JP2001215727A5 - - Google Patents
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- JP2001215727A5 JP2001215727A5 JP2000028235A JP2000028235A JP2001215727A5 JP 2001215727 A5 JP2001215727 A5 JP 2001215727A5 JP 2000028235 A JP2000028235 A JP 2000028235A JP 2000028235 A JP2000028235 A JP 2000028235A JP 2001215727 A5 JP2001215727 A5 JP 2001215727A5
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- JP
- Japan
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000028235A JP4210407B2 (ja) | 2000-02-04 | 2000-02-04 | レジスト積層物 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000028235A JP4210407B2 (ja) | 2000-02-04 | 2000-02-04 | レジスト積層物 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001215727A JP2001215727A (ja) | 2001-08-10 |
| JP2001215727A5 true JP2001215727A5 (https=) | 2005-12-22 |
| JP4210407B2 JP4210407B2 (ja) | 2009-01-21 |
Family
ID=18553674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000028235A Expired - Fee Related JP4210407B2 (ja) | 2000-02-04 | 2000-02-04 | レジスト積層物 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4210407B2 (https=) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5403943B2 (ja) * | 2008-05-21 | 2014-01-29 | 昭和電工株式会社 | ポリマー、感光性樹脂組成物及びレジストパターンの形成方法 |
| JP5597616B2 (ja) * | 2011-10-03 | 2014-10-01 | 富士フイルム株式会社 | ネガ型化学増幅レジスト組成物、並びに、それを用いたレジスト膜、レジスト塗布マスクブランクス、レジストパターン形成方法、及び、フォトマスク |
| US10020456B2 (en) * | 2014-09-25 | 2018-07-10 | Basf Se | Ether-based polymers as photo-crosslinkable dielectrics |
| TWI662370B (zh) * | 2015-11-30 | 2019-06-11 | Rohm And Haas Electronic Materials Korea Ltd. | 與外塗佈光致抗蝕劑一起使用之塗料組合物 |
| KR102550405B1 (ko) * | 2017-09-07 | 2023-07-04 | 제이에스알 가부시끼가이샤 | 조성물, 막, 막의 형성 방법 및 패터닝된 기판의 제조 방법 |
| CN111492311B (zh) * | 2017-12-22 | 2024-11-08 | 日产化学株式会社 | 具有缩醛结构的保护膜形成用组合物 |
| JP7302480B2 (ja) * | 2017-12-22 | 2023-07-04 | 日産化学株式会社 | ジオール構造を有する保護膜形成組成物 |
| CN115287060B (zh) * | 2022-03-24 | 2023-05-26 | 辽宁科技大学 | 蓝光碳点、荧光粉和白光发光二极管及其制备方法 |
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2000
- 2000-02-04 JP JP2000028235A patent/JP4210407B2/ja not_active Expired - Fee Related