JP2001284279A - Method for attaching and detaching cylindrical member - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for attaching and detaching a cylindrical member, which can save the labor of an operator, can easily improve accuracy, and can also greatly reduce the working time. SOLUTION: In this method for attaching and detaching the cylindrical member, when the cylindrical member is placed at a specific height position in a device by an elevation mechanism, a first centering tool 98 is mounted to the device installation place, a second centering tool 87 having a site that can be fitted to the first centering tool is mounted onto a placement rest 33 where the cylindrical member of the elevation mechanism is placed, and the placement rest of the elevation mechanism is raised for fitting the second centering tool to the first one, thus centering the placement rest to the installation place, then removing the first and second centering tools, installing the cylindrical member to the specific position on the placement rest, and raising the placement base for mounting the cylindrical member to the device installation place.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a cylindrical member, for example, a cylindrical member such as a reaction tube of a vertical reactor provided in a vertical semiconductor manufacturing apparatus, a heater unit, etc. The present invention relates to a method for attaching and detaching a cylindrical member during removal.

[0002]

2. Description of the Related Art FIGS. 23 and 24 show a reactor portion located at the rear of a vertical semiconductor manufacturing apparatus.

[0003] Briefly describing a vertical semiconductor manufacturing apparatus,
The semiconductor manufacturing apparatus is installed in a clean room, and further, main devices are housed in a closed casing 1 that maintains a highly clean atmosphere.

Inside the casing 1, a cassette transfer stage (not shown), a cassette transfer device (not shown), a cassette storage shelf (not shown), a wafer transfer machine 2, and a boat are described below from the front side. A boat elevator 3 that is inserted into and removed from the reaction furnace 4 is provided, and the reaction furnace 4 is provided above the boat elevator 3.

[0005] A predetermined number, for example, 25, of silicon wafers, which are materials of semiconductor elements, are loaded in a cassette and conveyed. When a cassette is carried into the cassette transfer stage by an external transfer device (not shown), the cassette is transferred to the cassette storage shelf by the cassette transfer device, and the wafer transfer device 2 is moved to a predetermined position on the cassette storage shelf (not shown). The wafer is transferred from the cassette to the boat in a lowered state. The boat elevator 3 inserts a boat into the reaction furnace 4, heats the wafer in the reaction furnace 4, further introduces a reaction gas into the reaction furnace 4, and forms a thin film on the wafer surface. Processing is performed.

When the processing is completed, the wafer is carried out by the operation reverse to the above operation.

The reactor 4 is not particularly shown, but
It is composed of a cylindrical tube reaction tube, a cylindrical tube soaking tube, a cylindrical tube heater unit, and the like, which are arranged in a concentric multiple manner.

[0008] A thin film is formed on the wafer inside the reactor 4, and the thin film is deposited on the inner surface of the reaction tube. When the film thickness is increased, the thin film is separated and floats as particles. Adhering to the wafer and contaminating the wafer. If the wafer is contaminated with particles, it will cause disconnection inside the manufactured semiconductor device, etc., which may cause a decrease in the product quality of the semiconductor device or a decrease in the yield. The pipe is cleaned. Or,
Heating wires may break due to the deterioration of the heater unit over time.

Since the cleaning of the reaction tube is performed by detaching the reaction tube from the semiconductor manufacturing apparatus, the cleaning operation involves the attachment and detachment of the reaction tube, and further, if there is a break in the heating wire in the heater unit, the replacement of the heater unit itself is involved. .

Conventionally, a maintenance work space 5 for maintenance work of the reaction furnace 4, such as replacement of a reaction tube and replacement of a heater unit, is provided at a rear portion of the housing 1 of the semiconductor manufacturing apparatus.

Referring to FIGS. 23 and 24, a conventional method for attaching and detaching a reaction tube and a heater unit will be described.

Since equipment constituting a semiconductor manufacturing apparatus such as the boat elevator 3 is provided below the reaction furnace 4, the maintenance work space 5 includes the reaction furnace 4, the boat elevator 3 and the like.
It is provided behind.

The reactor 4 is fixed to a heater base 7 and is attached to the housing 1 via the heater base 7. The heater base 7 is attached to the housing 1.
Is also connected to the horizontal moving mechanism 8 provided in the first position. The horizontal moving mechanism 8 includes a slide support mechanism such as a horizontal guide and a driving device such as an air cylinder.

When the reactor 4 is maintained, the heater base 7 is separated from the housing 1 and is horizontally moved to the maintenance work space 5 by the horizontal moving mechanism 8. In this state, the reaction furnace 4 is detached from the heater base 7, lowered onto the work table 11 below, and
Had been taken out.

Since the utility box 9, the control box 10 and the like are provided on the wall surface of the maintenance work space 5, it cannot be said that the work space is sufficient, and a work machine such as a power lifter cannot be used. After the furnace 4 has been removed from the heater base 7, the work
Even if a support table or the like is used, it mainly relies on manual work.

[0016]

The heat equalizing tube and the reaction tube are made of quartz and are long and heavy. Because of this,
It was a very inefficient and dangerous work because multiple people could not work together alone. Further, since the soaking tube and the reaction tube are concentrically arranged with a small gap,
Great care was required for assembly and removal, and the burden on the operator was heavy.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method for attaching and detaching a cylindrical member, which requires less labor of an operator, can easily obtain accuracy, and can greatly shorten the operation time.

[0018]

According to the present invention, when a cylindrical member is installed at a predetermined height position of an apparatus by an elevating mechanism, a first centering jig is attached to the installation position of the apparatus.
A second centering jig having a portion that can be fitted to the first centering jig is attached to a mounting table on which the cylindrical member of the elevating mechanism is mounted, and the mounting table of the elevating mechanism is raised to raise the second centering jig. By fitting the two centering jigs and the first centering jig, the mounting table is centered on the installation location, and then the first centering jig and the second centering jig are removed. The present invention relates to a cylindrical member attaching / detaching method in which a cylindrical member is installed at a predetermined position on the mounting table, the mounting table is raised, and the cylindrical member is mounted on a device installation location.

[0019]

Embodiments of the present invention will be described below with reference to the drawings.

First, an outline of the present invention will be described with reference to FIG.

The method according to the present invention uses the detachable carriage 14 for the reactor.
It is implemented using.

In FIG. 1, the same components as those shown in FIG. 23 are denoted by the same reference numerals.

The movable reaction furnace detachable carriage 14 has a receiving stage 15 that can move up and down and move in the horizontal direction, and a centering attachment (not shown) can be attached to the receiving stage 15. .

First, the reactor detachable carriage 14 is made to be adjacent to the rear surface of the casing 1 (FIG. 1A), and the reactor detachable cart 14 and the casing 1 are fixed by the connecting fixture 16 (FIG. 1).
(B)). The receiving stage 15 is horizontally moved and inserted into the maintenance work space 5 (FIG. 1C). The receiving stage 15 is raised, and the receiving stage 15 is aligned with the reactor installation portion of the housing 1 (FIG. 1D).

After the completion of the alignment, the carriage 14 for attaching and detaching the reactor is removed.
The centering position of the receiving stage 15 is stored. This storage means may be any means such as mechanically setting a centering position using a stopper or the like and enabling repetitive reproduction, or storing electrically using a position detecting means such as a sensor or an encoder. Is selected.

With the receiving stage 15 lowered and housed in the reaction furnace detachable carriage 14, the reaction furnace 4
Are placed on the receiving stage 15, and the positioning of the reaction furnace components with respect to the receiving stage 15 is performed. still,
In order to allow the components of the reaction furnace 4 to be easily received at the center of the receiving stage 15,
A positioning attachment (not shown) is used (FIG. 1E).

The receiving stage 15 is horizontally moved, and the position after the movement is determined by the storage means (FIG. 1).
(F)). The receiving stage 15 is raised. When the reaction furnace 4 is supported at the mounting level by the receiving stage 15, that position is an accurate mounting position of the reaction furnace components, and the reaction furnace components may be fixed with bolts or the like (FIG. 1 (G) )). Thus, the reactor components can be easily attached to the correct positions.

The components of the reaction furnace include a heater unit, a soaking tube, a reaction tube, and the like. The mounting operation is performed sequentially from a large diameter one, and if necessary, a positioning attachment is adapted to each of the reaction furnace components. What should be done.

Next, referring to FIGS. 2 to 5, the trolley 14 will be described in detail.

The main frame 17 formed in a rectangular parallelepiped frame is mounted on a traveling pedestal 18 via a level adjuster 19. As shown in FIG. 7, for example, the level adjuster 19 includes a push bolt 21 screwed to the main frame 17 side and a pull bolt 22 penetrating the push bolt 21 and screwed to the traveling pedestal 18 side. .

The main frame 17 has a structure in which a pair of rectangular frames 17a, 17a arranged in parallel are horizontally connected by a required number (seven in this embodiment) of horizontal beams 23. Two columns 25, 25 are provided upright on the two horizontal beams 23 facing up and down of the horizontal beams 23 via brackets 24, 24, and vertical slide guides 26 are fixed to the columns 25, respectively. ing. The other two horizontal beams 2 vertically facing each other among the horizontal beams 23
One support 28 is erected on the support 3 via brackets 27, 27, and a vertical slide guide 29 is fixed to the support 28.

The three vertical slide guides 26, 2
6. A concave-shaped elevating stage 31 is provided via a vertical slide guide 29 so as to be movable up and down.
A mounting table 33 is provided via a two-stage horizontal slide guide 32 so as to be able to advance and retreat in the horizontal direction.

A screw rod 34 (preferably a ball screw rod) disposed in parallel between the supports 25, 25 is rotatably supported near the upper and lower ends of the support 25, and is supported by the screw rod 34. An elevating motor 36 (preferably a servomotor whose speed can be controlled) is connected to an upper end via a speed reducer 35. A screw block 37 is screwed to the screw rod 34, and the screw block 37 is fixed to the lifting stage 31. The screw rod 34 is rotated by the driving of the lift motor 36, and the lift stage 31 moves up and down via the screw block 37. The lifting motor 3
Reference numeral 6 is driven via a control unit (not shown). The control unit is provided with an operation panel (not shown) so that an operator can drive the elevating motor 36 via the operation panel. I have.

Racks 38, 38 extending substantially over the entire length are fixed to the column 28 and the column 25 opposed to the column 28, and a horizontal pinion shaft 39 is rotatably penetrated through the elevating stage 31 so as to rotate. Pinions 41, 41 are fixed to both ends of the shaft 39.
Are engaged with the rack 38. Since the pinion 41 is connected by one pinion shaft 39,
Both pinions 41, 41 rotate without a phase shift, thereby preventing tilting at both ends of the elevating stage 31. That is, the rack 38, the pinion shaft 39, and the pinion 41 function as a tilt prevention mechanism when the elevation stage 31 is locally driven.

A spline shaft 42 is rotatably supported by brackets 43 and 44 near the upper end and lower end of the column 25, and a driven pulley 45 is fitted to the lower end of the spline shaft 42. An advance / retreat drive shaft 48 is rotatably provided on the support 25 via brackets 46 and 47, and the advance / retreat drive shaft 48 is provided.
A handle 51 is fitted on the upper end, and a drive pulley 4 is
9, the driving pulley 49 and the driven pulley 45
Means that a drive belt 52 (preferably a timing belt) is wound around and the handle 51 is rotated so that the advance / retreat drive shaft 48, the drive pulley 49, the drive belt 52,
The spline shaft 42 rotates via the driven pulley 45. The spline shaft 42 is connected to the drive shaft 5 via a rotation transmitting means 56 described later.
Rotate 5

A worm speed reducer 54 is mounted on the elevating stage 31. A drive shaft 55 is connected to an input shaft (not shown) of the worm speed reducer 54. The drive shaft 55 and the driven pulley 45 They are connected by rotation transmitting means 56 composed of a required number of pulleys, a belt (preferably a timing belt) wound around the pulleys, and the like. A rotating arm 57 is fixed to the output shaft of the worm speed reducer 54, and the tip of the rotating arm 57 is slidably and rotatably connected to the mounting table 33 via a connecting portion 58 (described later). . One of the pulleys 50 constituting the rotation transmitting means 56 is slidably fitted to the spline shaft 42 so that the rotation of the spline shaft 42 is transmitted and the pulley 50 can be moved up and down integrally with the elevating stage 31. I have.

By rotating the handle 51, the spline shaft 42 is rotated via the advance / retreat drive shaft 48 and the drive belt 52, and the pulley 50 is rotated via the spline shaft 42, and further rotated. The drive shaft 55 is rotated via the transmission means 56,
Further, the rotation arm 57 is rotated via the worm speed reducer 54. Although not shown, a rotation lock mechanism is provided on the handle 51 so that rotation can be locked at a predetermined position.

The mounting table 33 will be described with reference to FIG.

An advance / retreat stage 62 is attached to the inner slide block 61 of the two-stage horizontal slide guide 32. The advance / retreat stage 62 has a width-direction adjusting guide 63 extending at right angles to the two-stage horizontal slide guide 32.
A load receiving seat 64 is slidably provided on the advance / retreat stage 62 via the width direction adjustment guide 63 in a direction (width direction) orthogonal to the advance / retreat direction. A viewing window hole 78 is formed in the advance / retreat stage 62 so that the
4 is provided with a centering hole 79 also serving as a viewing window.

A width direction adjusting mechanism 65 is provided between the advance / retreat stage 62 and the load receiving seat 64.

The advancing / retreating stage 62 includes a bolt penetrating piece 6
6 is fixed, a bolt screwing piece 67 is fixed to the load receiving seat 64, and the bolt screwing piece 67 and the bolt penetrating piece 66 are fixed.
And a width position adjusting bolt 68. The width adjusting bolt 68 passes through the bolt penetrating piece 66 and is screwed to the bolt screwing piece 67. By rotating the width position adjusting bolt 68, the load receiving seat 64 is displaced in the width direction with respect to the advance / retreat stage 62, and the lock nut 69 screwed to the width position adjusting bolt 68 is tightened. Thus, the position of the cargo receiving seat 64 is fixed.

The connecting portion 58 will be described with reference to FIGS.

A connecting slide guide 71 is mounted on the lower surface of the advance / retreat stage 62 in parallel with the width direction adjusting guide 63, and the advance / retreat position adjusting guide 72 is fixed to the advance / retreat stage 62 via the connecting slide guide 71. The direction of the advance / retreat position adjustment guide 72 is parallel to the two-stage horizontal slide guide 32 and orthogonal to the width direction adjustment guide 63. A connecting slide 73 is attached to the advance / retreat position adjusting guide 72.
Is slidably mounted, and the connecting slide piece 73 and the advance / retreat position adjusting guide 72 are connected by an advance / retreat position adjusting screw 74. The advance / retreat position adjusting screw 74 passes through the advance / retreat position adjustment guide 72 and is screwed to the connecting slide piece 73.
A fixing nut 75 is screwed to the advance / retreat position adjusting screw 74, and the advance / retreat position adjustment guide 72, that is, the advance / retreat stage 62 moves in the advance / retreat direction with respect to the rotating arm 57 by the rotation of the advance / retreat position adjustment screw 74. Is displaced. Further, by tightening the fixing nut 75, the advance / retreat position adjusting screw 7
4 can be fixed to the advance / retreat position adjustment guide 72.

The connecting slide piece 73 includes a connecting pin 76.
The tip of the rotating arm 57 is rotatably fitted to the connecting pin 76 via a bearing 77.

When the rotation arm 57 rotates, the advance / retreat position adjustment guide 72 moves in the width direction along the connection slide guide 71, and the displacement of the tip of the rotation arm 57 only in the advance / retreat direction is reduced. It is provided to the lifting stage 31. That is, the rotation of the rotation arm 57 is converted into a forward / backward movement by the connecting portion 58, and the mounting table 33 advances / retreats by the rotation of the rotation arm 57.

The carriage 14 for attaching and detaching the reactor is mounted on the traveling pedestal 1.
8, the housing 1 and the reactor mounting / detaching carriage 14 are connected by a docking means in a predetermined positional relationship during maintenance work of the reactor 4.

The docking means will be described with reference to FIGS. 3, 10, and 11.

In FIGS. 10 and 11, the same components as those shown in FIGS. 23 and 24 are denoted by the same reference numerals, and the details of the reactor attaching / detaching vehicle 14 are omitted. .

A docking bracket 8 is provided on the upper rear surface of the housing 1.
0. Attach the docking bracket 81 to the lower back.
The mounting positions of the docking bracket 80 and the docking bracket 81 are determined accurately by means such as positioning pins. A screw hole (not shown) is provided in a portion of the reactor mounting / detaching carriage 14 where the docking fitting 80 abuts.
Are drilled, and the reactor attaching / detaching cart 14 is provided with fixing bolts 82.
Thus, it is fixed to the docking fitting 80.

A docking hole having a vertical axis is formed in the docking bracket 81, and a docking block 83 which can be superimposed on the docking bracket 81 is attached to the reactor attaching / detaching carriage 14. A docking receiving hole (not shown) having an axis coincident with the docking hole is formed at a connection position between the housing 1 and the reaction furnace detachable carriage 14. Thus, the fixing pin 84 is inserted into the docking hole and the docking receiving hole to connect the reaction furnace detachable carriage 14 and the housing 1.

By connecting the reactor mounting vehicle 14 and the housing 1 via the docking bracket 80 and the docking bracket 81, the two are positioned in the approaching / separating direction and the horizontal direction. The vertical positioning (leveling) of the housing 1 and the reactor mounting / detaching carriage 14 is performed by the level adjuster 19 shown in FIG.

As described above, the reaction furnace 4 includes a heater unit, a soaking tube, and a reaction tube. Note that, depending on the model, there are heater units, reaction tubes, and inner tubes, and the configuration of the reaction furnace is variously different.

The heater unit, the soaking tube, and the reaction tube are assembled concentrically at the position where the reaction furnace 4 of the semiconductor manufacturing apparatus is installed, and these cylindrical members have the same center as the mounting table 33, that is, the load receiving seat 64. It must be placed as it is. Therefore, as shown in FIG.
A heater unit 86 is mounted on the heater unit 4 via a heater attachment 85. As shown in FIG. 13, an attachment body 87 and a protective sheet 8 made of synthetic resin such as nylon.
8. A soaking tube 91 is placed via a soaking tube attachment 89, and a reaction tube 92 is placed via the attachment body 87 and a protective sheet 88 as shown in FIG. I have.

The lower surface of the attachment body 87 is provided with a tapered lower surface projection 95 that fits into the centering hole 79 of the load receiving seat 64, and the upper surface is a tapered upper surface projection that fits into the lower end of the reaction tube 92. 90 are provided. In addition, a tapered recess 97 that fits with the tapered upper surface projecting portion 90 is formed on the lower surface of the heat equalizing tube attachment 89, and the heat equalizing tube 91 is formed on the upper surface of the heat equalizing tube attachment 89.
Is provided with a tapered upper surface protruding portion 99 that fits on the lower end of the taper.

Thus, the attachment body 87 is accurately placed on the mounting table 33 without performing a positioning operation by the positioning operation between the tapered lower surface projecting portion 95 and the centering hole 79. The reaction tube 92 is accurately positioned with respect to the mounting table 33 only by being mounted on the attachment main body 87 by the positioning action with the tapered upper surface projecting portion 90. Similarly, when the heat equalizing tube attachment 89 is placed on the attachment main body 87, the position between the attachment main body 87 and the tapered upper surface protruding portion 99 is also adjusted by the positioning action between the tapered upper surface protruding portion 90 and the tapered concave portion 97. The centering of the taper upper surface protruding portion 99 is also performed by the centering action of the taper upper surface protruding portion 99.
It is accurately positioned on the mounting table 33 via the heat equalizing tube attachment 89 and the attachment body 87.

Hereinafter, the assembling operation of the reaction furnace 4 will be described with reference to FIGS.

The reactor 4 is assembled in the maintenance work space 5. First, the heater unit 86 is installed, and the soaking tube 91 and the reaction tube 92 are installed with the heater unit 86 as a reference. When the heater unit 86 is already installed, the installed heater unit 86 is used as a reference. The details will be described below.

The carriage 14 is moved to a position near the back of the semiconductor manufacturing apparatus, a level (not shown) is set on the mounting table 33, and the level adjuster 19 is set on the basis of the level.
To adjust the horizontal and vertical positions of the mounting table 33 (see FIG. 15).

Next, the reactor mounting and dismounting cart 14 and the housing 1 are connected by docking means.

The docking bracket 80 and the docking bracket 81 are attached to predetermined positions of the housing 1, and the fixing bolt 82 and the fixing pins 84 are used to connect the docking bracket 80 and the docking bracket 81 to the reaction furnace attaching / detaching carriage 14. And the housing 1 (see FIG. 16).

The horizontal moving mechanism 8 is moved to the maintenance work space 5, and the mounting table 33 is lowered and moved to a position where it is retracted. Attach the heater attachment 8 to the mounting table 33.
12 and the heater unit 86 is fixed to the heater attachment 85 via the heater base 7 (FIG. 12).
reference).

When the handle 51 is rotated, the rotation transmitting means 56, the drive shaft 55, the worm reducer 54
The rotation arm 57 is rotated via the
3 is advanced into the maintenance work space 5 of the housing 1. The lifting motor 36 is driven to raise the lifting stage 31 via the screw rod 34 and the screw block 37. The horizontal moving mechanism 8 includes a heater base fixing column 93 for fixing the heater base 7, and fixes the heater base 7 to the heater base fixing column 93 (see FIG. 17).

The mounting table 33 is lowered, the heater attachment 85 is removed, and the attachment body 87 is mounted on the mounting table 33. The centering pins 96 are mounted on the mounting table 33. Further, a furnace port mounting column 94 is mounted on the lower surface of the heater base 7 at three equally circumferential positions, and a centering plate 98 is mounted concentrically with the heater unit 86 via the furnace port mounting column 94. The centering plate 98 has a centering hole (not shown) for centering at a position corresponding to the centering pin 96.

With the handle 51 fully rotated and the mounting table 33 at the stroke end, the handle 51 is locked by required means, and the lifting motor 36 is driven to raise the mounting table 33. .

The mounting table 33 is raised just before the centering pins 96 come into contact with the centering plate 98. By turning the width position adjusting bolt 68 of the width direction adjusting mechanism 65 and turning the forward / backward position adjusting screw 74 of the connecting portion 58 to adjust the position in the width direction and the forward / backward direction, the centering pin 96 is aligned with the centering pin 96. With the holes aligned, and with the lock nut 69 and the fixing nut 75 loosened,
Is further raised, the centering pin 96 and the centering hole are fitted, and the lock nut 69 and the fixed nut 75 are tightened and locked. In this state, the core of the attachment main body 87 matches the core of the heater base 7 (FIG. 1).
8).

The mounting table 33 is lowered and further retracted so as to be positioned inside the reactor detachable carriage 14. In this state, the attachment 89 for the soaking tube is placed on the attachment body 87 via the protective sheet 88, and the soaking tube 91 is further placed on the attachment 89 for the soaking tube. As described above, the heat equalizing tube 91 is centered with respect to the attachment body 87. By rotating the handle 51, the heat equalizing tube 91 is moved into the maintenance work space 5 to the stroke end. In this state, the cores of the heat equalizing tube 91 and the heater unit 86 match. Further, the elevating motor 36 is driven to move the soaking tube 91 to the heater unit 8.
6 and fix the flange of the heat equalizing tube 91 to the heater base 7. (See FIG. 19).

The mounting table 33 is lowered and further retracted so as to be positioned in the reaction furnace detachable carriage 14. The attachment 89 for the soaking tube is removed, and the attachment body 8 is removed.
The reaction tube 92 is placed on 7. The reaction tube 9
The alignment of the attachment 2 with the attachment body 87 has been completed.

The handle 51 is rotated to move the reaction tube 92 into the maintenance work space 5 to the stroke end. In this state, the reaction tube 92 and the soaking tube 91
And the core match. Further, the elevating motor 36 is driven to insert the reaction tube 92 into the soaking tube 91, the flange of the reaction tube 92 is fixed to the heater base 7, and the reaction tube 92 is assembled, that is, the reactor 4 is assembled. Complete (Figure 2
0).

The horizontal moving mechanism 8 is driven to move the reaction furnace 4 from the maintenance work space 5 to the reaction furnace 4 storage position.
Further, the mounting table 33 is lowered and retracted, and further, the docking means is removed, and the connection between the reaction furnace 4, the reaction furnace detachable carriage 14 and the housing 1 is released.

The disassembly of the reaction furnace 4 and the removal of the reaction tube 92 may be performed in the reverse order of the above-described assembling and assembling.

The heater unit 86 and the soaking tube 9
1. The alignment before the installation of the reaction tube 92 and the adjustment of the posture have been completed, and the assembly work of the operator in the semiconductor manufacturing apparatus is only the fixing work of the heater unit 86, the soaking tube 91, and the reaction tube 92. The operation becomes extremely simple, and the heater unit 86, the soaking tube 91, the reaction tube 92
There is no work to support the heater unit 86 and the soaking tube 9
1. Since the work of supporting the reaction tube 92 manually is at a low position and is outside the semiconductor manufacturing apparatus, workability is good and safety is improved.

FIGS. 21 and 22 show an application example of the present invention. The reaction furnace 4 to which the application example is applied has a quartz inner tube 101 provided inside a reaction tube 100. .

An inner tube attachment 102 is mounted on the attachment body 87. On the lower surface of the inner tube attachment 102, a lower surface concave portion 103 is formed which can be fitted to a tapered upper surface projecting portion 90 projecting from the upper surface of the attachment main body 87, and the inner tube attachment 102 is attached to the attachment main body 87.
The centering can be performed simply by placing it on the vehicle. or,
The inner tube attachment 102 is provided with a positioning handle 104 protruding in the radial direction, and an adjustment viewing window 105 is formed.

After the inner tube 101 is placed via the inner tube attachment 102 and further inserted into the reaction tube 100, the adjustment viewing window 105
The handle 104 is used to rotate the inner tube 101 via the inner tube attachment 102 while observing the positional relationship between the inner tube 101 and the reaction tube 100 from the position of the inner tube 101 and the reaction tube 100 in the rotational direction. Make a match.

[0075]

As described above, according to the present invention, when the cylindrical member is installed at a predetermined height position of the apparatus by the elevating mechanism, the first centering jig is attached to the installation place of the apparatus. Attaching a second centering jig having a portion that can be fitted to the first centering jig to a mounting table on which the cylindrical member of the elevating mechanism is mounted, raising the mounting table of the elevating mechanism, By fitting the second centering jig and the first centering jig, the mounting table is centered with respect to the installation location,
Thereafter, the first centering jig and the second centering jig are removed,
The cylindrical member is installed at a predetermined position on the mounting table, and the mounting table is raised to mount the cylindrical member at the installation location. This eliminates the need for alignment, greatly improving workability and, when the cylindrical member is heavy, eliminates the need for manual adjustment work at high places, thereby exhibiting excellent effects such as improved safety. .

[Brief description of the drawings]

FIG. 1 is an explanatory view schematically showing an embodiment of the present invention.

FIG. 2 is a front view showing a reaction furnace detachable cart used in the present embodiment.

FIG. 3 is a side view of the vehicle for attaching and detaching a reactor in the same manner.

FIG. 4 is a view taken in the direction of arrows AA in FIG. 2;

FIG. 5 is a vertical sectional view of the carriage for attaching and detaching a reactor in the same manner.

FIG. 6 is a view taken in the direction of arrows BB in FIG. 2;

FIG. 7 is a partial view of a traveling pedestal of the reaction furnace detachable carriage.

FIG. 8 is a sectional view taken along the line CC of FIG. 4;

FIG. 9 is a view as viewed in the direction of arrows DD in FIG. 8;

FIG. 10 is an overall side view showing an embodiment of the present invention.

FIG. 11 is an overall plan view showing the embodiment of the present invention.

FIG. 12 is an explanatory diagram showing a relationship between a heater and an attachment.

FIG. 13 is an explanatory diagram showing a relationship between a heat equalizing tube and an attachment.

FIG. 14 is an explanatory diagram showing a relationship between a reaction tube and an attachment.

FIG. 15 is an explanatory diagram showing details of an embodiment of the present invention.

FIG. 16 is an explanatory diagram showing details of an embodiment of the present invention.

FIG. 17 is an explanatory diagram showing details of an embodiment of the present invention.

FIG. 18 is an explanatory diagram showing details of an embodiment of the present invention.

FIG. 19 is an explanatory diagram showing details of an embodiment of the present invention.

FIG. 20 is an explanatory diagram showing details of an embodiment of the present invention.

FIG. 21 is an explanatory diagram of a main part showing another embodiment of the present invention.

FIG. 22 is a plan view of the main part of FIG.

FIG. 23 is a side view showing a conventional example.

FIG. 24 is a rear view showing a conventional example.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 housing 4 reaction furnace 7 heater base 8 horizontal moving mechanism 14 reaction furnace detachable carriage 15 receiving stage 17 main frame 18 traveling pedestal 31 elevating stage 32 two-stage horizontal slide guide 33 mounting table 34 screw rod 36 elevating motor 42 spline shaft 48 Advancing / retracting drive shaft 56 Rotation transmitting means 57 Rotating arm 58 Connecting portion 62 Advancing / retracting stage 68 Width position adjusting bolt 71 Connecting slide guide 73 Connecting slide piece 74 Advancing / retreating position adjusting screw 80 Docking bracket 81 Docking bracket 84 Fixing pin 85 Heater attachment 87 Attachment Body 89 Attachment for heat equalizing tube 90 Tapered upper surface protruding portion 93 Heater base fixing column 94 Furnace opening mounting column 95 Tapered lower surface protruding portion 96 Centering pin 98 Centering plate 99 Tapered upper surface Out section

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Atsushi Morikawa 3-14-20 Higashinakano, Nakano-ku, Tokyo Kokusai Denki Co., Ltd. F-term (reference) 4K055 AA00 BA03 HA02 HA19 5F045 BB10 DQ05 EB02 EC02 EN08

Claims (1)

[Claims] When a cylindrical member is installed at a predetermined height position of an apparatus by an elevating mechanism, a first centering jig is attached to the installation location of the apparatus, and the cylindrical member of the elevating mechanism is mounted. A second centering jig having a portion that can be fitted to the first centering jig is attached to the mounting table to be mounted, and the mounting table of the elevating mechanism is raised to raise the second centering jig and the first centering jig. By fitting a centering jig, the mounting table is centered on the installation location, and then the first centering jig and the second centering jig are removed, and the cylindrical member is mounted on the mounting table. A method for mounting and dismounting a cylindrical member, wherein the cylindrical member is installed at a predetermined position, the mounting table is raised, and the cylindrical member is mounted on an installation location of the apparatus.