JP2001280848A5 - - Google Patents

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Publication number
JP2001280848A5
JP2001280848A5 JP2000097497A JP2000097497A JP2001280848A5 JP 2001280848 A5 JP2001280848 A5 JP 2001280848A5 JP 2000097497 A JP2000097497 A JP 2000097497A JP 2000097497 A JP2000097497 A JP 2000097497A JP 2001280848 A5 JP2001280848 A5 JP 2001280848A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000097497A
Other languages
Japanese (ja)
Other versions
JP4036598B2 (ja
JP2001280848A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000097497A priority Critical patent/JP4036598B2/ja
Priority claimed from JP2000097497A external-priority patent/JP4036598B2/ja
Publication of JP2001280848A publication Critical patent/JP2001280848A/ja
Publication of JP2001280848A5 publication Critical patent/JP2001280848A5/ja
Application granted granted Critical
Publication of JP4036598B2 publication Critical patent/JP4036598B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP2000097497A 2000-03-31 2000-03-31 熱処理装置 Expired - Lifetime JP4036598B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000097497A JP4036598B2 (ja) 2000-03-31 2000-03-31 熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000097497A JP4036598B2 (ja) 2000-03-31 2000-03-31 熱処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2006302825A Division JP4039491B2 (ja) 2006-11-08 2006-11-08 熱処理装置

Publications (3)

Publication Number Publication Date
JP2001280848A JP2001280848A (ja) 2001-10-10
JP2001280848A5 true JP2001280848A5 (enExample) 2006-12-14
JP4036598B2 JP4036598B2 (ja) 2008-01-23

Family

ID=18612112

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000097497A Expired - Lifetime JP4036598B2 (ja) 2000-03-31 2000-03-31 熱処理装置

Country Status (1)

Country Link
JP (1) JP4036598B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4503397B2 (ja) * 2004-08-26 2010-07-14 東京エレクトロン株式会社 縦型熱処理装置及びその処理容器急速降温方法
CN102466403A (zh) * 2010-11-05 2012-05-23 施丽萍 推车炉窑
CN108704687A (zh) * 2018-05-03 2018-10-26 宁波大学 一种圆形玻璃纤维滤膜层叠堆放式烘烧皿

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