JPH0596061U - Abrasion resistant structure - Google Patents

Abstract

(57) [Summary] (Correction) [Purpose] The purpose is to create a wear-resistant structure that allows replacement of only specific parts of machine tools that require wear resistance. A wear resistant structure in which a thin plate 13 having a base material coated with a hard carbon film 12 having a predetermined shape is detachably fixed to a specific portion of the machine tool member that requires wear resistance.

Description

[Detailed description of the device]

[0001]

[Industrial application]

 The present invention relates to a wear resistant structure of a machine tool member that requires wear resistance in a specific portion.

[0002]

[Prior Art]

 In general, members such as machinery have parts that are more easily worn than other parts, such as the sliding surface of a cam or the inner surface of a slide groove, but only that part is limited to a wear resistant structure. Things are extremely difficult. The desired effect can be obtained by coating the part that requires wear resistance with a hard carbon film, but since this film is created exclusively in a limited vacuum chamber, the object to be coated is small. However, there is a limit in the vacuum chamber, and if film formation is performed by occupying the interior of the chamber, the efficiency will be reduced and the cost will be disadvantageous. Further, if there is a portion where the formation of the hard carbon film is not necessary, the cost will be further increased by performing the mask treatment or the like.

[0003]

[Problems to be solved by the device]

 The present invention is intended to have a wear resistant structure in which only a specific portion of a machine tool member can be replaced.

[0004]

[Means for Solving the Problems]

 The above-mentioned problem is that a thin plate of a predetermined shape in which a base material such as a stainless steel material, a steel material, a cemented carbide material or other non-ferrous metal material is coated with a hard carbon film is detachably fixed to a specific portion requiring wear resistance. This is solved by the wear resistant structure of the machine tool member characterized by the above.

In the mechanical tool of the present invention, the specific portion requiring wear resistance is, for example, the sliding surface of the cam member shown in FIGS. 1 (a) and 1 (b) or the inner surface of the sliding groove of the guide rail shown in FIG. These limiting parts are large enough to be processed in a vacuum vessel.

In order to form a hard carbon film on a base material, for example, PVD (physical vapor deposition) method or plasma CVD (chemical vapor deposition) method may be carried out. In this case, the base material is a non-ferrous metal material. For steel materials, nickel-phosphorus plating is first performed, and after aging treatment, Ti, Si, and hard carbon films are sequentially stacked to form a laminated structure, and when the base material is stainless steel or carbide, The hard carbon film may be formed through the Ti or Si film or directly. The thickness of the thin plate on which the hard carbon film is formed is in the range of 0.05 to 1.0 mm.

[0007]

[Action]

 By forming a hard carbon coating with low friction, high hardness, corrosion resistance, and wear resistance as described above, the weaknesses of non-ferrous metal and steel materials with poor wear resistance are eliminated. It Further, by adopting a laminated structure, the adhesion of the hard carbon coating becomes stronger.

[0008]

【Example】

 The present invention will be described below based on the embodiments shown in the drawings. Embodiment 1 FIGS. 1 (a) and 1 (b) show a cam made of a metal material such as a non-ferrous metal material or a steel material, which is relatively easily worn. The hard protective layer 3 is provided on the surface 2. The protective layer 3 has a structure that adheres to the sliding surface 2 to protect it.

To obtain this protective layer 3, the following steps are performed. First, as shown in FIG. 1C, a nickel-phosphorus coating 5 having a thickness of 2 to 5 μm was formed on a thin plate 4 made of a steel material by wet plating. <Plating solution composition> Nickel sulfate 20 g / l Sodium hypophosphite 25 g / l Lactic acid 25 g / l Propionic acid 3 g / l <Plating conditions> pH 4-5 Temperature 90 ° C

Next, a titanium film 6 was formed on the nickel-phosphorus film by 0.1 μm by the PVD method, and a silicon film 7 was formed by 0.5 μm on the titanium film in the same manner.

After that, a hard carbon coating 8 was formed to a thickness of 2 μm on the silicon coating 7 by the plasma-CVD method under the following conditions. <Hard carbon film forming conditions> Gas species Methane gas Film forming pressure 0.1 torr High frequency power 300 Watt Film forming rate 0.12 μm Vickers hardness 3000 to 5000 (HV) A thin plate 4 with a Bonn coating 8 is obtained. The thin plate 4 was fixed so as to be in close contact with the sliding surface 2 of the cam to obtain a wear resistant structure according to the present invention.

Embodiment 2 FIG. 2 shows a groove portion 11 of a guide rail 10 of a mechanical device, which has a structure in which a thin stainless steel plate 13 having a hard carbon coating 12 is adhered to both inner surfaces of the groove. is there. The following steps were performed to obtain this structure. A thin plate of stainless steel (0.05 to 1.0 mm thick) 13 was cut into strips to suit the inner surface shape of the groove 11. This was coated with a titanium coating on the substrate by PVD method to give a value of 0. 1 .mu.m thick, and a silicon coating 0.5 .mu.m thick on the titanium coating. Then, a hard carbon film was formed to a thickness of 2 μm on the silicon film by using the P-CVD method. This was adhesively fixed to the inner surface of the groove 11 to obtain the wear resistant structure of the present invention.

[0013]

[Effect of the device]

 According to the present invention, the hard carbon coating can be applied to the wear-resistant structure of only the parts of the machine that are particularly liable to wear.

[Brief description of drawings]

1A is a side view of a cam, FIG. 1B is a front view thereof, and FIG. 1C is an enlarged sectional view of a protective layer.

FIG. 2 is a partial perspective view of a guide rail according to a second embodiment.

[Explanation of symbols] 1 cam body 10 guide rail
Rule 2 Sliding surface 11 Groove 3 Protective layer 12 Hard carbon film 4 Thin plate 13 Thin plate 5 Nickel-phosphorus film 6 Titanium film 7 Silicon film 8 Hard carbon film

Claims (1)

[Scope of utility model registration request] 1. A thin plate of a predetermined shape obtained by coating a base material such as a stainless steel material, a steel material, a super hard material, or a non-ferrous metal material with a hard carbon film, on a specific portion of a machine tool member that requires wear resistance. A wear resistant structure characterized by being detachably fixed.