JP2001223251A5 - - Google Patents
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- Publication number
- JP2001223251A5 JP2001223251A5 JP2000029806A JP2000029806A JP2001223251A5 JP 2001223251 A5 JP2001223251 A5 JP 2001223251A5 JP 2000029806 A JP2000029806 A JP 2000029806A JP 2000029806 A JP2000029806 A JP 2000029806A JP 2001223251 A5 JP2001223251 A5 JP 2001223251A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000029806A JP4073138B2 (ja) | 2000-02-07 | 2000-02-07 | 石英中に含有される金属の分析方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000029806A JP4073138B2 (ja) | 2000-02-07 | 2000-02-07 | 石英中に含有される金属の分析方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001223251A JP2001223251A (ja) | 2001-08-17 |
| JP2001223251A5 true JP2001223251A5 (de) | 2006-03-23 |
| JP4073138B2 JP4073138B2 (ja) | 2008-04-09 |
Family
ID=18554904
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000029806A Expired - Fee Related JP4073138B2 (ja) | 2000-02-07 | 2000-02-07 | 石英中に含有される金属の分析方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4073138B2 (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8021623B2 (en) | 2003-10-08 | 2011-09-20 | Tokyo Electron Limited | Examination method and examination assistant device for quartz product of semiconductor processing apparatus |
| JP3890047B2 (ja) * | 2003-10-08 | 2007-03-07 | 東京エレクトロン株式会社 | 石英中の金属分析方法及び分析用治具 |
| JP4881656B2 (ja) * | 2006-06-02 | 2012-02-22 | 東京エレクトロン株式会社 | 石英部材の分析方法 |
| JP5101477B2 (ja) * | 2008-12-09 | 2012-12-19 | コバレントマテリアル株式会社 | セラミックス部材の不純物分析方法 |
| JP2011257436A (ja) * | 2011-10-04 | 2011-12-22 | Tokyo Electron Ltd | 石英部材 |
| JP6885287B2 (ja) * | 2017-09-29 | 2021-06-09 | 株式会社Sumco | 石英ルツボの不純物分析方法 |
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2000
- 2000-02-07 JP JP2000029806A patent/JP4073138B2/ja not_active Expired - Fee Related