JP2001252859A5 - - Google Patents

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Publication number
JP2001252859A5
JP2001252859A5 JP2000065138A JP2000065138A JP2001252859A5 JP 2001252859 A5 JP2001252859 A5 JP 2001252859A5 JP 2000065138 A JP2000065138 A JP 2000065138A JP 2000065138 A JP2000065138 A JP 2000065138A JP 2001252859 A5 JP2001252859 A5 JP 2001252859A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000065138A
Other languages
Japanese (ja)
Other versions
JP2001252859A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000065138A priority Critical patent/JP2001252859A/ja
Priority claimed from JP2000065138A external-priority patent/JP2001252859A/ja
Publication of JP2001252859A publication Critical patent/JP2001252859A/ja
Publication of JP2001252859A5 publication Critical patent/JP2001252859A5/ja
Withdrawn legal-status Critical Current

Links

JP2000065138A 2000-03-09 2000-03-09 研磨方法 Withdrawn JP2001252859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000065138A JP2001252859A (ja) 2000-03-09 2000-03-09 研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000065138A JP2001252859A (ja) 2000-03-09 2000-03-09 研磨方法

Publications (2)

Publication Number Publication Date
JP2001252859A JP2001252859A (ja) 2001-09-18
JP2001252859A5 true JP2001252859A5 (enExample) 2007-04-05

Family

ID=18584718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000065138A Withdrawn JP2001252859A (ja) 2000-03-09 2000-03-09 研磨方法

Country Status (1)

Country Link
JP (1) JP2001252859A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004142083A (ja) 2002-10-28 2004-05-20 Elpida Memory Inc ウエハ研磨装置およびウエハ研磨方法
JP4734353B2 (ja) * 2008-02-05 2011-07-27 トッキ株式会社 ポリシング装置
KR20230025100A (ko) * 2021-08-13 2023-02-21 에스케이엔펄스 주식회사 연마 장치 및 반도체 소자의 제조방법

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