JP2001244213A5 - - Google Patents
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- Publication number
- JP2001244213A5 JP2001244213A5 JP2000390829A JP2000390829A JP2001244213A5 JP 2001244213 A5 JP2001244213 A5 JP 2001244213A5 JP 2000390829 A JP2000390829 A JP 2000390829A JP 2000390829 A JP2000390829 A JP 2000390829A JP 2001244213 A5 JP2001244213 A5 JP 2001244213A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000390829A JP2001244213A (en) | 1999-12-24 | 2000-12-22 | Laser beam irradiating device and method of manufacturing semiconductor device |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11-367030 | 1999-12-24 | ||
| JP36703099 | 1999-12-24 | ||
| JP2000390829A JP2001244213A (en) | 1999-12-24 | 2000-12-22 | Laser beam irradiating device and method of manufacturing semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2001244213A JP2001244213A (en) | 2001-09-07 |
| JP2001244213A5 true JP2001244213A5 (en) | 2007-12-27 |
Family
ID=26581863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000390829A Withdrawn JP2001244213A (en) | 1999-12-24 | 2000-12-22 | Laser beam irradiating device and method of manufacturing semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2001244213A (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4637376B2 (en) * | 2000-02-02 | 2011-02-23 | 株式会社半導体エネルギー研究所 | Laser irradiation apparatus and method for manufacturing semiconductor device |
| CN101009322B (en) * | 2001-11-09 | 2012-06-27 | 株式会社半导体能源研究所 | Light-emitting device |
| JP4149168B2 (en) | 2001-11-09 | 2008-09-10 | 株式会社半導体エネルギー研究所 | Light emitting device |
| JP3973882B2 (en) | 2001-11-26 | 2007-09-12 | 株式会社半導体エネルギー研究所 | Laser irradiation apparatus and laser irradiation method |
| US7109435B2 (en) | 2001-12-07 | 2006-09-19 | Sony Corporation | Beam irradiator and laser anneal device |
| JP2004241561A (en) * | 2003-02-05 | 2004-08-26 | Mitsubishi Electric Corp | Laser processing system |
| KR20070090246A (en) * | 2004-12-22 | 2007-09-05 | 칼 짜이스 레이저 옵틱스 게엠베하 | Optical illumination system for creating a line beam |
Family Cites Families (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6340694A (en) * | 1986-08-04 | 1988-02-22 | Toyota Motor Corp | Forming method for laser light |
| JPS6377178A (en) * | 1986-09-19 | 1988-04-07 | Fanuc Ltd | Pumping reflector for laser |
| JPS6384788A (en) * | 1986-09-29 | 1988-04-15 | Nippon Steel Corp | Method and device for controlling projection of laser beam |
| JPH02187294A (en) * | 1989-01-13 | 1990-07-23 | Nec Corp | Laser beam shaping apparatus |
| JP3033120B2 (en) * | 1990-04-02 | 2000-04-17 | セイコーエプソン株式会社 | Manufacturing method of semiconductor thin film |
| DE4023904A1 (en) * | 1990-07-27 | 1992-01-30 | Zeiss Carl Fa | MIRROR FOR CHANGING THE GEOMETRIC DESIGN OF A BUNCH OF LIGHT |
| JPH06333871A (en) * | 1993-05-25 | 1994-12-02 | Sony Corp | Laser beam irradiation device and heat treatment using the device |
| JP3388042B2 (en) * | 1994-11-18 | 2003-03-17 | 三菱電機株式会社 | Laser annealing method |
| JP3593375B2 (en) * | 1995-02-07 | 2004-11-24 | 株式会社日立製作所 | Micro defect detection method and device |
| JPH10111471A (en) * | 1996-08-09 | 1998-04-28 | Toyota Motor Corp | Laser optical system and laser welding device |
| JP4322359B2 (en) * | 1999-07-08 | 2009-08-26 | 住友重機械工業株式会社 | Laser processing equipment |
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2000
- 2000-12-22 JP JP2000390829A patent/JP2001244213A/en not_active Withdrawn