JP2001252859A5 - - Google Patents

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Publication number
JP2001252859A5
JP2001252859A5 JP2000065138A JP2000065138A JP2001252859A5 JP 2001252859 A5 JP2001252859 A5 JP 2001252859A5 JP 2000065138 A JP2000065138 A JP 2000065138A JP 2000065138 A JP2000065138 A JP 2000065138A JP 2001252859 A5 JP2001252859 A5 JP 2001252859A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2000065138A
Other languages
Japanese (ja)
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JP2001252859A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000065138A priority Critical patent/JP2001252859A/ja
Priority claimed from JP2000065138A external-priority patent/JP2001252859A/ja
Publication of JP2001252859A publication Critical patent/JP2001252859A/ja
Publication of JP2001252859A5 publication Critical patent/JP2001252859A5/ja
Withdrawn legal-status Critical Current

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JP2000065138A 2000-03-09 2000-03-09 研磨方法 Withdrawn JP2001252859A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000065138A JP2001252859A (ja) 2000-03-09 2000-03-09 研磨方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000065138A JP2001252859A (ja) 2000-03-09 2000-03-09 研磨方法

Publications (2)

Publication Number Publication Date
JP2001252859A JP2001252859A (ja) 2001-09-18
JP2001252859A5 true JP2001252859A5 (cg-RX-API-DMAC7.html) 2007-04-05

Family

ID=18584718

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000065138A Withdrawn JP2001252859A (ja) 2000-03-09 2000-03-09 研磨方法

Country Status (1)

Country Link
JP (1) JP2001252859A (cg-RX-API-DMAC7.html)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004142083A (ja) 2002-10-28 2004-05-20 Elpida Memory Inc ウエハ研磨装置およびウエハ研磨方法
JP4734353B2 (ja) * 2008-02-05 2011-07-27 トッキ株式会社 ポリシング装置
KR20230025100A (ko) * 2021-08-13 2023-02-21 에스케이엔펄스 주식회사 연마 장치 및 반도체 소자의 제조방법

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