JP2001237160A5 - - Google Patents
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- Publication number
- JP2001237160A5 JP2001237160A5 JP2000044497A JP2000044497A JP2001237160A5 JP 2001237160 A5 JP2001237160 A5 JP 2001237160A5 JP 2000044497 A JP2000044497 A JP 2000044497A JP 2000044497 A JP2000044497 A JP 2000044497A JP 2001237160 A5 JP2001237160 A5 JP 2001237160A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000044497A JP4541481B2 (ja) | 2000-02-22 | 2000-02-22 | 位置検出装置、露光装置、およびデバイス製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000044497A JP4541481B2 (ja) | 2000-02-22 | 2000-02-22 | 位置検出装置、露光装置、およびデバイス製造方法 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001237160A JP2001237160A (ja) | 2001-08-31 |
JP2001237160A5 true JP2001237160A5 (ja) | 2007-04-05 |
JP4541481B2 JP4541481B2 (ja) | 2010-09-08 |
Family
ID=18567238
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000044497A Expired - Fee Related JP4541481B2 (ja) | 2000-02-22 | 2000-02-22 | 位置検出装置、露光装置、およびデバイス製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4541481B2 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3803699B2 (ja) * | 2004-05-31 | 2006-08-02 | 独立行政法人農業・食品産業技術総合研究機構 | 分光画像取得装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09320926A (ja) * | 1996-05-27 | 1997-12-12 | Nikon Corp | 露光方法 |
JPH11260679A (ja) * | 1998-03-06 | 1999-09-24 | Nikon Corp | マーク検出装置及び露光装置 |
JPH11304422A (ja) * | 1998-04-20 | 1999-11-05 | Nikon Corp | 位置検出装置及び位置検出方法並びに露光装置 |
JP4258035B2 (ja) * | 1998-05-22 | 2009-04-30 | 株式会社ニコン | 露光装置及びデバイス製造方法 |
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2000
- 2000-02-22 JP JP2000044497A patent/JP4541481B2/ja not_active Expired - Fee Related