JP2001216634A - Disk cleaning/drying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a disk cleaning/drying device capable of improving through-put by efficiently cleaning and drying plural disks so as to increase disk finishing accuracy. SOLUTION: In this disk cleaning/drying device 1 provided with a cleaning unit 200 and a drying unit 300 arranged close to each other, plural spindles 410 and 420 gripping disks 2 in the respective tip parts 411 and 421 thereof are axially slid to perform cleaning and drying in sequence. An inner cover 301 covering the disk is rotated coxially to the spindle to blow out moisture by a centrifugal force. The rotational motion of the spindle and the driving force of the inner cover are respectively one. Means for supplying/ejecting disks are respectively provided with dedicated carrier devices 110 and 120.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk cleaning and drying apparatus for cleaning and drying disks such as magnetic disks.

[0002]

2. Description of the Related Art Conventionally, cleaning and drying in the process of manufacturing a disk are conventionally performed by separate cleaning devices and drying devices, and the disk is transferred and transported between the devices. I was However, 1
With a method in which one disk is washed and dried in one unit, when mass production is required, a plurality of units must be prepared, which requires a large amount of space and costs.

As disclosed in Japanese Patent Application Laid-Open No. 10-11749, there is a method of simultaneously processing a plurality of disks in order to increase the processing efficiency. However, the disks after cleaning are dried within a short time. Failure to do so will result in drying spots on the disk surface, which will reduce the accuracy of the disk itself. That is, if the time from cleaning to drying is long, there is a possibility that stains may occur during movement between the devices.

The present invention solves the above-mentioned problems of the conventional disk cleaning / drying apparatus, and efficiently cleans and dries a plurality of disks. It is an object of the present invention to provide a disk cleaning / drying apparatus which can improve the finishing accuracy of the disk and improve the throughput.

[0005]

SUMMARY OF THE INVENTION The present invention relates to a disk cleaning / drying apparatus which solves the above-mentioned problems, and the invention described in claim 1 is an apparatus in which a cleaning unit and a drying unit are provided. In the disk cleaning / drying apparatus arranged close to each other, a plurality of spindles holding the disk at each tip end slide simultaneously in the axial direction between the cleaning position and the drying position to clean the disk. And a drying step.

According to the first aspect of the present invention, since the cleaning unit and the drying unit are disposed close to each other in the disk cleaning / drying apparatus having the above-described configuration, the disk is provided at the tip of each spindle. While being held by the unit, the sheet is transported between the washing position and the drying position, and washing and drying are sequentially performed at those positions. Then, in each processing position, the switching of the disk is not performed.

As a result, the time required for transporting and transferring the washed disc to the drying position is reduced, and the disc after washing can be dried within a short time. As a result, mass productivity can be improved, and the throughput of the disk can be improved. In addition, the occurrence of spots on the surface of the disk is prevented, and the finishing accuracy of the disk can be improved.

Further, by configuring the invention according to the first aspect as described in the second aspect, the disk drying apparatus is arranged such that the spindle rotates the disk at a high speed and blows off the moisture attached to the disk by centrifugal force. It is supposed to be done.

As a result, the disk is dried by gripping the disk at the leading end and using the spindle for transporting and transferring the disk between the washing position and the drying position as it is and rotating it at high speed. And the structure of the disk drying device can be simplified.

According to the third aspect of the present invention, an inner cover for covering the disk is provided, and the inner cover is coaxially rotated with the spindle and adheres to the disk. The water that has been blown off by the centrifugal force collides with the inner cover, and further the inner cover rotates, so that the water that collides with the inner cover is blown off by the centrifugal force and discharged out of the inner cover. .

As a result, even if the water adhering to the disk is blown off by the centrifugal force and collides with the inner cover,
The inner cover rotates coaxially with the spindle, and the water that has collided with the inner cover is blown off by the centrifugal force and discharged out of the inner cover. Adherence is prevented.

Further, according to the fourth aspect of the present invention, in the disk cleaning / drying apparatus, at least a plurality of driving means of a plurality of operating members of a group of a plurality of operating members performing the same operation. Each of the driving sources for the driving means for rotating each of the spindles and the driving means for the plurality of inner covers is one.

As a result, it is possible to prevent the apparatus from being enlarged and to reduce the cost of the apparatus, even though the apparatus is a disk cleaning / drying apparatus for simultaneously cleaning and drying a plurality of disks. In addition, by making the rotation of the inner cover the same as that of the plurality of disks, it is possible to keep the same dry finish of each disk.

According to the fifth aspect of the present invention, the disk is supplied to the disk cleaning / drying apparatus by configuring the invention according to any one of the first to fourth aspects.
The discharging means is composed of two transporting devices, a transporting device exclusively for supply and a transporting device exclusively for discharging, wherein each of the two transporting devices has the same number of disks as the number of disks gripped by the plurality of spindles. , And the disk is moved simultaneously with respect to the disk cleaning / drying device.

As a result, a plurality of discs are simultaneously supplied to the disc cleaning / drying device by the feeding device dedicated to supply, and a plurality of discs are simultaneously ejected from the disc cleaning / drying device by the feeding device dedicated to ejection. So
The mass productivity is further improved, and the disk throughput can be further improved.

Further, by configuring the invention according to any one of claims 1 to 5 as described in claim 6, the cleaning device at the disk cleaning position simultaneously cleans both sides of the disk, It can be raised and lowered.

As a result, the cleaning process over the entire surface of the disk can be completed quickly, and the disk can be quickly transported and transferred to the drying position, thereby preventing the occurrence of spots on the disk surface. Thus, the finishing accuracy of the disc can be further improved. In addition, by the downward movement of the cleaning device, it is possible to eliminate obstacles when transferring the cleaned disk to the drying position, and to quickly transport and transfer the cleaned disk to the drying position.

Furthermore, by configuring the invention according to any one of claims 2 to 6 as described in claim 7, a drying gas is blown onto both sides of the center of the disc at the drying position of the disc. A nozzle is provided.

As a result, even if the spindle is rotated at a high speed, the water adhering to the disk cannot be completely blown off by the centrifugal force, and there is a possibility that complete drying cannot be performed with water remaining. also, the nozzle by blowing thereto dry gas, such as clean air or N ₂ gas, it is possible to completely dry. As a result, the degree of dry finish of the disc can be increased, and the finish accuracy of the disc can be further enhanced.

In particular, the center portion of the disk is often used as a holding portion for the disk. In such a case, the above-mentioned risk is further increased. By providing a nozzle for blowing the drying gas on both sides in the vicinity, such a fear is eliminated. Even when the diameter of the disc is very small and the effect of separating water by the high-speed rotation of the spindle can be expected only incompletely, the same effect can be expected by the same means.

[0021]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the invention described in claims 1 to 7 of the present application shown in FIGS. 1 to 8 will be described below. FIG. 1 is a side view of a disk cleaning / drying apparatus according to the present embodiment, showing a part of the apparatus in cross section, FIG. 2 is a plan view of the same, and FIG.
FIG. 4 is a sectional view taken along the line II-III of FIG.
5 is a diagram illustrating an example of a module configuration according to the tact, FIG. 6 is a diagram illustrating a time flow of a cleaning / drying process step according to the example of the module configuration, and FIG. FIG. 8 shows another example of the combined module configuration.
FIG. 5 is a diagram showing a time flow of a cleaning / drying process according to another example of the module configuration.

As shown in FIGS. 1 and 2, a disk cleaning / drying apparatus 1 according to the present embodiment is a disk cleaning / drying apparatus for simultaneously processing two disks 2, and comprises two disks. 2 and a cleaning device 20 for cleaning the disk at the same time.
0, a drying device 300 for drying the disk, and a disk 2
Spindle unit 40 for holding, rotating and moving back and forth
0 is the main component.

Two disk transfer devices 100 are prepared, one of which is a first supply-only disk used as a transfer device for exclusively transferring the disk 2 to the cleaning device 200 side. The other is a transfer-only second disk transfer device 120 which is used as a transfer device for exclusively performing the operation of receiving and discharging the disk 2 from the cleaning device 200 side. These two disk transport devices 110 and 120 have the same structure, and include two disk holders 101 and two holder sliders 102 for moving these disk holders 101 forward and backward.

Although the detailed description of the structure of the disk holding unit 101 is omitted, it may be either a structure holding the outside of the disk 2 or a structure holding the inside. The holding unit slider 102 may use an air-driven component, but it is more preferable to use a numerical control motor and a transmission mechanism such as a belt and a ball screw to realize high-speed delivery.

The cleaning apparatus 200 has a cleaning tank 210 as a base. The cleaning tank 210 has two entrance openings.
211, 212, and furthermore, the drying room entrance opening 213 on the back side,
214 and an exhaust port 215 for forcibly exhausting the inside of the cleaning tank 210
And a drain port 216. Two entrance openings 211
, 212, a shutter 230 is provided for preventing splashing of washing water.

It is desirable to provide an air purifier 217 on the top surface of the cleaning tank 210 in order to improve the cleanness.
Inside the cleaning tank 210, a cleaning device 220 using a technique such as ultrasonic wave or bubble jet, an elevating slider 221 for vertically moving the cleaning device 220, and a rocking device 222 for swinging the cleaning device 220 are oscillated. Are provided. Cleaning equipment22
0 is provided on each side of the disk 2, one or two (two in the present embodiment).
Cleaning is performed simultaneously by these cleaning devices 220. The elevating slider 221 moves up and down all of these cleaning devices 220 as a unit. The oscillating device 222 includes one cleaning device 220.
It is provided for each.

Drying device 300 for drying disk 2
The spindles 410 and 420, which will be described later, are located on the side of the drying chamber entrance openings 213 and 214 of the cleaning tank 210 and at predetermined intervals on the outer periphery of the disk 2 as shown in FIG.
Inner covers 301 and 301 that perform coaxial rotation (rotation with a common rotation axis) and these inner covers 301,
And a partition plate 309 provided between them.

In the inner cover 301, when the disk 2 is dried, the center of the disk 2 (the inner diameter near the central axis)
The tips of nozzles 310 and 311 for blowing a drying gas such as clean air or N2 gas are inserted into both surfaces of the nozzle. Of these nozzles 310 and 311, the upper nozzle 310
Is fixedly mounted on the side of the disk 2 facing the spindle unit 400, and the lower nozzle 311 is
The disc 2 is mounted on the side facing the cleaning device 200 so as not to hinder the movement of the disc 2.

The two inner covers 301 are provided with a drive motor
The rotation of the pulley 30 is fixed to the drive motor 306.
5, pulley 303 fixed to each inner cover 301,
By being transmitted to the inner cover 301 via a belt transmission mechanism composed of a belt 304 wound around these pulleys, the belt is simultaneously driven to rotate.

As shown in FIG. 1, the pulley 303 has a journal unit integrally, and the end of the journal unit is fixed to the inner cover 301. The journal part is supported by a bearing 302 and is supported by a casing of the drying device 300. Thus, the two inner covers 301 are connected to one drive motor 306.
The cost is reduced by the structure driven to rotate.

Outside the inner cover 301, a drying device is provided.
There is an outer cover 307 forming a casing of 300, and exhaust ports 308 for forcibly exhausting the inside of the outer cover 307 are provided at two places on both sides below the casing. In addition,
Although not shown in detail, the inner cover 301 has through holes at a plurality of large diameter portions in the circumferential direction for blowing out water adhering to the inner surface by centrifugal force and discharging the water to the outer cover 307. Have been.

Next, the structure of the spindle unit 400 will be described in detail. As shown in FIGS. 1 and 2, the spindle unit 400 for holding, rotating and moving the disk 2 back and forth has two spindles 410 and 420 arranged in parallel. And these spindles 4
Although not shown in detail, a mechanism for holding the disc 2 is provided at each of the tip portions 411 and 421 of the discs 10 and 420.

The two spindles 410 and 420 rotate at high speed along with the disk 2 on the center axis of the disk 2 held by them, and move along the center axis of the disk 2 along the same axis.
And move in the same direction in the front-rear direction (axial direction).

The rotation mechanism of the two spindles 410 and 420 is as follows. Pulleys 412 and 422 are integrally provided at the rear ends of the spindles 410 and 420, and a pulley 431 is integrally provided on the rotating shaft of the drive motor 430. A belt 43 is provided between these pulleys 412, 422 and 431.
2 is multiplied. Therefore, now, when the drive motor 430 rotates, this rotation is performed by the pulleys 412, 422.
, 431 and a belt 432 are transmitted to two spindles 410, 420 via a belt transmission mechanism, and these two spindles 410, 420 are simultaneously rotated.

The mechanism for moving the two spindles 410 and 420 back and forth is as follows. Spindle unit 400
Are all loaded on the table 450 and the table 45
The LM guides 460 are integrally attached to the lower surface of the table 450 at four front, rear, left and right corners of the table 450. Then, the two left and right LM guides 460 slide on the two left and right guide rails 461 laid below the table 450, respectively. As a result, the table 450 moves back and forth on the guide rail 461, and the spindles 410 and 420 loaded on the table 450 move back and forth. LM Guide 460
Slide on the guide rail 461 of the table 450
This is made possible by a drive source (slide device drive source) 440 such as an air cylinder or a servomotor fixed to the lower surface of the device.

Next, the operation of the disk cleaning / drying apparatus 1 of the present embodiment will be described. 1 and 2, both disk holding units 101 of the first disk transfer device 110 are shown.
Are transported to the cleaning position of the cleaning device 200. At the same time, two spindles
The discs 410 and 420 are moved to the washing position by the forward movement of the table 450 by the operation of the slide drive source 440 (FIG. 4), and receive the disc 2 from the first disc transport device 110 to their tips 411 and 421, respectively. . In this case, since the two spindles 410 and 420 employ means for gripping the inner diameter of the disk 2, the apparatus can be made compact.

Thereafter, the shutter 230 of the cleaning device 200 is closed, and the lifting slider 22 for vertically moving the cleaning device 220 is moved.
1 rises and enters wash mode. Cleaning equipment
The swing operation of 220 and the low-speed rotation of the spindles 410 and 420 are performed. Swinging speed of the cleaning equipment 220 during cleaning,
The rotation speed of the spindles 410 and 420, the cleaning time, and the like can be arbitrarily adjusted.

At the end of the cleaning mode, the cleaning device 220 is lowered, and the disk 2 is moved to the drying position. When the disk 2 moves to the drying position, the nozzle 311 moves up to the vicinity of the inner diameter of the disk 2 and the spindles 410, 420
Starts high-speed rotation. The spindles 410 and 420 in the drying position rotate at a high speed in response to the high speed rotation of the drive motor 430, and remove water adhering to the disk 2 to the outer peripheral side of the disk 2 by centrifugal force.

The removed water adheres to the inner surface of an inner cover 301 provided so as to cover the disk 2 at a constant interval on the outer periphery of the disk 2, and this inner cover 301 rotates coaxially with the spindles 410 and 420. As a result, it is further blown out into the outer cover 307 by centrifugal force and is discharged, so that reattachment of moisture to the disk 2 is prevented.
A partition plate 309 is provided between the adjacent inner covers 301, 301.
Is provided, the moisture discharged from the inner cover 301 does not enter the other adjacent inner cover 301.

In this manner, the disk 2 is dried at a high speed by rotation. Even in this high speed rotation drying, a sufficiently dry state cannot be obtained at the center of the disk 2 (inner diameter near the central axis). Therefore, a suitable amount of clean air or N2 gas is blown to the vicinity by the nozzles 310 and 311 so as to obtain a sufficiently dry state of the center of the disk 2 by using a drying action by an air current.

The disk 2 that has finished the drying mode is
The table 450 is moved forward to the cleaning position by the forward movement of the table 450 by the operation of 440, and is transferred to the two disk holding units 101 of the second disk transport device 120 that has come to receive.

Since the present embodiment is configured as described above, the following effects can be obtained. In the disk cleaning / drying apparatus 1 in which the cleaning unit 200 and the drying unit 300 are arranged close to each other, the two spindles 41 holding the disk 2 at the tips 411 and 421 respectively.
0 and 420 are simultaneously slid in the same axial direction between the washing position and the drying position so that the washing and drying of the disc 2 are performed sequentially.
Is transported between the washing position and the drying position while being gripped by the tips 411 and 421 of the spindles 410 and 420,
At these positions, the respective processes of washing and drying are sequentially performed. Then, in each processing position, the switching of the disk is not performed.

As a result, the time required for transporting and transferring the washed disc 2 to the drying position is reduced, and the dried disc 2 can be dried within a short time.
Thereby, mass productivity is improved, and the throughput of the disk 2 can be improved. In addition, the occurrence of spots on the surface of the disk 2 can be prevented, and the finishing accuracy of the disk 2 can be improved.

In the disk drying apparatus 300, the spindles 410 and 420 rotate the disk 2 at a high speed to blow off the water adhering to the disk 2 by centrifugal force. The discs 2 can be dried by using the spindles 410 and 420 for transporting and transferring the discs 2 between the washing position and the drying position while holding them at a high speed and rotating them at high speed. The structure of the disc drying device 300 can be simplified.

An inner cover for covering each disk 2
The inner cover 301 is provided with a spindle
The water adhering to the disk 2 is blown off by the centrifugal force and collides with the inner cover 301, and the inner cover 301 rotates, and the water colliding with the inner cover 301 is rotated. Is blown off by the centrifugal force and discharged to the outside of the inner cover 301. Therefore, even if moisture adhering to the disc 2 is blown off by the centrifugal force and collides with the inner cover 301, 2 is prevented from re-adhering to the disk 2.

Further, in the disc cleaning / drying apparatus 1, at least two driving sources for the driving means for rotating the spindles 410 and 420 and the two inner covers 301 are provided.
The driving sources of the driving means are the driving motors 430, 30
6, the disk cleaning / drying apparatus 1 for simultaneously cleaning and drying two disks 2 can prevent an increase in the size of the apparatus and reduce the cost of the apparatus. be able to. In addition, by making the rotations of the two disks 2 and the two inner covers 301 the same, it is possible to keep the degree of dry finish of each disk 2 the same.

The means for supplying and discharging the disk 2 to and from the disk cleaning / drying apparatus 1 comprises two transfer devices, a transfer device 110 exclusively for supply and a transfer device 120 exclusively for discharge. Transport apparatus holds the same number of disks 2 as the number of disks 2 gripped by the two spindles 410 and 420, and simultaneously moves the disks 2 to the disk cleaning / drying apparatus 1. Therefore, the two disks 2 are simultaneously supplied to the disk cleaning / drying device 1 by the transport device dedicated to supply, and the two disks 2 are simultaneously discharged from the disk cleaning / drying device 1 by the transport device dedicated to discharge. Since the ejection is performed, the mass productivity is further improved, and the throughput of the disk 2 can be further improved.

Further, since the cleaning device 220 at the cleaning position of the disk 2 cleans both surfaces of the disk 2 at the same time, the cleaning process over the entire surface of the disk 2 can be completed quickly, and the disk 2 can be quickly moved to the drying position. It can be transported and transferred, preventing occurrence of spots on the surface of the disk 2 and further improving the finishing accuracy of the disk 2.

Further, since the cleaning device 220 at the cleaning position of the disk 2 is configured to be able to move up and down, the cleaning device 220 can be moved up and down.
By the downward movement of 220, obstacles when transferring the washed disc 2 to the drying position can be eliminated, and the washed disc 2 can be quickly conveyed and transferred to the drying position.

Further, in the drying position of the disc 2,
Since the nozzles 310 and 311 for blowing the drying gas are provided on both sides of the center of the disk 2, the spindle 410
, 420, the water attached to the disk 2 cannot be completely blown off by centrifugal force, and there is a possibility that complete drying may not be achieved with water remaining. Drying gas such as clean air or N ₂ gas is blown there by 310 and 311 so that the drying can be completed. This allows
The degree of dry finish of the disk 2 can be increased, and the finish accuracy of the disk 2 can be further increased.

In particular, the central portion of the disk 2 is a holding portion for the disk 2, and there is a greater possibility that complete drying cannot be performed while water remains, but as described above, the central portion of the disk 2 Nozzle that blows drying gas on both sides
The provision of 310 and 311 eliminates such a fear.

Here, the effect of improving the throughput of the disk 2 will be described in more detail. 5 to 8 show examples of the module configuration according to the tact. These examples are examples of two-block production and three-block production using the disk cleaning / drying device 1 as a block unit. In each case, the first disk transport device 110 dedicated to supply is used. Each transfer and delivery operation with the second disk transfer device 120 dedicated to ejection (unloading) is as follows.
It is set to be performed at the same time.

In the case of the two-block production shown in FIGS. 5 and 6, if the total processing time for the cleaning and drying of the disk 2 is assumed to be 18 seconds / one, 12.
Two disks 2 have been processed in 75 seconds, and production can be performed with a tact of 6.4 seconds per disk. Further, FIG.
Considering the case of three-block production shown in FIG. 8, two disks 2 have been processed in nine seconds, and can be produced with a tact of 4.5 seconds per disk. In addition,
In these figures, the supply and discharge characters enclosed by ○ indicate a first disk transfer device 110 dedicated to supply and a second disk transfer device 120 dedicated to discharge, respectively.

In the present embodiment, the number of disks 2 that can be processed at one time by the disk cleaning / drying apparatus 1 is two. In this case, the number of cleaning devices 220, the number of spindles 410 and 420, and the number of inner covers 301 are increased in accordance with the increased number. Also in this case, the driving source of the driving means for rotating each of the plurality of spindles 410 and 420 and the driving source of the driving means for the plurality of inner covers 301 can be each one of the driving motors 430 and 306. .

In this embodiment, the two spindles 410 and 420 holding the disk 2 at the respective ends are
The disc 2 is simultaneously slid in the same axial direction between the washing position and the drying position so that washing and drying of the disk 2 are sequentially performed. However, the present invention is not limited to this. The disk 2 may be simultaneously slid in different directions in the axial direction so that the washing and drying of the disk 2 are sequentially performed in different phases on each side of the two spindles 410 and 420. . In this case, a mechanism for moving the two spindles 410 and 420 back and forth (axially) is provided individually for each spindle. In addition, various modifications can be made without departing from the scope of the present invention.

[Brief description of the drawings]

FIG. 1 is a side view of a disk cleaning / drying apparatus according to an embodiment of the present invention described in claims 1 to 7 of the present application, and is a partially sectional view.

FIG. 2 is a plan view of the same.

FIG. 3 is a sectional view taken along line III-III in FIG. 1;

FIG. 4 is a sectional view taken along line IV-IV of FIG. 1;

FIG. 5 is a diagram illustrating an example of a module configuration according to a tact.

FIG. 6 is a diagram showing a time flow of a cleaning / drying processing step according to the example of the module configuration.

FIG. 7 is a diagram illustrating another example of a module configuration according to a tact.

FIG. 8 is a diagram showing a time flow of a cleaning / drying process according to another example of the module configuration.

[Description of Signs] 1 ... Disk cleaning / drying device, 2 ... Disk, 100 ... Disk transport device, 101 ... Disk holding unit, 102 ... Holding unit slider, 110 ... First disk transport device exclusively for supply, 12
0: second disk transport device exclusively for discharge, 200: disk cleaning device, 210: cleaning tank, 211, 212 ... entrance opening, 21
3, 214… drying room entrance opening, 215… exhaust outlet, 216…
Drain outlet, 217… air purifier, 220… cleaning equipment, 221… lifting slider, 222… rocking device, 230… shutter, 30
0… Disc drying device, 301… Inner cover, 302…
Bearing, 303: Pulley, 304: Belt, 305: Pulley, 306: Drive motor, 307: Outer cover, 30
8 ... exhaust port, 309 ... partition plate, 310 ... upper nozzle, 311
… Lower nozzle, 400… Spindle unit, 410… Spindle, 411… Tip, 412… Pulley, 420… Spindle, 421… Tip, 422… Pulley, 430… Drive motor, 431… Pulley, 432… Belt, 440 … Slide device drive source, 450… Table, 460… LM guide, 461
... guide rails.

Claims (7)

[Claims] 1. A disk cleaning / drying apparatus in which a cleaning unit and a drying unit are arranged close to each other, wherein a plurality of spindles gripping a disk at each tip end have an axis between a cleaning position and a drying position. A disc cleaning / drying apparatus wherein the discs are simultaneously slid in the directions so that cleaning and drying of the disc are performed sequentially. 2. The disk cleaning device according to claim 1, wherein the disk drying device is configured such that the spindle rotates the disk at a high speed to blow off moisture attached to the disk by centrifugal force. -Drying device. 3. An inner cover for covering the disk is provided, wherein the inner cover rotates coaxially with the spindle, and the water attached to the disk is blown off by centrifugal force and collides with the inner cover, 3. The disk cleaning / drying apparatus according to claim 2, wherein the inner cover is rotated to blow off water that has collided with the inner cover by centrifugal force and to discharge the water out of the inner cover. . 4. The disc cleaning / drying apparatus,
Among the plurality of the drive means of a group of operating members to the same operation, driving each of at least a plurality of the rotational movement of the drive means and a plurality of the inner cover of the drive means of the spindle <br/> Dogen are both 4. The disc cleaning / drying device according to claim 3, wherein the number of the discs is one. 5. The means for supplying and discharging a disk to and from the disk cleaning / drying device comprises two transport devices, a transport device exclusively for supply and a transport device exclusively for discharge, and the two transport devices. Wherein each of the plurality of spindles holds the same number of disks as the number of disks gripped by the plurality of spindles, and simultaneously moves the disks to the disk cleaning / drying device. The disk cleaning / drying apparatus according to any one of claims 1 to 4. 6. The cleaning device at a cleaning position of the disk, wherein both surfaces of the disk are simultaneously cleaned and vertically movable.
The disc cleaning / drying apparatus according to any one of the above. 7. The disk cleaning device according to claim 2, wherein a nozzle for blowing a drying gas to both surfaces of a center portion of the disk is provided at a drying position of the disk. -Drying device.