JP2001252859A5 - - Google Patents
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- Publication number
- JP2001252859A5 JP2001252859A5 JP2000065138A JP2000065138A JP2001252859A5 JP 2001252859 A5 JP2001252859 A5 JP 2001252859A5 JP 2000065138 A JP2000065138 A JP 2000065138A JP 2000065138 A JP2000065138 A JP 2000065138A JP 2001252859 A5 JP2001252859 A5 JP 2001252859A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000065138A JP2001252859A (ja) | 2000-03-09 | 2000-03-09 | 研磨方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000065138A JP2001252859A (ja) | 2000-03-09 | 2000-03-09 | 研磨方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001252859A JP2001252859A (ja) | 2001-09-18 |
| JP2001252859A5 true JP2001252859A5 (ja) | 2007-04-05 |
Family
ID=18584718
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000065138A Withdrawn JP2001252859A (ja) | 2000-03-09 | 2000-03-09 | 研磨方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001252859A (ja) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004142083A (ja) | 2002-10-28 | 2004-05-20 | Elpida Memory Inc | ウエハ研磨装置およびウエハ研磨方法 |
| JP4734353B2 (ja) * | 2008-02-05 | 2011-07-27 | トッキ株式会社 | ポリシング装置 |
| KR20230025100A (ko) * | 2021-08-13 | 2023-02-21 | 에스케이엔펄스 주식회사 | 연마 장치 및 반도체 소자의 제조방법 |
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2000
- 2000-03-09 JP JP2000065138A patent/JP2001252859A/ja not_active Withdrawn