JP2001237160A5 - - Google Patents

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Publication number
JP2001237160A5
JP2001237160A5 JP2000044497A JP2000044497A JP2001237160A5 JP 2001237160 A5 JP2001237160 A5 JP 2001237160A5 JP 2000044497 A JP2000044497 A JP 2000044497A JP 2000044497 A JP2000044497 A JP 2000044497A JP 2001237160 A5 JP2001237160 A5 JP 2001237160A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000044497A
Other languages
Japanese (ja)
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JP4541481B2 (ja
JP2001237160A (ja
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Application filed filed Critical
Priority to JP2000044497A priority Critical patent/JP4541481B2/ja
Priority claimed from JP2000044497A external-priority patent/JP4541481B2/ja
Publication of JP2001237160A publication Critical patent/JP2001237160A/ja
Publication of JP2001237160A5 publication Critical patent/JP2001237160A5/ja
Application granted granted Critical
Publication of JP4541481B2 publication Critical patent/JP4541481B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000044497A 2000-02-22 2000-02-22 位置検出装置、露光装置、およびデバイス製造方法 Expired - Fee Related JP4541481B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000044497A JP4541481B2 (ja) 2000-02-22 2000-02-22 位置検出装置、露光装置、およびデバイス製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000044497A JP4541481B2 (ja) 2000-02-22 2000-02-22 位置検出装置、露光装置、およびデバイス製造方法

Publications (3)

Publication Number Publication Date
JP2001237160A JP2001237160A (ja) 2001-08-31
JP2001237160A5 true JP2001237160A5 (cg-RX-API-DMAC7.html) 2007-04-05
JP4541481B2 JP4541481B2 (ja) 2010-09-08

Family

ID=18567238

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000044497A Expired - Fee Related JP4541481B2 (ja) 2000-02-22 2000-02-22 位置検出装置、露光装置、およびデバイス製造方法

Country Status (1)

Country Link
JP (1) JP4541481B2 (cg-RX-API-DMAC7.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3803699B2 (ja) * 2004-05-31 2006-08-02 独立行政法人農業・食品産業技術総合研究機構 分光画像取得装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09320926A (ja) * 1996-05-27 1997-12-12 Nikon Corp 露光方法
JPH11260679A (ja) * 1998-03-06 1999-09-24 Nikon Corp マーク検出装置及び露光装置
JPH11304422A (ja) * 1998-04-20 1999-11-05 Nikon Corp 位置検出装置及び位置検出方法並びに露光装置
JP4258035B2 (ja) * 1998-05-22 2009-04-30 株式会社ニコン 露光装置及びデバイス製造方法

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