JP2001235041A - Valve component and valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve component providing high adhesiveness between a base and a hard carbon film and allowing thickening of the hard carbon film. SOLUTION: A valve element 16 serving as a valve component having a sliding surface comprises the base 1 and a cover layer 3 formed on the surface of the base 1, with the surface of the cover layer 3 being formed as the sliding surface 16a. The cover layer 3 is formed by laminating together two or more laminate films 6 each comprising the hard carbon film 4 and a silicon film 5 laminated together, with the silicon films 5 disposed on the base 1 side. The thickness of each hard carbon film 4 is not less than 0.01 μm nor more than 0.5 μm and the thickness of each silicon film 5 is not less than 0.005 μm nor more than 0.5 μm. The thickness of each hard carbon film 4 is equal to or greater than the thickness of each silicon film 5 and the overall thickness of the cover layer is not less than 0.5 μm nor more than 50 μm.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a valve component having a sliding surface and a valve provided with the valve component having the sliding surface.

[0002]

2. Description of the Related Art Valves provided with valve parts (for example, valve seats and valve bodies) having a sliding surface are widely used for home use and industrial use. Such a valve adjusts the flow rate of the fluid by, for example, sliding a disc-shaped valve (disk) against a ring-shaped valve seat (seat ring) fixedly arranged in the fluid flow path.

In a valve component having a sliding surface,
The use wears the sliding surface, and such wear causes an increase in operating torque in the valve, leakage of fluid, and the like.
JP-A-6-227882 discloses a valve component in which a hard amorphous carbon film is formed on a sliding surface in order to reduce such wear. Further, in the valve component disclosed in the above publication, a silicon-based non-oxidizing material is interposed between the substrate and the amorphous carbon film in order to increase the degree of adhesion between the alumina base and the amorphous carbon film constituting the valve component. An object film is interposed.

[0004]

However, the valve parts according to the above prior art have the following problems. That is, in the valve component according to the above-described conventional technology, the hardness of the sliding surface is increased and the wear of the sliding surface is reduced by forming the amorphous carbon film on the surface of the base. However, a hard carbon film such as an amorphous carbon film has an extremely large internal stress, and as a result, the degree of adhesion to the substrate is low and the hard carbon film is easily peeled from the substrate. In order to solve such a problem, the valve component according to the prior art has a silicon-based non-oxide film interposed between the substrate and the amorphous carbon film. Not enough yet. In particular, when the thickness of the hard carbon film is increased in order to increase the hardness of the sliding surface, the effect of the internal stress of the hard carbon film increases accordingly, so that the hard carbon film is easily peeled from the substrate.
As a result, it is difficult to increase the thickness of the hard carbon film to a certain thickness or more in the valve component according to the related art.

Accordingly, the present invention solves the above-mentioned problems, and provides a valve component having a high degree of adhesion between a substrate and a hard carbon film and capable of increasing the thickness of the hard carbon film, and a valve provided with the same. That is the task.

[0006]

In order to solve the above-mentioned problems, a valve component according to the present invention is a valve component having a sliding surface, comprising a base and a coating layer formed on the surface of the base. Wherein the coating layer is formed by laminating two or more layers of a laminated film obtained by laminating a hard carbon film and a silicon film so that the silicon film is disposed on the side of the substrate, Each film thickness is 0.01 μm or more and 0.5 μm
m or less, and the film thickness of each of the silicon films is 0.1.
005 μm or more and 0.5 μm or less, wherein the surface of the coating layer is formed as the sliding surface.

[0007] A coating layer formed by laminating two or more laminated films of a hard carbon film and a silicon film such that the silicon film is disposed on the side of the substrate is composed of a hard carbon film and a silicon film alternately. It becomes the structure laminated | stacked. Here, the internal stress of the silicon film is 1/10 of the internal stress of the hard carbon film.
Since it is less than that, the coating layer in which the hard carbon film and the silicon film are alternately laminated has a significantly smaller internal stress (average value) than the coating layer formed only of the hard carbon film. As a result, even if the coating layer is thickened, the influence of the internal stress can be suppressed to a small level. Further, by setting the thickness of each hard carbon film to 0.01 μm or more, it is possible to prevent the hard carbon film from being mixed with the silicon film in manufacturing. By setting the thickness of each hard carbon film to 0.5 μm or less, the internal stress generated in each hard carbon film can be reduced. Further, by setting the thickness of each of the silicon films to 0.005 μm or more, it is possible to prevent the silicon film from being mixed with the hard carbon film in manufacturing. By setting the thickness of each silicon film to 0.5 μm or less, the internal stress generated in each silicon film can be reduced and the hardness of the entire coating layer can be increased.

Further, in the valve part of the present invention,
It is preferable that the thickness of the hard carbon film is equal to or larger than the thickness of the silicon film.

By making the thickness of the hard carbon film equal to or larger than the thickness of the silicon film, the ratio of the hard carbon film in the coating layer is increased, and the hardness of the entire coating layer can be increased. When the layer wears out, the time during which the hard carbon film acts as a sliding surface can be extended.

In the valve part of the present invention,
It is preferable that the thickness of the coating layer is 0.5 μm or more and 50 μm or less.

By setting the thickness of the coating layer to 0.5 μm or more, the hardness of the entire coating layer can be increased. By setting the thickness of the coating layer to 50 μm or less, the internal stress (average value) of the entire coating layer can be kept small.

In the valve part of the present invention,
It is particularly preferable that the thickness of the coating layer is not less than 1.5 μm. Considering the degree of adhesion to the substrate, 1.5 μm is required for forming the coating layer using only the hard carbon film.
It is extremely difficult to form a coating layer having a layer thickness of m or more. However, as in the present invention, by alternately laminating a hard carbon film and a silicon film to form a coating layer, 1.
A coating layer having a layer thickness of 5 μm or more can be easily formed.

A valve according to the present invention is a valve provided with a valve component having a sliding surface, wherein the valve component is any one of the valve components described above.

In the above-mentioned valve component, the degree of adhesion between the base and the hard carbon film is high, and the thickness of the hard carbon film can be increased, so that the hardness of the sliding surface can be increased. Therefore, by using such a valve component, it is possible to configure a valve having a long life.

[0015]

DESCRIPTION OF THE PREFERRED EMBODIMENTS A valve component and a valve according to an embodiment of the present invention will be described with reference to the drawings. First, the configuration of the valve component and the valve according to the present embodiment will be described. FIG. 1 is a partially cutaway front view of a valve according to the present embodiment, and FIG. 2 is an enlarged perspective view of a valve component according to the present embodiment.

As shown in FIG. 1, a valve 10 according to this embodiment has a valve box 12 having a through hole 12a serving as a fluid flow path, and a valve box 2 fixedly disposed along the inner wall surface of the through hole 12a. It comprises two ring-shaped valve seats 14 and a disc-shaped valve body 16 slidably arranged between the two valve seats. Here, the valve body 16 is a valve component according to the present embodiment. In the valve 10, the valve body 16 is slid in the vertical direction (the direction of the arrow) in FIGS. That is, in the valve 10, the flow path can be blocked by sliding the valve body 16 downward to close the opening 14 b of the ring-shaped valve seat 14, while sliding the valve body 16 upward. Thereby, the flow path can be opened. At this time, the valve body 16 is
4 (moving by sliding) with respect to the valve body 16.
And the valve seat 14 are formed with sliding surfaces 14a and 16a, which are surfaces that slide on each other.

Here, as shown in FIG. 2, the valve seat 14 is not a simple cylinder, one edge is cut obliquely with respect to the axis, and the valve body 16 is not a simple cylinder but a bottom surface of both. Is cut obliquely with respect to the axis.
6 so that it can be easily inserted between the two valve seats 14. Here, the obliquely cut surfaces become the sliding surfaces 14a and 16a. Further, both bottom surfaces of the valve body 16 are not flat, and the central portion is depressed. Therefore, the depressed portion does not slide on the valve seat 14, so that the sliding surface 16a of the valve body 16 has a donut shape as shown in FIG. Sliding surface 16a of valve body 16
Is formed in such a shape in order to reduce the friction between the valve body 16 and the valve seat 14.

FIG. 3 is an enlarged sectional view of the valve body 16 cut perpendicular to the sliding surface 16a. The valve body 16 has a sectional structure as shown in FIG. That is, the valve element 16
Comprises a substrate 1 and a coating layer 3 formed on the surface of the substrate 1, and the surface of the coating layer 3 is
a.

The substrate 1 is made of a material having high wear resistance such as ceramics such as alumina and stellite. The base 1 is manufactured by, for example, a method such as cutting.

The coating layer 3 comprises a hard carbon film 4 and a silicon film 5
Are laminated to form two or more layers (four layers in FIG. 3) such that the silicon film 5 is disposed on the side of the base 1. The hard carbon film 4 is a film made of hard carbon. Here, hard carbon refers to, for example, amorphous carbon or hydrogenated carbon partially having a diamond structure (usually, amorphous carbon,
Carbon, diamond-like carbon, etc.). A hard carbon film made of hard carbon generally has a Knoop hardness of 1 × 9.8 to 8 × 9.8 GPa, an extremely small friction coefficient at the time of sliding, is chemically stable, hard to seize, and It has the feature of excellent moldability. The silicon film 5 is a film made of silicon.

Here, the thickness of each of the hard carbon films 4 is
0.01 μm or more and 0.5 μm or less, and
The thickness of each silicon film 4 is not less than 0.005 μm and not more than 0.5 μm. In this case, the hard carbon film 4
Is preferably equal to or greater than the thickness of the silicon film 5. still,
When the thicknesses of the hard carbon films 4 are different from each other, and when the thicknesses of the silicon films 5 are different from each other, the average value of the thickness of the hard carbon film 4 is equal to the average value of the thickness of the silicon film 5, or It is preferable that the average thickness of the silicon film 5 is larger than the average value.

The thickness of the entire coating layer 3 is 0.5 μm
It is preferably not less than 50 μm and not more than 1.5 μm
It is particularly preferred that the thickness be at least 50 μm. Base 1
Considering the degree of adhesion to, when forming a coating layer only with a hard carbon film, it is extremely difficult to form a coating layer having a layer thickness of 1.5 μm or more, but as in this embodiment,
By forming the coating layer 3 by alternately laminating the hard carbon films 4 and the silicon films 5, the coating layer 3 having a layer thickness of 1.5 μm or more can be easily formed.

The hard carbon film 4 is formed by, for example, a plasma CVD method using microwave plasma, ECR plasma, high-frequency plasma, arc plasma, etc., an ion deposition method using carbon, hydrocarbon ions or the like as a raw material, or a solid carbon as a raw material. It can be formed by a sputtering method or a cathode arc ion plating method. The silicon film 5 can be formed by a vacuum evaporation method, a high-frequency ion plating method, a sputtering method, a plasma CVD method, or the like. In the present embodiment, since the hard carbon film 4 and the silicon film 5 are formed alternately, a composite process capable of forming the hard carbon film 4 and the silicon film 5 alternately and continuously is used. It is efficient.

Next, the operation and effects of the valve component and the valve according to the present embodiment will be described. The valve body 16 which is a valve component according to the present embodiment is configured such that the laminated film 6 in which the hard carbon film 4 and the silicon film 5 are laminated is replaced with the silicon film 5.
Are arranged on the base 1 side to form a coating layer 3 by laminating two or more layers, and the surface of the coating layer 3 is formed as a sliding surface 16a. Therefore, the coating layer 3 has a configuration in which the hard carbon films 4 and the silicon films 5 are alternately stacked. Here, the internal stress of the silicon film 5 is 1/10 or less as compared with the internal stress of the hard carbon film 4 (generally, 1 GPa or more). Therefore, the hard carbon film 4 and the silicon film 5 are alternately laminated. The internal stress (average value) of the coating layer 3 is significantly smaller than that of the coating layer formed only of the hard carbon film. Therefore, even if the coating layer 3 is thickened, the influence of the internal stress can be suppressed to a small level. As a result, it is possible to increase the thickness of the hard carbon film 4 (more precisely, the entire coating layer 3 including the silicon film 5) while maintaining a high degree of adhesion between the base 1 and the hard carbon film 4. Become.

In this case, by setting the thickness of each of the hard carbon films 4 to 0.01 μm or more, the hard carbon films 4
Can be prevented from being mixed with the silicon film 5. As a result, the hard carbon film 4 can be reliably formed.
By setting the thickness of each hard carbon film 4 to 0.5 μm or less, the internal stress generated in each hard carbon film 4 can be reduced. As a result, the hard carbon film 4 is prevented from peeling from the adjacent silicon film 5.

In this case, by setting the thickness of each of the silicon films 5 to 0.005 μm or more, it is possible to prevent the silicon films from being mixed with the hard carbon film 4 in manufacturing. As a result, the silicon film 5 can be reliably formed. Further, by setting the thickness of each silicon film 5 to 0.5 μm or less, the internal stress generated in each silicon film 5 can be reduced and the hardness of the entire coating layer 3 can be increased.

Further, in the valve element 16 which is a valve component according to the present embodiment, the thickness of the hard carbon film 4 is equal to or larger than the thickness of the silicon film 5 so that the coating layer 3 is formed. The ratio of the hard carbon film 4 occupying can be increased. As a result, the hardness (average value) of the entire coating layer 3 can be increased. In addition, by making the thickness of the hard carbon film 4 equal to or larger than the thickness of the silicon film 5, even when the coating layer 3 is worn, the hard carbon film 5 can be used on the sliding surface. The time acting as 16a becomes longer. As a result, it is possible to maintain high hardness in the vicinity of the sliding surface 16a with high probability.

In the valve body 16 which is a valve part according to the present embodiment, the coating layer 3 has a thickness of 0.5 μm.
By doing so, the hardness of the entire coating layer 3 can be increased. Further, by setting the thickness of the coating layer 3 to 50 μm or less, the internal stress (average value) of the entire coating layer 3 can be kept small. As a result, the degree of adhesion of the coating layer 3 to the substrate 1 can be maintained at an extremely high level.

Further, the valve 10 according to the present embodiment
By being provided with the valve element 16 having the above configuration, the valve element 1
6 and the hard carbon film 5 (more precisely, the entire coating layer 3 including the silicon film 5) is increased in the degree of adhesion.
The thickness of the hard carbon film 5 (more precisely, the entire coating layer 3 including the silicon film 5) can be increased, and the hardness of the sliding surface 16a of the valve body 16 can be increased. As a result, wear of the sliding surface 16a of the valve body 16 is reduced, and the life is prolonged.

Hereinafter, the effects of the valve and the valve component according to the present embodiment will be described based on experimental results using specific examples. Here, the following experiments were performed on the valves according to Examples 1 to 13 and Comparative Examples 1 to 5 of the present invention. That is, the valve is opened and closed 100 times (by sliding the valve body 100 reciprocations) in 288 ° C. high-temperature and high-pressure saturated steam pressurized water (corresponding to the environment of the cooling water system of a nuclear power plant), and the state of the coating layer (Whether or not peeling was seen or good without peeling) was observed, and the friction coefficient of the sliding surface and the amount of water leakage were measured. The load applied to the sliding surface was set to 2 × 9.8 N / mm ² .

The valve according to the first embodiment has the following valve body 1
6 is a valve 10 including That is, such a valve element 1
6 is Stellite No. 6; Substrate 1 formed by 6
And a coating layer 3 formed on the surface of the base 1. The coating layer 3 is formed by laminating 200 laminated films 6 in each of which a hard carbon film 4 and a silicon film 5 are laminated so that the silicon film 5 is disposed on the side of the base 1. The thickness of each hard carbon film 4 is 0.01 μm, and the thickness of each silicon film 5 is 0.01 μm. Therefore, the layer thickness of the entire coating layer 3 is 4.0 μm. Here, the hard carbon film 4 was formed by a high frequency plasma CVD method, and the silicon film 5 was formed by a sputtering method.

The valves according to Examples 2 to 13 and Comparative Examples 1 to 5 have the structure of the coating layer of the valve body, that is, the thickness of the hard carbon film, the thickness of the silicon film, the number of stacked films, Only the thickness of the layers is different, and the configuration of the other parts is the same as the valve according to the first embodiment. The thickness of the hard carbon film, the thickness of the silicon film, the number of stacked layers, and the thickness of the coating layer in the coating layers of the valve bodies provided in the valves according to Examples 2 to 13 and Comparative Examples 1 to 5 are as follows: As shown in FIG.
In addition, the coating layer of the valve body provided in the valve according to Comparative Example 1 was formed of only a hard carbon film (single layer).

FIG. 4 shows the state of the coating layer, the coefficient of friction of the sliding surface, and the amount of water leakage after the valves of Examples 1 to 13 and Comparative Examples 1 to 5 have been opened and closed 100 times. As can be seen from FIG. 4, in the valves according to Comparative Examples 1 to 5,
Peeling of the coating layer (Comparative Examples 1, 3, 4) or 100
While leaks of not less than ³ cm ³ were observed (Comparative Examples 2 and 5), in Examples 1 to 13 of the present invention, no peeling of the coating layer 3 was observed, and no water was leaked, or (3 cm ³ in Example 7, 5 cm ³ in Example 8, and 12 cm ^{3 in} Example 13). In particular, a valve in which the thickness of the hard carbon film 4 is equal to or larger than the thickness of the silicon film 4 and the thickness of the coating layer 3 is 0.5 μm or more and 50 μm or less (Examples 1 to 6, 9 to Regarding 12), there was no leakage of water.

In the valve 10 according to the above embodiment, the valve element 16 which is a valve component having a sliding surface 16a
Is provided with the coating layer 3 having the above configuration, but the valve seat 14 which is a valve component having the sliding surface 14a may be provided with the coating layer 3 having the above configuration. Further, both the valve seat 14 and the valve body 16 may be configured to include the coating layer 3 having the above configuration.

The valve of the present invention is a domestic faucet valve,
It can be used as a valve for various fluids for industrial use, a valve for a thermal power plant or a nuclear power plant. In particular, it is suitable as a valve used in a place where a corrosive fluid such as high-temperature and high-pressure water is used, for example, a valve used in a cooling water system of a nuclear power plant.

[0036]

The valve component of the present invention has a coating layer alternately laminated with a hard carbon film and a silicon film, so that the internal stress (average value) is higher than that of the coating layer formed only of the hard carbon film. Is significantly reduced. Therefore, even if the coating layer is thickened, the influence of the internal stress can be suppressed small,
As a result, it is possible to increase the thickness of the hard carbon film while maintaining high adhesion between the substrate and the hard carbon film. In this case, by setting the thickness of each hard carbon film to 0.01 μm or more, the hard carbon film can be surely formed, and by setting the thickness of each hard carbon film to 0.5 μm or less, The carbon film is prevented from peeling from the adjacent silicon film. In this case, by setting the thickness of each of the silicon films to 0.005 μm or more, the silicon film can be reliably formed, and by setting the thickness of each of the silicon films to 0.5 μm or less, And the hardness of the entire coating layer can be increased.

In the valve part of the present invention,
By making the thickness of each hard carbon film equal to or larger than the thickness of each silicon film, the ratio of the hard carbon film in the coating layer can be increased, and as a result, the hardness of the entire coating layer (average hardness) Value). In addition, by making the thickness of each hard carbon film equal to or larger than the thickness of each silicon film, even when the coating layer is worn, the hard carbon film acts as a sliding surface. The time during which the sliding is performed becomes longer, and it becomes possible to maintain high hardness in the vicinity of the sliding surface with a high probability.

Further, in the valve part according to the present invention, by setting the thickness of the coating layer to 0.5 μm or more, the hardness of the entire coating layer can be increased, and the thickness of the coating layer can be reduced to 5 μm.
When the thickness is 0 μm or less, the internal stress (average value) of the entire coating layer can be kept small, and as a result, the degree of adhesion of the coating layer to the substrate can be kept extremely high.

In addition, since the valve of the present invention is provided with the valve component having the above-described structure, wear of the sliding surface of the valve component is reduced, and the life is prolonged.

[Brief description of the drawings]

FIG. 1 is a partially cutaway front view of a valve according to an embodiment of the present invention.

FIG. 2 is an enlarged perspective view of a valve component according to the embodiment of the present invention.

FIG. 3 is an enlarged sectional view of a valve component according to the embodiment of the present invention.

FIG. 4 is a table showing experimental conditions and results of an experiment using a specific example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Base, 3 ... Coating layer, 4 ... Hard carbon film, 5 ... Silicon film, 6 ... Laminated film, 10 ... Valve, 12 ... Valve box, 14 ... Valve seat, 14a ... Sliding surface, 16 ... Valve element, 16a: sliding surface

Claims (5)

[Claims] 1. A valve component having a sliding surface, comprising: a base; and a coating layer formed on a surface of the base, wherein the coating layer is formed by stacking a hard carbon film and a silicon film. A film is formed by laminating two or more layers so that the silicon film is disposed on the side of the base, and the thickness of each of the hard carbon films is 0.01 μm or more and 0.5 μm or less; A component for a valve, wherein each film thickness is not less than 0.005 μm and not more than 0.5 μm, and the surface of the coating layer is formed as the sliding surface. 2. The valve component according to claim 1, wherein the thickness of the hard carbon film is equal to or greater than the thickness of the silicon film. 3. The coating layer has a thickness of 0.5 μm or more and 5 μm or more.
The valve component according to claim 1, wherein the thickness is 0 μm or less. 4. The valve part according to claim 3, wherein the coating layer has a thickness of 1.5 μm or more. 5. A valve provided with a valve component having a sliding surface, wherein the valve component is the valve component according to claim 1. Description: