JP2001270727A - Method for producing round sealed quartz tube - Google Patents
Method for producing round sealed quartz tubeInfo
- Publication number
- JP2001270727A JP2001270727A JP2000089412A JP2000089412A JP2001270727A JP 2001270727 A JP2001270727 A JP 2001270727A JP 2000089412 A JP2000089412 A JP 2000089412A JP 2000089412 A JP2000089412 A JP 2000089412A JP 2001270727 A JP2001270727 A JP 2001270727A
- Authority
- JP
- Japan
- Prior art keywords
- quartz
- quartz tube
- disk
- tube material
- prescribed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/04—Re-forming tubes or rods
- C03B23/09—Reshaping the ends, e.g. as grooves, threads or mouths
- C03B23/092—Reshaping the ends, e.g. as grooves, threads or mouths by pressing
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B23/00—Re-forming shaped glass
- C03B23/20—Uniting glass pieces by fusing without substantial reshaping
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Glass Melting And Manufacturing (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、半導体工業に使用
される石英炉心管として使用される石英管、特に大口径
の丸封石英管の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a quartz tube used as a quartz furnace core tube used in the semiconductor industry, in particular, a large diameter round sealed quartz tube.
【０００２】[0002]
【関連技術】丸封石英管の製造方法としては、従来、図
６に示すように、石英管（ストレート管）１０１を硝子
旋盤Ｌに取り付け、管軸を中心として回転させながら、
丸封加工位置に硝子バーナＢにより大きな熱量を加え、
その部分を石英硝子の可塑領域まで熱するとともに、加
熱部分をカーボン（黒鉛）製の治具を用いて絞り込むこ
とによって、石英管の端部を丸封加工するという方法が
一般的に知られている。[Related Art] Conventionally, as a method of manufacturing a sealed quartz tube, a quartz tube (straight tube) 101 is attached to a glass lathe L as shown in FIG.
A larger amount of heat is applied to the glass burner B at the rounding position,
It is generally known that the end of the quartz tube is round-sealed by heating the portion to the plastic region of the quartz glass and narrowing the heated portion using a jig made of carbon (graphite). I have.
【０００３】また、他の方法として、特開平６−３４５
４７０号公報には、図７に示すように、石英管本体（ス
トレート管）と石英円板（平板）を素材として、その石
英管本体と石英円板を硝子旋盤に互いに対向するように
取り付け、石英管本体の一端に石英円板を高温火災で溶
着した後、その溶着一体化物を回転させながら、石英円
板を高温火災で加熱するとともに、石英管本体内に他端
側からブローを供給して内圧を高め、石英円板を外方に
膨らませることにより、石英管端部に所定の曲率をもつ
アール部を加工する技術が開示されている。Another method is disclosed in Japanese Patent Application Laid-Open No. 6-345.
No. 470, as shown in FIG. 7, using a quartz tube main body (straight tube) and a quartz disk (flat plate) as materials, attaching the quartz tube main body and the quartz disk to a glass lathe so as to face each other. After welding a quartz disk to one end of the quartz tube body by a high-temperature fire, the quartz disk is heated by the high-temperature fire while rotating the welded integrated product, and a blow is supplied from the other end into the quartz tube body. There is disclosed a technique for processing a round portion having a predetermined curvature at the end of a quartz tube by increasing the internal pressure to expand the quartz disk outward.
【０００４】また特開平１１−１５７８５６号公報に
は、図９に示されるように、素材として石英管本体（ス
トレート管）１と石英円板２を用い、その石英管本体１
の端部に、製品形状に合わせた曲率のアール部１ａ'を
成形し、石英円板２を製品形状に湾曲させ、それら石英
管本体１'と石英円板２'の端部を加熱して相互に溶着し
て大型の丸封石英管Ｔを得る技術も提案されている。Japanese Patent Application Laid-Open No. 11-157856 discloses a quartz tube main body (straight tube) 1 and a quartz disk 2 as raw materials, as shown in FIG.
Is formed at the end of the quartz tube, the quartz disk 2 is bent into the product shape, and the ends of the quartz tube main body 1 'and the quartz disk 2' are heated. A technique for obtaining a large round sealed quartz tube T by welding them together has also been proposed.
【０００５】[0005]
【発明が解決しようとする課題】ところで、最近では、
半導体工業で使用される炉心管（丸封石英管）が、６イ
ンチ、８インチ、１２インチと大型化する傾向にある
が、図６に示す従来の方法では、その大型化に伴って石
英管を可塑領域まで加熱するのに大きな熱量が必要とな
り、エネルギ消費も大きくなる。また石英管が大口径と
なると、石英管を絞り込むために要する作業時間も非常
に長くなるという問題がある。By the way, recently,
The core tube (round-sealed quartz tube) used in the semiconductor industry tends to be large, such as 6 inches, 8 inches, and 12 inches. In the conventional method shown in FIG. Requires a large amount of heat to heat the steel to the plasticizing region, and the energy consumption increases. In addition, when the quartz tube has a large diameter, there is a problem that the operation time required for narrowing the quartz tube becomes very long.
【０００６】一方、特開平６−３４５４７０号公報に記
載の方法によれば、石英管本体に石英円板を溶着した
後、石英円板を均一に加熱し空気圧によって外方に膨ら
ませる方法であるので、その膨らませ加工時に、溶着部
分に変形が生じる可能性があり、これを防ぐための何ら
かの対策を採る必要がある。具体的には、同公報の第３
頁、段落１５に、石英ガラス製円板を溶着した石英ガラ
ス管の溶着端面をガラス管径よりテーパー状に拡径して
該拡径部と溶着一体物を加熱し、内圧負荷により外側へ
膨出させることが、後述する丸封時に、該溶着面が丸封
部中心側へずれこむのを防ぎ、かつ、均一な粘性の可塑
領域を保持して丸封面全体の肉厚変動を抑止する上で有
効である、と記載されるごとく、図８に示すように溶着
端面をガラス管径よりデーパー状に拡径する形状を採用
する必要があり、それだけ余分な作業を必要とする。On the other hand, according to the method described in JP-A-6-345470, after a quartz disk is welded to a quartz tube main body, the quartz disk is uniformly heated and expanded outward by air pressure. Therefore, there is a possibility that the welded portion may be deformed during the swelling process, and it is necessary to take some measures to prevent this. Specifically, the third publication of the publication
In page 15, paragraph 15, the fused end face of the quartz glass tube to which the quartz glass disk is welded is tapered from the diameter of the glass tube, the enlarged portion and the welded unit are heated, and expanded outward by the internal pressure load. In order to prevent the welded surface from slipping toward the center of the rounded portion at the time of rounding described below, and to maintain a uniform viscous plastic region and suppress wall thickness fluctuation of the whole rounded surface. As shown in FIG. 8, it is necessary to adopt a shape in which the welded end face is expanded in a taper shape from the diameter of the glass tube, as shown in FIG. 8, which requires extra work.
【０００７】さらに、特開平１１−１５７８５６号公報
記載の方法によれば、石英円板を湾曲させる際に石英管
本体内に気体圧力を付与するための圧力付与手段は必要
でないものの、石英管本体の端部に所定の曲率のアール
部を形成し、一方では石英円板を同じ曲率に湾曲させる
という困難な作業を行う必要があるという新たな問題が
生じている。Further, according to the method described in Japanese Patent Application Laid-Open No. H11-157856, a pressure applying means for applying a gas pressure to the inside of the quartz tube main body when the quartz disk is curved is not required, but the quartz tube main body is not required. However, a new problem arises in that it is necessary to perform a difficult operation of forming a rounded portion having a predetermined curvature at the end portion, while bending the quartz disk to the same curvature.
【０００８】本発明は、上記した従来技術の問題点に鑑
みなされたもので、高精度な所定の曲率を有し、かつ滑
らかな曲部が形成された丸封石英管を高度な熟練度を必
要とすることなく、簡単なより少ない工程で、生産性、
再現性よく、かつ高品質のものを製造することができ、
半導体製造用治具として、強度、寸法性共に優れた大型
丸封石英管を製造することのできる方法を提供すること
を目的とする。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and is intended to provide a round quartz tube having a predetermined curvature with high precision and a smooth curved portion to a high degree of skill. Productivity, with fewer and simpler steps, without the need
High quality products with good reproducibility can be manufactured.
An object of the present invention is to provide a method capable of manufacturing a large round quartz tube having excellent strength and dimensional properties as a jig for manufacturing a semiconductor.
【０００９】[0009]
【課題を解決するための手段】上記課題を解決するため
に、本発明の丸封石英管の製造方法は、所定の肉厚及び
外径に研削加工した石英円板と、所定の外径及び肉厚の
石英管材料を熔着して丸封石英管を製造する方法であ
り、該石英円板の外周部にＲ面取り加工を施すととも
に、熔着部となる該石英円板の片面と石英管材料の端部
を平面研削加工を施した後に熔着する工程と、該熔着し
た石英円板部及び石英管材料端部周辺を加熱軟化させ、
所定のＲ形状をもつカーボンモールドを接触させて丸封
部を形成する工程とからなることを特徴とする。In order to solve the above-mentioned problems, a method for manufacturing a sealed quartz tube according to the present invention comprises a quartz disk ground to a predetermined thickness and an outer diameter; This is a method of manufacturing a sealed quartz tube by fusing a thick quartz tube material, performing an R chamfering process on an outer peripheral portion of the quartz disk, and forming a quartz portion on one side of the quartz disk serving as a welded portion. Welding the end of the tube material after performing the surface grinding process, heating and softening the fused quartz disc portion and the periphery of the quartz tube material end,
Forming a round-sealed portion by contacting a carbon mold having a predetermined R shape.
【００１０】前記石英管材料を縦置きし、該石英管材料
の上端面に前記石英円板を載置した状態で両者を熔着す
れば、特別な治具を要することなく、石英円板を載置す
るだけで両者を当接できる利点がある。If the quartz tube is placed vertically and the quartz tube is placed on the upper end surface of the quartz tube and welded to each other, the quartz tube can be welded without any special jig. There is an advantage that the two can be brought into contact just by placing them.
【００１１】前記石英円板及び石英管材料を平面研削加
工する際、ダイヤモンド砥石を使用し、そのダイヤモン
ド粒度は＃５０（約０.８〜０.９mm）より細かいもの、
好ましくは＃２００（約０.２０〜０.２５mm）より細か
いものであるのが好適である。When the quartz disk and the quartz tube material are subjected to surface grinding, a diamond grindstone is used, and the diamond grain size is smaller than # 50 (about 0.8 to 0.9 mm).
Preferably, it is finer than # 200 (about 0.20 to 0.25 mm).
【００１２】[0012]
【発明の実施の形態】以下に本発明の一つの実施の形態
を添付図面中、図１〜図５に基づいて説明するが、図示
例は例示的に示されるもので、本発明の技術思想から逸
脱しない限り種々の変形が可能なことはいうまでもな
い。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. 1 to 5 in the accompanying drawings. It goes without saying that various modifications can be made without departing from the scope of the present invention.
【００１３】図１は本発明方法において縦置き石英管材
料の上端面に石英円板を載置する工程を示す側面的説明
図である。図２は石英管材料とその上端面に載置された
石英円板とを熔着する工程を示す側面的説明図である。
図３は熔着した石英円板と石英管材料上端部に丸封部を
形成する工程を示す側面的説明図である。図４は縦置き
石英管材料の上端内面に石英円板を載置する工程を示す
側面的説明図である。図５は作製される石英管の例を示
す側面図で、（ａ）は平封石英管、（ｂ）は丸封石英管
をそれぞれ示す。FIG. 1 is a side view showing a step of placing a quartz disk on the upper end surface of a vertically placed quartz tube material in the method of the present invention. FIG. 2 is a side explanatory view showing a step of welding a quartz tube material and a quartz disk placed on the upper end surface thereof.
FIG. 3 is a side explanatory view showing a step of forming a round seal portion at the upper end of the fused quartz disk and quartz tube material. FIG. 4 is a side explanatory view showing a step of placing a quartz disk on the inner surface of the upper end of the vertically placed quartz tube material. FIGS. 5A and 5B are side views showing examples of the quartz tube to be manufactured. FIG. 5A shows a plain sealed quartz tube, and FIG. 5B shows a round sealed quartz tube.
【００１４】本発明の石英管の製造方法においては、所
定の肉厚及び外径に研削加工した石英円板１０と、所定
の外径及び肉厚の石英管材料１２とをまず用意する。次
に、この石英円板１０を石英管材料１２の一方の端面に
当接させる。この当接作業において石英管材料１２は縦
置きであっても横置きであってもよいが、図１（ａ）に
示したように石英管材料１２を縦置きとしておけば、石
英円板１０を石英管材料１２の上端面に載置するだけで
当接させることができるので、支持手段を必要とする横
置きの場合よりも好適である。In the method of manufacturing a quartz tube according to the present invention, a quartz disk 10 ground to a predetermined thickness and outer diameter and a quartz tube material 12 having a predetermined outer diameter and thickness are first prepared. Next, the quartz disk 10 is brought into contact with one end face of the quartz tube material 12. In this contacting operation, the quartz tube material 12 may be placed vertically or horizontally, but if the quartz tube material 12 is placed vertically as shown in FIG. Can be brought into contact by merely placing it on the upper end surface of the quartz tube material 12, which is more preferable than the case of a horizontal installation requiring supporting means.
【００１５】本発明方法においては、上記した当接作業
の前に、石英円板１０の外周部にＲ面取り加工を施す
〔図１（ｂ）〕。石英円板１０の外周部にＲ面取り加工
を施さない場合には、熔着後に空気圧によって外方に膨
らませて後述する丸封部２１ａを形成する際に、熔着部
分に不必要な変形が生じてしまい、良好な丸封部２１ａ
を形成することができない。このＲ面取り加工は、石英
管材料１２の肉厚をｄｍｍとした場合に、（ｄ±１）Ｒ
程度とすればよい。In the method of the present invention, an R-chamfering process is performed on the outer peripheral portion of the quartz disk 10 before the contacting operation described above (FIG. 1B). If the R-chamfering process is not performed on the outer peripheral portion of the quartz disk 10, unnecessary deformation may occur in the welded portion when expanding outward by air pressure to form a round seal portion 21 a described later. Good sealed part 21a
Cannot be formed. This R chamfering process is performed when (d ± 1) R when the thickness of the quartz tube material 12 is dmm.
It should be about the degree.
【００１６】一方、熔着部となる石英円板１０の片面、
図１（ａ）の場合には下面１０ａに平面研削加工を施
し、かつ同じく熔着部となる石英管材料１２の円周端
部、図１（ａ）の場合には円周上端面１２ａに平面研削
加工を施すことが必須である。この平面研削加工を施し
た石英円板１０の面１０ａの表面粗さはＲａ（中心線平
均粗さ）≦５μｍ、Ｒｙ（最大高さ）≦４０μｍとする
のが好ましい。また、上記した熔着部に対する事前の平
面研削加工を施さない場合には熔着部の馴染みが悪く良
好な熔着部を形成できないこととなる。On the other hand, one side of a quartz disk 10 serving as a welding portion,
In the case of FIG. 1A, the lower surface 10a is subjected to surface grinding, and the circumferential end portion of the quartz tube material 12 which is also a welded portion. In the case of FIG. 1A, the circumferential upper end surface 12a is formed. It is essential to perform surface grinding. The surface roughness of the surface 10a of the quartz disk 10 subjected to the surface grinding is preferably Ra (center line average roughness) ≦ 5 μm and Ry (maximum height) ≦ 40 μm. In addition, if the above-mentioned surface grinding is not performed on the welded portion in advance, the familiarity of the welded portion is poor and a good welded portion cannot be formed.
【００１７】続いて、石英円板１０と石英管材料１２と
を熔着するには、図２に示すように、該石英円板１０を
上面に載置した石英管材料１２をターンテーブル１４上
に縦置きし、熔着用インナーバーナー１６を石英管材料
１２の内部に配置し、また熔着用アウターバーナー１８
を石英管材料１２の外周部に配置する。該インナーバー
ナー１６及びアウターバーナー１８を用いて、石英円板
１０と石英管材料１２の当接部を加熱熔融することによ
って石英円板１０と石英管材料１２とを熔着する。この
熔着工程によって石英円板１０と石英管材料１２とが熔
着され、その溶着部、即ち平封部２０ａが溶着された石
英管溶着体、即ち平封石英管２０が作製される〔図５
（ａ）〕。Subsequently, in order to weld the quartz disk 10 and the quartz tube material 12, as shown in FIG. 2, the quartz tube material 12 with the quartz disk 10 mounted on the upper surface is placed on a turntable 14. The welding inner burner 16 is placed inside the quartz tube material 12 and the welding outer burner 18 is
Is arranged on the outer periphery of the quartz tube material 12. By using the inner burner 16 and the outer burner 18, the contact portion between the quartz disk 10 and the quartz tube material 12 is heated and melted to fuse the quartz disk 10 and the quartz tube material 12. By this welding step, the quartz disk 10 and the quartz tube material 12 are welded, and a welded portion of the welded portion, that is, the quartz tube welded with the plain sealed portion 20a, that is, a plain sealed quartz tube 20 is produced [FIG. 5
(A)].
【００１８】次いで、図３に示すように、該平封石英管
２０をガラス旋盤２２に片持状態でセットする。該平封
石英管２０の開口部にガス導入管２６が付いたキャップ
２４を装着する。該平封石英管２０を回転しつつ該平封
部２０ａの周辺をバーナー２８によって加熱し、石英円
板部分を軟化させ、カーボン製Ｒ治具３０を押し当てな
がら、平封石英管２０内にガス導入管２６からクリーン
エアを供給して石英円板部分を膨らませてカーボン製Ｒ
治具３０のＲに合わせた形状の丸封部２１ａが形成され
るとともに丸封石英管２１が製造される〔図５
（ｂ）〕。Next, as shown in FIG. 3, the flat quartz tube 20 is set on a glass lathe 22 in a cantilever state. A cap 24 with a gas inlet tube 26 is attached to the opening of the flat quartz tube 20. While rotating the plain-sealed quartz tube 20, the periphery of the plain-sealed portion 20 a is heated by the burner 28 to soften the quartz disc portion, and the carbon jig 30 is pressed into the plain-sealed quartz tube 20. Clean air is supplied from the gas inlet pipe 26 to inflate the quartz disk portion to remove carbon
A round sealed portion 21a having a shape corresponding to the radius of the jig 30 is formed, and the round sealed quartz tube 21 is manufactured [FIG.
(B)].
【００１９】丸封石英管２１の製造に際しては、図５に
示したように作製しようとする丸封部２１ａの体積Ｖを
計算し、その体積Ｖよりも若干大きくなるように石英円
板１０の肉厚ｔを設定するのが好適である。この肉厚ｔ
は次の式（１）によって算出することができる。In manufacturing the sealed quartz tube 21, the volume V of the sealed portion 21a to be manufactured is calculated as shown in FIG. 5, and the volume of the quartz disk 10 is slightly larger than the volume V. It is preferable to set the thickness t. This wall thickness t
Can be calculated by the following equation (1).
【００２０】[0020]
【数１】ｔ＝４Ｖ／（３．１４×ＯＤ2）……（１） 但しＶ＝〔３．１４／３×Ｈ１×（３×Ｒ１−Ｈ１）〕
−〔３．１４／３×Ｈ２ 2×（３×Ｒ２−Ｈ２）〕## EQU1 ## t = 4V / (3.14 × OD)Two) (1) where V = [3.14 / 3 × H1 × (3 × R1-H1)]
− [3.14 / 3 × H2 Two× (3 × R2-H2)]
【００２１】上式において、ｔ：石英円板の肉厚、Ｖ：
丸封部の体積、ＯＤ：石英管材料の外径、Ｒ１：丸封部
外周面のＲ、Ｒ２：丸封部内周面のＲ，Ｈ１：丸封部の
内径高さ、Ｈ２：丸封部の外径高さである。In the above equation, t: wall thickness of the quartz disk, V:
Volume of the sealed portion, OD: outer diameter of the quartz tube material, R1: R on the outer peripheral surface of the sealed portion, R2: R on the inner peripheral surface of the sealed portion, H1: height of the inner diameter of the sealed portion, H2: rounded portion Is the height of the outside diameter.
【００２２】上記した実施の形態においては、石英管材
料１２の上端面に石英円板１０を載置する場合を説明し
たが、石英管材料１２の端部と石英円板１０の片面を当
接状態とする態様としては、他の例も考えられるもので
あり、図４に示すように、石英管材料１２の上端開口部
の上端内周面１２ｂに石英円板１０の外周側面１０ｂを
当接させて熔着することも可能である。この場合、それ
ぞれの当接面である上端内周面１２ｂ及び外周側面１０
ｂをそれぞれ平面研削加工とする必要があることはいう
までもない。In the above-described embodiment, the case where the quartz disk 10 is placed on the upper end surface of the quartz tube material 12 has been described, but the end of the quartz tube material 12 and one surface of the quartz disk 10 are in contact with each other. As an example of the state, another example is also conceivable. As shown in FIG. 4, the outer peripheral side surface 10b of the quartz disk 10 is brought into contact with the upper inner peripheral surface 12b of the upper end opening of the quartz tube material 12. It is also possible to perform welding. In this case, the upper end inner peripheral surface 12b and the outer peripheral side surface 10
Needless to say, it is necessary to perform surface grinding on each of b.
【００２３】[0023]
【実施例】以下実施例をあげて本発明をさらに詳細に説
明するが、この実施例は例示的に示されるもので限定的
に解釈すべきでないことはいうまでもない。EXAMPLES The present invention will be described in more detail with reference to the following Examples, which, of course, are illustrative and should not be construed as limiting.
【００２４】（実施例１）外径φ３１６、肉厚４.５m
m、長さ１３００mmの石英管材料を円筒研削機にセット
し、レジンボンド＃４００ダイヤモンド砥石を使用し、
石英管材料の片側端部を平面研削加工を施し、この加工
面のＲａ＝０．１９μｍ、Ｒｙ＝１．４μｍとした。ま
た、３５０×３５０mm、厚さ６.０mmの石英板から、レ
ーザー加工機にてφ３１６に切り出した後、平面研削機
にセットし、レジンボンド＃４００ダイヤモンド砥石を
使用して石英円板の両面を平面研削加工を施すとともに
この加工面のＲａ＝０．１９μｍ、Ｒｙ＝１．４μｍと
し、厚さ５.３mmに仕上げた。その後、石英円板をマシ
ニングセンターにセットし、レジンボンド＃２３０ダイ
ヤモンド砥石を使用して石英円板の外周部を４.５Ｒに
面取り加工を施した。(Example 1) Outer diameter φ316, wall thickness 4.5m
m, a 1300 mm long quartz tube material is set in a cylindrical grinder, and a resin bond # 400 diamond grindstone is used.
One end of the quartz tube material was subjected to surface grinding, and the processed surface was set to Ra = 0.19 μm and Ry = 1.4 μm. Further, a quartz plate having a size of 350 × 350 mm and a thickness of 6.0 mm was cut into φ316 by a laser beam machine, then set on a surface grinding machine, and both sides of the quartz disk were bonded using a resin bond # 400 diamond grindstone. Surface grinding was performed, and Ra = 0.19 μm and Ry = 1.4 μm on the processed surface, and the surface was finished to a thickness of 5.3 mm. Thereafter, the quartz disk was set on a machining center, and the outer periphery of the quartz disk was chamfered to 4.5R using a resin bond # 230 diamond grindstone.
【００２５】平面研削加工を施した端部が上になるよう
に石英管材料をターンテーブルに載せた後、熔着用イン
ナーバーナーを石英管材料内に挿入し固定した。その
後、ゆっくり回転させながら、石英管材料がターンテー
ブルの中心に配置されるよう、位置合わせをした。ター
ンテーブルを停止後、石英円板を静かに石英管材料の上
に載せ、中心を合わせた。再びゆっくりとターンテーブ
ルを回転させ、熔着用アウターバーナーを石英管外周部
に配置し点火した。同時にインナーバーナーも点火し、
石英管端部にバーナーの炎の中心がくるように位置合わ
せを行い、そのまま放置すると、約３分後に石英管材料
と石英円板が完全に熔着し、この段階で平封石英管を作
製することができた。After the quartz tube material was placed on a turntable so that the end subjected to the surface grinding was turned up, an inner burner for welding was inserted into the quartz tube material and fixed. Then, while slowly rotating, the positioning was performed so that the quartz tube material was placed at the center of the turntable. After stopping the turntable, the quartz disk was gently placed on the quartz tubing and centered. Again, the turntable was slowly rotated, and the outer burner for welding was arranged on the outer periphery of the quartz tube and ignited. At the same time the inner burner also ignites,
After aligning the center of the flame of the burner at the end of the quartz tube and leaving it as it is, after about 3 minutes, the quartz tube material and the quartz disc are completely welded, and a flat sealed quartz tube is manufactured at this stage. We were able to.
【００２６】ターンテーブルからこの平封石英管を取り
外し、ガラス旋盤にセットした。平封石英管開口部にガ
ス導入管が付いたキャップを装着し、ロータリージョイ
ントを介したシリコンゴムホースにて、クリーンエア供
給部に接続した。The quartz tube was removed from the turntable and set on a glass lathe. A cap with a gas introduction tube was attached to the opening of the plain quartz tube, and connected to a clean air supply unit with a silicone rubber hose via a rotary joint.
【００２７】平封石英管を回転させ、石英円板及び石英
管材料との熔着部周辺をバーナーにて加熱した。約５分
後、石英円板部分が軟化したので、Ｒ２５４のカーボン
製Ｒ治具を押し当てながら、平封石英管内にクリーンエ
アを供給すると石英円板部分が膨らみ所望の形状の丸封
部が形成された。この段階で丸封石英管を作製すること
ができた。The flat quartz tube was rotated, and the area around the fused portion of the quartz disk and the quartz tube material was heated by a burner. Approximately 5 minutes later, the quartz disk portion was softened. When clean air was supplied into the flat-sealed quartz tube while pressing an R254 carbon R jig, the quartz disk portion swelled, and a round seal portion having a desired shape was formed. Been formed. At this stage, a sealed quartz tube could be manufactured.
【００２８】約３０分後、充分に冷却された丸封石英管
をガラス旋盤から取り外し、寸法を測定してみると、丸
封部がＲ２５４、肉厚４.５mmであった。また、石英円
板の熔着部もよく馴染んでおり、ほとんど繋ぎ目がわか
らない程度であった。After about 30 minutes, the well-cooled sealed quartz tube was removed from the glass lathe, and the dimensions were measured. The sealed portion was R254 and had a wall thickness of 4.5 mm. In addition, the welded portion of the quartz disk was also familiar, and the joint was hardly visible.
【００２９】[0029]
【発明の効果】以上述べたごとく、従来の石英管の製造
においては、石英管材料と円板のつなぎ目に段差が残る
ため、熟練者が注意深く作業をしないと、高品質な製品
はできなかったが、本発明方法によれば、丸封面が滑ら
かな曲面で形成され、高精度に所定の曲率を持つ大型丸
封石英ガラス管が高度な熟練度を必要とすることなく、
ガラス旋盤のような通常的な装置を改良することによっ
て、一体的な連続作業で生産性よく、かつ再現性よく製
造することができる。As described above, in the conventional production of a quartz tube, a step remains at the joint between the quartz tube material and the disc, so that a high-quality product cannot be obtained unless the skilled worker works carefully. However, according to the method of the present invention, the round sealing surface is formed with a smooth curved surface, and a large round quartz glass tube having a predetermined curvature with high precision does not require a high degree of skill,
By improving a conventional apparatus such as a glass lathe, it is possible to produce a single continuous operation with high productivity and high reproducibility.
【００３０】特に、管外形のストレート部長さ及び丸封
部の頂点間距離等の制御性もよいことから、半導体製造
用治具として、強度、寸法性に優れた大型丸封石英ガラ
ス管を製造することができる。In particular, a large round quartz glass tube having excellent strength and dimensional properties is manufactured as a jig for semiconductor manufacturing because of its good controllability such as the length of the straight portion of the tube outer shape and the distance between the vertices of the sealed portion. can do.
【図１】 本発明方法における縦置き石英管材料の上端
面に石英円板を載置する工程を示し、（ａ）は側面的説
明図及び（ｂ）は丸Ａ部の拡大図である。FIG. 1 shows a step of placing a quartz disk on the upper end surface of a vertically placed quartz tube material in the method of the present invention, wherein (a) is a side view and (b) is an enlarged view of a circle A.
【図２】 本発明方法における石英管材料とその上端面
に載置された石英円板とを熔着する工程を示す側面的説
明図である。FIG. 2 is a side explanatory view showing a step of welding a quartz tube material and a quartz disk placed on an upper end surface thereof in the method of the present invention.
【図３】 本発明方法における熔着した石英円板と石英
管材料上端部に丸封部を形成する工程を示す側面的説明
図である。FIG. 3 is a side elevational view showing a step of forming a round seal portion on the upper end portion of the fused quartz disk and quartz tube material in the method of the present invention.
【図４】 本発明方法における縦置き石英管材料の上端
内面に石英円板を載置する工程を示し、（ａ）は側面的
説明図及び（ｂ）は丸Ｂ部の拡大図である。FIG. 4 shows a step of placing a quartz disk on the inner surface of the upper end of a vertically placed quartz tube material in the method of the present invention, wherein (a) is a side view and (b) is an enlarged view of a circle B portion.
【図５】 本発明方法における作製される石英管の例を
示す側面図で、（ａ）は平封石英管、（ｂ）は丸封石英
管をそれぞれ示す。FIGS. 5A and 5B are side views showing examples of a quartz tube produced in the method of the present invention, wherein FIG. 5A shows a plain sealed quartz tube and FIG.
【図６】 丸封石英管の従来の製造方法の１例を示す説
明図である。FIG. 6 is an explanatory view showing an example of a conventional method for manufacturing a round quartz tube.
【図７】 丸封石英管の従来の製造方法の他の例を示す
説明図である。FIG. 7 is an explanatory view showing another example of a conventional method for manufacturing a round quartz tube.
【図８】 図７の方法の際に用いられる石英管の熔着端
面をテーパー状に拡径した概念図である。FIG. 8 is a conceptual diagram in which the welded end surface of a quartz tube used in the method of FIG. 7 is tapered.
【図９】 丸封石英管の従来の製造方法の別の例を示す
説明図である。FIG. 9 is an explanatory view showing another example of the conventional method for manufacturing a round quartz tube.
１０：石英円板、１０ａ：石英円板の下面、１０ｂ：石
英円板の外周側面、１２：石英管材料、１２ａ：石英管
材料の円周上端面、１２ｂ：石英管材料の上端内周面、
１４：ターンテーブル、１６：熔着用インナーバーナ
ー、１８：熔着用アウターバーナー、２０：平封石英
管、２０ａ：平封部、２１：丸封石英管、２１ａ：丸封
部、２２：ガラス旋盤、２４：キャップ、２６：ガス導
入管、２８：バーナー、３０：カーボン製Ｒ治具、Ｌ：
旋盤。10: quartz disk, 10a: lower surface of quartz disk, 10b: outer peripheral side surface of quartz disk, 12: quartz tube material, 12a: upper peripheral surface of quartz tube material, 12b: upper inner peripheral surface of quartz tube material ,
14: turntable, 16: inner burner for welding, 18: outer burner for welding, 20: plain sealed quartz tube, 20a: plain sealed portion, 21: round sealed quartz tube, 21a: round sealed portion, 22: glass lathe, 24: cap, 26: gas inlet tube, 28: burner, 30: carbon R jig, L:
lathe.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 高橋 賞治 山形県天童市大字清池字藤段1357番３ 株 式会社山形信越石英内 (72)発明者 伊勢 吉明 山形県天童市大字清池字藤段1357番３ 株 式会社山形信越石英内 Ｆターム(参考） 3C043 BA08 BC02 4G014 AH08 AH23 4G015 BA05 BA15 DA05 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Shoji Takahashi 1357-3, Fujidan, Kiyoike, Odai, Tendo, Yamagata Prefecture Incorporated in Yamagata Shinetsu Quartz Co., Ltd. 1357-3 Fujidan F-term in Yamagata Shin-Etsu Quartz Co., Ltd. 3C043 BA08 BC02 4G014 AH08 AH23 4G015 BA05 BA15 DA05
Claims (3)
円板と、所定の外径及び肉厚の石英管材料を熔着して丸
封石英管を製造する方法であり、該石英円板の外周部に
Ｒ面取り加工を施すとともに、熔着部となる該石英円板
の片面と石英管材料の端部を平面研削加工を施した後に
熔着する工程と、該熔着した石英円板部及び石英管材料
端部周辺を加熱軟化させ、所定のＲ形状をもつカーボン
製Ｒ治具を接触させて丸封部を形成する工程とからなる
ことを特徴とする丸封石英管の製造方法。1. A method for producing a sealed quartz tube by welding a quartz disc ground to a predetermined thickness and outer diameter and a quartz tube material having a predetermined outer diameter and thickness. A step of performing an R chamfering process on an outer peripheral portion of the disk, performing a surface grinding process on one surface of the quartz disk and an end portion of the quartz tube material to be a welded portion, and then welding; A step of heating and softening the periphery of the disc portion and the end portion of the quartz tube material, and contacting a carbon R jig having a predetermined R shape to form a round sealed portion. Production method.
料の上端面に前記石英円板を載置した状態で両者を熔着
することを特徴とする請求項１記載の方法。2. The method according to claim 1, wherein the quartz tube material is placed vertically, and both are welded together with the quartz disk placed on the upper end surface of the quartz tube material.
加工する際、ダイヤモンド砥石を使用し、そのダイヤモ
ンド粒度が＃５０（約０.８〜０.９mm）より細かいもの
であることを特徴とする請求項１又は２記載の方法。3. The surface grinding of the quartz disk and the quartz tube material is performed using a diamond grindstone, and the diamond grain size is finer than # 50 (about 0.8 to 0.9 mm). The method according to claim 1 or 2, wherein
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000089412A JP4346202B2 (en) | 2000-03-28 | 2000-03-28 | Manufacturing method of round sealed quartz tube |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000089412A JP4346202B2 (en) | 2000-03-28 | 2000-03-28 | Manufacturing method of round sealed quartz tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001270727A true JP2001270727A (en) | 2001-10-02 |
| JP4346202B2 JP4346202B2 (en) | 2009-10-21 |
Family
ID=18605179
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000089412A Expired - Lifetime JP4346202B2 (en) | 2000-03-28 | 2000-03-28 | Manufacturing method of round sealed quartz tube |
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| Country | Link |
|---|---|
| JP (1) | JP4346202B2 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102424519A (en) * | 2011-09-16 | 2012-04-25 | 北京金格兰石英玻璃有限公司 | Production method of heterotype quartz glass tube |
| JP2018115109A (en) * | 2018-03-12 | 2018-07-26 | 日本電気硝子株式会社 | Method for manufacturing glass joined body |
| CN108863028A (en) * | 2017-05-10 | 2018-11-23 | 张忠恕 | A kind of Novel quartz pipe processing method |
| CN111453977A (en) * | 2020-04-17 | 2020-07-28 | 新沂市赛立科石英制品有限公司 | U-shaped quartz tube hot bending forming device |
| CN112203992A (en) * | 2018-12-19 | 2021-01-08 | 诺希斯股份有限公司 | Method for manufacturing quartz tube-shaped bottle |
| CN112499944A (en) * | 2020-12-04 | 2021-03-16 | 杭州大和热磁电子有限公司 | Quartz product vacuumizing equipment |
| US20220161963A1 (en) * | 2017-06-27 | 2022-05-26 | Nexus Company Inc. | Fabricating method for quartz vial |
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2000
- 2000-03-28 JP JP2000089412A patent/JP4346202B2/en not_active Expired - Lifetime
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102424519A (en) * | 2011-09-16 | 2012-04-25 | 北京金格兰石英玻璃有限公司 | Production method of heterotype quartz glass tube |
| CN108863028A (en) * | 2017-05-10 | 2018-11-23 | 张忠恕 | A kind of Novel quartz pipe processing method |
| US20220161963A1 (en) * | 2017-06-27 | 2022-05-26 | Nexus Company Inc. | Fabricating method for quartz vial |
| US11745914B2 (en) * | 2017-06-27 | 2023-09-05 | Nexus Company Inc. | Fabricating method for quartz vial |
| JP2018115109A (en) * | 2018-03-12 | 2018-07-26 | 日本電気硝子株式会社 | Method for manufacturing glass joined body |
| CN112203992A (en) * | 2018-12-19 | 2021-01-08 | 诺希斯股份有限公司 | Method for manufacturing quartz tube-shaped bottle |
| KR20210005660A (en) * | 2018-12-19 | 2021-01-14 | 넥서스 가부시키가이샤 | Method of making a quartz vial bottle |
| US20210163174A1 (en) * | 2018-12-19 | 2021-06-03 | Nexus Company Inc. | Fabricating method for quartz vial |
| EP3901107A4 (en) * | 2018-12-19 | 2022-02-16 | Nexus Company Inc. | Method for manufacturing quartz vial |
| KR102465679B1 (en) * | 2018-12-19 | 2022-11-11 | 넥서스 가부시키가이샤 | Manufacturing method of quartz vial bottle |
| CN111453977A (en) * | 2020-04-17 | 2020-07-28 | 新沂市赛立科石英制品有限公司 | U-shaped quartz tube hot bending forming device |
| CN112499944A (en) * | 2020-12-04 | 2021-03-16 | 杭州大和热磁电子有限公司 | Quartz product vacuumizing equipment |
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| Publication number | Publication date |
|---|---|
| JP4346202B2 (en) | 2009-10-21 |
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