JP2001296326A5 - - Google Patents

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Publication number
JP2001296326A5
JP2001296326A5 JP2000116180A JP2000116180A JP2001296326A5 JP 2001296326 A5 JP2001296326 A5 JP 2001296326A5 JP 2000116180 A JP2000116180 A JP 2000116180A JP 2000116180 A JP2000116180 A JP 2000116180A JP 2001296326 A5 JP2001296326 A5 JP 2001296326A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000116180A
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Japanese (ja)
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JP2001296326A (ja
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Publication date
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Priority to JP2000116180A priority Critical patent/JP2001296326A/ja
Priority claimed from JP2000116180A external-priority patent/JP2001296326A/ja
Publication of JP2001296326A publication Critical patent/JP2001296326A/ja
Publication of JP2001296326A5 publication Critical patent/JP2001296326A5/ja
Pending legal-status Critical Current

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JP2000116180A 2000-04-18 2000-04-18 欠陥検査方法及び装置 Pending JP2001296326A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000116180A JP2001296326A (ja) 2000-04-18 2000-04-18 欠陥検査方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000116180A JP2001296326A (ja) 2000-04-18 2000-04-18 欠陥検査方法及び装置

Publications (2)

Publication Number Publication Date
JP2001296326A JP2001296326A (ja) 2001-10-26
JP2001296326A5 true JP2001296326A5 (enrdf_load_stackoverflow) 2007-06-07

Family

ID=18627674

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000116180A Pending JP2001296326A (ja) 2000-04-18 2000-04-18 欠陥検査方法及び装置

Country Status (1)

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JP (1) JP2001296326A (enrdf_load_stackoverflow)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4450143B2 (ja) * 2001-05-24 2010-04-14 オー・エイチ・ティー株式会社 回路パターン検査装置並びに回路パターン検査方法及び記録媒体
JP2004184385A (ja) * 2002-11-30 2004-07-02 Oht Inc 回路パターン検査装置及びパターン検査方法
JP4586124B2 (ja) * 2003-07-10 2010-11-24 奇美電子股▲ふん▼有限公司 電気的接続部の非接触検査方法及び非接触検査装置
JP4953590B2 (ja) * 2005-05-31 2012-06-13 株式会社アドバンテスト 試験装置、及びデバイス製造方法
JP4915776B2 (ja) * 2006-04-27 2012-04-11 日本電産リード株式会社 基板検査装置及び基板検査方法
JP6244742B2 (ja) * 2013-08-26 2017-12-13 大日本印刷株式会社 膜検査方法、インプリント方法、パターン構造体の製造方法、インプリント用のモールド、インプリント用の転写基板、および、インプリント装置
CN103487960B (zh) * 2013-10-21 2016-01-06 京东方科技集团股份有限公司 光栅基板短路检测方法
KR102132860B1 (ko) * 2020-03-17 2020-07-10 주식회사 나노시스 기판 검사 시스템

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