JP2001272335A - Spectroscopic cross-sectional image measurement apparatus - Google Patents
Spectroscopic cross-sectional image measurement apparatusInfo
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- JP2001272335A JP2001272335A JP2000084639A JP2000084639A JP2001272335A JP 2001272335 A JP2001272335 A JP 2001272335A JP 2000084639 A JP2000084639 A JP 2000084639A JP 2000084639 A JP2000084639 A JP 2000084639A JP 2001272335 A JP2001272335 A JP 2001272335A
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- sectional image
- spectroscopic
- light source
- tomographic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
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- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、断層画像と同時に
分光を行い分光学的測定を行う分光学的断面画像測定装
置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a spectroscopic cross-sectional image measuring apparatus for performing spectroscopic measurement by performing spectroscopy simultaneously with tomographic images.
【０００２】[0002]
【従来の技術】従来、断面画像測定装置における断面画
像に関して、スペクトル情報が得られていなかった。信
号処理によってスペクトル情報を得た報告もあるが、直
接測定でなく、信号処理のため信頼性に問題がある。2. Description of the Related Art Conventionally, spectral information has not been obtained for a cross-sectional image in a cross-sectional image measuring apparatus. There are reports that spectrum information is obtained by signal processing, but there is a problem in reliability due to signal processing instead of direct measurement.
【０００３】[0003]
【発明が解決しようとする課題】従来、断面画像測定に
おいて得られていなかったスペクトル情報が、信頼性の
高い直接測定によって断層画像に加わることは、生体の
代謝を始め活動状態が測定できることとなり、生化学的
分野において重要なことである。The addition of spectral information, which has not been obtained conventionally in cross-sectional image measurement, to tomographic images by highly reliable direct measurement means that the metabolism of living organisms and the active state can be measured. This is important in the biochemical field.
【０００４】本発明は、上記状況に鑑みて、断層構造情
報とその画像でのスペクトル情報を得ることができ、精
確で信頼性の高い分光学的断面画像測定装置を提供する
ことを目的とする。The present invention has been made in view of the above circumstances, and has as its object to provide an accurate and reliable spectroscopic cross-sectional image measuring apparatus capable of obtaining tomographic structure information and spectral information in an image thereof. .
【０００５】[0005]
【課題を発明するための手段】本発明は、上記目的を達
成するために、 〔１〕分光学的断面画像測定装置において、広帯域波長
光源と、照射光学系と、空間遅延型フィゾー干渉計と、
高速分光器と、画像データ処理用コンピュータとを備
え、前記空間遅延型フィゾー干渉計からの断層画像を測
定するとともに、前記高速分光器からの散乱光の波長ス
ペクトルも同時に測定することを特徴とする。According to the present invention, there is provided a spectroscopic cross-sectional image measuring apparatus comprising: a broadband wavelength light source, an irradiation optical system, a spatial delay type Fizeau interferometer; ,
A high-speed spectrometer, and a computer for image data processing, wherein the tomographic image from the spatial delay Fizeau interferometer is measured and the wavelength spectrum of the scattered light from the high-speed spectrometer is simultaneously measured. .
【０００６】〔２〕上記〔１〕記載の分光学的断面画像
測定装置において、前記高速分光器はマルチチャンネル
分光器であることを特徴とする。[2] In the spectroscopic sectional image measuring apparatus according to the above [1], the high-speed spectrometer is a multi-channel spectrometer.
【０００７】〔３〕上記〔１〕記載の分光学的断面画像
測定装置において、前記広帯域波長光源を非線形光学結
晶の結晶軸を周期的に反転させた周期ドメイン反転結晶
を用いて創成することを特徴とする。[3] In the spectroscopic sectional image measuring apparatus according to [1], the broadband wavelength light source is created using a periodic domain inversion crystal in which the crystal axis of a nonlinear optical crystal is periodically inverted. Features.
【０００８】[0008]
【発明の実施の形態】以下、本発明の実施の形態を図面
を参照しながら詳細に説明する。Embodiments of the present invention will be described below in detail with reference to the drawings.
【０００９】図１は本発明の実施例を示す分光学的断面
画像測定装置の全体構成図である。FIG. 1 is an overall configuration diagram of a spectroscopic sectional image measuring apparatus showing an embodiment of the present invention.
【００１０】この図において、１は広帯域波長光源、２
はその広帯域波長光源１に接続される光ファイバ、３は
その光ファイバ２に接続されるコリメータレンズ、４は
ビームスプリッタ、５はビームスプリッタ４からの光波
の一部を受ける空間分割型位相変調器、６はその空間分
割型位相変調器５に接続される高電圧信号発生器、７は
ハーフミラー、８はコリメータレンズ（対物レンズ）、
９は生体試料、１０は集光レンズ、１１は第１の光ファ
イバ、１２はその第１の光ファイバ１１に接続されるマ
ルチチャンネル分光器、１３は第２の光ファイバ、１４
はその第２の光ファイバ１３に接続される光検出器、１
５は上記したマルチチャンネル分光器１２と光検出器１
４からの出力信号を取り込む画像データ処理用コンピュ
ータである。In this figure, 1 is a broadband wavelength light source, 2
Is an optical fiber connected to the broadband wavelength light source 1, 3 is a collimator lens connected to the optical fiber 2, 4 is a beam splitter, 5 is a space division type phase modulator that receives a part of the light wave from the beam splitter 4. , 6 are high voltage signal generators connected to the space division type phase modulator 5, 7 is a half mirror, 8 is a collimator lens (objective lens),
9 is a biological sample, 10 is a condenser lens, 11 is a first optical fiber, 12 is a multi-channel spectroscope connected to the first optical fiber 11, 13 is a second optical fiber, 14
Are photodetectors connected to the second optical fiber 13;
5 is the multi-channel spectrometer 12 and the photodetector 1 described above.
4 is an image data processing computer which takes in output signals from the image data processing apparatus 4.
【００１１】図１に示したように、この実施例の分光学
的断面画像測定装置は、広帯域波長光源１と、照射光学
系（２，３，４）、空間遅延型フィゾー干渉計（５，
６，７，８，９，１０，１１，１３，１４）、マルチャ
ンネル分光器１２、画像データ処理用コンピュータ１５
で構成される。As shown in FIG. 1, the spectroscopic sectional image measuring apparatus of this embodiment includes a broadband wavelength light source 1, an irradiation optical system (2, 3, 4), and a spatial delay type Fizeau interferometer (5, 5).
6, 7, 8, 9, 10, 11, 13, 14), a multi-channel spectrometer 12, and an image data processing computer 15
It consists of.
【００１２】そこで、広帯域波長光源１、照射光学系
（２，３，４）、空間遅延型フィゾー干渉計（５，６，
７，８，９，１０，１１，１３，１４）で、従来のＯＣ
Ｔ原理に基づいて断層画像を測定するが、マルチャンネ
ル分光器１２（高速分光器）を用いることにより、散乱
光の波長スペクトルも同時に測定する。Therefore, the broadband wavelength light source 1, the irradiation optical system (2, 3, 4), and the spatial delay type Fizeau interferometer (5, 6,
7, 8, 9, 10, 11, 13, 14) and the conventional OC
Although the tomographic image is measured based on the T principle, the wavelength spectrum of the scattered light is measured at the same time by using the multi-channel spectroscope 12 (high-speed spectroscope).
【００１３】ここで、広帯域の光源について説明する。Here, a broadband light source will be described.
【００１４】現在、非線形光学結晶の結晶軸を周期的に
反転させた周期ドメイン反転結晶を用いると波長変換が
高効率に実現できることが実証されているが、コヒーレ
ント光源（スペクトル幅が狭い）への応用のみである。
そこで、ここではこれをインコヒーレント光源へ拡張し
て断層画像測定に有効な広帯域波長光源の創成に用いる
ように構成する。At present, it has been proved that wavelength conversion can be realized with high efficiency by using a periodic domain inversion crystal in which the crystal axis of a nonlinear optical crystal is periodically inverted. Application only.
Therefore, here, this is extended to an incoherent light source so as to be used for creating a broadband wavelength light source effective for tomographic image measurement.
【００１５】まず、第１例として、図２（ａ）に示すよ
うに、コヒーレント光源λ0 〔図２（ｂ）参照〕の光波
を周期ドメイン反転非線形光学結晶１６に入射して、複
数の周期でもって、連続又は不連続な波長λ1 〜λ
2 〔図２（ｃ）参照〕を得ることができる。上記した周
期ドメイン反転非線形光学結晶１６では反転できる周期
を自由に変えられるので発生光のスペクトルを自由に実
現できる。つまり、断層画像測定に理想的な光源が実現
できる。First, as a first example, as shown in FIG. 2A, a light wave of a coherent light source λ 0 (see FIG. Thus, continuous or discontinuous wavelengths λ 1 to λ
2 [see FIG. 2 (c)]. In the above-described periodic domain-inverted nonlinear optical crystal 16, the reversible period can be freely changed, so that the spectrum of the generated light can be freely realized. That is, an ideal light source for tomographic image measurement can be realized.
【００１６】また、第１例として、図２（ｄ）に示すよ
うに、励起光（連続又はパルス）を広帯域反射ミラー１
７を具備する共振器１８に入射して、連続又は不連続な
波長λ1 〜λ2 〔図２（ｃ）参照〕を得ることができ
る。As a first example, as shown in FIG. 2D, the excitation light (continuous or pulsed) is
7 is incident on the resonator 18 having a can be obtained a continuous or discontinuous wavelength lambda 1 to [lambda] 2 [refer to FIG. 2 (c)].
【００１７】次に、２次元のアレイ状光検出器に入射さ
れる光波とその処理について説明する。Next, the light wave incident on the two-dimensional array photodetector and its processing will be described.
【００１８】図３はその全体システムの説明図、図４は
２次元のアレイ状光検出器の斜視図、図５はその２次元
のアレイ状光検出器のｃ−ｄでの断面における光波を示
す図である。FIG. 3 is an explanatory view of the overall system, FIG. 4 is a perspective view of the two-dimensional array-shaped photodetector, and FIG. FIG.
【００１９】図３において、２１は低コヒーレンス光
源、２２はレンズ、２３はスリット、２４はビームスプ
リッタ（ＢＳ）、２５は対物レンズ、２６は生体試料、
２７はレンズ、２８は振動ミラー、２９はピエゾデバイ
ス（ＰＺＴ）、３０は高圧アンプ、３１は発振器、３２
はレンズ、Ｆは焦点距離である。In FIG. 3, 21 is a low coherence light source, 22 is a lens, 23 is a slit, 24 is a beam splitter (BS), 25 is an objective lens, 26 is a biological sample,
27 is a lens, 28 is a vibrating mirror, 29 is a piezo device (PZT), 30 is a high-voltage amplifier, 31 is an oscillator, 32
Is a lens, and F is a focal length.
【００２０】図３において、振動ミラー２８が周波数ｆ
で振動することにより、光波Ｓに対して、光波Ｒがシフ
トする。つまり、生体試料２６に、平面Ｐ１で高散乱点
ａ，ｂがある場合に、平面Ｐ１からの後散乱光が２次元
のアレイ状光検出器１の平面Ｐ２に結像するが、その強
度が周波数ｆで時間的に変化する。In FIG. 3, the vibrating mirror 28 has a frequency f
The light wave R shifts with respect to the light wave S by vibrating at. That is, when the biological sample 26 has the high scattering points a and b on the plane P1, the backscattered light from the plane P1 forms an image on the plane P2 of the two-dimensional array-shaped photodetector 1, but its intensity is low. It changes with time at the frequency f.
【００２１】次に、光波Ｓと光波Ｒがビームスプリッタ
２４で合波され、レンズ３２で結像されることにより、
２次元のアレイ状光検出器１の平面Ｐ２上に時間的に変
化する光強度分布が生じる。その状態を図４及び図５に
示している。つまり、２次元のアレイ状光検出器１のｃ
−ｄでの断面においては光強度ａ′，ｂ′が時間的に周
波数ｆで変化する。Next, the light wave S and the light wave R are multiplexed by the beam splitter 24 and imaged by the lens 32,
A time-varying light intensity distribution occurs on the plane P2 of the two-dimensional array photodetector 1. The state is shown in FIG. 4 and FIG. That is, c of the two-dimensional array photodetector 1
In the section at -d, the light intensities a 'and b' change temporally with the frequency f.
【００２２】図６は２次元光ヘテロダイン走査検出シス
テムの模式図、図７はその各部における信号強度を示す
図である。FIG. 6 is a schematic diagram of a two-dimensional optical heterodyne scanning detection system, and FIG. 7 is a diagram showing the signal intensity at each part thereof.
【００２３】これらの図に示すように、時間Ｔ0 のスイ
ッチング時間で順次２次元のアレイ状光検出器１がｉ＝
１〜Ｎまで走査部によって切り換えられていき、最終的
に端子ｃによって出力される。つまり、２次元のアレイ
状光検出器１の外部出力端子ａ〔光強度〕は図７（ａ）
に示すような信号強度を示している。ここで、ＣACは交
流成分、ＣDCは直流成分を示している。また、第１段目
の検波回路部３Ａの出力端子ｂ〔検波後〕は図７（ｂ）
に示すような信号強度を示し、第２段目の検波回路部３
Ｂの出力端子ｃ〔帯域フィルタ通過後〕は図７（ｃ）に
示すような信号強度を示す。すなわち、図７（ｃ）では
ビート信号の振幅に応じた信号強度が画素信号として出
力される。As shown in these figures, the two-dimensional array-shaped photodetectors 1 are sequentially switched to i = 2 at the switching time T 0.
Switching is performed by the scanning unit from 1 to N, and finally output from the terminal c. That is, the external output terminal a [light intensity] of the two-dimensional array-shaped photodetector 1 is shown in FIG.
The signal strength is as shown in FIG. Here, C AC indicates an AC component, and C DC indicates a DC component. The output terminal b (after detection) of the first-stage detection circuit unit 3A is shown in FIG.
And the second-stage detection circuit section 3
The output terminal c of B (after passing through the bandpass filter) has a signal strength as shown in FIG. That is, in FIG. 7C, a signal intensity corresponding to the amplitude of the beat signal is output as a pixel signal.
【００２４】図８はヘテロダイン光検出システムの模式
図である。FIG. 8 is a schematic diagram of a heterodyne photodetection system.
【００２５】この図において、４１は光源、４２は光フ
ァイバ、４３はレンズ、４４はビームスプリッタ、４５
はコリメータレンズ、４６は生体試料、４７は光変調
器、４８は高圧アンプ、４９は発振器、５０はレンズ、
５１は光ファイバ、５２は光検出器である。In this figure, 41 is a light source, 42 is an optical fiber, 43 is a lens, 44 is a beam splitter, 45
Is a collimator lens, 46 is a biological sample, 47 is an optical modulator, 48 is a high-voltage amplifier, 49 is an oscillator, 50 is a lens,
51 is an optical fiber and 52 is a photodetector.
【００２６】別に記述ている原理に従って光波Ｓと光波
Ｒの光路がコヒーレンス長以内で等しいときに光検出器
５２からはヘテロダインビート信号が測定され、散乱点
４６Ａからの後散乱光強度が測定されることになる。よ
って、この場合、生体試料４６をｘ方向に走査すれば、
深さ方向のプロファイル、ｙ方向に走査すれば、横方向
のプロファイルが測定される。According to the principle described separately, when the optical paths of the light wave S and the light wave R are equal within the coherence length, a heterodyne beat signal is measured from the photodetector 52, and the intensity of the backscattered light from the scattering point 46A is measured. Will be. Therefore, in this case, if the biological sample 46 is scanned in the x direction,
If scanning is performed in the depth direction and the y direction, the profile in the horizontal direction is measured.
【００２７】これにより、ｘ方向走査→ｙ方向１ステッ
プ走査→ｘ方向走査→ｙ方向１ステップ走査を繰り返せ
ば、ｘ，ｙ面断層像が測定できる。Thus, by repeating x-direction scanning → y-direction one-step scanning → x-direction scanning → y-direction one-step scanning, an x, y plane tomographic image can be measured.
【００２８】図９は本発明の分光学的断面画像測定装置
の構成図である。FIG. 9 is a block diagram of a spectroscopic cross-sectional image measuring apparatus according to the present invention.
【００２９】この図において、６１は光源、６２はレン
ズ、６３はビームスプリッタＢＳ、６４はハーフミラ
ー、６５はコリメータレンズ、６６は生体試料、６７は
空間分割型位相変調器、６８は集光レンズ、６９は第２
の光ファイバ、７１は第１の光ファイバ、７０は光検出
器、７２はマルチチャンネル分光器、７３は画像データ
処理用コンピュータである。In this figure, 61 is a light source, 62 is a lens, 63 is a beam splitter BS, 64 is a half mirror, 65 is a collimator lens, 66 is a biological sample, 67 is a space division type phase modulator, and 68 is a condenser lens. , 69 is the second
, 71 is a first optical fiber, 70 is a photodetector, 72 is a multi-channel spectroscope, and 73 is a computer for image data processing.
【００３０】図１０は本発明にかかるマルチチャンネル
分光器の構成図である。FIG. 10 is a configuration diagram of a multi-channel spectroscope according to the present invention.
【００３１】この図において、８１は分光器本体、８２
はその分光器本体に形成されるスリット、８３は凹面鏡
Ｍ１、８４は回折格子であり、この回折格子８４は波長
によって出射角が異なる。８５は凹面鏡Ｍ２、８６はフ
ォトダイオードアレイ、８７はマルチチャンネルディテ
クター、８８はレンズである。In this figure, reference numeral 81 denotes a spectroscope main body;
Is a slit formed in the main body of the spectroscope, 83 is a concave mirror M1, 84 is a diffraction grating, and the diffraction grating 84 has a different emission angle depending on the wavelength. 85 is a concave mirror M2, 86 is a photodiode array, 87 is a multi-channel detector, and 88 is a lens.
【００３２】第１の光ファイバ７１（図９参照）を介し
て得られた多波長光波はレンズ８８を経てスリット８２
から分光器本体８１に取り込まれ、凹面鏡８３、回折格
子８４、凹面鏡８５を経てフォトダイオードアレイ８６
を有するマルチチャンネルディテクター８７で検出す
る。ここで、マルチチャンネル分光器７２は、本来の分
光器の出射スリットの位置にフォトダイオードアレイな
どのマルチチャンネルディテクター８７を配置したもの
である。これにより、旧タイプでの回析格子を機械的に
回転することなく瞬時にスペクトル情報を測定できる。The multi-wavelength light wave obtained through the first optical fiber 71 (see FIG. 9) passes through a lens 88 and a slit 82
From the spectroscope main body 81 through a concave mirror 83, a diffraction grating 84, and a concave mirror 85.
Is detected by the multi-channel detector 87 having Here, the multi-channel spectroscope 72 has a multi-channel detector 87 such as a photodiode array arranged at the position of the exit slit of the original spectroscope. Thus, the spectrum information can be instantaneously measured without mechanically rotating the old type diffraction grating.
【００３３】そこで、測定Ａでは、図１１（ａ）に示す
ように、生体試料６６内のａ点からの散乱光の強度を測
定する。測定Ｂでは、図１１（ｂ）に示すように、生体
試料６６のａ点からの散乱光のスペクトルを測定するこ
とができ、スペクトル測定では、特定の波長λ1 ，
λ2 ，λ3 ，λ4 に対する測定やλ1 〜λ2 の連続スペ
クトル測定も可能である。Therefore, in the measurement A, the intensity of the scattered light from the point a in the biological sample 66 is measured as shown in FIG. In the measurement B, as shown in FIG. 11B, the spectrum of the scattered light from the point a of the biological sample 66 can be measured. In the spectrum measurement, the specific wavelength λ 1 ,
Measurement for λ 2 , λ 3 , λ 4 and continuous spectrum measurement of λ 1 to λ 2 are also possible.
【００３４】それらの情報をコンピュータ７３（図９参
照）で処理する。The information is processed by the computer 73 (see FIG. 9).
【００３５】このように構成したので、断層構造情報と
その画像でのスペクトル情報を得ることができるので、
新しい医療応用が期待される。With this configuration, it is possible to obtain the tomographic structure information and the spectral information of the image.
New medical applications are expected.
【００３６】なお、本発明は上記実施例に限定されるも
のではなく、本発明の趣旨に基づいて種々の変形が可能
であり、これらを本発明の範囲から除外するものではな
い。It should be noted that the present invention is not limited to the above-described embodiment, and various modifications are possible based on the spirit of the present invention, and these are not excluded from the scope of the present invention.
【００３７】[0037]
【発明の効果】以上、詳細に説明したように、本発明に
よれば、以下のような効果を奏することができる。As described above, according to the present invention, the following effects can be obtained.
【００３８】従来、断層画像を計測する際に、得られて
いなかったスペクトル情報が、信頼性の高い直接測定に
よって断層画像に加わることになり、生体の代謝を始め
活動状態が測定できることになり、特に、生化学的分野
における実用的効果は著大である。Conventionally, when a tomographic image is measured, spectrum information that has not been obtained is added to the tomographic image by highly reliable direct measurement, so that the metabolism of the living body and the activity state can be measured. In particular, the practical effects in the biochemical field are remarkable.
【００３９】すなわち、断層画像に加えて、スペクトル
情報も測定できることから、生化学的に新しい知見が得
られ、医学分野では新しい臨床診断・基礎研究への応用
が期待され、さらに、半導体や他の産業分野への幅広い
応用が期待されその波及効果は多大である。That is, since spectral information can be measured in addition to tomographic images, new biochemical findings can be obtained, and in the medical field, applications to new clinical diagnosis and basic research are expected. It is expected to be widely applied to industrial fields, and its ripple effect is enormous.
【図１】本発明の実施例を示す分光学的断面画像測定装
置の全体構成図である。FIG. 1 is an overall configuration diagram of a spectroscopic cross-sectional image measurement device showing an embodiment of the present invention.
【図２】本発明の実施例を示す広帯域波長光源の説明図
である。FIG. 2 is an explanatory diagram of a broadband wavelength light source showing an embodiment of the present invention.
【図３】２次元光ヘテロダインシステムの説明図であ
る。FIG. 3 is an explanatory diagram of a two-dimensional optical heterodyne system.
【図４】本発明の実施例を示す２次元のアレイ状光検出
器の斜視図である。FIG. 4 is a perspective view of a two-dimensional array photodetector showing an embodiment of the present invention.
【図５】図４のアレイ状光検出器のｃ−ｄでの断面にお
ける光波を示す図である。FIG. 5 is a diagram showing light waves in a cross section taken along the line cd of the array-shaped photodetector in FIG. 4;
【図６】本発明の実施例を示す２次元光ヘテロダイン走
査検出システムの模式図である。FIG. 6 is a schematic diagram of a two-dimensional optical heterodyne scanning detection system showing an embodiment of the present invention.
【図７】図６の各部における信号強度を示す図である。FIG. 7 is a diagram illustrating signal strengths at various parts in FIG. 6;
【図８】ヘテロダイン光検出システムの模式図である。FIG. 8 is a schematic diagram of a heterodyne photodetection system.
【図９】本発明に係る分光学的断面画像測定装置の構成
図である。FIG. 9 is a configuration diagram of a spectroscopic cross-sectional image measurement device according to the present invention.
【図１０】本発明に係るマルチチャンネル分光器の構成
図である。FIG. 10 is a configuration diagram of a multi-channel spectrometer according to the present invention.
【図１１】本発明に係る光検出器の出力とスペクトル情
報を示す図である。FIG. 11 is a diagram showing an output of a photodetector and spectrum information according to the present invention.
１ 広帯域波長光源 ２，４２，５１， 光ファイバ ３，８，４５，６５ コリメータレンズ ４，２４，４４，６３ ビームスプリッタ ５ 空間分割型位相変調器 ６ 高電圧信号発生器 ７，６４ ハーフミラー ９，２６，４６，６６ 生体試料 １０ 集光レンズ １１，７１ 第１の光ファイバ １２，７２ マルチチャンネル分光器 １３，６９ 第２の光ファイバ １４，５２，７０ 光検出器 １５，７３ 画像データ処理用コンピュータ １６ 周期ドメイン反転非線形光学結晶 １７ 広帯域反射ミラー １８ 共振器 ２１ 低コヒーレンス光源 ２２，２７，３２，４３，５０，６２，６８，８８
レンズ ２３，８２ スリット ２５ 対物レンズ ２８ 振動ミラー ２９ ピエゾデバイス（ＰＺＴ） ３０，４８ 高圧アンプ ３１，４９ 発振器 ４１，６１ 光源 ４６Ａ 散乱点 ４７，６７ 光変調器 ４９ 発振器 ８１ 分光器本体 ８３ 凹面鏡Ｍ１ ８４ 回折格子 ８５ 凹面鏡Ｍ２ ８６ フォトダイオードアレイ ８７ マルチチャンネルディテクターDESCRIPTION OF SYMBOLS 1 Broadband wavelength light source 2, 42, 51, Optical fiber 3, 8, 45, 65 Collimator lens 4, 24, 44, 63 Beam splitter 5 Space division type phase modulator 6 High voltage signal generator 7, 64 Half mirror 9, 26, 46, 66 Biological sample 10 Condenser lens 11, 71 First optical fiber 12, 72 Multi-channel spectrometer 13, 69 Second optical fiber 14, 52, 70 Photodetector 15, 73 Computer for image data processing Reference Signs List 16 periodic domain inversion nonlinear optical crystal 17 broadband reflection mirror 18 resonator 21 low coherence light source 22, 27, 32, 43, 50, 62, 68, 88
Lens 23, 82 Slit 25 Objective lens 28 Vibration mirror 29 Piezo device (PZT) 30, 48 High voltage amplifier 31, 49 Oscillator 41, 61 Light source 46A Scattering point 47, 67 Light modulator 49 Oscillator 81 Spectroscope main body 83 Concave mirror M1 84 Diffraction Grating 85 Concave mirror M2 86 Photodiode array 87 Multi-channel detector
───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｇ０１Ｎ 21/01 Ｇ０１Ｂ 11/24 Ｄ Ａ Ｆターム(参考） 2F064 AA09 CC04 EE05 FF00 GG00 GG02 GG22 GG49 GG51 GG57 GG70 HH08 JJ05 2F065 AA54 BB02 DD03 FF42 FF46 FF51 GG01 GG12 JJ03 JJ26 LL02 LL42 LL46 LL57 LL67 MM26 NN08 QQ21 QQ28 QQ32 2G059 AA05 BB12 EE02 EE09 EE12 FF01 GG01 JJ05 JJ11 JJ14 JJ17 JJ22 JJ30 KK03 KK04 MM20 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification FI FI Theme Court ゛ (Reference) G01N 21/01 G01B 11/24 DA F Term (Reference) 2F064 AA09 CC04 EE05 FF00 GG00 GG02 GG22 GG49 GG51 GG57 GG70 HH08 JJ05 2F065 AA54 BB02 DD03 FF42 FF46 FF51 GG01 GG12 JJ03 JJ26 LL02 LL42 LL46 LL57 LL67 MM26 NN08 QQ21 QQ28 QQ32 2G059 AA05 BB12 EE02 EE09 EE12 FF01 JJ01 KK01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 KK01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 KK01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 JJ01 KK01 JJ01
Claims (3)
系と、（ｃ）空間遅延型フィゾー干渉計と、（ｄ）高速
分光器と、（ｅ）画像データ処理用コンピュータとを備
え、（ｆ）前記空間遅延型フィゾー干渉計からの断層画
像を測定するとともに、前記高速分光器からの散乱光の
波長スペクトルも同時に測定することを特徴とする分光
学的断面画像測定装置。1. A broadband wavelength light source, (b) an irradiation optical system, (c) a spatial delay type Fizeau interferometer, (d) a high-speed spectrometer, and (e) a computer for image data processing. And (f) measuring a tomographic image from the spatial delay Fizeau interferometer and simultaneously measuring a wavelength spectrum of scattered light from the high-speed spectroscope.
置において、前記高速分光器はマルチチャンネル分光器
であることを特徴とする分光学的断面画像測定装置。2. A spectroscopic sectional image measuring apparatus according to claim 1, wherein said high-speed spectrometer is a multi-channel spectrometer.
置において、前記広帯域波長光源を非線形光学結晶の結
晶軸を周期的に反転させた周期ドメイン反転結晶を用い
て創成することを特徴とする分光学的断面画像測定装
置。3. The spectroscopic cross-sectional image measuring apparatus according to claim 1, wherein the broadband wavelength light source is created using a periodic domain inversion crystal in which a crystal axis of a nonlinear optical crystal is periodically inverted. Spectroscopic cross-sectional image measurement device.
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| JP2000084639A JP3681608B2 (en) | 2000-03-24 | 2000-03-24 | Spectroscopic sectional image measuring device |
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