JP2001218482A5 - - Google Patents

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Publication number
JP2001218482A5
JP2001218482A5 JP2000025873A JP2000025873A JP2001218482A5 JP 2001218482 A5 JP2001218482 A5 JP 2001218482A5 JP 2000025873 A JP2000025873 A JP 2000025873A JP 2000025873 A JP2000025873 A JP 2000025873A JP 2001218482 A5 JP2001218482 A5 JP 2001218482A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000025873A
Other languages
Japanese (ja)
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JP2001218482A (ja
JP4491888B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000025873A priority Critical patent/JP4491888B2/ja
Priority claimed from JP2000025873A external-priority patent/JP4491888B2/ja
Publication of JP2001218482A publication Critical patent/JP2001218482A/ja
Publication of JP2001218482A5 publication Critical patent/JP2001218482A5/ja
Application granted granted Critical
Publication of JP4491888B2 publication Critical patent/JP4491888B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2000025873A 2000-02-03 2000-02-03 振動アクチュエータ Expired - Lifetime JP4491888B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000025873A JP4491888B2 (ja) 2000-02-03 2000-02-03 振動アクチュエータ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000025873A JP4491888B2 (ja) 2000-02-03 2000-02-03 振動アクチュエータ

Publications (3)

Publication Number Publication Date
JP2001218482A JP2001218482A (ja) 2001-08-10
JP2001218482A5 true JP2001218482A5 (cg-RX-API-DMAC10.html) 2007-04-12
JP4491888B2 JP4491888B2 (ja) 2010-06-30

Family

ID=18551668

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000025873A Expired - Lifetime JP4491888B2 (ja) 2000-02-03 2000-02-03 振動アクチュエータ

Country Status (1)

Country Link
JP (1) JP4491888B2 (cg-RX-API-DMAC10.html)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008054459A (ja) * 2006-08-28 2008-03-06 Matsushita Electric Ind Co Ltd 駆動装置
US8164233B2 (en) 2006-08-28 2012-04-24 Panasonic Corporation Drive apparatus

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02146971A (ja) * 1988-11-28 1990-06-06 Hitachi Ltd 圧電モータおよび圧電モータの駆動方法
JPH06261565A (ja) * 1993-03-09 1994-09-16 Ricoh Co Ltd 振動アクチュエータ
JPH07111789A (ja) * 1993-10-08 1995-04-25 Tamura Electric Works Ltd 搬送装置
JPH07163159A (ja) * 1993-11-30 1995-06-23 Canon Inc 超音波リニアモータ
JPH07274559A (ja) * 1994-03-30 1995-10-20 Fanuc Ltd 圧電式リニアアクチュエータ
JPH09159672A (ja) * 1995-12-08 1997-06-20 Olympus Optical Co Ltd 分析装置
JPH11190339A (ja) * 1997-12-25 1999-07-13 Kyocera Corp 静圧流体軸受

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