and the second rotation The tray carrier according to claim 1, wherein the claw used for holding the tray can be selected by rotation of the body. 5. A third elevating mechanism attached to the elevating base; a fourth elevating mechanism attached to the elevating base; a third tray base attached to the third elevating mechanism; A fourth tray base attached to the elevating mechanism, a third tray holding claw attached to the third tray base, and holding the tray from a side held by the first tray holding claw by a holding operation; The fourth tray holding claw attached to the fourth tray base and holding the tray from the side held by the second tray holding claw by a holding operation, further comprising: a fourth tray holding claw. Tray transport device. 6. The apparatus according to claim 1, wherein the first tray base, the second tray base, the third tray base, and the fourth tray base can move up and down independently of each other. Item 6. The tray conveying device according to Item 5. 7. The first tray base is moved to a position where the first tray holding claw can hold the tray, and the second tray base is moved to a position where the second tray holding claw is the second tray holding claw. The third tray base moves to a position where the third tray holding claw can hold the tray; and the fourth tray base moves to a position where the third tray holding claw can hold the tray. The tray carrying device according to claim 6, wherein the tray holding claw moves to a position where the tray holding claw can hold the tray. 8. The first tray holding claw is provided by providing a plurality of types of claws for holding the tray on the outer periphery of a first rotating body. The claw to be used for holding is selectable, and the second tray holding claw is configured by providing a plurality of types of claws for holding the tray on the outer periphery of a second rotating body, and the second rotation The rotation of the body enables selection of the claw to be used for holding the tray, and the third tray holding claw is provided by providing a plurality of types of claws for holding the tray on the outer periphery of the third rotating body. The claw to be used for holding the tray can be selected by rotation of the third rotating body, and the fourth tray holding claw holds the tray on the outer periphery of the fourth rotating body. Multiple The tray carrying device according to claim 5, wherein the tray carrying device is constituted by providing different kinds of claws, and the rotation of the fourth rotating body enables selection of the claws to be used for holding the tray. 9. The method according to claim 1, wherein the first rotating body rotates in conjunction with the third rotating body, and the second rotating body rotates in conjunction with the fourth rotating body. The tray conveying device according to claim 8, wherein 10. The rotating motion of the first rotating body is interlocked with the third rotating body via an Oldham coupling, and the rotating motion of the second rotating body is coupled to the fourth rotating body via an Oldham coupling. The tray transport device according to claim 9, wherein the tray transport device is interlocked with the rotating member.