JP2001297695A - Color cathode-ray tube producing method and exposure apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a color cathode-ray tube producing method, enabling the reduction of the dispersion of an electron beam misleading amount for every produced color cathode-ray tube. SOLUTION: The producing method comprises a step (a) of moving a main correcting lens 15, used in the next exposing step to an exposure position in accordance with data for the electron beam misleading amount accumulated on a storage part 21, an exposing step (b) of radiating an ultraviolet bean to a photoresist film, provided on the inner face of a cathode-ray tube panel via the main correcting lens, a step (c) of forming a black matrix and a fluorescent layer, a step (d) of completing the color cathode-ray tube, and a step of measuring the electron beam misleading amount for every completed color cathode-ray tube, along with a step of repeating the steps (a) and (b), using the exposing device for another cathode-ray tube panel an accumulating data obtained by the measurement in the storage part 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for continuously and sequentially manufacturing a plurality of color cathode ray tubes using an apparatus for exposing a photoresist film applied to the inner surface of a cathode ray tube panel. A method of manufacturing a color cathode ray tube for quickly reflecting the measurement result of the amount of electron beam mislanding of the manufactured color cathode ray tube in an exposure process of a color cathode ray tube manufactured later, and an exposure apparatus used for performing the manufacturing method About.

[0002]

2. Description of the Related Art An exposure apparatus used for manufacturing a black matrix of a color cathode ray tube is disclosed in, for example, JP-A-8-1.
There are those disclosed in JP-A-53467 or JP-A-11-329234. In the production of the black matrix, the ultraviolet light emitted from the lamp house was irradiated through the opening of the mask through the main correction lens onto the photoresist film applied on the inner surface of the cathode ray tube panel, and the ultraviolet light was irradiated. A portion of the photoresist film is developed and removed, a graphite film is applied, and a black matrix (BM) is formed by leaving the graphite film only in a portion where the photoresist film has been removed by etching. Thereafter, a phosphor layer is formed in a portion (BM opening) where the black matrix is not formed. Therefore, when the irradiation position of the ultraviolet light is shifted from a desired position in the exposure step, the phosphor layer is also formed with a shift,
Mislanding of the electron beam occurs in the color cathode ray tube completed through these steps. Therefore, it is important to properly control the irradiation position of the ultraviolet light in the exposure step.

[0003]

However, even when the same exposure apparatus is used, the irradiation position of the ultraviolet light fluctuates due to various factors in the manufacturing process. There has been a problem that the electron beam mislanding amount varies for each cathode ray tube.

[0004] Further, the variation of the irradiation position of the ultraviolet light in the exposure step can be found only by measuring the amount of electron beam mislanding of the manufactured color cathode ray tube. It was difficult to reduce.

Further, in order to correct the variation of the irradiation position of the ultraviolet light in the exposure step, it is effective to replace the main correction lens for deflecting the ultraviolet light from the lamp house. The operation of attaching another main correction lens is a time-consuming operation, and it has been difficult to perform the operation in a continuous manufacturing process of sequentially exposing a plurality of cathode ray tube panels using the same exposure apparatus.

Accordingly, the present invention has been made to solve the above-mentioned problems of the prior art, and an object of the present invention is to reduce the amount of electron beam mislanding of a previously manufactured color cathode ray tube. A method for manufacturing a color cathode ray tube capable of reducing the variation in the amount of electron beam mislanding for each manufactured color cathode ray tube by rapidly reflecting the measurement results in an exposure process of a color cathode ray tube manufactured later, and a method for manufacturing the same. An object of the present invention is to provide an exposure apparatus used for performing a manufacturing method.

[0007]

According to a first aspect of the present invention, there is provided a color cathode ray tube manufacturing method, wherein a light source, a plurality of types of main correction lenses having different light deflection characteristics, and one of the main correction lenses are selectively exposed. A lens exchanging means for moving to a position for use, and an exposure apparatus having an exposure apparatus having a storage means, wherein: (a) a method of manufacturing based on data relating to an electron beam mislanding amount accumulated in the storage means; Moving the main correction lens to be used in the next exposure step from the plurality of types of main correction lenses to an exposure position so that the electron beam mislanding amount of the color cathode ray tube becomes a desired value. And (b) passing ultraviolet light emitted from the light source through the opening of the mask attached to the cathode ray tube panel through the main correction lens at the exposure position. An exposure step of irradiating a photoresist film provided on the inner surface of the cathode ray tube panel, (c) a step of forming a black matrix and a phosphor layer on the inner surface of the cathode ray tube panel, and (d) using the cathode ray tube panel. The step of completing the color cathode ray tube and the step of (e) repeating the above steps (a) and (b) for another cathode ray tube panel using the same exposure apparatus, Measuring the amount of electron beam mislanding for each cathode ray tube, and storing data obtained by the measurement in the storage means.

Further, the method of manufacturing a color cathode ray tube according to claim 2 includes a step of raster aging the completed color cathode ray tube before the measurement of the amount of electron beam mislanding in the step (e). And

According to a third aspect of the present invention, in the method of manufacturing a color cathode ray tube, the measurement of the amount of electron beam mislanding in the step (e) is performed in the vicinity of four corners of the effective screen of the color cathode ray tube and in the vicinity of the center of the effective screen. , And near the center of each side of the effective screen.

An exposure apparatus according to a fourth aspect of the present invention includes a light source that emits ultraviolet light, and a main correction lens that deflects the ultraviolet light emitted from the light source, and converts the ultraviolet light emitted from the light source into: Through the main correction lens at the exposure position,
An apparatus for irradiating a photoresist film provided on an inner surface of a cathode ray tube panel through an opening of a mask attached to the cathode ray tube panel, and holding a plurality of types of main correction lenses having different light deflection characteristics, Lens replacement means for selectively moving the main correction lens to the exposure position, and storage means for storing data relating to the amount of mislanding of the electron beam measured for each previously completed color cathode ray tube using the same exposure apparatus Based on the data on the amount of electron beam mislanding stored in the storage means, the main correction lens is set to the plurality of types so that the amount of electron beam mislanding of the color cathode ray tube to be manufactured next becomes a desired value. And control means for selecting from the main correction lens and moving the main correction lens to the exposure position.

According to a fifth aspect of the present invention, there is provided an exposure apparatus, wherein the lens exchange means holds the plurality of types of main correction lenses and selectively places any one of the main correction lenses at an exposure position. , A motor for rotating the turntable, and driving means for driving the motor.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 is a schematic diagram showing an exposure apparatus used in carrying out a method for manufacturing a color cathode ray tube according to an embodiment of the present invention. Also, FIG.
FIG. 2 is a plan view schematically showing a turntable holding a main correction lens of the exposure apparatus of FIG. 1.

As shown in FIG. 1, an exposure apparatus used in the manufacturing method of the present embodiment includes an opening (for example, a slit) of a mask (for example, an aperture grill) 2 attached to a cathode ray tube panel 1. Tube panel 1 through
Is an apparatus for irradiating the photoresist film 3 applied on the inner surface of the substrate with ultraviolet light. The exposure apparatus includes a lamp house 12 having an ultra-high pressure mercury lamp 11 that emits ultraviolet light,
A dimming filter 13 for correcting the distribution of the amount of light applied to the photoresist film 3, a flat lens 14, and a main correction lens 15 for deflecting ultraviolet light directed to the photoresist film 3
, A cover glass 16 and a seat 17 on which the cathode ray tube panel 1 is placed. The exposure apparatus includes a turntable 18 for holding a plurality of main correction lenses, a motor 19 for rotating the turntable 18, and a motor 1
9, a drive unit 20, a storage unit 21, and a control unit 22 that controls the drive unit 20 based on data stored in the storage unit 21.

As the flat lens 14, a plurality of (for example, three) flat lenses having different light deflection characteristics are provided. As the plurality of flat lenses 14, the parallel flat lens 1 having a constant thickness used when forming the BM opening at the center beam irradiation position in the in-line type electron gun is used.
4a and an inclined flat lens whose thickness gradually increases toward one end used when forming a BM opening at a side beam irradiation position (that is, one surface is inclined with respect to the other surface). 14b and 14c. Cathode ray tube panel 1
In the step of exposing the photoresist film 3, the exposure using the parallel flat lens 14 a and the tilt type flat lens 1
Three exposures of 4b and 14c are performed. Further, flat lenses 14a, 14b, 14 used for exposure
The switching of c is performed by a switching mechanism (not shown).

As the main correction lens 15, a plurality of (for example, four) main correction lenses 15a having different light deflection characteristics are provided.
15b, 15c and 15d are provided. The plurality of main correction lenses 15a, 15b, 15c, 15d are disposed on an XY shift table 18a on a turntable 18, as shown in FIG. The XY shift table 18a has main correction lenses 15a, 15b, and 15 mounted thereon.
It has a function of finely adjusting the positions of c and 15d in the radial direction of the turntable 18 and in the direction perpendicular thereto. In FIG. 2, a position surrounded by a broken line 18b is an exposure position, and the main correction lens at the exposure position is used in the exposure process. Also, the turntable 1 is driven by the motor 19.
By rotating the main correction lens 8, the main correction lens placed at the exposure position is changed into a plurality of main correction lenses 15 a, 15 b, 1.
It can be exchanged for either 5c or 15d.

The main correction lens 15a is a design reference lens for obtaining a reference light deflection characteristic, that is, a desired amount of mislanding, and does not take into account mislanding fluctuations caused by various factors in the manufacturing process. Has deflection characteristics. Main correction lenses 15b, 15c, 15d
Has a characteristic of correcting electron beam mislanding in addition to the light deflection characteristics of the main correction lens 15a. The mislanding of the electron beam is caused by a shift component as shown in FIG. 3A (in the figure, a shift component in the right direction of the screen is shown) and a rotational component as shown in FIG.
A clockwise rotation component is shown, and a V-shape component as shown in FIG. 3C (in the figure, a V-shape component having an inward deviation at the top of the screen and an outward deviation at the bottom of the screen is shown. ) Can be considered as a combination. Therefore, the main correction lens 1
5b, 15c, and 15d have at least one of a characteristic for correcting a shift component, a characteristic for correcting a rotational component, and a characteristic for correcting a C-shape component, in addition to the optical deflection characteristics of the main correction lens 15a. Main correction lenses 15b, 15c, 15
What kind of light deflection characteristic is adopted as d is reduced by the difference between the measurement result of the mislanding amount and the desired mislanding amount (the difference is ultimately set to 0). ) And the correction direction. The method of switching the main correction lens is not limited to the turntable method shown in FIG. 2, but may be another method such as a slide method. Also, the number of main correction lenses is not limited to four, and if it is necessary to correct the mislanding amount even smaller, it is necessary to prepare more than four main correction lenses having different light deflection characteristics. desirable.

FIG. 4 is a schematic diagram showing a jig for measuring the amount of mislanding of an electron beam used when the method of manufacturing a color cathode ray tube according to the embodiment of the present invention is performed. FIG. 5 is an explanatory diagram showing a measurement principle in the measurement device of FIG.

As shown in FIG. 4, the jig for measuring the amount of electron beam mislanding includes four corners of the effective screen 1a of the completed color cathode ray tube, a center of the effective screen 1a, and each of the effective screen 1a. A measuring sensor 31 provided at each of nine locations near the center of the side;
And a control unit 32 for receiving a signal from The position measured by the measurement sensor 31 is not limited to the illustrated position, and the number of measurement points is not limited to nine.

In measuring the amount of mislanding of the electron beam, first, a normal deflection current is caused to flow through the deflection yoke of the completed color cathode ray tube, and as shown in FIG.
The electron beam 33a is irradiated onto the phosphor in the black matrix opening (portion between the hatched portions in the drawing) 34.
Next, by controlling the deflection current, the irradiation position of the electron beam 33b is adjusted so that _one end of the electron beam 33b coincides with the end BM1 of the black matrix BM as shown by a solid line in FIG. Move left. Then, to measure the displacement amount d ₁ of the electron beam 33a and the electron beam 33b. Next, as shown in FIG. 5 (c), by controlling the deflection current, to move the electron beam 33c so that the distance d ₁ shifts to the right than the electron beam 33a.
At this time, the distance S (= d ₁ −d ₂ ) between the end BM ₂ of the black matrix BM and the left end of the electron beam 33 c is the amount of mislanding.

FIG. 6 is a flowchart schematically showing a method of manufacturing a color cathode ray tube according to the present embodiment using the exposure apparatus of FIG. 1 and the measuring jig of FIG. The method of manufacturing a color cathode ray tube according to the present embodiment is generally performed according to the following procedure.

First, the cathode ray tube panel 1 to be exposed is set on the seat 17 of the exposure apparatus (step ST11).
If there is data input relating to the amount of mislanding, data is input to the storage unit 21 (step ST12), and a main correction lens switching step by the exposure device is performed (step ST13). In this step, based on the data on the amount of electron beam mislanding stored in the storage unit 21, the control unit 22 controls the following so that the amount of electron beam mislanding of the manufactured color cathode ray tube becomes a desired value. The main correction lens used in the exposure step is selected from a plurality of types of main correction lenses 15a, 15b, 15c, and 15d. Then, the turntable 18 is rotated by the drive unit 20 and the motor 19, and the selected main correction lens is moved to the exposure position.

Next, an exposure process is performed by the exposure device (step ST14). In this process, the ultraviolet light emitted from the lamp house 12 is
4. Irradiate the photoresist film 3 provided on the inner surface of the cathode ray tube panel 1 through the opening of the mask 2 attached to the cathode ray tube panel 1 through the main correction lens 15 at the exposure position. After that, the cathode ray tube panel 1
Is removed (step ST15). Thus, the exposure process for the first cathode ray tube panel 1 is completed.

Next, the same process as the exposure process for the first cathode ray tube panel is performed on the second cathode ray tube panel (steps ST21 to ST25), and further, the third and subsequent cathode ray tube panels. Is similarly performed (not shown).

After the exposure, a black matrix is formed on the inner surface of the cathode ray tube panel 1 (step ST16 or ST16).
26), assemble the color cathode ray tube (step ST17)
Or ST27). Then, the electron beam mislanding amount is measured for the completed color cathode ray tube using the measuring jig of FIG. 4 (step ST18 or ST2).
8). This electron beam mislanding amount measurement step
The process is performed for each completed color cathode ray tube, and the measurement result of the mislanding amount of the first color cathode ray tube (step ST18) is immediately input to the storage unit 21 of the exposure apparatus in FIG. (Step ST
22). However, data input to the storage unit 21 does not necessarily have to be between Step 21 and ST23, and can be performed at any time. If it takes a long time to measure the mislanding amount of the first color cathode ray tube, the data on the measurement result is input to the storage unit 21 during the exposure process of the third and subsequent cathode ray tube panels. Done in

In the above-described manufacturing method, the measurement result of the electron beam mislanding amount of the previously manufactured color cathode ray tube is immediately transferred to the storage unit 21. Further, replacement of various correction lenses is performed by rotation of the turntable 18. Therefore, the latest measurement result of the amount of mislanding of the electron beam can be reflected when selecting the main correction lens used in the exposure process of the color cathode ray tube manufactured later. For this reason, the irradiation position of the ultraviolet light (ie,
Even if the relative positional relationship between the BM opening position and the irradiation position of the electron beam fluctuates, the change in the irradiation position of the ultraviolet light can be quickly corrected by exchanging the main correction lens, and the electron for each manufactured color cathode ray tube can be corrected. Variations in the amount of beam mislanding can be reduced.

Next, a method of manufacturing a color cathode ray tube according to the present embodiment will be described more specifically. First, the cathode ray tube panel (glass panel) 1 is washed, and a photoresist film 3 is applied to the inner surface thereof. A mask 2 is attached to the cathode ray tube panel 1, and the cathode ray tube panel 1 is placed at a predetermined position on a seat 17 of the exposure apparatus shown in FIG.

Next, the storage unit 2 of the exposure apparatus shown in FIG.
Based on the data on the amount of electron beam mislanding (here, the amount of center beam mislanding) accumulated in 1, a plurality of main correction lenses used in the exposure process are used so that the amount of electron beam mislanding becomes a desired value. Types of main correction lenses 15a, 15b, 15c,
15d is selected and moved to the exposure position 18b. Here, the desired mislanding amount is a mislanding amount determined by design, and is a factor of the mislanding occurrence in a device (for example, a television receiver or a monitor device for a personal computer) in which the manufactured color cathode ray tube is incorporated. Is the amount of mislanding taking into account. That is, the mislanding amount is canceled by the mislanding occurrence factor of the device into which the manufactured color cathode ray tube is incorporated. Therefore, if there is no mislanding occurrence factor of the apparatus into which the manufactured color cathode ray tube is incorporated, the desired mislanding amount is zero. In the stage where the data relating to the amount of electron beam mislanding is not stored in the storage unit 21, the main correction lens 15a of the design standard is placed at the exposure position.

Next, the parallel plate lens 14a for exposing the center beam irradiation position is selected, and the lamp house 1 is selected.
The ultraviolet light emitted from the light source 2 is converted into a light control filter 13, a parallel plate lens 14a, and a main correction lens 15 at an exposure position.
Irradiate the photoresist film 3 provided on the inner surface of the cathode ray tube panel 1 through the opening of the mask 2 attached to the cathode ray tube panel 1 via the. Next, the inclined flat lens 14b for exposing the side beam irradiation position is selected, and the ultraviolet light emitted from the lamp house 12 is applied to the dimming filter 13, the inclined flat lens 14b, and the main correction at the exposure position. Through the opening of the mask 2 attached to the cathode ray tube panel 1 through the lens 15, the cathode ray tube panel 1
Irradiate the photoresist film 3 provided on the inner surface of the substrate. Next, the inclined flat lens 14c for exposing the side beam irradiation position is selected, and the ultraviolet light emitted from the lamp house 12 is passed through the dimming filter 13, the inclined flat lens 1
4c, irradiate the photoresist film 3 provided on the inner surface of the cathode ray tube panel 1 through the opening of the mask 2 attached to the cathode ray tube panel 1 through the main correction lens 15 at the exposure position.

Next, the cathode ray tube panel 1 after the exposure is
The black matrix (B) is obtained by developing and removing the portion of the photoresist film 3 irradiated with the ultraviolet light, applying a graphite film thereon, and leaving the graphite film only in the portion where the photoresist film has been removed by etching.
M). Thereafter, a phosphor layer is formed in a portion (BM opening) where the black matrix is not formed.

Next, the cathode ray tube panel 1 is sealed with a glass funnel which has been subjected to an interior treatment, and further, an electron gun is sealed with a neck. Thereafter, the inside of the glass tube is degassed to make a high vacuum. A high voltage is applied to the color cathode ray tube to remove dust in the cathode ray tube by discharging (seasoning process), and further activate the electron gun cathode to adjust the emission (aging process) to inspect various characteristics of the color cathode ray tube. (Characteristic inspection process), and perform a funnel exterior treatment and an explosion-proof band winding treatment. After that, the electron beam is scanned by an electron gun to inspect the initial time-dependent change in characteristics (raster aging step), and thereafter, the center beam mislanding amount is measured using a measuring jig shown in FIG. .

The center beam mislanding amount is measured, for example, at nine locations shown in FIG.
1 to the storage unit 21 shown in FIG.
, For example, through a line. The control unit 22 averages the measurement results stored in the storage unit 21, and selects an optimal main correction lens in the next exposure processing based on the averaged measurement results.

For example, TL is the center beam mislanding amount near the upper left corner of the effective screen, BL is the center beam mislanding amount near the lower left corner of the effective screen, and TR is the center beam mislanding amount near the upper right corner of the effective screen. Landing amount, BR, the center beam mislanding amount near the lower right corner of the effective screen,
M is the center beam mislanding amount near the center of the effective screen, L is the center beam mislanding amount near the center of the left side of the effective screen, R is the center beam mislanding amount near the center of the right side of the effective screen, T is When the center beam mislanding amount near the center of the upper side of the effective screen, B, is the center beam mislanding amount near the center of the lower side of the effective screen, the shift component, the rotation component, and the C-shaped component of the center beam mislanding amount Each is defined as in the following equations (1) to (3).
The values of TL, BL, TR, BR, M, L, R, T, and B are deviation values in the horizontal direction (X direction) of the effective screen. Direction, and vice versa. In addition, the vertical direction (Y
The deviation value in the direction is not considered.

Shift component = (L + R) / 2−M (1) Rotation component = (TL + T + TR−BL−B−BR) / 6 (2) C-shape component = (TL−TR + BR−BL) / 4 (3)

Each of the present mislanding components in the product obtained by the above equations (1) to (3) is represented by α, and each of the mislanding components obtained from the desired mislanding amount at each measurement point is represented by β. Sometimes, the amount that needs to be corrected as each mislanding component is obtained by the following equations (4) to (6).

Shift component correction amount = (shift component α) − (shift component β) (4) rotation component correction amount = (rotation component α) − (rotation component β) (5) C-shaped component correction amount = (C-shape component α) − (C-shape component β) (6)

In the case where the correction amount of the mislanding component having the largest value among the correction amounts of the respective mislanding components obtained by the above equations (4) to (6) exceeds a predetermined value, Then, a main correction lens having a light deflection characteristic corresponding to the correction amount is selected in advance and moved to the exposure position.

As described above, according to the manufacturing method of the present embodiment, the center beam mislanding amount is grasped for each exposure apparatus used in the BM manufacturing, and when the desired mislanding amount varies, Can determine the amount of correction from the difference between the fluctuating mislanding component and the desired mislanding component, and then quickly correct the mislanding for each exposure apparatus. Therefore, the variation in the amount of mislanding can be reduced for each manufactured color cathode ray tube, and the characteristics of each manufactured color cathode ray tube can be made constant.

Further, since the center beam mislanding amount measurement step is performed after the raster aging step, accurate data can be obtained as the measurement data of the center beam mislanding amount of the color cathode ray tube. However, the center beam mislanding amount measuring step may be performed before the raster aging step.

[0039]

As described above, according to the manufacturing method of the first to third aspects, the measurement result of the amount of electron beam mislanding of the color cathode ray tube manufactured earlier is used for the color cathode ray tube manufactured later. Since this is promptly reflected in the selection of the main correction lens used in the exposure process, there is an effect that the variation in the amount of electron beam mislanding for each manufactured color cathode ray tube can be reduced.

According to the second aspect of the present invention, since the completed color cathode ray tube is raster-aged before the measurement of the amount of electron beam mislanding, it is manufactured later based on highly reliable measurement data. The main correction lens used in the exposure process of the color cathode ray tube can be selected, and there is an effect that the variation in the amount of electron beam mislanding for each manufactured color cathode ray tube can be reduced.

According to the exposure apparatus of the fourth and fifth aspects, the measurement result of the amount of electron beam mislanding of the previously manufactured color cathode ray tube is mainly used in the exposure process of the color cathode ray tube manufactured later. Since it is promptly reflected in the selection of the correction lens, there is an effect that the variation in the amount of mislanding of the electron beam for each manufactured color cathode ray tube can be reduced.

According to the fifth aspect of the present invention, since the main correction lens can be replaced by rotating the turntable, the main correction lens can be quickly replaced.

[Brief description of the drawings]

FIG. 1 is a configuration diagram schematically showing an exposure apparatus used when performing a method of manufacturing a color cathode ray tube according to an embodiment of the present invention.

FIG. 2 is a plan view schematically showing a turntable mechanism for holding a main correction lens of the exposure apparatus of FIG.

3A and 3B are diagrams showing electron beam mislanding components, wherein FIG. 3A shows a shift component, FIG. 3B shows a rotation component, and FIG.
Indicates a C-shaped component.

FIG. 4 is a configuration diagram schematically showing a jig for measuring an amount of mislanding of an electron beam used when carrying out a method of manufacturing a color cathode ray tube according to an embodiment of the present invention.

FIG. 5 is an explanatory diagram showing a measurement principle in the measurement device of FIG.

6 is a flowchart schematically showing a method of manufacturing a color cathode ray tube according to the present embodiment, which is performed using the exposure apparatus of FIG. 1 and the measuring jig of FIG.

[Explanation of symbols]

Reference Signs List 1 cathode ray tube panel, 1a effective screen, 2 mask, 3 photoresist film, 11 light source, 12
Lamp house, 13 dimming filter, 14 (14
a, 14b, 14c) flat lens, 15 (15a,
15b, 15c, 15d) Main correction lens, 16 cover glass, 18 turntable, 18a XY
Shift unit, 18b exposure position, 19 motor,
20 drive part, 21 storage part, 22 control part.

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) H01J 9/42 H01J 9/42 A 9/44 9/44 A

Claims (5)

[Claims] 1. An exposure apparatus comprising: a light source; a plurality of types of main correction lenses having different light deflection characteristics; lens exchange means for selectively moving any of the main correction lenses to an exposure position; A method for manufacturing a color cathode ray tube including an exposure process according to (a), wherein the amount of electron beam mislanding of the manufactured color cathode ray tube is determined based on the data on the amount of electron beam mislanding stored in the storage means. A step of selecting a main correction lens to be used in the next exposure step from among the plurality of types of main correction lenses and moving the main correction lens to an exposure position so as to have a value of
(B) passing the ultraviolet light emitted from the light source through the opening of the mask attached to the cathode ray tube panel through the main correction lens at the exposure position to the photoresist film provided on the inner surface of the cathode ray tube panel; An exposure step of irradiating; (c) a step of forming a black matrix and a phosphor layer on the inner surface of the cathode ray tube panel; (d) a step of completing a color cathode ray tube using the cathode ray tube panel; In parallel with the step of repeating the above steps (a) and (b) using the same exposure apparatus for the CRT panel, the amount of electron beam mislanding was measured for each completed color cathode ray tube, Storing the data obtained by the measurement in the storage means. 2. A method for manufacturing a color cathode ray tube according to claim 1, further comprising a step of raster aging the completed color cathode ray tube before the measurement of the amount of electron beam mislanding in the step (e). . 3. The measurement of the amount of mislanding of the electron beam in the step (e) is performed near four corners of the effective screen of the color cathode ray tube, near the center of the effective screen, and near the center of each side of the effective screen. The method for manufacturing a color cathode ray tube according to claim 1, wherein: 4. A light source that emits ultraviolet light, and a main correction lens that deflects the ultraviolet light emitted from the light source. The main correction lens that is located at an exposure position emits the ultraviolet light emitted from the light source. In an exposure apparatus for irradiating a photoresist film provided on the inner surface of a cathode ray tube panel through an opening of a mask attached to the cathode ray tube panel, a plurality of types of main correction lenses having different light deflection characteristics are held,
Lens exchange means for selectively moving one of the main correction lenses to the exposure position, and accumulating data on the amount of mislanding of the electron beam measured for each previously completed color cathode ray tube using the same exposure equipment And a main correction lens, based on the data on the amount of electron beam mislanding stored in the storage means, so that the amount of electron beam mislanding of the color cathode ray tube manufactured next has a desired value. An exposure apparatus comprising: a control unit that performs a control of selecting one of a plurality of types of main correction lenses and moving the lens to an exposure position. 5. A turntable for holding the plurality of types of main correction lenses and selectively placing any one of the main correction lenses at an exposure position, and a motor for rotating the turntable. 5. An exposure apparatus according to claim 4, further comprising a driving unit for driving said motor.