JP2001267229A5 - - Google Patents
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- JP2001267229A5 JP2001267229A5 JP2000078394A JP2000078394A JP2001267229A5 JP 2001267229 A5 JP2001267229 A5 JP 2001267229A5 JP 2000078394 A JP2000078394 A JP 2000078394A JP 2000078394 A JP2000078394 A JP 2000078394A JP 2001267229 A5 JP2001267229 A5 JP 2001267229A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000078394A JP4454773B2 (ja) | 2000-03-21 | 2000-03-21 | 位置合わせ方法及び位置合わせ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000078394A JP4454773B2 (ja) | 2000-03-21 | 2000-03-21 | 位置合わせ方法及び位置合わせ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001267229A JP2001267229A (ja) | 2001-09-28 |
| JP2001267229A5 true JP2001267229A5 (hu) | 2007-05-17 |
| JP4454773B2 JP4454773B2 (ja) | 2010-04-21 |
Family
ID=18595813
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000078394A Expired - Fee Related JP4454773B2 (ja) | 2000-03-21 | 2000-03-21 | 位置合わせ方法及び位置合わせ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4454773B2 (hu) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4609167B2 (ja) * | 2005-04-13 | 2011-01-12 | 株式会社ニコン | 露光システム、露光方法及びマイクロデバイスの製造方法 |
| JP5096965B2 (ja) | 2008-02-29 | 2012-12-12 | キヤノン株式会社 | 位置合わせ方法、位置合わせ装置、露光方法及びデバイス製造方法 |
| CN103165501A (zh) * | 2011-12-08 | 2013-06-19 | 财团法人金属工业研究发展中心 | 无标记基板组装对位方法 |
| CN103995440B (zh) * | 2014-06-12 | 2016-01-27 | 上海华力微电子有限公司 | 光刻机对准性能的检测方法 |
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2000
- 2000-03-21 JP JP2000078394A patent/JP4454773B2/ja not_active Expired - Fee Related